KR20030055778A - 평판표시장치의 칩 본딩장치 및 이를 이용한 본딩방법 - Google Patents
평판표시장치의 칩 본딩장치 및 이를 이용한 본딩방법 Download PDFInfo
- Publication number
- KR20030055778A KR20030055778A KR1020010085856A KR20010085856A KR20030055778A KR 20030055778 A KR20030055778 A KR 20030055778A KR 1020010085856 A KR1020010085856 A KR 1020010085856A KR 20010085856 A KR20010085856 A KR 20010085856A KR 20030055778 A KR20030055778 A KR 20030055778A
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- KR
- South Korea
- Prior art keywords
- bonding
- chip
- glass
- unit
- bonded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000034 method Methods 0.000 title claims description 54
- 239000011521 glass Substances 0.000 claims abstract description 98
- 238000011068 loading method Methods 0.000 claims abstract description 34
- 238000004140 cleaning Methods 0.000 claims abstract description 25
- 238000012546 transfer Methods 0.000 claims description 42
- 230000008569 process Effects 0.000 claims description 39
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 10
- 238000003825 pressing Methods 0.000 claims description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 5
- 239000001569 carbon dioxide Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 4
- 230000007547 defect Effects 0.000 abstract description 3
- 238000012937 correction Methods 0.000 description 15
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/58—Arrangements comprising a monitoring photodetector
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (7)
- 작업대와, 이 작업대의 상측에 설치되고 로딩된 글래스를 원주방향으로 이동시키는 회전수단과, 이 수단의 원주방향에 설치되는 로딩부, 클리닝부, 칩셋팅부, 본딩부, 언로딩부를 포함하며, 상기 본딩부는 2개 이상의 본딩유니트로 구성되는 평판표시장치의 칩 본딩장치.
- 청구항 1에 있어서, 상기한 본딩유니트는, 상기 작업대의 상판에 설치되는 고정플레이트와, 이 고정플레이트의 폭방향으로 설치된 슬라이드부재에 결합되어 좌,우측 방향으로 이송되는 횡플레이트와, 이 횡플레이트의 길이방향으로 설치된 슬라이드부재와 결합되어 상,하측 방향으로 이송되는 종플레이트와, 상기 종플레이트의 일측에 결합되어 이 플레이트와 동일한 방향으로 이동하면서 칩을 본딩하고 내부 일측에는 히터가 삽입된 본딩헤드를 포함하며, 상기 본딩헤드와 종플레이트 사이에는 압력감지부재가 설치된 평판표시장치의 칩 본딩장치.
- 청구항 2에 있어서, 상기한 압력감지부재는 로드셀(LOAD CELL)인 것을 특징으로 하는 평판표시장치의 칩 본딩장치.
- 청구항 1에 있어서, 상기한 회전수단은 구동원에 의해 자체 회전하는 인덱싱 드라이브 테이블(INDEXING DRIVE TABLE)로 이루어지며, 이 수단은 회전테이블에 로딩된 글래스를 자체 회전하면서 크리닝부, 칩셋팅부, 본딩부, 언로딩부로 이동시키고, 상기 작업대의 보조프레임에서 이송부에 의해 슬라이드 되면서 칩셋팅시에 로딩된 글래스를 피접착면의 길이방향으로 위치를 변화시키는 평판표시장치의 칩 본딩장치.
- 청구항 1에 있어서, 상기 크리닝부는 모터의 구동에 의해 일방향으로 이동하는 이송유니트의 슬라이드부재에 분사노즐이 설치되고, 이 분사노즐은 글래스나 필름의 피접착면에 이산화탄소를 분사하는 평판표시장치의 칩 본딩장치.
- 글래스나 필름을 로딩하는 로딩공정과, 로딩된 글래스나 필름의 피접착면에 부착된 이물질을 제거하기 위한 크리닝공정과, 크리닝된 글래스나 필름의 피접착면에 칩을 셋팅하는 칩셋팅공정과, 셋팅된 칩의 상측면을 가압하여 본딩하는 2개 이상의 본딩공정과, 칩이 본딩된 글래스를 언로딩하는 언로딩공정을 포함하며, 상기 칩셋팅공정은 로딩된 글래스나 필름의 피접착면에 칩이 정확하게 셋팅될 수 있도록 정렬공정을 행한 후 칩을 셋팅하고, 상기 본딩공정은 2개 이상의 본딩유니트에 의해 정해진 본딩시간을 분할하여 비연속적으로 본딩하는 것을 특징으로 하는 평판표시장치의 칩 본딩방법.
