KR20080030839A - 표면 개질된 폴리이미드 필름, 그 제조방법 및 이를 이용한동박 폴리이미드 적층체 - Google Patents
표면 개질된 폴리이미드 필름, 그 제조방법 및 이를 이용한동박 폴리이미드 적층체 Download PDFInfo
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- KR20080030839A KR20080030839A KR1020060097283A KR20060097283A KR20080030839A KR 20080030839 A KR20080030839 A KR 20080030839A KR 1020060097283 A KR1020060097283 A KR 1020060097283A KR 20060097283 A KR20060097283 A KR 20060097283A KR 20080030839 A KR20080030839 A KR 20080030839A
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- Prior art keywords
- polyimide film
- plasma
- film
- modified
- copper foil
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
- C08J7/123—Treatment by wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
- C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/16—Applications used for films
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
항목 | 조건 |
Scan Mode | Non-contact mode |
Scan rate | 1Hz |
SetP | variable |
Gain | 1 |
LP filter | 3.1 |
Cantilever | UL20D(Ultralever) |
Flattening | 2nd order H&V-direction |
플라즈마 처리 상수 | 분위기 가스 | 전극과 간격 | 평균표면조도 (nm) | |
실시예 1 | 5 | Air | 1 mm | 1.25 |
실시예 2 | 50 | Air | 1 mm | 4.87 |
실시예 3 | 0.3 | Air | 1 mm | 0.98 |
실시예 4 | 24 | Air | 1 mm | 2.48 |
실시예 5 | 300 | Ar 98%, O2 2% | 1 mm | 20.75 |
비교예 1 | 0.1 | Air | 1 mm | 0.21 |
비교예 2 | 5 | 질소 | 1 mm | 0.39 |
비교예 3 | 0.1 | Ar 98%, O2 2% | 1 mm | 0.19 |
비교예 4 | 5 | Air | 15 mm | 0.29 |
비교예 5 | 400 | Air | 1 mm | 34.72 |
비교예 6 | 5kW (corona) | Air | 5 mm | 0.35 |
비교예 7 | - | - | - | 0.17 |
평균표면조도(nm) | 박리 강도(kgf/mm) | |
실시예 1 | 1.25 | 1.65 |
실시예 2 | 4.87 | 1.87 |
실시예 3 | 0.98 | 1.47 |
실시예 4 | 2.48 | 1.98 |
실시예 5 | 20.75 | 2.03 |
비교예 1 | 0.21 | 0.87 |
비교예 2 | 0.39 | 0.84 |
비교예 3 | 0.19 | 0.77 |
비교예 4 | 0.29 | 0.59 |
비교예 5 | 34.72 | 0.41 |
비교예 6 | 0.35 | 0.60 |
비교예 7 | 0.17 | 0.32 |
Claims (5)
- 플라즈마를 이용하여 표면 개질된 폴리이미드 필름에 있어서,필름의 임의의 위치에서 선택된 1㎛ × 1㎛ 면적에 대해 Atomic Force Microscope을 이용하여 측정된 평균 표면조도값이 0.5~30㎚ 것임을 특징으로 하는 표면 개질된 폴리이미드 필름.
- 디아민과 디안하이드라이드를 공중합하여 폴리이미드 필름을 제조하고, 필름의 임의의 위치에서 선택된 1㎛ × 1㎛ 면적에 대해 Atomic Force Microscope을 이용하여 측정된 평균 표면조도값이 0.5~30㎚ 되도록 표면을 플라즈마 처리하는 표면 개질된 폴리이미드 필름 제조방법.
- 제 2 항에 있어서,하기의 수식으로 표현되는 플라즈마 처리 상수가 0.3~300임을 특징으로 하는 표면 개질된 폴리이미드 필름 제조방법.플라즈마 처리 상수 = 플라즈마 세기(kW) × 플라즈마 처리 속도(m/min)
- 동박의 적어도 일면에, 제 1 항의 플라즈마 처리로 표면 개질된 폴리이미드 필름을 포함하는 동박 폴리이미드 적층체.
