KR20180113602A - 경화성 수지 조성물, 그의 경화물 및 반도체 장치 - Google Patents
경화성 수지 조성물, 그의 경화물 및 반도체 장치 Download PDFInfo
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- KR20180113602A KR20180113602A KR1020187027098A KR20187027098A KR20180113602A KR 20180113602 A KR20180113602 A KR 20180113602A KR 1020187027098 A KR1020187027098 A KR 1020187027098A KR 20187027098 A KR20187027098 A KR 20187027098A KR 20180113602 A KR20180113602 A KR 20180113602A
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- 239000011342 resin composition Substances 0.000 title claims abstract description 288
- 239000004065 semiconductor Substances 0.000 title claims description 110
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 87
- 125000003118 aryl group Chemical group 0.000 claims abstract description 76
- 125000003342 alkenyl group Chemical group 0.000 claims abstract description 59
- 239000000203 mixture Substances 0.000 claims abstract description 54
- 239000003054 catalyst Substances 0.000 claims abstract description 40
- 238000006459 hydrosilylation reaction Methods 0.000 claims abstract description 27
- -1 zinc carboxylate Chemical class 0.000 claims description 149
- 125000004432 carbon atom Chemical group C* 0.000 claims description 109
- 230000003287 optical effect Effects 0.000 claims description 51
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 49
- 125000003545 alkoxy group Chemical group 0.000 claims description 41
- 239000011701 zinc Substances 0.000 claims description 41
- 239000003566 sealing material Substances 0.000 claims description 38
- 229910052725 zinc Inorganic materials 0.000 claims description 37
- 150000001875 compounds Chemical class 0.000 claims description 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 31
- 238000007789 sealing Methods 0.000 claims description 30
- 125000001931 aliphatic group Chemical group 0.000 claims description 29
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 28
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 27
- 238000009826 distribution Methods 0.000 claims description 25
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 24
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- 239000003795 chemical substances by application Substances 0.000 claims description 17
- 239000007787 solid Substances 0.000 claims description 17
- 239000004793 Polystyrene Substances 0.000 claims description 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 12
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- 125000002723 alicyclic group Chemical group 0.000 claims description 11
- 125000004209 (C1-C8) alkyl group Chemical group 0.000 claims description 8
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- 125000005915 C6-C14 aryl group Chemical group 0.000 claims description 5
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- 150000003752 zinc compounds Chemical class 0.000 claims description 5
- 230000004888 barrier function Effects 0.000 abstract description 40
- 239000000047 product Substances 0.000 description 128
- 239000007789 gas Substances 0.000 description 89
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 57
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 51
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 42
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- 238000012360 testing method Methods 0.000 description 25
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- 229910052697 platinum Inorganic materials 0.000 description 22
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- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 21
- 238000002834 transmittance Methods 0.000 description 19
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- 125000000923 (C1-C30) alkyl group Chemical group 0.000 description 17
- 125000005843 halogen group Chemical group 0.000 description 17
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 16
- 239000000243 solution Substances 0.000 description 16
- 125000001424 substituent group Chemical group 0.000 description 16
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- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 12
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- 238000006482 condensation reaction Methods 0.000 description 11
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 11
- 125000000623 heterocyclic group Chemical group 0.000 description 11
- 125000002510 isobutoxy group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])O* 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 238000005160 1H NMR spectroscopy Methods 0.000 description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000008393 encapsulating agent Substances 0.000 description 10
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 10
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 10
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- 238000001816 cooling Methods 0.000 description 9
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- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 9
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 8
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 8
- 150000001450 anions Chemical class 0.000 description 8
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 7
