KR870005477A - 반도체 장치 - Google Patents
반도체 장치 Download PDFInfo
- Publication number
- KR870005477A KR870005477A KR860009364A KR860009364A KR870005477A KR 870005477 A KR870005477 A KR 870005477A KR 860009364 A KR860009364 A KR 860009364A KR 860009364 A KR860009364 A KR 860009364A KR 870005477 A KR870005477 A KR 870005477A
- Authority
- KR
- South Korea
- Prior art keywords
- type
- semiconductor
- layer
- semiconductor device
- electrode
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 50
- 239000002019 doping agent Substances 0.000 claims 5
- 239000012535 impurity Substances 0.000 claims 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052787 antimony Inorganic materials 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 229910052714 tellurium Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
- H10F71/1035—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials having multiple Group IV elements, e.g. SiGe or SiC
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
- H10F77/166—Amorphous semiconductors
- H10F77/1662—Amorphous semiconductors including only Group IV materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (22)
- 중간층에 이웃하는 반도체보다 전기 저항이 큰 절연체나 반도체도 만들어진 최소한 하나의 중간층이 반도체층 사이나 반도체와 전극 사이에 들어감을 특징으로 하는 핀-형 또는 닙-형 무정질-함유 반도체층 그리고 최소한 2개의 전극으로 구성된 반도체 장치.
- 제1항에 있어서, 중간층이 p-형 반도체와 i-형 반도체의 사이 및/또는 n-형 반도체와 i-형 반도체의 사이 형성된 반도체 장치.
- 제1항에 있어서, 중간층이 한 전도형의 반도체와 전극 사이에 형성된 반도체 장치.
- 제1항에 있어서, 중간층이 Si1-xC:X:Y, Si1-xNx:X:Y 및 Si1-xO:X:Y(여기서 x는 0〈X〈1의 관계를 만족하는 수이며, X는 H,Cl,F 또 Br이고, Y는 H,Cl,F 또는 Br임)로 이루어진 그룹에서 선택된 층인 반도체 장치.
- 제1항에 있어서, 중간층이 Si1-xCx:H(여기저 X는 0〈X〈1의 관계를 만족하는 수임)인 반도체 장치.
- 제1항에 있어서, 최소한 하나의 중간층이 p-형 무정질-함유 반도체층에 인접하여 형성된 반도체 장치.
- 제1항에 있어서, 중간층이 p-형과 i-형 무정질-함유 반도체층 사이에 형성된 반도체 장치.
- 제1항 내지 7항중의 어느 하나에 있어서, 중간층의 두께가 10 내지 500Å인 반도체 장치.
- p-형 또는 n-형 층의 도판트의 양이 p/i 또는 n/i 접합면에서 최소이고 p/전극 또는 n/전극의 상호면을 향해 점진적으로 증가함을 특징으로 하는 핀-형 또는 닙-형 무정질-함유 반도체층 그리고 최소한 2개의 전극으로 구성된 반도체 장치.
- 제9항에 있어서, p-형 층과 n-형 층의 최소한 하나가 a-SiC:H층인 반도체 장치.
- 제9항에 있어서, p-형 층과 n-형 층의 최소한 하나가 a-Si:H층인 반도체 장치.
- 제9항에 있어서, p-형 또는 n-형 부위의 도판트의 양이 p/i 또는 n/i 접합면으로 부터 최소한 20Å의 두께도 p/ 전극 또는 n/전극의 상호면을 향해 점진적으로 증가해 가는 반도체 장치.
- 제9항에 있어서, p-형 또는 n-형 부위의 도판트의 양이 p/i 또는 n/i 접합면으로 부터 최소한 100Å의 두께로 p/전극 또는 n/전극의 상호면을 향해 점진적으로 증가해가는 반도체 장치.
- 제9항 내지 11항중의 어느 하나에 있어서, p-형층의 도판트가 B,Al,Ga,In 및 T1로 이루어진 그룹에서 선택된 한 원소인 반도체 장치.
- 제9항 내지 11항중의 어느 하나에 있어서, n-형 층의 도판트가 N,P,As,Sb,Te 및 PO로 이루어진 그룹에서 선택된 한 원소인 반도체 장치.
- 인접한 반도체(Ⅱ)와 전도형이 동일하고 불순물 밀도가 높은 최소한 하나의 반도체층(I)이 반도체(Ⅱ)과 전극 사이에 들어감을 특징으로 하는, 닙-형 또는 핀-형 무정질-함유 반도체층과 최소한 두개의 전극으로 구성된 반도체 장치.
