KR102767271B1 - Photosensitive resin composition, photosensitive resin layer using the same, color filter comprising the photosensitive resin layer, cmos image sensor, display device and camera - Google Patents
Photosensitive resin composition, photosensitive resin layer using the same, color filter comprising the photosensitive resin layer, cmos image sensor, display device and camera Download PDFInfo
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- KR102767271B1 KR102767271B1 KR1020210170125A KR20210170125A KR102767271B1 KR 102767271 B1 KR102767271 B1 KR 102767271B1 KR 1020210170125 A KR1020210170125 A KR 1020210170125A KR 20210170125 A KR20210170125 A KR 20210170125A KR 102767271 B1 KR102767271 B1 KR 102767271B1
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- South Korea
- Prior art keywords
- photosensitive resin
- resin composition
- photopolymerization initiator
- chemical formula
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- Prior art date
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- 229920005989 resin Polymers 0.000 title claims abstract description 74
- 239000011347 resin Substances 0.000 title claims abstract description 74
- 239000011342 resin composition Substances 0.000 title claims abstract description 65
- 239000000126 substance Substances 0.000 claims abstract description 102
- 239000003999 initiator Substances 0.000 claims abstract description 74
- 239000011230 binding agent Substances 0.000 claims abstract description 31
- 239000000178 monomer Substances 0.000 claims abstract description 25
- 239000003086 colorant Substances 0.000 claims abstract description 15
- 239000002904 solvent Substances 0.000 claims abstract description 15
- 239000000049 pigment Substances 0.000 claims description 31
- 239000004094 surface-active agent Substances 0.000 claims description 11
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 10
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 9
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 8
- 239000000654 additive Substances 0.000 claims description 8
- 230000000996 additive effect Effects 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 125000005843 halogen group Chemical group 0.000 claims description 5
- KQIGMPWTAHJUMN-UHFFFAOYSA-N 3-aminopropane-1,2-diol Chemical compound NCC(O)CO KQIGMPWTAHJUMN-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 4
- 239000007870 radical polymerization initiator Substances 0.000 claims description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 33
- -1 methyl benzoyl Chemical group 0.000 description 23
- 150000001875 compounds Chemical class 0.000 description 17
- 239000001055 blue pigment Substances 0.000 description 13
- 239000002270 dispersing agent Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 239000002253 acid Substances 0.000 description 12
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 11
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 239000001054 red pigment Substances 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 9
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 8
- 229920005822 acrylic binder Polymers 0.000 description 8
- 150000002148 esters Chemical class 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 7
- 125000005907 alkyl ester group Chemical group 0.000 description 7
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 7
- 239000001056 green pigment Substances 0.000 description 7
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 6
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000001052 yellow pigment Substances 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 5
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 229910017053 inorganic salt Inorganic materials 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 229940022663 acetate Drugs 0.000 description 4
