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KR930010070U - 플라즈마 발생장치 - Google Patents

플라즈마 발생장치

Info

Publication number
KR930010070U
KR930010070U KR2019910017066U KR910017066U KR930010070U KR 930010070 U KR930010070 U KR 930010070U KR 2019910017066 U KR2019910017066 U KR 2019910017066U KR 910017066 U KR910017066 U KR 910017066U KR 930010070 U KR930010070 U KR 930010070U
Authority
KR
South Korea
Prior art keywords
plasma generator
plasma
generator
Prior art date
Application number
KR2019910017066U
Other languages
English (en)
Other versions
KR950004756Y1 (ko
Inventor
김인기
Original Assignee
엘지일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지일렉트론 주식회사 filed Critical 엘지일렉트론 주식회사
Priority to KR2019910017066U priority Critical patent/KR950004756Y1/ko
Publication of KR930010070U publication Critical patent/KR930010070U/ko
Application granted granted Critical
Publication of KR950004756Y1 publication Critical patent/KR950004756Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
KR2019910017066U 1991-10-14 1991-10-14 플라즈마 발생장치 KR950004756Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910017066U KR950004756Y1 (ko) 1991-10-14 1991-10-14 플라즈마 발생장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910017066U KR950004756Y1 (ko) 1991-10-14 1991-10-14 플라즈마 발생장치

Publications (2)

Publication Number Publication Date
KR930010070U true KR930010070U (ko) 1993-05-26
KR950004756Y1 KR950004756Y1 (ko) 1995-06-14

Family

ID=19320545

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910017066U KR950004756Y1 (ko) 1991-10-14 1991-10-14 플라즈마 발생장치

Country Status (1)

Country Link
KR (1) KR950004756Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100428813B1 (ko) * 2001-09-18 2004-04-29 주성엔지니어링(주) 플라즈마 발생장치 및 이를 이용한 ＳｉＯ₂박막 식각방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100428813B1 (ko) * 2001-09-18 2004-04-29 주성엔지니어링(주) 플라즈마 발생장치 및 이를 이용한 ＳｉＯ₂박막 식각방법

Also Published As

Publication number Publication date
KR950004756Y1 (ko) 1995-06-14

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19911014

UG1501 Laying open of application
E902 Notification of reason for refusal
UE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event code: UE09021S01D

Patent event date: 19950109

UG1604 Publication of application

Patent event code: UG16041S01I

Comment text: Decision on Publication of Application

Patent event date: 19950522

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19950914

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19951013

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

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Termination date: 20070710