KR20180064285A - 분석 모듈 및 이의 제조 방법 - Google Patents
분석 모듈 및 이의 제조 방법 Download PDFInfo
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Abstract
Description
도 2는 도 1에 도시된 마이크로-웰의 종단면도이다.
도 3은 본 발명의 일실시예에 따른 분석 모듈의 제조 방법을 설명하기 위한 흐름도이다.
도 4a 내지 도 4i는 본 발명의 일실시예에 따른 분석 모듈의 제조 방법을 설명하기 위한 단면도들이다.
112 : 마이크로-웰 120 : 분석 시약
130 : 온도감응성 하이드로젤 202 : 실리콘 웨이퍼
204, 206 : 보호막 208 : 포토레지스트
210 : 패턴마스크 210 : 제1 공정 챔버
220 : 제2 공정 챔버
Claims (9)
- 형성된 복수의 마이크로-웰들을 포함하는 멀티-웰 플레이트;
상기 마이크로-웰들 각각에 수용된 분석 시약; 및
상온에서 고체상태를 유지하고, 상기 상온보다 낮은 저온과 상기 상온보다 높은 고온에서 액체상태를 유지하는 특성을 갖고서, 상기 분석 시약을 커버하도록 상기 마이크로-웰들 각각에 낙하된 온도감응성 하이드로젤을 포함하는 것을 특징으로 하는 분석 모듈. - 제1항에 있어서, 상기 분석 시약은 액상 시약인 것을 특징으로 하는 분석 모듈.
- 제1항에 있어서, 상기 온도감응성 하이드로젤은 폴리에틸렌글리콜-폴리프로필렌글리콜-폴리에틸렌글리콜(PEG-PPG-PEG) 블록공중합체를 포함하는 것을 특징으로 하는 분석 모듈.
- 제1항에 있어서, 상기 온도감응성 하이드로젤은 플루노닉(pluronic) F127 제품을 포함하는 것을 특징으로 하는 분석 모듈.
- 제1항에 있어서, 상기 온도감응성 하이드로젤은 대략 섭씨 40도 이하에서 고체 상태를 유지하고 대략 섭씨 40도 이상에서 액체 상태를 유지하는 물질을 포함하는 것을 특징으로 하는 분석 모듈.
- 반도체 제작공정으로 멀티-웰 플레이트를 제작하는 단계;
상기 멀티-웰 플레이트에 형성된 마이크로-웰들 각각에 반응 시약을 드롭하는 단계;
상온에서 고체상태를 유지하고, 상기 상온보다 낮은 저온과 상기 상온보다 높은 고온에서 액체상태를 유지하는 특성을 갖는 온도감응성 하이드로젤을 상기 마이크로-웰들 각각에 분주하는 단계;
상기 마이크로-웰들 각각에 반응 시약 및 온도감응성 하이드로젤이 순차적으로 드롭된 멀티-웰 플레이트를 상온의 공정 온도를 갖는 공정 챔버에 투입하는 단계; 및
상온에서 고체화된 온도감응성 하이드로젤을 포함하는 분석 모듈을 공정라인에서 반출 및 적재하는 단계를 포함하는 것을 특징으로 하는 분석 모듈의 제조 방법. - 제6항에 있어서, 상기 온도감응성 하이드로젤은 폴리에틸렌글리콜-폴리프로필렌글리콜-폴리에틸렌글리콜(PEG-PPG-PEG) 블록공중합체를 포함하는 것을 특징으로 하는 분석 모듈의 제조 방법.
- 제6항에 있어서, 상기 온도감응성 하이드로젤은 플루노닉(pluronic) F127 제품을 포함하는 것을 특징으로 하는 분석 모듈의 제조 방법.
- 제6항에 있어서, 상기 온도감응성 하이드로젤은 대략 섭씨 40도 이하에서 고체 상태를 유지하고 대략 섭씨 40도 이상에서 액체 상태를 유지하는 물질을 포함하는 것을 특징으로 하는 분석 모듈의 제조 방법.
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CN113307223A (zh) * | 2021-04-20 | 2021-08-27 | 杭州欧光芯科技有限公司 | 一种纳米孔局部亲疏水性修饰的方法 |
CN112285078B (zh) * | 2020-10-14 | 2023-04-25 | 安庆师范大学 | 一种基于智能dna水凝胶的汞离子现场检测新方法 |
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KR20230127521A (ko) * | 2022-02-25 | 2023-09-01 | 한국과학기술연구원 | 블록 공중합체 기반의 3차원 다형성 인공 이중막 멤브레인 구조물 제조 방법 |
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CN113307223A (zh) * | 2021-04-20 | 2021-08-27 | 杭州欧光芯科技有限公司 | 一种纳米孔局部亲疏水性修饰的方法 |
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