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KR930022555A - 루테늄산염 전극을 갖는 커패시터 - Google Patents

루테늄산염 전극을 갖는 커패시터

Info

Publication number
KR930022555A
KR930022555A KR1019930005854A KR930005854A KR930022555A KR 930022555 A KR930022555 A KR 930022555A KR 1019930005854 A KR1019930005854 A KR 1019930005854A KR 930005854 A KR930005854 A KR 930005854A KR 930022555 A KR930022555 A KR 930022555A
Authority
KR
South Korea
Prior art keywords
capacitor
layer
electrode
formed over
electrode region
Prior art date
Application number
KR1019930005854A
Other languages
English (en)
Other versions
KR100290223B1 (ko
Inventor
디. 마니어 파푸
Original Assignee
빈센트 비. 인그라시아
모토로라 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 빈센트 비. 인그라시아, 모토로라 인코포레이티드 filed Critical 빈센트 비. 인그라시아
Publication of KR930022555A publication Critical patent/KR930022555A/ko
Application granted granted Critical
Publication of KR100290223B1 publication Critical patent/KR100290223B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/692—Electrodes
    • H10D1/696—Electrodes comprising multiple layers, e.g. comprising a barrier layer and a metal layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/682—Capacitors having no potential barriers having dielectrics comprising perovskite structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/692—Electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

커패시터(11)는 유전체층(34)위에 형성된다. 도체층(36)은 유정체층(34)위에 형성된다. 선택적 배리어층(16)은 전기적으로 접속되어 루테늄산염 부분을 갖는 제1전극지역(20)으로부터 도체층(36)을 절연한다. 유전체층(22)은 커패시터 유전체를 형성하는 제1류테늄산염 전극지역(20)위에 형성된다. 제2전극지역(24)은 유전체층 (22)위에 형성된다. 선택적인 배리어층(28)은 전극 배리어층(28) 위에 형성되어 전극지역(24)과 전기접촉된다. 유전체층(30)은 커패시터(11)를 전기적으로 절연시키도록 형성된다.

Description

루테늄산염 전극을 갖는 커패시터
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도및 제2도는 본 발명에 따른 루테늄산염 커패시터 전극을 갖는 커패시터 형성방법을 도시한 도면.
제3도는 본 발명에 따른 루테늄산염 커페시터 전극을 갖는 다른 커패시터의 단면도.
제4도는 및 제5도는 본 발명에 따른 루테늄산염 커패시터 전극형성 방법을 도시한 도면.

Claims (1)

  1. 루테늄산염 물질로 형성된 제1부분(20또는18)을 갖는 제1전극(20,18)과, 제2전극(26)과, 제1전극과 제2전극사이에 형성된 유전체 물질(22)을 포함하는 것을 특징으로 하는 커패시퍼(10).
    ※참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930005854A 1992-04-29 1993-04-08 루테늄산염 전극을 갖는 커패시터 및 그 형성방법 KR100290223B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/875,463 US5185689A (en) 1992-04-29 1992-04-29 Capacitor having a ruthenate electrode and method of formation
US875,463 1992-04-29

Publications (2)

Publication Number Publication Date
KR930022555A true KR930022555A (ko) 1993-11-24
KR100290223B1 KR100290223B1 (ko) 2001-06-01

Family

ID=25365852

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930005854A KR100290223B1 (ko) 1992-04-29 1993-04-08 루테늄산염 전극을 갖는 커패시터 및 그 형성방법

Country Status (3)

Country Link
US (1) US5185689A (ko)
JP (1) JP3327486B2 (ko)
KR (1) KR100290223B1 (ko)

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Also Published As

Publication number Publication date
JPH0621341A (ja) 1994-01-28
JP3327486B2 (ja) 2002-09-24
KR100290223B1 (ko) 2001-06-01
US5185689A (en) 1993-02-09

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