- 청구항 6에 있어서, 상기 정렬공정은 칩의 셋팅시에 감지카메라가 글래스나 필름의 피접착면과 칩의 위치편차를 각각 모니터링하여 이를 회전수단의 이송부와칩셋팅부의 이송유니트에 의해 위치편차를 보정하는 평판표시장치의 칩 본딩방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010085856A KR20030055778A (ko) | 2001-12-27 | 2001-12-27 | 평판표시장치의 칩 본딩장치 및 이를 이용한 본딩방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010085856A KR20030055778A (ko) | 2001-12-27 | 2001-12-27 | 평판표시장치의 칩 본딩장치 및 이를 이용한 본딩방법 |
Publications (1)
Publication Number | Publication Date |
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KR20030055778A true KR20030055778A (ko) | 2003-07-04 |
Family
ID=32214029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020010085856A Ceased KR20030055778A (ko) | 2001-12-27 | 2001-12-27 | 평판표시장치의 칩 본딩장치 및 이를 이용한 본딩방법 |
Country Status (1)
Country | Link |
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KR (1) | KR20030055778A (ko) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030080876A (ko) * | 2002-04-11 | 2003-10-17 | 한동희 | 평판디스플레이장치의 회로기판 본딩장치 및 방법 |
KR20030084293A (ko) * | 2002-04-26 | 2003-11-01 | 한동희 | 평판디스플레이용 회로기판 칩본딩기의 로딩장치 |
KR20040006224A (ko) * | 2002-07-11 | 2004-01-24 | 한동희 | 평판디스플레이의 이방전도성필름 및 구동칩 본딩장치 |
KR20040015945A (ko) * | 2002-08-14 | 2004-02-21 | 한동희 | 평판디스플레이의 회로기판 및 이방전도성필름 본딩장치 |
KR20040019506A (ko) * | 2002-08-28 | 2004-03-06 | 한동희 | 평판디스플레이의 회로기판 및 이방전도성필름 본딩장치 |
KR100719689B1 (ko) * | 2005-07-28 | 2007-05-17 | 삼성에스디아이 주식회사 | 평판 표시장치 제조용 엔드 이펙터 |
KR101141376B1 (ko) * | 2010-02-23 | 2012-05-03 | 주식회사 아이. 피. 에스시스템 | 기판 촬상유닛 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0675199A (ja) * | 1992-06-25 | 1994-03-18 | Toshiba Corp | 液晶パネル製造装置、位置決め装置および加工装置 |
JPH08114812A (ja) * | 1994-10-17 | 1996-05-07 | Toshiba Corp | 液晶パネル製造装置 |
JPH1062804A (ja) * | 1996-06-14 | 1998-03-06 | Matsushita Electric Ind Co Ltd | 液晶実装方法及び装置 |
JPH1192716A (ja) * | 1997-09-19 | 1999-04-06 | Nippon Avionics Co Ltd | 貼着物の貼着装置 |
JPH11191576A (ja) * | 1997-12-25 | 1999-07-13 | Seiko Epson Corp | 電子部品の実装方法および装置 |
-
2001
- 2001-12-27 KR KR1020010085856A patent/KR20030055778A/ko not_active Ceased
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0675199A (ja) * | 1992-06-25 | 1994-03-18 | Toshiba Corp | 液晶パネル製造装置、位置決め装置および加工装置 |
JPH08114812A (ja) * | 1994-10-17 | 1996-05-07 | Toshiba Corp | 液晶パネル製造装置 |
JPH1062804A (ja) * | 1996-06-14 | 1998-03-06 | Matsushita Electric Ind Co Ltd | 液晶実装方法及び装置 |
JPH1192716A (ja) * | 1997-09-19 | 1999-04-06 | Nippon Avionics Co Ltd | 貼着物の貼着装置 |
JPH11191576A (ja) * | 1997-12-25 | 1999-07-13 | Seiko Epson Corp | 電子部品の実装方法および装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030080876A (ko) * | 2002-04-11 | 2003-10-17 | 한동희 | 평판디스플레이장치의 회로기판 본딩장치 및 방법 |
KR20030084293A (ko) * | 2002-04-26 | 2003-11-01 | 한동희 | 평판디스플레이용 회로기판 칩본딩기의 로딩장치 |
KR20040006224A (ko) * | 2002-07-11 | 2004-01-24 | 한동희 | 평판디스플레이의 이방전도성필름 및 구동칩 본딩장치 |
KR20040015945A (ko) * | 2002-08-14 | 2004-02-21 | 한동희 | 평판디스플레이의 회로기판 및 이방전도성필름 본딩장치 |
KR20040019506A (ko) * | 2002-08-28 | 2004-03-06 | 한동희 | 평판디스플레이의 회로기판 및 이방전도성필름 본딩장치 |
KR100719689B1 (ko) * | 2005-07-28 | 2007-05-17 | 삼성에스디아이 주식회사 | 평판 표시장치 제조용 엔드 이펙터 |
KR101141376B1 (ko) * | 2010-02-23 | 2012-05-03 | 주식회사 아이. 피. 에스시스템 | 기판 촬상유닛 |
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