- 229910004283 SiO 4 Inorganic materials 0.000 description 7
- 125000006615 aromatic heterocyclic group Chemical group 0.000 description 7
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 7
- 229910052703 rhodium Inorganic materials 0.000 description 7
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 7
- 150000004756 silanes Chemical class 0.000 description 7
- 239000008096 xylene Substances 0.000 description 7
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 6
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 229910052783 alkali metal Inorganic materials 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- 125000001309 chloro group Chemical group Cl* 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 125000003700 epoxy group Chemical group 0.000 description 6
- BITPLIXHRASDQB-UHFFFAOYSA-N ethenyl-[ethenyl(dimethyl)silyl]oxy-dimethylsilane Chemical compound C=C[Si](C)(C)O[Si](C)(C)C=C BITPLIXHRASDQB-UHFFFAOYSA-N 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 229910052740 iodine Inorganic materials 0.000 description 6
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 6
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 6
- CHJMFFKHPHCQIJ-UHFFFAOYSA-L zinc;octanoate Chemical compound [Zn+2].CCCCCCCC([O-])=O.CCCCCCCC([O-])=O CHJMFFKHPHCQIJ-UHFFFAOYSA-L 0.000 description 6
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 5
- 125000001153 fluoro group Chemical group F* 0.000 description 5
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 5
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 5
- 125000001624 naphthyl group Chemical group 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
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- 239000000565 sealant Substances 0.000 description 5
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- BSXVSQHDSNEHCJ-UHFFFAOYSA-N [(dimethyl-$l^{3}-silanyl)oxy-diphenylsilyl]oxy-dimethylsilicon Chemical compound C=1C=CC=CC=1[Si](O[Si](C)C)(O[Si](C)C)C1=CC=CC=C1 BSXVSQHDSNEHCJ-UHFFFAOYSA-N 0.000 description 4
- 150000001340 alkali metals Chemical class 0.000 description 4
- 125000004414 alkyl thio group Chemical group 0.000 description 4
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 4
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- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- ZMKOJNOAFRBHTG-UHFFFAOYSA-N ethenyl(ethenylsilyloxy)silane Chemical compound C=C[SiH2]O[SiH2]C=C ZMKOJNOAFRBHTG-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 4
- 125000004076 pyridyl group Chemical group 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- WSFQLUVWDKCYSW-UHFFFAOYSA-M sodium;2-hydroxy-3-morpholin-4-ylpropane-1-sulfonate Chemical compound [Na+].[O-]S(=O)(=O)CC(O)CN1CCOCC1 WSFQLUVWDKCYSW-UHFFFAOYSA-M 0.000 description 4
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 description 3
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 3
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- DSVRVHYFPPQFTI-UHFFFAOYSA-N bis(ethenyl)-methyl-trimethylsilyloxysilane;platinum Chemical class [Pt].C[Si](C)(C)O[Si](C)(C=C)C=C DSVRVHYFPPQFTI-UHFFFAOYSA-N 0.000 description 3
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- YCWSUKQGVSGXJO-NTUHNPAUSA-N nifuroxazide Chemical group C1=CC(O)=CC=C1C(=O)N\N=C\C1=CC=C([N+]([O-])=O)O1 YCWSUKQGVSGXJO-NTUHNPAUSA-N 0.000 description 3
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- 125000000008 (C1-C10) alkyl group Chemical group 0.000 description 2
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- 125000004973 1-butenyl group Chemical group C(=CCC)* 0.000 description 2
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- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 2
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 2
- 125000006043 5-hexenyl group Chemical group 0.000 description 2
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- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
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- HMDRAGZZZBGZJC-UHFFFAOYSA-N n-[3-[3-aminopropoxy(dimethoxy)silyl]propyl]-1-phenylprop-2-en-1-amine Chemical compound NCCCO[Si](OC)(OC)CCCNC(C=C)C1=CC=CC=C1 HMDRAGZZZBGZJC-UHFFFAOYSA-N 0.000 description 1
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- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
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- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
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Abstract
하기의 (A) 성분, (B) 성분, (C) 성분을 포함하는 경화성 수지 조성물.
(A): 하기 평균 단위식:
[R1은 알킬, 아릴, 알케닐 등이고, R1의 전량에 대한 알킬의 비율이 50 내지 98몰%, 아릴의 비율이 1 내지 50몰%, 알케닐의 비율이 1 내지 35몰%이다. a1>0, a2>0, a3≥0, a4>0, 0.5≤a1/a2≤10, a1+a2+a3+a4=1]로 표현되는 폴리오르가노실록산
(B): 하기 평균 조성식:
[R2는 알킬, 또는 아릴이다. 0.7≤m≤2.1, 0.001≤n≤1.0, 0.8≤m+n≤3]로 표현되는 폴리오르가노실록산
(C): 히드로실릴화 촉매
Description
101 : 금속 배선(전극)
102 : 광반도체 소자
103 : 본딩 와이어
104 : 경화물(밀봉재)
Claims (19)
- 하기의 (A) 성분, (B) 성분 및 (C) 성분을 포함하는 것을 특징으로 하는 경화성 수지 조성물.
(A): 하기 평균 단위식 (I):
[식 중, R1은 동일하거나 또는 상이하고, 탄소수 1 내지 10의 알킬기, 탄소수 6 내지 14의 아릴기, 탄소수 2 내지 8의 알케닐기, 탄소수 1 내지 10의 알콕시기, 또는 수산기이고, R1의 전량(100몰%)에 대한 알킬기의 비율을 X몰%, 아릴기의 비율을 Y몰%, 알케닐기의 비율을 Z몰%라고 했을 때, X는 50 내지 98몰%, Y는 1 내지 50몰%, Z는 1 내지 35몰%이다. a1, a2, a3 및 a4는 a1>0, a2>0, a3≥0, a4>0, 0.5≤a1/a2≤10 및 a1+a2+a3+a4=1을 만족시키는 수이다.]
