KR20060095706A - Atmospheric Plasma Surface Treatment System - Google Patents

Abstract

Atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention, the housing is provided with a gas injection port for injecting the gas to be the material of plasma generation and the plasma injection port for injection of the generated plasma; First and second ground electrodes provided on surfaces corresponding to each other inside the housing; A high voltage electrode disposed in the center of the housing and positioned between the first and second ground electrodes; And a plasma generator formed in a region between the first and second ground electrodes and the high voltage electrode, wherein the first and second ground electrodes and the high voltage electrode are surrounded by a dielectric material.

According to the present invention, the plasma surface treatment of the object to be treated is configured to be processed outside the region between the electrodes where the plasma is generated, i.e., outside the electric field, and the module for injecting the generated plasma is formed in a capillary manner. In addition, the problem of arcing or streamer generation is overcome, and the surface of the workpiece can be treated by a glow discharge, and the shape and size constraints of the workpiece can be overcome.

Description

Apparatus for surface treatment atmospheric plasma

1 is a schematic cross-sectional view of a conventional atmospheric plasma surface treatment apparatus.

2 is a schematic cross-sectional view of an atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention.

3 is a schematic cross-sectional view of an atmospheric plasma surface treatment apparatus according to another embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

200 housing 202 gas inlet

204: plasma injection port 210: first ground electrode

212: second ground electrode 220: high voltage electrode

230: dielectric 240: plasma generating unit

The present invention relates to a plasma surface treatment apparatus, and more particularly, to an atmospheric pressure plasma surface treatment apparatus.

In the conventional surface treatment apparatus using plasma, a process of surface treatment of a target object by generating plasma in a vacuum state rather than atmospheric pressure is used. Such a vacuum plasma surface treatment apparatus is capable of creating a vacuum state rather than an open system. The equipment and the vacuum chamber is required separately, so the price is very high, and also, there is a problem that the size and shape are largely limited because the workpiece is processed in the vacuum chamber.

In order to overcome the shortcomings of the vacuum plasma generator, U.S. Pat. As a device for this, the study was conducted on the gas composition and the discharge according to the distance between electrodes when the power was changed at 1 ~ 5kV, 1 ~ 100kHz.

However, these methods cannot control abnormal discharge phenomena such as arcs or streamers, are limited in the gas used, and surface treatment of the workpiece is performed between the high voltage electrode and the ground electrode which are positioned opposite each other. Because of the process, there is a problem that the surface treatment of the workpiece having a complicated shape and size is difficult.

1 is a schematic cross-sectional view of a conventional atmospheric plasma surface treatment apparatus.

Referring to FIG. 1, a conventional atmospheric plasma surface treatment apparatus is disposed such that a metal high voltage electrode 10 and a ground electrode 12 face each other.

In addition, the surfaces of the high voltage electrode 10 and the ground electrode 12 facing each other are formed with a dielectric plate 14, and the dielectric plate 14 formed on the high voltage electrode 10 and the ground electrode 12, respectively. It is designed so that the surface treatment of the to-be-processed object (not shown) may progress in between 16.

That is, the conventional atmospheric pressure plasma surface treatment apparatus has an opposing structure, and plasma is generated between the electrodes provided above and below, and surface treatment of the target object is performed in the region, that is, the electric field.

However, since the workpiece is moved in the electric field, arcing is generated due to the characteristics of the atmospheric pressure plasma, and thus there is a high risk of burning, and the narrower the gap between the upper and lower electrodes, the higher the efficiency, and thus the thickness of the workpiece is increased. The disadvantage is that it is limited. In addition, it can be seen that a lot of restrictions on the shape and size of the workpiece.

The present invention is configured to treat the plasma surface treatment of an object to be treated in a region between electrodes where plasma is generated, i.e., outside the electric field, and by arranging a module for injecting the generated plasma in a capillary manner, thereby arcing. It is possible to treat the surface of the workpiece by glow discharge to overcome the problem of generating) or streamer, and to provide the atmospheric pressure plasma surface treatment apparatus to overcome the shape and size constraints of the workpiece. There is a purpose.

In order to achieve the above object, an atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention, the housing is provided with a gas injection port for injecting a gas to be a material for plasma generation and a plasma injection port for injecting the generated plasma; First and second ground electrodes provided on surfaces corresponding to each other inside the housing; A high voltage electrode disposed in the center of the housing and positioned between the first and second ground electrodes; And a plasma generator formed in a region between the first and second ground electrodes and the high voltage electrode, wherein the first and second ground electrodes and the high voltage electrode are surrounded by a dielectric material.