- 제16항에 있어서, 전도형이 p-형 및/또는 n-형인 반도체 장치.
- 제17항에 있어서, 반도체 층(I)의 두께가 10 내지 300Å인 반도체 장치.
- 제15항에 있어서, p-형 및/또는 n-형 반도체층(I)이 a-SiC:H로 이루어진 반도체 장치.
- 제17항 내지 19항중의 어느 하나에 있어서, p-형 및/또는 n-형 반도체층(I)이 a-Si로 이루어진 반도체 장치.
- 제17항 내지 19항중의 어느 하나에 있어서, 불순물 밀도가 높은 p-형 또는 n-형 반도체층(I)의 불순물 밀도가 반도체층(Ⅱ)의 것보다 2배 이상인 반도체 장치.
- 제17항 내지 19항중의 어느 하나에 있어서, 불순물 밀도가 높은 반도체층(I)의 불순물 밀도가 반도체층(Ⅱ)의 것보다 4배 이상인 반도체 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP247463 | 1985-11-05 | ||
JP60247463A JPS62106670A (ja) | 1985-11-05 | 1985-11-05 | 半導体素子 |
JP60255681A JP2545066B2 (ja) | 1985-11-14 | 1985-11-14 | 半導体装置 |
JP255681 | 1985-11-14 | ||
JP61099939A JPS62256481A (ja) | 1986-04-30 | 1986-04-30 | 半導体装置 |
JP99939 | 1986-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR870005477A true KR870005477A (ko) | 1987-06-09 |
Family
ID=27309089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR860009364A KR870005477A (ko) | 1985-11-05 | 1986-11-05 | 반도체 장치 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5032884A (ko) |
EP (3) | EP0494090A3 (ko) |
KR (1) | KR870005477A (ko) |
CN (1) | CN1036817C (ko) |
AU (2) | AU600453B2 (ko) |
CA (1) | CA1321660C (ko) |
DE (2) | DE3650712T2 (ko) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6384075A (ja) * | 1986-09-26 | 1988-04-14 | Sanyo Electric Co Ltd | 光起電力装置 |
EP0364780B1 (en) * | 1988-09-30 | 1997-03-12 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Solar cell with a transparent electrode |
JP3099957B2 (ja) * | 1990-01-17 | 2000-10-16 | 株式会社リコー | 光導電部材 |
US5155567A (en) * | 1990-01-17 | 1992-10-13 | Ricoh Company, Ltd. | Amorphous photoconductive material and photosensor employing the photoconductive material |
US5158896A (en) * | 1991-07-03 | 1992-10-27 | International Business Machines Corporation | Method for fabricating group III-V heterostructure devices having self-aligned graded contact diffusion regions |
US5162891A (en) * | 1991-07-03 | 1992-11-10 | International Business Machines Corporation | Group III-V heterostructure devices having self-aligned graded contact diffusion regions and method for fabricating same |
US5256887A (en) * | 1991-07-19 | 1993-10-26 | Solarex Corporation | Photovoltaic device including a boron doping profile in an i-type layer |
AU743048C (en) * | 1997-03-10 | 2003-01-16 | Canon Kabushiki Kaisha | Deposited film forming process, deposited film forming apparatus and process for manufacturing semiconductor element |
JP3869952B2 (ja) * | 1998-09-21 | 2007-01-17 | キヤノン株式会社 | 光電変換装置とそれを用いたx線撮像装置 |
EP1056139A3 (en) * | 1999-05-28 | 2007-09-19 | Sharp Kabushiki Kaisha | Method for manufacturing photoelectric conversion device |
US6566594B2 (en) * | 2000-04-05 | 2003-05-20 | Tdk Corporation | Photovoltaic element |
US20030111675A1 (en) * | 2001-11-27 | 2003-06-19 | Jds Uniphase Corporation | Doped absorption for enhanced responsivity for high speed photodiodes |
US7202102B2 (en) * | 2001-11-27 | 2007-04-10 | Jds Uniphase Corporation | Doped absorption for enhanced responsivity for high speed photodiodes |
JP4733519B2 (ja) * | 2002-10-25 | 2011-07-27 | エリコン ソーラー アーゲー,トゥルーバッハ | 半導体装置の製造方法及びこの方法で得られた半導体装置 |
WO2004050961A1 (en) * | 2002-11-27 | 2004-06-17 | University Of Toledo, The | Integrated photoelectrochemical cell and system having a liquid electrolyte |
JP4171428B2 (ja) * | 2003-03-20 | 2008-10-22 | 三洋電機株式会社 | 光起電力装置 |
US7667133B2 (en) * | 2003-10-29 | 2010-02-23 | The University Of Toledo | Hybrid window layer for photovoltaic cells |
WO2006110613A2 (en) * | 2005-04-11 | 2006-10-19 | The University Of Toledo | Integrated photovoltaic-electrolysis cell |
EP1724844A2 (en) | 2005-05-20 | 2006-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device, manufacturing method thereof and semiconductor device |
US7906723B2 (en) | 2008-04-30 | 2011-03-15 | General Electric Company | Compositionally-graded and structurally-graded photovoltaic devices and methods of fabricating such devices |
US20070023081A1 (en) * | 2005-07-28 | 2007-02-01 | General Electric Company | Compositionally-graded photovoltaic device and fabrication method, and related articles |
US7655542B2 (en) * | 2006-06-23 | 2010-02-02 | Applied Materials, Inc. | Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device |
US20080173350A1 (en) * | 2007-01-18 | 2008-07-24 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US20080223440A1 (en) * | 2007-01-18 | 2008-09-18 | Shuran Sheng | Multi-junction solar cells and methods and apparatuses for forming the same |
US8203071B2 (en) * | 2007-01-18 | 2012-06-19 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US7582515B2 (en) * | 2007-01-18 | 2009-09-01 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
JP2008181965A (ja) * | 2007-01-23 | 2008-08-07 | Sharp Corp | 積層型光電変換装置及びその製造方法 |
US20080245414A1 (en) * | 2007-04-09 | 2008-10-09 | Shuran Sheng | Methods for forming a photovoltaic device with low contact resistance |
US7875486B2 (en) * | 2007-07-10 | 2011-01-25 | Applied Materials, Inc. | Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning |
US20090104733A1 (en) * | 2007-10-22 | 2009-04-23 | Yong Kee Chae | Microcrystalline silicon deposition for thin film solar applications |
US20090130827A1 (en) * | 2007-11-02 | 2009-05-21 | Soo Young Choi | Intrinsic amorphous silicon layer |
US7741144B2 (en) * | 2007-11-02 | 2010-06-22 | Applied Materials, Inc. | Plasma treatment between deposition processes |
EP2216826A4 (en) * | 2007-11-30 | 2016-10-12 | Kaneka Corp | PHOTOELECTRIC SILICON THIN FILM CONVERSION DEVICE |
US8895842B2 (en) * | 2008-08-29 | 2014-11-25 | Applied Materials, Inc. | High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells |
US20100059110A1 (en) * | 2008-09-11 | 2010-03-11 | Applied Materials, Inc. | Microcrystalline silicon alloys for thin film and wafer based solar applications |
WO2011011301A2 (en) * | 2009-07-23 | 2011-01-27 | Applied Materials, Inc. | A mixed silicon phase film for high efficiency thin film silicon solar cells |
WO2011046664A2 (en) * | 2009-10-15 | 2011-04-21 | Applied Materials, Inc. | A barrier layer disposed between a substrate and a transparent conductive oxide layer for thin film silicon solar cells |
US20110126875A1 (en) * | 2009-12-01 | 2011-06-02 | Hien-Minh Huu Le | Conductive contact layer formed on a transparent conductive layer by a reactive sputter deposition |
US20110232753A1 (en) * | 2010-03-23 | 2011-09-29 | Applied Materials, Inc. | Methods of forming a thin-film solar energy device |
CN103283031B (zh) * | 2010-09-22 | 2016-08-17 | 第一太阳能有限公司 | 包含n型掺杂剂源的光伏装置 |
KR20120034965A (ko) * | 2010-10-04 | 2012-04-13 | 삼성전자주식회사 | 태양 전지 |
JP5583196B2 (ja) * | 2011-12-21 | 2014-09-03 | パナソニック株式会社 | 薄膜太陽電池およびその製造方法 |
CN110073504B (zh) * | 2016-11-15 | 2023-04-28 | 信越化学工业株式会社 | 高光电转换效率的太阳能电池、其制造方法、太阳能电池组件和光伏发电系统 |
JP6375471B1 (ja) * | 2017-03-31 | 2018-08-15 | 日本碍子株式会社 | 接合体および弾性波素子 |
TWI791099B (zh) * | 2018-03-29 | 2023-02-01 | 日商日本碍子股份有限公司 | 接合體及彈性波元件 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7317598U (de) * | 1972-06-09 | 1974-04-04 | Bbc Ag | Halbleiterbauelement |
JPS5252593A (en) * | 1975-10-27 | 1977-04-27 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor light receiving diode |
US4117506A (en) * | 1977-07-28 | 1978-09-26 | Rca Corporation | Amorphous silicon photovoltaic device having an insulating layer |
US4200473A (en) * | 1979-03-12 | 1980-04-29 | Rca Corporation | Amorphous silicon Schottky barrier solar cells incorporating a thin insulating layer and a thin doped layer |
US4251287A (en) * | 1979-10-01 | 1981-02-17 | The University Of Delaware | Amorphous semiconductor solar cell |
US4255211A (en) * | 1979-12-31 | 1981-03-10 | Chevron Research Company | Multilayer photovoltaic solar cell with semiconductor layer at shorting junction interface |
IL63753A (en) * | 1980-09-09 | 1985-02-28 | Energy Conversion Devices Inc | Photoresponsive amorphous germanium alloys,their production and devices made therefrom |
US4522663A (en) * | 1980-09-09 | 1985-06-11 | Sovonics Solar Systems | Method for optimizing photoresponsive amorphous alloys and devices |
IE52208B1 (en) * | 1980-09-09 | 1987-08-05 | Energy Conversion Devices Inc | Method for increasing the band gap in photoresponsive amorphous alloys and devices |
US4490208A (en) * | 1981-07-08 | 1984-12-25 | Agency Of Industrial Science And Technology | Method of producing thin films of silicon |
EP0070509B2 (en) * | 1981-07-17 | 1993-05-19 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Amorphous semiconductor and amorphous silicon photovoltaic device |
JPS5864070A (ja) * | 1981-10-13 | 1983-04-16 | Kanegafuchi Chem Ind Co Ltd | フツ素を含むアモルフアスシリコン太陽電池 |
US4379943A (en) * | 1981-12-14 | 1983-04-12 | Energy Conversion Devices, Inc. | Current enhanced photovoltaic device |
US4398054A (en) * | 1982-04-12 | 1983-08-09 | Chevron Research Company | Compensated amorphous silicon solar cell incorporating an insulating layer |
US4415760A (en) * | 1982-04-12 | 1983-11-15 | Chevron Research Company | Amorphous silicon solar cells incorporating an insulating layer in the body of amorphous silicon and a method of suppressing the back diffusion of holes into an N-type region |
JPS5914679A (ja) * | 1982-07-16 | 1984-01-25 | Toshiba Corp | 光起電力装置 |
US4633031A (en) * | 1982-09-24 | 1986-12-30 | Todorof William J | Multi-layer thin film, flexible silicon alloy photovoltaic cell |
US4492743A (en) * | 1982-10-15 | 1985-01-08 | Standard Oil Company (Indiana) | Multilayer photoelectrodes and photovoltaic cells |
US4451970A (en) * | 1982-10-21 | 1984-06-05 | Energy Conversion Devices, Inc. | System and method for eliminating short circuit current paths in photovoltaic devices |
JPS5975682A (ja) * | 1982-10-25 | 1984-04-28 | Nippon Denso Co Ltd | 光起電力素子 |
US4485265A (en) * | 1982-11-22 | 1984-11-27 | President And Fellows Of Harvard College | Photovoltaic cell |
GB2137810B (en) * | 1983-03-08 | 1986-10-22 | Agency Ind Science Techn | A solar cell of amorphous silicon |
JPS59229878A (ja) * | 1983-06-11 | 1984-12-24 | Toa Nenryo Kogyo Kk | 新規なアモルフアス半導体素子及びその製造方法、並びにそれを製造するための装置 |
JPS6050972A (ja) * | 1983-08-31 | 1985-03-22 | Agency Of Ind Science & Technol | 薄膜太陽電池 |
US4531015A (en) * | 1984-04-12 | 1985-07-23 | Atlantic Richfield Company | PIN Amorphous silicon solar cell with nitrogen compensation |
US4742012A (en) * | 1984-11-27 | 1988-05-03 | Toa Nenryo Kogyo K.K. | Method of making graded junction containing amorphous semiconductor device |
-
1986
- 1986-10-28 CA CA000521602A patent/CA1321660C/en not_active Expired - Lifetime
- 1986-10-31 AU AU64619/86A patent/AU600453B2/en not_active Expired
- 1986-11-01 EP EP19920104633 patent/EP0494090A3/en not_active Ceased
- 1986-11-01 EP EP86115170A patent/EP0221523B1/en not_active Revoked
- 1986-11-01 DE DE3650712T patent/DE3650712T2/de not_active Expired - Lifetime
- 1986-11-01 DE DE3650012T patent/DE3650012T2/de not_active Revoked
- 1986-11-01 EP EP92104628A patent/EP0494088B1/en not_active Expired - Lifetime
- 1986-11-05 KR KR860009364A patent/KR870005477A/ko not_active Application Discontinuation
- 1986-11-05 CN CN86106353A patent/CN1036817C/zh not_active Expired - Lifetime
-
1990
- 1990-02-07 US US07/477,138 patent/US5032884A/en not_active Expired - Lifetime
- 1990-11-09 AU AU65966/90A patent/AU636677B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AU600453B2 (en) | 1990-08-16 |
DE3650712T2 (de) | 1999-09-30 |
AU6596690A (en) | 1991-01-24 |
CA1321660C (en) | 1993-08-24 |
DE3650712D1 (de) | 1999-04-01 |
EP0494088A1 (en) | 1992-07-08 |
EP0221523B1 (en) | 1994-08-03 |
AU6461986A (en) | 1987-05-07 |
EP0494088B1 (en) | 1999-02-24 |
DE3650012D1 (de) | 1994-09-08 |
AU636677B2 (en) | 1993-05-06 |
EP0221523A3 (en) | 1989-07-26 |
EP0494090A2 (en) | 1992-07-08 |
DE3650012T2 (de) | 1994-11-24 |
EP0221523A2 (en) | 1987-05-13 |
CN86106353A (zh) | 1987-12-02 |
US5032884A (en) | 1991-07-16 |
CN1036817C (zh) | 1997-12-24 |
EP0494090A3 (en) | 1992-08-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR870005477A (ko) | 반도체 장치 | |
KR860003675A (ko) | 다접합형 반도체 장치 | |
JPS5772370A (en) | Photoelectric converter | |
US4131486A (en) | Back wall solar cell | |
JPS55162255A (en) | High voltage resistance resistor element | |
ATE195390T1 (de) | Solarzelle | |
KR970060477A (ko) | 반도체 장치 | |
KR910008861A (ko) | 집적회로소자 | |
KR870010640A (ko) | 애벌란치 포토 다이오드 | |
JPS55102268A (en) | Protecting circuit for semiconductor device | |
JPS56125881A (en) | Optical semiconductor element | |
KR890008979A (ko) | 모놀리식 과전압 보호용 어셈블리 | |
JPS6484733A (en) | Semiconductor device | |
KR840005930A (ko) | 반도체 장치(半導體裝置) | |
JPS5670675A (en) | Manufacture of photoelectric converter | |
KR970063777A (ko) | 고농도로 도핑된 반도체 및 그의 제조방법 | |
JPS55157240A (en) | Semiconductor device | |
KR910013587A (ko) | 애벌란취 항복형 접합을 갖는 반도체 장치 | |
KR830002398A (ko) | 반도체장치의 전극구조 | |
JPS57101752A (en) | Gas sensitive semiconductor element | |
JPS5539663A (en) | Semiconductor device | |
EP0391420A3 (en) | Radiation resistant semiconductor structure | |
JPS5513935A (en) | Glass for covering semiconductor | |
JPS56101779A (en) | Schottky barrier diode | |
JPS57113276A (en) | Semiconductor memory device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19861105 |
|
PG1501 | Laying open of application | ||
A201 | Request for examination | ||
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19881124 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19861105 Comment text: Patent Application |
|
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19910919 Patent event code: PE09021S01D |
|
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19920219 Patent event code: PE09021S01D |
|
E601 | Decision to refuse application | ||
PE0601 | Decision on rejection of patent |
Patent event date: 19930107 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 19920219 Comment text: Notification of reason for refusal Patent event code: PE06011S01I Patent event date: 19910919 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |
|
J2X1 | Appeal (before the patent court) |
Free format text: APPEAL AGAINST DECISION TO DECLINE REFUSAL |
|
PJ2001 | Appeal |
Appeal kind category: Appeal against decision to decline refusal Decision date: 19941130 Appeal identifier: 1993201000218 Request date: 19930209 |