로 표현되는 폴리오르가노실록산
(B): 하기 평균 조성식 (II):
[식 중, R2는 동일하거나 또는 상이하고, 탄소수 1 내지 10의 알킬기, 또는 탄소수 6 내지 14의 아릴기이고, R2의 적어도 하나는 아릴기이다. 규소 원자에 결합한 수소 원자를 적어도 2개 갖는다. m 및 n은 0.7≤m≤2.1, 0.001≤n≤1 및 0.8≤m+n≤3을 만족시키는 수이다.]
로 표현되는 폴리오르가노실록산
(C): 히드로실릴화 촉매 - 제1항에 있어서, (A) 성분이,
중량 평균 분자량이 폴리스티렌 환산으로 500 이상 50000 이하이고,
분자량 분포가 1 이상 4 이하이고,
25℃에서의 점도가 10mPa·s 이상의 액체 혹은 고체인
폴리오르가노실록산인, 경화성 수지 조성물. - 제1항 또는 제2항에 있어서, 성분 (A)에 있어서, X와 Y의 비율(X/Y)이 0.5 내지 25인, 경화성 수지 조성물.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 하기의 (D) 성분을 더 포함하는, 경화성 수지 조성물.
(D): 분자 내에 1개 이상의 지방족 탄소-탄소 불포화 결합을 포함하는 기를 갖는 폴리오르가노실록시실알킬렌 - 제1항 내지 제4항 중 어느 한 항에 있어서, 하기의 (E) 성분을 더 포함하는, 경화성 수지 조성물.
(E): 카르복실산아연 및 아연β디케톤 착체로 이루어지는 군에서 선택되는 적어도 1종의 아연 화합물 - 제5항에 있어서, 상기 (E) 성분의 함유량이, 경화성 수지 조성물의 전량(100중량%)에 대하여, 0.01 내지 1중량%인, 경화성 수지 조성물.
- 제1항 내지 제6항 중 어느 한 항에 있어서, (B) 성분이, (R2' 2HSiO1 / 2)로 표현되는 구성 단위(R2'은 동일하거나 또는 상이하고, 탄소수 1 내지 10의 알킬기, 또는 탄소수 6 내지 14의 아릴기임)를 적어도 2개 갖는, 경화성 수지 조성물.
- 제1항 내지 제8항 중 어느 한 항에 있어서, 하기 식 (2)
[식 (2) 중, Rf, Rg 및 Rh는 동일하거나 또는 상이하고, 식 (2a)로 표현되는 기, 또는 식 (2b)로 표현되는 기를 나타낸다. 단, Rf, Rg 및 Rh 중 적어도 1개는 식 (2b)로 표현되는 기이다.
[식 (2a) 중, Ri는 수소 원자, 또는 직쇄 혹은 분지쇄상의 C1- 8알킬기를 나타낸다]
[식 (2b) 중, Rj는 수소 원자, 또는 직쇄 혹은 분지쇄상의 C1- 8알킬기를 나타낸다]]
로 표현되는 이소시아누레이트 화합물 (F)를 더 포함하는, 경화성 수지 조성물. - 제1항 내지 제9항 중 어느 한 항에 있어서, 실란 커플링제 (G)를 더 포함하는, 경화성 수지 조성물.
- 제1항 내지 제10항 중 어느 한 항에 기재된 경화성 수지 조성물의 경화물.
- 제11항에 있어서, 589㎚에 있어서의 굴절률이 1.46 이상 1.54 이하인 것을 특징으로 하는, 경화물.
- 제1항 내지 제10항 중 어느 한 항에 있어서, 밀봉제인, 경화성 수지 조성물.
- 제1항 내지 제10항 중 어느 한 항에 있어서, 렌즈 형성용 수지 조성물인, 경화성 수지 조성물.
- 반도체 소자와, 해당 반도체 소자를 밀봉하는 밀봉재를 갖는 반도체 장치로서, 상기 밀봉재가, 제13항에 기재된 경화성 수지 조성물의 경화물인 것을 특징으로 하는 반도체 장치.
- 반도체 소자와 렌즈를 갖는 반도체 장치로서, 상기 렌즈가, 제14항에 기재된 경화성 수지 조성물의 경화물인 것을 특징으로 하는 반도체 장치.
- 반도체 소자와, 해당 반도체 소자를 밀봉하는 밀봉재와, 렌즈를 갖는 반도체 장치로서, 상기 밀봉재가, 제13항에 기재된 경화성 수지 조성물의 경화물이고, 상기 렌즈가, 제14항에 기재된 경화성 수지 조성물의 경화물인 것을 특징으로 하는 반도체 장치.
- 제15항 내지 제17항 중 어느 한 항에 있어서, 경화물의 589㎚에 있어서의 굴절률이 1.46 이상 1.54 이하인, 반도체 장치.
- 제15항 내지 제18항 중 어느 한 항에 있어서, 광반도체 장치인 반도체 장치.
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