Here, the dielectric is made of quartz or ceramic, the plasma generated through the plasma generator is discharged through the plasma injection port, and the target object is surface treated outside the plasma injection port, The module constituting the plasma injection port is characterized in that configured in a capillary (capillary) method.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic cross-sectional view of an atmospheric plasma surface treatment apparatus according to an embodiment of the present invention.

Referring to FIG. 2, the apparatus for treating atmospheric pressure plasma surface according to the embodiment of the present invention includes a gas injection hole 202 into which gas, which is a material for plasma generation, and a plasma injection hole 204 into which the generated plasma is injected, respectively. A housing 200 provided; First and second ground electrodes 210 and 212 respectively provided on surfaces corresponding to each other inside the housing; A high voltage electrode 220 disposed in the center of the housing 200 and positioned between the first and second ground electrodes; And a plasma generator 240 formed in an area between the first and second ground electrodes and the high voltage electrode, wherein the first and second ground electrodes and the high voltage electrode are surrounded by a dielectric material 230. It is characterized by. Here, the dielectric 230 is preferably made of quartz or ceramic.

In the case of the present invention, the surface treatment of the workpiece (not shown) is not performed in the electric field in which the plasma is generated, that is, the plasma generator 230 as in the conventional case.

That is, the plasma generated by the plasma generator 230 is discharged through the plasma injection hole 204, and the object to be treated is surface treated outside the plasma injection hole.

Accordingly, it is possible to overcome the burning phenomenon caused by arcing that occurs in the conventional case.

In addition, the module constituting the plasma injection hole (204) (not shown) is configured in a capillary (capillary) method, it is possible to inject a plasma longer by the pressure difference, and thus to the movement of the workpiece This frees up and down movement and enables surface treatment regardless of the thickness of the workpiece.

As a result, according to the present invention, a pair of ground electrodes is formed, and a high voltage electrode 220 is formed between the pair of ground electrodes 210 and 212, and a predetermined power is applied to the high voltage electrode to provide a region between the electrodes. Plasma is generated, the generated plasma is discharged to the outside through the plasma injection port 204, characterized in that to perform the surface treatment of the workpiece from the outside of the electric field through the discharged plasma.

3 is a schematic cross-sectional view of an atmospheric pressure plasma surface treatment apparatus according to another embodiment of the present invention.

However, the same reference numerals are used for the same components, and description thereof will be omitted.

Referring to FIG. 3, the overall configuration is the same as that of the embodiment shown in FIG. 2, except that the inner surface of the housing 200 is formed in a cylindrical shape, and the spacing of the plasma injection holes 204 is very small, a few mm. .

Due to the cylindrical head configuration, the electric field, that is, the path of the plasma generator 230 is lengthened, thereby preventing arcing of the workpiece.

That is, in the case of the embodiment shown in FIG. 3, as a result, a pair of ground electrodes is formed, and a high voltage electrode 220 is formed between the pair of ground electrodes 210 and 212, so that the high voltage electrode 220 is formed. A predetermined power is applied to the plasma to generate plasma in the region between the electrodes, and the generated plasma is discharged to the outside through the plasma injection port 204, and the surface treatment of the object is not performed outside the electric field through the discharged plasma. It is characterized by performing.

According to the present invention, the plasma surface treatment of the object to be treated is configured to be processed outside the region between the electrodes where the plasma is generated, i.e., outside the electric field, and the module for injecting the generated plasma is formed in a capillary manner. In addition, the problem of arcing or streamer generation is overcome, and the surface of the workpiece can be treated by a glow discharge, and the shape and size constraints of the workpiece can be overcome.

Accordingly, the plasma surface treatment can be safely performed even on the metal surface or the patterned workpiece, and it can be applied to a large area or an in-line method.

Claims (4)

A housing each provided with a gas injection hole into which a gas serving as a material for plasma generation is injected and a plasma injection hole through which the generated plasma is injected; First and second ground electrodes provided on surfaces corresponding to each other inside the housing; A high voltage electrode disposed in the center of the housing and positioned between the first and second ground electrodes; A plasma generator formed in a region between the first and second ground electrodes and the high voltage electrode, And the first and second ground electrodes and the high voltage electrode are surrounded by a dielectric. The method of claim 1, Atmospheric pressure plasma surface treatment apparatus characterized in that the dielectric is a load made of quartz or ceramic (ceramic). The method of claim 1, The plasma generated by the plasma generating unit is discharged through the plasma injection port, the target object is characterized in that the surface treatment is carried out outside the plasma injection port. The method of claim 1, Atmospheric pressure plasma surface treatment apparatus characterized in that the module constituting the plasma injection port is configured in a capillary (capillary) method.

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