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- 238000004898 kneading Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 3
- OFGVQLJUXSRVEG-UHFFFAOYSA-N 3-amino-4-[[4-[4-[(2-amino-6-sulfonaphthalen-1-yl)diazenyl]-3-methylphenyl]-2-methylphenyl]diazenyl]naphthalene-2,7-disulfonic acid Chemical compound OS(=O)(=O)C1=CC=C2C(N=NC3=CC=C(C=C3C)C=3C=C(C(=CC=3)N=NC=3C4=CC=C(C=C4C=CC=3N)S(O)(=O)=O)C)=C(N)C(S(O)(=O)=O)=CC2=C1 OFGVQLJUXSRVEG-UHFFFAOYSA-N 0.000 description 3
- UVHHADIQQIICAV-UHFFFAOYSA-N 4-amino-3-[[4-[4-[(1-amino-4-sulfonaphthalen-2-yl)diazenyl]-2-methylphenyl]-3-methylphenyl]diazenyl]naphthalene-1-sulfonic acid Chemical compound C1=CC=CC2=C(N)C(N=NC=3C=C(C(=CC=3)C=3C(=CC(=CC=3)N=NC=3C(=C4C=CC=CC4=C(C=3)S(O)(=O)=O)N)C)C)=CC(S(O)(=O)=O)=C21 UVHHADIQQIICAV-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 3
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 239000000080 wetting agent Substances 0.000 description 3
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical group 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 125000005842 heteroatom Chemical group 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 2
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- HJIAMFHSAAEUKR-UHFFFAOYSA-N (2-hydroxyphenyl)-phenylmethanone Chemical compound OC1=CC=CC=C1C(=O)C1=CC=CC=C1 HJIAMFHSAAEUKR-UHFFFAOYSA-N 0.000 description 1
- FJKOQFIGFHTRRW-UHFFFAOYSA-N (2-methoxy-3-methylphenyl)-(3-methylphenyl)methanone Chemical compound COC1=C(C)C=CC=C1C(=O)C1=CC=CC(C)=C1 FJKOQFIGFHTRRW-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- BUZYGTVTZYSBCU-UHFFFAOYSA-N 1-(4-chlorophenyl)ethanone Chemical compound CC(=O)C1=CC=C(Cl)C=C1 BUZYGTVTZYSBCU-UHFFFAOYSA-N 0.000 description 1
- PYKHTOHGCVJJMZ-UHFFFAOYSA-N 1-(4-phenylsulfanylphenyl)butan-1-one Chemical compound C1=CC(C(=O)CCC)=CC=C1SC1=CC=CC=C1 PYKHTOHGCVJJMZ-UHFFFAOYSA-N 0.000 description 1
- JNGALPZRHWQEEZ-UHFFFAOYSA-N 1-(4-phenylsulfanylphenyl)octan-1-one Chemical compound C1=CC(C(=O)CCCCCCC)=CC=C1SC1=CC=CC=C1 JNGALPZRHWQEEZ-UHFFFAOYSA-N 0.000 description 1
- IMDHDEPPVWETOI-UHFFFAOYSA-N 1-(4-tert-butylphenyl)-2,2,2-trichloroethanone Chemical compound CC(C)(C)C1=CC=C(C(=O)C(Cl)(Cl)Cl)C=C1 IMDHDEPPVWETOI-UHFFFAOYSA-N 0.000 description 1
- VMCRQYHCDSXNLW-UHFFFAOYSA-N 1-(4-tert-butylphenyl)-2,2-dichloroethanone Chemical compound CC(C)(C)C1=CC=C(C(=O)C(Cl)Cl)C=C1 VMCRQYHCDSXNLW-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 1
- BPIUIOXAFBGMNB-UHFFFAOYSA-N 1-hexoxyhexane Chemical compound CCCCCCOCCCCCC BPIUIOXAFBGMNB-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 description 1
- BRKORVYTKKLNKX-UHFFFAOYSA-N 2,4-di(propan-2-yl)thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC(C(C)C)=C3SC2=C1 BRKORVYTKKLNKX-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- ZAOMUMJENGCKAR-UHFFFAOYSA-N 2-(1-phenylbut-3-en-2-yloxy)but-3-enylbenzene Chemical compound C=1C=CC=CC=1CC(C=C)OC(C=C)CC1=CC=CC=C1 ZAOMUMJENGCKAR-UHFFFAOYSA-N 0.000 description 1
- DQMOHZLFVGYNAN-UHFFFAOYSA-N 2-(2-phenylethenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=CC=2C=CC=CC=2)=N1 DQMOHZLFVGYNAN-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- FVNIIPIYHHEXQA-UHFFFAOYSA-N 2-(4-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 FVNIIPIYHHEXQA-UHFFFAOYSA-N 0.000 description 1
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 1
- MPNIGZBDAMWHSX-UHFFFAOYSA-N 2-(4-methylphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(C)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 MPNIGZBDAMWHSX-UHFFFAOYSA-N 0.000 description 1
- PUBNJSZGANKUGX-UHFFFAOYSA-N 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=C(C)C=C1 PUBNJSZGANKUGX-UHFFFAOYSA-N 0.000 description 1