- 동박의 적어도 일면에, 제 2 항의 제조방법에 의하여 얻어진 폴리이미드 필름을 포함하는 동박 폴리이미드 적층체.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060097283A KR100845329B1 (ko) | 2006-10-02 | 2006-10-02 | 표면 개질된 폴리이미드 필름, 그 제조방법 및 이를 이용한동박 폴리이미드 적층체 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060097283A KR100845329B1 (ko) | 2006-10-02 | 2006-10-02 | 표면 개질된 폴리이미드 필름, 그 제조방법 및 이를 이용한동박 폴리이미드 적층체 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080030839A true KR20080030839A (ko) | 2008-04-07 |
KR100845329B1 KR100845329B1 (ko) | 2008-07-10 |
Family
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KR1020060097283A Active KR100845329B1 (ko) | 2006-10-02 | 2006-10-02 | 표면 개질된 폴리이미드 필름, 그 제조방법 및 이를 이용한동박 폴리이미드 적층체 |
Country Status (1)
Country | Link |
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KR (1) | KR100845329B1 (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI468292B (zh) * | 2008-12-19 | 2015-01-11 | Toyo Boseki | 積層體及其製法、積層體電路板 |
CN106105402A (zh) * | 2015-02-05 | 2016-11-09 | 朴畅济 | 利用大气压等离子体的一次性烤盘的表面处理方法和其表面处理装置以及通过其表面处理方法而制造的一次性烤盘 |
CN107602899A (zh) * | 2017-09-21 | 2018-01-19 | 珠海市创元电子材料有限公司 | 一种聚酰亚胺膜、其制造方法及应用 |
CN115056565A (zh) * | 2022-06-13 | 2022-09-16 | 深圳市志凌伟业技术股份有限公司 | 一种采用常压等离子体技术降低压膜时产生气泡的方法 |
KR102575657B1 (ko) * | 2022-10-26 | 2023-09-07 | 주식회사 옥스 | 고분자 필름 기판상에 표면처리 및 금속패턴 형성방법 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4350263B2 (ja) * | 2000-04-03 | 2009-10-21 | 三菱伸銅株式会社 | 金属化ポリイミドフィルムおよびその製造方法 |
JP3994696B2 (ja) | 2000-10-02 | 2007-10-24 | 宇部興産株式会社 | 線膨張係数を制御したポリイミドフィルム及び積層体 |
US6838184B2 (en) * | 2002-03-22 | 2005-01-04 | Ube Industries, Ltd. | Aromatic polyimide film for electro-conductive sealing element of packaged semi-conductor device |
KR100601308B1 (ko) * | 2004-09-06 | 2006-07-13 | 한국화학연구원 | 상압플라즈마를 이용한 폴리이미드 필름의 표면처리방법 |
KR20060051831A (ko) * | 2004-09-29 | 2006-05-19 | 우베 고산 가부시키가이샤 | 폴리이미드 필름 및 폴리이미드 복합 시트 |
-
2006
- 2006-10-02 KR KR1020060097283A patent/KR100845329B1/ko active Active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI468292B (zh) * | 2008-12-19 | 2015-01-11 | Toyo Boseki | 積層體及其製法、積層體電路板 |
CN106105402A (zh) * | 2015-02-05 | 2016-11-09 | 朴畅济 | 利用大气压等离子体的一次性烤盘的表面处理方法和其表面处理装置以及通过其表面处理方法而制造的一次性烤盘 |
CN107602899A (zh) * | 2017-09-21 | 2018-01-19 | 珠海市创元电子材料有限公司 | 一种聚酰亚胺膜、其制造方法及应用 |
CN115056565A (zh) * | 2022-06-13 | 2022-09-16 | 深圳市志凌伟业技术股份有限公司 | 一种采用常压等离子体技术降低压膜时产生气泡的方法 |
KR102575657B1 (ko) * | 2022-10-26 | 2023-09-07 | 주식회사 옥스 | 고분자 필름 기판상에 표면처리 및 금속패턴 형성방법 |
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