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KR900015853A - 연마 또는 연삭장치 - Google Patents

연마 또는 연삭장치 Download PDF

Info

Publication number
KR900015853A
KR900015853A KR1019900004153A KR900004153A KR900015853A KR 900015853 A KR900015853 A KR 900015853A KR 1019900004153 A KR1019900004153 A KR 1019900004153A KR 900004153 A KR900004153 A KR 900004153A KR 900015853 A KR900015853 A KR 900015853A
Authority
KR
South Korea
Prior art keywords
tool
storage tank
cooling gas
control device
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019900004153A
Other languages
English (en)
Inventor
뤼버링 요한네스
이메 페터
부쎄 위르겐
슈미쯔 에르빈
볼케르 볼프강
Original Assignee
원본미기재
메쎄르 그리샤임 게엠베하
잉게르솔-란트 게엠베하
뤼버링 요한네스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE3910590A external-priority patent/DE3910590C2/de
Priority claimed from DE3910581A external-priority patent/DE3910581A1/de
Priority claimed from DE3910582A external-priority patent/DE3910582C1/de
Application filed by 원본미기재, 메쎄르 그리샤임 게엠베하, 잉게르솔-란트 게엠베하, 뤼버링 요한네스 filed Critical 원본미기재
Publication of KR900015853A publication Critical patent/KR900015853A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/10—Arrangements for cooling or lubricating tools or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/10—Arrangements for cooling or lubricating tools or work
    • B23Q11/1092—Arrangements for cooling or lubricating tools or work specially adapted for portable power-driven tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B23/00—Portable grinding machines, e.g. hand-guided; Accessories therefor
    • B24B23/02—Portable grinding machines, e.g. hand-guided; Accessories therefor with rotating grinding tools; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D29/00—Arrangement or mounting of control or safety devices
    • F25D29/001—Arrangement or mounting of control or safety devices for cryogenic fluid systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/02—Mixing fluids
    • F17C2265/025—Mixing fluids different fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0545—Tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Disintegrating Or Milling (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

내용 없음.

Description

연마 또는 연삭장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 공작 재료상에 있는 가공 공구를 도시한 도면,
제2도는 냉간 가스 공급을 부분적으로 도시한 도면,
제3도는 고정장치를 도시한 도면.

Claims (10)

  1. 연마 또는 연삭 장치에 있어서, 액체 가스 저장 탱크(21), 연마 또는 연삭 공구(17), 저장탱크(21)와 공구(17)사이의 냉각 절연 결합 호스(16) 및 공구(17)가 작동하는 동안 냉각 가스 흐름을 계속하여 공구의 작업 영역내로 공급하는 장치가 제공되어 있는 것을 특징으로 하는 장치.
  2. 제1항에 있어서, 다수의 저장 탱크(21)가 달려 있는 장치로서, 저장탱크(21)가 주탱크(11)와 연결되어 있는 것을 특징으로 하는 장치.
  3. 제1항 또는 제2항에 있어서, 저장 탱크(21)와 공구(17)또는 주 탱크(11)와 저장 탱크(21)사이에 냉각 가스와 압축 공기가 공급되는 혼합 용기(13)가 배치되어 있는 것을 특징으로 하는 장치.
  4. 제1항 내지 제3항중 한 항에 있어서, 저장 탱크(21)가 가동중간 탱크(18)로부터 충전될 수 있도록 형성되어 있는 것을 특징으로 하는 장치.
  5. 냉각 가스를 준비하여 가공 공구(17)의 작업 영역내로 공급하고, 액체 가스 저장탱크(22), 액체가스 저장탱크(22)와 공구(26)사이의 냉각 절연 결합 호스(25)가 달려 있는 장치에 있어서, 액체 저장탱크(22)에 용기 가열기(23)와 후속 가열기(24)가 제공되어 있고, 가열기에는 제어장치(35)가 병렬되어 있고, 제저장치가 예정된 온도값과 압력값에 따라 용기 가열장치(23)와 후속 가열 장치(24)의 출력을 조절하는 것을 특징으로 하는 장치.
  6. 제5항에 있어서, 냉각가스용 공급 장치의 유출구가 가공 공구(26)의 작업영역 내에서 끝나는 것을 특징으로 하는 장치.
  7. 냉각가스를 가공 장치에 공급하는 장치용 온도제어장치로서, 가열할 수 있는 액체 가스 저장탱크로 구성되어 있고, 후속 가열장치, 가공 공구 및 탱크와 공구 사이의 결합 호수가 제공되어 있는 온도제어 장치에 있어서, 온도 감지기(29)가 냉각 가스의 유동로내에서 냉각 가스가 가공공구(26)내로 들어가는 유입구 앞에 제공되어 있는 것을 특징으로 하는 제어장치.
  8. 제7항에 있어서, 온도 감지기(30)가 냉각 가수의 유동로내에 있는 후속 가열기(24)뒤에 배치되어 있는 것을 특징으로 하는 제어장치.
  9. 제7항에 있어서, 압력센서(31)가 냉각 가스의 유동로내에 있는 후속 가열기(24) 앞에 배치되어 있는 것을 특징으로 하는 제어장치.
  10. 제7항 내지 제9항 중 한 항에 있어서, 압축 공기에 의하여 작동하는 가공 공구가 달려있는 제어장치로서, 압력차 조절기(32)가 냉각가스의 유동로내에서 온도 감지기(29)와 전기적으로 연결되어 있는 압축 공기 공급장치(27)내에 제공되어 있는 것을 특징으로 하는 제어장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900004153A 1989-04-01 1990-03-28 연마 또는 연삭장치 Withdrawn KR900015853A (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE3910581.4 1989-04-01
DE3910590A DE3910590C2 (de) 1989-04-01 1989-04-01 Handpoliermaschine
DE3910581A DE3910581A1 (de) 1989-04-01 1989-04-01 Kaltgasbearbeitungseinrichtung
DE3910590.3 1989-04-01
DE3910582A DE3910582C1 (en) 1989-04-01 1989-04-01 Temperature-controlling device
DE3910582.2 1989-04-01

Publications (1)

Publication Number Publication Date
KR900015853A true KR900015853A (ko) 1990-11-10

Family

ID=27199337

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900004153A Withdrawn KR900015853A (ko) 1989-04-01 1990-03-28 연마 또는 연삭장치

Country Status (7)

Country Link
US (2) US5088242A (ko)
EP (1) EP0391148B1 (ko)
JP (1) JPH0349860A (ko)
KR (1) KR900015853A (ko)
AT (1) ATE106300T1 (ko)
DE (1) DE59005867D1 (ko)
ES (1) ES2059858T3 (ko)