- ZJRNXDIVAGHETA-UHFFFAOYSA-N 2-[2-(3,4-dimethoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=C(OC)C(OC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 ZJRNXDIVAGHETA-UHFFFAOYSA-N 0.000 description 1
- XBWGBEZTVOHKSB-UHFFFAOYSA-N 2-[4-(4-ethylphenyl)phenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(CC)=CC=C1C1=CC=C(C=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)C=C1 XBWGBEZTVOHKSB-UHFFFAOYSA-N 0.000 description 1
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 1
- FGTYTUFKXYPTML-UHFFFAOYSA-N 2-benzoylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 FGTYTUFKXYPTML-UHFFFAOYSA-N 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- AAXRSWGYLGOFQP-UHFFFAOYSA-N 2-butoxy-1-(2-butoxyphenyl)ethanone Chemical compound CCCCOCC(=O)C1=CC=CC=C1OCCCC AAXRSWGYLGOFQP-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- 125000003006 2-dimethylaminoethyl group Chemical group [H]C([H])([H])N(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- MRDMGGOYEBRLPD-UHFFFAOYSA-N 2-ethoxy-1-(2-ethoxyphenyl)ethanone Chemical compound CCOCC(=O)C1=CC=CC=C1OCC MRDMGGOYEBRLPD-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- ICPWFHKNYYRBSZ-UHFFFAOYSA-M 2-methoxypropanoate Chemical compound COC(C)C([O-])=O ICPWFHKNYYRBSZ-UHFFFAOYSA-M 0.000 description 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 1
- MYISVPVWAQRUTL-UHFFFAOYSA-N 2-methylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3SC2=C1 MYISVPVWAQRUTL-UHFFFAOYSA-N 0.000 description 1
- MWDGNKGKLOBESZ-UHFFFAOYSA-N 2-oxooctanal Chemical compound CCCCCCC(=O)C=O MWDGNKGKLOBESZ-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- HAZQZUFYRLFOLC-UHFFFAOYSA-N 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C=CC=CC=2)=N1 HAZQZUFYRLFOLC-UHFFFAOYSA-N 0.000 description 1
- WYYQKWASBLTRIW-UHFFFAOYSA-N 2-trimethoxysilylbenzoic acid Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1C(O)=O WYYQKWASBLTRIW-UHFFFAOYSA-N 0.000 description 1
- GWHLJVMSZRKEAQ-UHFFFAOYSA-N 3-(2,3-dicarboxyphenyl)phthalic acid Chemical compound OC(=O)C1=CC=CC(C=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O GWHLJVMSZRKEAQ-UHFFFAOYSA-N 0.000 description 1
- OKISUZLXOYGIFP-UHFFFAOYSA-N 4,4'-dichlorobenzophenone Chemical compound C1=CC(Cl)=CC=C1C(=O)C1=CC=C(Cl)C=C1 OKISUZLXOYGIFP-UHFFFAOYSA-N 0.000 description 1
- XDYLWBWPEDSSLU-UHFFFAOYSA-N 4-(3-carboxyphenyl)benzene-1,2,3-tricarboxylic acid Chemical compound OC(=O)C1=CC=CC(C=2C(=C(C(O)=O)C(C(O)=O)=CC=2)C(O)=O)=C1 XDYLWBWPEDSSLU-UHFFFAOYSA-N 0.000 description 1
- APXJLYIVOFARRM-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(C(O)=O)C(C(O)=O)=C1 APXJLYIVOFARRM-UHFFFAOYSA-N 0.000 description 1
- UNDXPKDBFOOQFC-UHFFFAOYSA-N 4-[2-nitro-4-(trifluoromethyl)phenyl]morpholine Chemical compound [O-][N+](=O)C1=CC(C(F)(F)F)=CC=C1N1CCOCC1 UNDXPKDBFOOQFC-UHFFFAOYSA-N 0.000 description 1
- ACQVEWFMUBXEMR-UHFFFAOYSA-N 4-bromo-2-fluoro-6-nitrophenol Chemical compound OC1=C(F)C=C(Br)C=C1[N+]([O-])=O ACQVEWFMUBXEMR-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- ZHBXLZQQVCDGPA-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)sulfonyl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(S(=O)(=O)C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 ZHBXLZQQVCDGPA-UHFFFAOYSA-N 0.000 description 1
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- ZNSMNVMLTJELDZ-UHFFFAOYSA-N Bis(2-chloroethyl)ether Chemical compound ClCCOCCCl ZNSMNVMLTJELDZ-UHFFFAOYSA-N 0.000 description 1
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
- UJOBWOGCFQCDNV-UHFFFAOYSA-N Carbazole Natural products C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 1
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 1
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 1
- AQZGPSLYZOOYQP-UHFFFAOYSA-N Diisoamyl ether Chemical compound CC(C)CCOCCC(C)C AQZGPSLYZOOYQP-UHFFFAOYSA-N 0.000 description 1
