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KR900000653B1 - Object observation method and apparatus of small gap - Google Patents

Object observation method and apparatus of small gap

Info

Publication number
KR900000653B1
KR900000653B1 KR8503078A KR850003078A KR900000653B1 KR 900000653 B1 KR900000653 B1 KR 900000653B1 KR 8503078 A KR8503078 A KR 8503078A KR 850003078 A KR850003078 A KR 850003078A KR 900000653 B1 KR900000653 B1 KR 900000653B1
Authority
KR
South Korea
Prior art keywords
light
image
gap
small gap
observation method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR8503078A
Other languages
English (en)
Other versions
KR850008404A (ko
Inventor
Moritosi Ando
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of KR850008404A publication Critical patent/KR850008404A/ko
Application granted granted Critical
Publication of KR900000653B1 publication Critical patent/KR900000653B1/ko
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Supply And Installment Of Electrical Components (AREA)
KR8503078A 1984-05-22 1985-05-07 Object observation method and apparatus of small gap Expired KR900000653B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59104249A JPS60247106A (ja) 1984-05-22 1984-05-22 形状検査装置
JP104249 1984-05-22

Publications (2)

Publication Number Publication Date
KR850008404A KR850008404A (ko) 1985-12-16
KR900000653B1 true KR900000653B1 (en) 1990-02-02

Family

ID=14375660

Family Applications (1)

Application Number Title Priority Date Filing Date
KR8503078A Expired KR900000653B1 (en) 1984-05-22 1985-05-07 Object observation method and apparatus of small gap

Country Status (5)

Country Link
US (1) US4686565A (ko)
EP (1) EP0162683B1 (ko)
JP (1) JPS60247106A (ko)
KR (1) KR900000653B1 (ko)
DE (1) DE3576737D1 (ko)

