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KR920022578A - Saw 필터용 압전소자의 전극 형성방법 - Google Patents

Saw 필터용 압전소자의 전극 형성방법 Download PDF

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Publication number
KR920022578A
KR920022578A KR1019910008809A KR910008809A KR920022578A KR 920022578 A KR920022578 A KR 920022578A KR 1019910008809 A KR1019910008809 A KR 1019910008809A KR 910008809 A KR910008809 A KR 910008809A KR 920022578 A KR920022578 A KR 920022578A
Authority
KR
South Korea
Prior art keywords
electrode
photoresist
piezoelectric element
electrode film
saw filter
Prior art date
Application number
KR1019910008809A
Other languages
English (en)
Inventor
고용태
Original Assignee
황선두
삼성전기 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 황선두, 삼성전기 주식회사 filed Critical 황선두
Priority to KR1019910008809A priority Critical patent/KR920022578A/ko
Publication of KR920022578A publication Critical patent/KR920022578A/ko

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

내용 없음.

Description

SAW 필터용 압전소자의 전극 형성방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 단면도이다.
제3도는 본 발명에 의한 제조공정도이다.

Claims (6)

  1. 탄성표면파를 이용한 압전소자의 제조방법에 있어서, 압전기판상에 제1전극막을 형성하는 제1공정과, 상기 제1전극막상에 포토 레지스트를 스핀코팅하는 제2공정과, 상기 포토레지스트중 최종 IDT 전극 수의1/2에 해당되는 포토레지스트 패턴을 형성하는 제3공정과, 부식액을 사용하여 상기 제1전극막을 식각하는 제4공정과, 상기 제1전극막에 상기 포토 레지스트가 형성된 패턴상에 제2전극막을 증착하는 제5공정 및, 상기 제1전극막상에 남아있는 포토 레지스트를 제거하여 원하는 전극패턴을 형성시키는 제6공정을 포함하는 것을 특징으로 하는 SAW필터용 압전소자의 전극 형성방법.
  2. 제1항에 있어서, 상기 압전기판상에 스푸터링법으로 A1전극막을 1.5∼2.5㎛ 두께로 형성함을 특징으로 하는 SAW 필터용 압전소자의 전극형성방법.
  3. 제2항에 있어서, E/B법에 의해 A1전극막을 형성함을 특징으로 하는 SAW필터용 압전소자의 전극형성방법.
  4. 제1항에 있어서, 상기 제1전극막상에 포지티브. 포토 레지스트를 1∼2㎛의 두께로 형성함을 특징으로 하는 SAW필터용 압전소자의 전극형성방법.
  5. 제1항에 있어서, 포토 레지스트, 패턴, 마스크를 최종 IDT 수의 1/2만큼 규칙적으로 배열시키되 언더커팅공정을 사용하여 전극의 간격을 조절함을 특징으로 하는 SAW필터용 압전소자의 전극형성방법.
  6. 제1항에 있어서, 상기 제1전극막의 식각율은 부식액의 온도와 시간으로 조절하되 상기 온도의 범위는 상온∼150℃이고 상기 시간은 3∼600초인것을 특징으로 하는 SAW필터용 압전소자의 전극형성방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910008809A 1991-05-29 1991-05-29 Saw 필터용 압전소자의 전극 형성방법 KR920022578A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910008809A KR920022578A (ko) 1991-05-29 1991-05-29 Saw 필터용 압전소자의 전극 형성방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910008809A KR920022578A (ko) 1991-05-29 1991-05-29 Saw 필터용 압전소자의 전극 형성방법

Publications (1)

Publication Number Publication Date
KR920022578A true KR920022578A (ko) 1992-12-19

Family

ID=67432818

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910008809A KR920022578A (ko) 1991-05-29 1991-05-29 Saw 필터용 압전소자의 전극 형성방법

Country Status (1)

Country Link
KR (1) KR920022578A (ko)

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