- XXRCUYVCPSWGCC-UHFFFAOYSA-N Ethyl pyruvate Chemical compound CCOC(=O)C(C)=O XXRCUYVCPSWGCC-UHFFFAOYSA-N 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- XOBKSJJDNFUZPF-UHFFFAOYSA-N Methoxyethane Chemical compound CCOC XOBKSJJDNFUZPF-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910005965 SO 2 Inorganic materials 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- JOBBTVPTPXRUBP-UHFFFAOYSA-N [3-(3-sulfanylpropanoyloxy)-2,2-bis(3-sulfanylpropanoyloxymethyl)propyl] 3-sulfanylpropanoate Chemical compound SCCC(=O)OCC(COC(=O)CCS)(COC(=O)CCS)COC(=O)CCS JOBBTVPTPXRUBP-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- IUHFWCGCSVTMPG-UHFFFAOYSA-N [C].[C] Chemical group [C].[C] IUHFWCGCSVTMPG-UHFFFAOYSA-N 0.000 description 1
- NOZAQBYNLKNDRT-UHFFFAOYSA-N [diacetyloxy(ethenyl)silyl] acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)C=C NOZAQBYNLKNDRT-UHFFFAOYSA-N 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 125000000732 arylene group Chemical group 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 125000000852 azido group Chemical group *N=[N+]=[N-] 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 229940007550 benzyl acetate Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- HXTBYXIZCDULQI-UHFFFAOYSA-N bis[4-(methylamino)phenyl]methanone Chemical compound C1=CC(NC)=CC=C1C(=O)C1=CC=C(NC)C=C1 HXTBYXIZCDULQI-UHFFFAOYSA-N 0.000 description 1
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- IWPATTDMSUYMJV-UHFFFAOYSA-N butyl 2-methoxyacetate Chemical compound CCCCOC(=O)COC IWPATTDMSUYMJV-UHFFFAOYSA-N 0.000 description 1
- 125000003739 carbamimidoyl group Chemical group C(N)(=N)* 0.000 description 1
- 125000003917 carbamoyl group Chemical group [H]N([H])C(*)=O 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 150000001733 carboxylic acid esters Chemical class 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- IPHJYJHJDIGARM-UHFFFAOYSA-M copper phthalocyaninesulfonic acid, dioctadecyldimethylammonium salt Chemical compound [Cu+2].CCCCCCCCCCCCCCCCCC[N+](C)(C)CCCCCCCCCCCCCCCCCC.C=1C(S(=O)(=O)[O-])=CC=C(C(=NC2=NC(C3=CC=CC=C32)=N2)[N-]3)C=1C3=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 IPHJYJHJDIGARM-UHFFFAOYSA-M 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- MGNCLNQXLYJVJD-UHFFFAOYSA-N cyanuric chloride Chemical compound ClC1=NC(Cl)=NC(Cl)=N1 MGNCLNQXLYJVJD-UHFFFAOYSA-N 0.000 description 1
- 125000000392 cycloalkenyl group Chemical group 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- WOSVXXBNNCUXMT-UHFFFAOYSA-N cyclopentane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1CC(C(O)=O)C(C(O)=O)C1C(O)=O WOSVXXBNNCUXMT-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 125000006159 dianhydride group Chemical group 0.000 description 1
- 150000008049 diazo compounds Chemical class 0.000 description 1
- WYACBZDAHNBPPB-UHFFFAOYSA-N diethyl oxalate Chemical compound CCOC(=O)C(=O)OCC WYACBZDAHNBPPB-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 125000001033 ether group Chemical group 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- WNIHNYUROPJCLW-UHFFFAOYSA-N ethyl 2-ethoxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)OCC WNIHNYUROPJCLW-UHFFFAOYSA-N 0.000 description 1
- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
- JLEKJZUYWFJPMB-UHFFFAOYSA-N ethyl 2-methoxyacetate Chemical compound CCOC(=O)COC JLEKJZUYWFJPMB-UHFFFAOYSA-N 0.000 description 1
- WHRLOJCOIKOQGL-UHFFFAOYSA-N ethyl 2-methoxypropanoate Chemical compound CCOC(=O)C(C)OC WHRLOJCOIKOQGL-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000445 field-emission scanning electron microscopy Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- 125000005549 heteroarylene group Chemical group 0.000 description 1