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* Cited by examiner, † Cited by third party
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US4788564A (en) * 1986-07-10 1988-11-29 Canon Kabushiki Kaisha Board recording apparatus with reduced smudge
JPH077446B2 (ja) * 1986-11-12 1995-01-30 松下電器産業株式会社 部品認識方法
US4862510A (en) * 1987-03-24 1989-08-29 Emhart Industries, Inc. Lead sense system for component insertion machine
JPH0814546B2 (ja) * 1987-05-07 1996-02-14 富士通株式会社 光学式形状検査装置
US4795237A (en) * 1987-05-26 1989-01-03 Paul Stuart Kempf Optical inspection method with side-viewing mirror
US4924304A (en) * 1987-11-02 1990-05-08 Mpm Corporation Video probe aligning of object to be acted upon
US4815204A (en) * 1988-05-02 1989-03-28 Emhart Industries, Inc. Electronic component insertion machine
US4854039A (en) * 1988-05-04 1989-08-08 The Technology Congress, Ltd. Prototype circuit board and method of testing
JP2577805B2 (ja) * 1989-12-27 1997-02-05 株式会社日立製作所 はんだ付部検査方法とその装置並びに電子部品実装状態検査方法
JPH03203399A (ja) * 1989-12-29 1991-09-05 Matsushita Electric Ind Co Ltd 部品装着装置
US5298989A (en) * 1990-03-12 1994-03-29 Fujitsu Limited Method of and apparatus for multi-image inspection of bonding wire
US5060063A (en) * 1990-07-30 1991-10-22 Mpm Corporation Viewing and illuminating video probe with viewing means for simultaneously viewing object and device images along viewing axis and translating them along optical axis
US5245421A (en) * 1990-09-19 1993-09-14 Control Automation, Incorporated Apparatus for inspecting printed circuit boards with surface mounted components
US5152055A (en) * 1991-04-26 1992-10-06 At&T Bell Laboratories Article alignment method
JP2563659Y2 (ja) * 1991-05-23 1998-02-25 株式会社電子技研 半田付け検査用治具
JPH06300697A (ja) * 1992-04-28 1994-10-28 Texas Instr Inc <Ti> 非改質性検査プラテン
US6011586A (en) * 1996-12-04 2000-01-04 Cognex Corporation Low-profile image formation apparatus
JPH10293158A (ja) * 1997-04-18 1998-11-04 Advantest Corp Ｉｃ試験装置
US5956134A (en) * 1997-07-11 1999-09-21 Semiconductor Technologies & Instruments, Inc. Inspection system and method for leads of semiconductor devices
US6055055A (en) * 1997-12-01 2000-04-25 Hewlett-Packard Company Cross optical axis inspection system for integrated circuits
US6072898A (en) 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
US6144762A (en) * 1998-02-23 2000-11-07 Olympus America Inc. Stereo video microscope
SG84530A1 (en) * 1998-05-21 2001-11-20 Agilent Technologies Inc Cross optical axis inspection system for integrated circuits
US6043876A (en) * 1998-10-08 2000-03-28 Lucent Technologies, Inc. Method and apparatus for detecting a solder bridge in a ball grid array
DE19847913B4 (de) * 1998-10-19 2005-09-22 Ersa Gmbh Vorrichtung und Verfahren zur optischen Inspektion insbesondere verdeckter Lötverbindungen
US20030021886A1 (en) * 2000-02-23 2003-01-30 Baele Stephen James Method of printing and printing machine
EP1220596A1 (en) * 2000-12-29 2002-07-03 Icos Vision Systems N.V. A method and an apparatus for measuring positions of contact elements of an electronic component
KR100395426B1 (ko) * 2001-06-25 2003-08-21 에이티아이 주식회사 2개의 보트를 이용한 아이씨용 피씨비 형상결함 검사장치
US6788406B2 (en) * 2001-11-02 2004-09-07 Delaware Capital Formation, Inc. Device and methods of inspecting soldered connections
US7110115B2 (en) * 2003-06-30 2006-09-19 Motorola, Inc. Method and arrangement for aligning an optical component on a printed wiring board
US7643136B2 (en) * 2006-02-02 2010-01-05 Optilia Instrument Ab Device for inspection of narrow spaces and objects in narrow spaces
KR101925541B1 (ko) * 2012-08-06 2018-12-06 삼성디스플레이 주식회사 구동 ｉｃ실장 장치 및 구동 ｉｃ 실장 방법
TWI493201B (zh) 2012-11-09 2015-07-21 Ind Tech Res Inst 電子零件腳位判斷與插件之方法與系統
JP6242078B2 (ja) 2013-05-20 2017-12-06 オリンパス株式会社 半導体装置、および半導体装置の位置決め装置
GB2519991B (en) * 2013-11-04 2016-10-12 Dave Hall Entpr Ltd Optical inspection of soldered components
CN104267037A (zh) * 2014-10-16 2015-01-07 北京星航机电装备有限公司 钎焊金属蜂窝结构面芯脱焊缺陷体视光学显微检测方法
CN106289855A (zh) * 2016-08-26 2017-01-04 北京星航机电装备有限公司 钎焊金属蜂窝结构焊接质量金相检测方法
CN110174406B (zh) * 2019-05-15 2021-05-14 山西大学 一种太阳能电池片图像采集结构
CN113029079A (zh) * 2021-02-04 2021-06-25 深圳市金致卓科技有限公司 一种pcb板的钻孔深度检测装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL260910A (ko) * 1960-02-06
FR2238166B1 (ko) * 1973-07-17 1977-12-23 Sopelem
US4028728A (en) * 1976-04-02 1977-06-07 Western Electric Company, Inc. Method of and video system for identifying different light-reflective surface areas on articles
US4268169A (en) * 1979-04-16 1981-05-19 Charles Stenning Flaw detection probe for cylindrical bores
US4389669A (en) * 1981-02-27 1983-06-21 Ilc Data Device Corporation Opto-video inspection system
US4473842A (en) * 1981-07-06 1984-09-25 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus and method for examining printed circuit board provided with electronic parts

Also Published As

Publication number Publication date
EP0162683A2 (en) 1985-11-27
JPH0310041B2 (ko) 1991-02-12
JPS60247106A (ja) 1985-12-06
US4686565A (en) 1987-08-11
EP0162683A3 (en) 1987-12-09
EP0162683B1 (en) 1990-03-21
KR850008404A (ko) 1985-12-16
DE3576737D1 (de) 1990-04-26

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Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 19990128

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee