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KR20220004545A - X선 분석 장치 - Google Patents

X선 분석 장치 Download PDF

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Publication number
KR20220004545A
KR20220004545A KR1020210055033A KR20210055033A KR20220004545A KR 20220004545 A KR20220004545 A KR 20220004545A KR 1020210055033 A KR1020210055033 A KR 1020210055033A KR 20210055033 A KR20210055033 A KR 20210055033A KR 20220004545 A KR20220004545 A KR 20220004545A
Authority
KR
South Korea
Prior art keywords
ray
sample
spectrum
energy
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020210055033A
Other languages
English (en)
Korean (ko)
Inventor
하루오 다카하시
Original Assignee
가부시키가이샤 히다치 하이테크 사이언스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 히다치 하이테크 사이언스 filed Critical 가부시키가이샤 히다치 하이테크 사이언스
Publication of KR20220004545A publication Critical patent/KR20220004545A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204—Specimen supports therefor; Sample conveying means therefore
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR1020210055033A 2020-07-03 2021-04-28 X선 분석 장치 Pending KR20220004545A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2020-127755 2020-07-03
JP2020127755A JP7562324B2 (ja) 2020-07-03 2020-07-03 Ｘ線分析装置

Publications (1)

Publication Number Publication Date
KR20220004545A true KR20220004545A (ko) 2022-01-11

Family

ID=79010192

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210055033A Pending KR20220004545A (ko) 2020-07-03 2021-04-28 X선 분석 장치

Country Status (4)

Country Link
JP (2) JP7562324B2 (zh)
KR (1) KR20220004545A (zh)
CN (1) CN113884524A (zh)
TW (1) TW202215000A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024042215A (ja) 2022-09-15 2024-03-28 株式会社日立ハイテクサイエンス Ｘ線分析装置およびｘ線分析方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06273147A (ja) 1993-03-19 1994-09-30 Seiko Instr Inc 蛍光ｘ線微小部膜厚計
JPH06273146A (ja) 1993-03-19 1994-09-30 Seiko Instr Inc 帯状の試料の中心を検出する方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61250508A (ja) * 1985-04-30 1986-11-07 Seiko Instr & Electronics Ltd 膜厚測定装置
JPS6457556A (en) * 1987-08-27 1989-03-03 Shimadzu Corp Stage movement controller for electron beam analyzer
JPH10216651A (ja) * 1997-02-13 1998-08-18 Ishikawajima Harima Heavy Ind Co Ltd 金属選別方法とこの方法を用いた金属選別装置
US6266390B1 (en) * 1998-09-21 2001-07-24 Spectramet, Llc High speed materials sorting using x-ray fluorescence
JP3146195B2 (ja) * 1999-01-22 2001-03-12 株式会社堀場製作所 Ｘ線マッピング装置
JP2001099795A (ja) * 1999-09-30 2001-04-13 Shimadzu Corp 元素マッピング装置
JP3888980B2 (ja) * 2003-03-18 2007-03-07 株式会社日立ハイテクノロジーズ 物質同定システム
JP4413887B2 (ja) * 2006-05-29 2010-02-10 株式会社日立ハイテクノロジーズ 物質同定システム
JP4870014B2 (ja) * 2007-04-12 2012-02-08 三菱電機株式会社 再生プラスチック材料選別方法
US20130022167A1 (en) * 2011-07-22 2013-01-24 Creative Electron, Inc. High Speed, Non-Destructive, Reel-to-Reel Chip/Device Inspection System and Method Utilizing Low Power X-rays/X-ray Fluorescence
US8855809B2 (en) * 2011-09-01 2014-10-07 Spectramet, Llc Material sorting technology
JP2016017823A (ja) * 2014-07-08 2016-02-01 株式会社日立ハイテクサイエンス Ｘ線分析用試料板及び蛍光ｘ線分析装置
JP6305280B2 (ja) * 2014-08-28 2018-04-04 株式会社日立ハイテクサイエンス 蛍光ｘ線分析装置及びその試料表示方法
WO2020105566A1 (ja) * 2018-11-19 2020-05-28 キヤノン株式会社 情報処理装置、情報処理装置の制御方法、プログラム、算出装置、及び算出方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06273147A (ja) 1993-03-19 1994-09-30 Seiko Instr Inc 蛍光ｘ線微小部膜厚計
JPH06273146A (ja) 1993-03-19 1994-09-30 Seiko Instr Inc 帯状の試料の中心を検出する方法

Also Published As

Publication number Publication date
JP7562324B2 (ja) 2024-10-07
TW202215000A (zh) 2022-04-16
JP2024174008A (ja) 2024-12-13
CN113884524A (zh) 2022-01-04
JP2022013497A (ja) 2022-01-18

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20210428

PG1501 Laying open of application