- 125000004366 heterocycloalkenyl group Chemical group 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 125000000717 hydrazino group Chemical group [H]N([*])N([H])[H] 0.000 description 1
- 125000005638 hydrazono group Chemical group 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- GWVMLCQWXVFZCN-UHFFFAOYSA-N isoindoline Chemical compound C1=CC=C2CNCC2=C1 GWVMLCQWXVFZCN-UHFFFAOYSA-N 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- 150000003903 lactic acid esters Chemical class 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 125000005641 methacryl group Chemical group 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- PPFNAOBWGRMDLL-UHFFFAOYSA-N methyl 2-ethoxyacetate Chemical compound CCOCC(=O)OC PPFNAOBWGRMDLL-UHFFFAOYSA-N 0.000 description 1
- YVWPDYFVVMNWDT-UHFFFAOYSA-N methyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OC YVWPDYFVVMNWDT-UHFFFAOYSA-N 0.000 description 1
- YSGBMDFJWFIEDF-UHFFFAOYSA-N methyl 2-hydroxy-3-methylbutanoate Chemical compound COC(=O)C(O)C(C)C YSGBMDFJWFIEDF-UHFFFAOYSA-N 0.000 description 1
- AKWHOGIYEOZALP-UHFFFAOYSA-N methyl 2-methoxy-2-methylpropanoate Chemical compound COC(=O)C(C)(C)OC AKWHOGIYEOZALP-UHFFFAOYSA-N 0.000 description 1
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- JIKUXBYRTXDNIY-UHFFFAOYSA-N n-methyl-n-phenylformamide Chemical compound O=CN(C)C1=CC=CC=C1 JIKUXBYRTXDNIY-UHFFFAOYSA-N 0.000 description 1
- OBKARQMATMRWQZ-UHFFFAOYSA-N naphthalene-1,2,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=CC2=C(C(O)=O)C(C(=O)O)=CC=C21 OBKARQMATMRWQZ-UHFFFAOYSA-N 0.000 description 1
- DOBFTMLCEYUAQC-UHFFFAOYSA-N naphthalene-2,3,6,7-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=C2C=C(C(O)=O)C(C(=O)O)=CC2=C1 DOBFTMLCEYUAQC-UHFFFAOYSA-N 0.000 description 1
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- ZDHCZVWCTKTBRY-UHFFFAOYSA-N omega-Hydroxydodecanoic acid Natural products OCCCCCCCCCCCC(O)=O ZDHCZVWCTKTBRY-UHFFFAOYSA-N 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- CLYVDMAATCIVBF-UHFFFAOYSA-N pigment red 224 Chemical compound C=12C3=CC=C(C(OC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)OC(=O)C4=CC=C3C1=C42 CLYVDMAATCIVBF-UHFFFAOYSA-N 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- JRDBISOHUUQXHE-UHFFFAOYSA-N pyridine-2,3,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)N=C1C(O)=O JRDBISOHUUQXHE-UHFFFAOYSA-N 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 150000003459 sulfonic acid esters Chemical class 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/182—Colour image sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Filters (AREA)
Abstract
(A) 바인더 수지; (B) 광중합성 단량체; (C) 광중합 개시제; (D) 착색제; 및 (E) 용매를 포함하고, 상기 광중합 개시제는 하기 화학식 1로 표시되는 제1 광중합 개시제 및 하기 화학식 2로 표시되는 제2 광중합 개시제를 포함하고, 상기 제1 광중합 개시제 및 제2 광중합 개시제는 70:30 내지 79:21의 중량비로 포함되는 감광성 수지 조성물, 상기 감광성 수지 조성물을 이용하여 제조된 감광성 수지막, 상기 감광성 수지막을 포함하는 컬러필터 및 CMOS 이미지 센서, 상기 컬러필터를 포함하는 디스플레이 장치 및 상기 CMOS 이미지 센서를 포함하는 카메라가 제공된다.
[화학식 1]
[화학식 2]
(상기 화학식 1 및 화학식 2에서, 각 치환기는 명세서에 정의된 바와 같다.)(A) a binder resin; (B) a photopolymerizable monomer; (C) a photopolymerization initiator; (D) a colorant; and (E) a solvent, wherein the photopolymerization initiator includes a first photopolymerization initiator represented by the following chemical formula 1 and a second photopolymerization initiator represented by the following chemical formula 2, and the first photopolymerization initiator and the second photopolymerization initiator are included in a weight ratio of 70:30 to 79:21; a photosensitive resin film manufactured using the photosensitive resin composition, a color filter and a CMOS image sensor including the photosensitive resin film, a display device including the color filter, and a camera including the CMOS image sensor are provided.