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USD330151S (en) 1990-09-04 1992-10-13 Fisher Tool Co., Inc. Pneumatic grinder
USD333766S (en) 1990-10-11 1993-03-09 Ingersoll-Rand Company Angled pneumatic grinder
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DE4238013A1 (de) * 1992-11-11 1994-05-19 Linde Ag Verfahren zum Abkühlen von Flächenteilen
DE4305764A1 (de) * 1993-02-25 1994-09-01 Krupp Foerdertechnik Gmbh Verlegbare Brücke und Einrichtung zum Verlegen der Brücke
GB9310107D0 (en) * 1993-05-17 1993-06-30 Minnesota Mining & Mfg Sanding and polishing systems
US5301471A (en) * 1993-06-11 1994-04-12 Fisher Tool Co., Inc. Portable air angle head random orbital unit
JPH0811045A (ja) * 1994-06-30 1996-01-16 Shinano Seisakusho:Kk 空気圧を動力源とする研磨工具
GB9423267D0 (en) * 1994-11-18 1995-01-11 Minnesota Mining & Mfg Compounding elements and use thereof
ATE192684T1 (de) * 1996-03-07 2000-05-15 Messer Griesheim Gmbh Maschine zum polieren und/oder schleifen
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US6165053A (en) * 1996-07-24 2000-12-26 Mayekawa Mfg. Co., Ltd. Method and apparatus for processing in cold air blast
US5839948A (en) * 1996-08-27 1998-11-24 American Stonecrafters, Inc. Right angle sanders for wet sanding
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US6142858A (en) * 1997-11-10 2000-11-07 3M Innovative Properties Company Backup pad for abrasive articles
JP3719324B2 (ja) 1997-12-24 2005-11-24 豊田工機株式会社 冷風冷却を用いた機械加工方法
JPH11188570A (ja) 1997-12-24 1999-07-13 Toyoda Mach Works Ltd 冷風冷却を用いた機械加工装置及び機械加工方法
FI107894B (fi) * 1998-10-19 2001-10-31 Addtek Res & Dev Oy Ab Menetelmä betonin sahauksessa käytetyn terän jäähdyttämiseksi ja sahausterä
WO2008010992A1 (en) * 2006-07-17 2008-01-24 Abeo, Llc Motor having a hollow drive shaft
US9415483B2 (en) * 2009-05-13 2016-08-16 3M Innovative Properties Company Tufted buffing pad
RU2549814C2 (ru) 2009-05-13 2015-04-27 3М Инновейтив Пропертиз Компани Быстроразъемное соединение
FR2953750B1 (fr) * 2009-12-16 2012-02-24 Peugeot Citroen Automobiles Sa Appareil de lustrage a air comprime dote d'un moyen de refroidissement
US10058975B2 (en) * 2016-02-12 2018-08-28 Applied Materials, Inc. In-situ temperature control during chemical mechanical polishing with a condensed gas
US20180354092A1 (en) * 2017-06-09 2018-12-13 GM Global Technology Operations LLC Cold sanding of thermoplastic workpieces
KR102736879B1 (ko) 2018-06-27 2024-12-03 어플라이드 머티어리얼스, 인코포레이티드 화학적 기계적 연마의 온도 제어
TWI838459B (zh) 2019-02-20 2024-04-11 美商應用材料股份有限公司 化學機械拋光裝置及化學機械拋光方法
US11628478B2 (en) 2019-05-29 2023-04-18 Applied Materials, Inc. Steam cleaning of CMP components
US11633833B2 (en) 2019-05-29 2023-04-25 Applied Materials, Inc. Use of steam for pre-heating of CMP components
TWI859239B (zh) 2019-05-29 2024-10-21 美商應用材料股份有限公司 用於化學機械研磨系統的蒸氣處置站的設備及方法
TWI872101B (zh) 2019-08-13 2025-02-11 美商應用材料股份有限公司 Cmp溫度控制的裝置及方法
US11897079B2 (en) 2019-08-13 2024-02-13 Applied Materials, Inc. Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity
EP4171873A4 (en) 2020-06-29 2024-07-24 Applied Materials, Inc. Temperature and slurry flow rate control in cmp
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US11577358B2 (en) 2020-06-30 2023-02-14 Applied Materials, Inc. Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing
CN115461193A (zh) 2020-06-30 2022-12-09 应用材料公司 用于cmp温度控制的设备和方法
CN114392875A (zh) * 2021-12-15 2022-04-26 邳州通达化工机械有限公司 一种避免安全隐患的化工设备搪瓷层紧急修补装置

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DE8904022U1 (de) * 1989-04-01 1989-06-08 Lübbering, Johannes, 33442 Herzebrock-Clarholz Kaltgasbearbeitungseinrichtung
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DE8904020U1 (de) * 1989-04-01 1989-06-08 Lübbering, Johannes, 33442 Herzebrock-Clarholz Kaltgasbearbeitungsgerät

Also Published As

Publication number Publication date
DE59005867D1 (de) 1994-07-07
US5088242A (en) 1992-02-18
ES2059858T3 (es) 1994-11-16
EP0391148B1 (de) 1994-06-01
EP0391148A2 (de) 1990-10-10
ATE106300T1 (de) 1994-06-15
US5088241A (en) 1992-02-18
EP0391148A3 (de) 1991-01-02
JPH0349860A (ja) 1991-03-04

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