[Chemical Formula 1]
[Chemical formula 2]
(In the above chemical formulas 1 and 2, each substituent is as defined in the specification.)
Description
본 기재는 감광성 수지 조성물, 이를 이용한 감광성 수지막, 상기 감광성 수지막을 포함하는 컬러필터 및 CMOS 이미지 센서, 상기 컬러필터를 포함하는 디스플레이 장치 및 상기 CMOS 이미지 센서를 포함하는 카메라에 관한 것이다.The present invention relates to a photosensitive resin composition, a photosensitive resin film using the same, a color filter and a CMOS image sensor including the photosensitive resin film, a display device including the color filter, and a camera including the CMOS image sensor.
본 발명은 액정 표시 소자(LCD) 등의 디스플레이 장치에 이용되는 컬러필터를 제작하는데 적합한 착색 감광성 수지 조성물, 상기 조성물에 의해 제작된 착색 영역을 가지는 컬러필터 및 상기 컬러 필터를 가지는 고체촬상 소자, 유기 LED용 액정 표시 장치 등의 화상 표시 장치(디스플레이 장치)에 관한 것이다.The present invention relates to a colored photosensitive resin composition suitable for producing a color filter used in a display device such as a liquid crystal display (LCD), a color filter having a colored region produced by the composition, and an image display device (display device) such as a solid-state imaging element having the color filter and a liquid crystal display for an organic LED.
컬러필터는 레드(R), 녹색(G), 청색(B)의 염료 또는 안료로 제조되고, 색소 재료의 스펙트럼이 요구되는 흡수 파장 이외에 불필요한 파장이 없고 폭이 좁은 흡수 밴드를 가질수록 향상된다. 또한 컬러 레지스트의 식각 과정에서 노출되는 자외선, 산, 염기 조건 하에서 퇴색 또는 변색되지 않는 우수한 내열성, 내광성 및 내화학성을 가져야 한다.Color filters are manufactured from red (R), green (G), and blue (B) dyes or pigments, and the spectrum of the pigment material is improved when it has a narrow absorption band without unnecessary wavelengths other than the required absorption wavelength. In addition, it must have excellent heat resistance, light resistance, and chemical resistance so that it does not fade or change color under ultraviolet rays, acid, and alkali conditions exposed during the etching process of the color resist.
또한, 본 발명은 CMOS 이미지 센서 제조에 필요한 착색 감광성 수지 조성물 및 상기 CMOS 이미지 센서를 포함하는 카메라에 관한 것이다.In addition, the present invention relates to a colored photosensitive resin composition necessary for manufacturing a CMOS image sensor and a camera including the CMOS image sensor.
CMOS 이미지 센서(CIS)란, 카메라가 받아들인 이미지를 디지털 신호로 전환해 주는 비메모리 반도체이다. CIS는 컬러 필터, 포토 다이오드, 증폭기 등의 pixel의 집합체다. Pixel 크기가 작아짐에 따라 정확한 빛 색상 인지 위해 고감도 재료 요구한다.CMOS image sensor (CIS) is a non-memory semiconductor that converts the image received by the camera into a digital signal. CIS is a collection of pixels such as color filters, photodiodes, and amplifiers. As the pixel size decreases, high-sensitivity materials are required for accurate light color recognition.
그러나, 종래 감광성 수지 조성물을 이용하여 제조되는 감광성 수지막의 경우, 제조 공정 시 발생되는 패턴 테이퍼의 열화에 의해 픽셀 벽면의 직진성에 열등한 문제가 있었다.However, in the case of a photosensitive resin film manufactured using a conventional photosensitive resin composition, there was a problem of inferior straightness of the pixel wall surface due to deterioration of the pattern taper that occurred during the manufacturing process.
따라서, 상기와 같은 문제점을 해결하기 위한 노력이 현재에도 계속되고 있다.Therefore, efforts to solve the above problems are still ongoing.
일 구현예는 서로 상이한 구조를 가지는 광중합 개시제 2종의 혼합 중량비를 제어함으로써, 패턴픽셀의 직진성을 개선할 수 있는 감광성 수지 조성물을 제공하기 위한 것이다.One embodiment is to provide a photosensitive resin composition capable of improving the straightness of a pattern pixel by controlling the mixing weight ratio of two photopolymerization initiators having different structures.
다른 일 구현예는 상기 감광성 수지 조성물을 이용하여 제조된 감광성 수지막을 제공하기 위한 것이다.Another embodiment is to provide a photosensitive resin film manufactured using the photosensitive resin composition.
또 다른 일 구현예는 상기 감광성 수지막을 포함하는 컬러필터를 제공하기 위한 것이다.Another embodiment is to provide a color filter including the photosensitive resin film.
또 다른 일 구현예는 상기 감광성 수지막을 포함하는 CMOS 이미지 센서를 제공하기 위한 것이다.Another embodiment is to provide a CMOS image sensor including the photosensitive resin film.
또 다른 일 구현예는 상기 컬러필터를 포함하는 디스플레이 장치를 제공하기 위한 것이다.Another embodiment is to provide a display device including the color filter.
또 다른 일 구현예는 상기 CMOS 이미지 센서를 포함하는 카메라를 제공하기 위한 것이다.Another embodiment is to provide a camera including the CMOS image sensor.
일 구현예는 (A) 바인더 수지; (B) 광중합성 단량체; (C) 광중합 개시제; (D) 착색제; 및 (E) 용매를 포함하고, 상기 광중합 개시제는 하기 화학식 1로 표시되는 제1 광중합 개시제 및 하기 화학식 2로 표시되는 제2 광중합 개시제를 포함하고, 상기 제1 광중합 개시제 및 제2 광중합 개시제는 70:30 내지 79:21의 중량비로 포함되는 감광성 수지 조성물을 제공한다.One embodiment provides a photosensitive resin composition comprising: (A) a binder resin; (B) a photopolymerizable monomer; (C) a photopolymerization initiator; (D) a colorant; and (E) a solvent, wherein the photopolymerization initiator comprises a first photopolymerization initiator represented by the following chemical formula 1 and a second photopolymerization initiator represented by the following chemical formula 2, and the first photopolymerization initiator and the second photopolymerization initiator are included in a weight ratio of 70:30 to 79:21.
[화학식 1][Chemical Formula 1]
[화학식 2][Chemical formula 2]
상기 화학식 1 및 화학식 2에서,In the above chemical formulas 1 and 2,
R1 및 R6은 각각 독립적으로 할로겐기, 히드록시기, 니트로기, 시아노기, 치환 또는 비치환된 C1 내지 C20 알킬기, 치환 또는 비치환된 C1 내지 C20 알콕시기, 치환 또는 비치환된 C3 내지 C20 사이클로알킬기 또는 치환 또는 비치환된 C6 내지 C20 아릴기이고,R 1 and R 6 are each independently a halogen group, a hydroxy group, a nitro group, a cyano group, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C1 to C20 alkoxy group, a substituted or unsubstituted C3 to C20 cycloalkyl group or a substituted or unsubstituted C6 to C20 aryl group,
R2 내지 R5는 각각 독립적으로 수소원자, 치환 또는 비치환된 C1 내지 C20 알킬기 또는 치환 또는 비치환된 C1 내지 C20 알콕시기이고,R 2 to R 5 are each independently a hydrogen atom, a substituted or unsubstituted C1 to C20 alkyl group, or a substituted or unsubstituted C1 to C20 alkoxy group,
n1 및 n2는 각각 독립적으로 0 내지 4의 정수이다.n1 and n2 are each independently an integer from 0 to 4.
상기 제1 광중합 개시제 및 제2 광중합 개시제는 72:28 내지 78:22의 중량비로 포함될 수 있다.The first photopolymerization initiator and the second photopolymerization initiator may be included in a weight ratio of 72:28 to 78:22.
상기 화학식 1 및 화학식 2에서, R4 및 R5는 각각 독립적으로 치환 또는 비치환된 C1 내지 C20 알킬기일 수 있다.In the above chemical formulas 1 and 2, R 4 and R 5 can each independently be a substituted or unsubstituted C1 to C20 alkyl group.
상기 R4 및 R5는 각각 독립적으로 비치환된 C1 내지 C20 알킬기이고, 상기 R4의 탄소수는 상기 R5의 탄소수보다 적을 수 있다.The above R 4 and R 5 are each independently an unsubstituted C1 to C20 alkyl group, and the carbon number of the R 4 may be less than the carbon number of the R 5 .
상기 제1 광중합 개시제는 하기 화학식 1-1 내지 화학식 1-3 중 적어도 하나 이상을 포함할 수 있다.The above first photopolymerization initiator may include at least one of the following chemical formulae 1-1 to 1-3.
[화학식 1-1][Chemical Formula 1-1]
[화학식 1-2][Chemical Formula 1-2]
[화학식 1-3][Chemical Formula 1-3]
상기 제2 광중합 개시제는 하기 화학식 2-1 내지 화학식 2-3 중 적어도 하나 이상을 포함할 수 있다.The second photopolymerization initiator may include at least one of the following chemical formulas 2-1 to 2-3.
[화학식 2-1][Chemical Formula 2-1]
[화학식 2-2][Chemical Formula 2-2]
[화학식 2-3][Chemical Formula 2-3]
상기 바인더 수지는 상기 감광성 수지 조성물 총량에 대해 0.1 중량% 내지 1 중량%로 포함될 수 있다.The above binder resin may be included in an amount of 0.1 wt% to 1 wt% based on the total amount of the photosensitive resin composition.
상기 바인더 수지는 상기 광중합성 단량체보다 적은 함량으로 포함될 수 있다.The above binder resin may be included in a smaller amount than the photopolymerizable monomer.
상기 착색제는 안료를 포함할 수 있다.The above colorant may include a pigment.
상기 착색제는 상기 감광성 수지 조성물 총량에 대해 50 중량% 내지 80 중량%로 포함될 수 있다.The above colorant may be included in an amount of 50 wt% to 80 wt% based on the total amount of the photosensitive resin composition.
상기 감광성 수지 조성물은, 상기 감광성 수지 조성물 총량에 대해, 상기 (A) 바인더 수지 0.1 중량% 내지 1 중량%; 상기 (B) 광중합성 단량체 1 중량% 내지 10 중량%; 상기 (C) 광중합 개시제 0.1 중량% 내지 5 중량%; 상기 (D) 착색제 50 중량% 내지 80 중량%; 및 상기 (E) 용매 잔부량을 포함할 수 있다.The photosensitive resin composition may include, based on the total amount of the photosensitive resin composition, 0.1 to 1 wt% of the (A) binder resin; 1 to 10 wt% of the (B) photopolymerizable monomer; 0.1 to 5 wt% of the (C) photopolymerization initiator; 50 to 80 wt% of the (D) colorant; and the remainder of the (E) solvent.
상기 감광성 수지 조성물은 말론산, 3-아미노-1,2-프로판디올, 실란계 커플링제, 레벨링제, 불소계 계면활성제, 라디칼 중합 개시제 또는 이들의 조합의 첨가제를 더 포함할 수 있다.The above photosensitive resin composition may further include an additive of malonic acid, 3-amino-1,2-propanediol, a silane coupling agent, a leveling agent, a fluorinated surfactant, a radical polymerization initiator, or a combination thereof.
상기 감광성 수지 조성물은 말론산, 3-아미노-1,2-프로판디올, 실란계 커플링제, 레벨링제, 불소계 계면활성제, 라디칼 중합 개시제 또는 이들의 조합의 첨가제를 더 포함할 수 있다.The above photosensitive resin composition may further include an additive of malonic acid, 3-amino-1,2-propanediol, a silane coupling agent, a leveling agent, a fluorinated surfactant, a radical polymerization initiator, or a combination thereof.
다른 일 구현예는 상기 감광성 수지 조성물을 이용하여 제조된 감광성 수지막을 제공한다.Another embodiment provides a photosensitive resin film manufactured using the photosensitive resin composition.
또 다른 일 구현예는 상기 감광성 수지막을 포함하는 컬러필터를 제공한다.Another embodiment provides a color filter including the photosensitive resin film.
또 다른 일 구현예는 상기 감광성 수지막을 포함하는 CMOS 이미지 센서를 제공한다.Another embodiment provides a CMOS image sensor including the photosensitive resin film.
또 다른 일 구현예는 상기 컬러필터를 포함하는 디스플레이 장치를 제공한다.Another embodiment provides a display device including the color filter.
또 다른 일 구현예는 상기 CMOS 이미지 센서를 포함하는 카메라를 제공한다.Another embodiment provides a camera including the CMOS image sensor.
기타 본 발명의 측면들의 구체적인 사항은 이하의 상세한 설명에 포함되어 있다.Specific details of other aspects of the present invention are included in the detailed description below.
일 구현예에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막은 패턴 직진성이 우수하여, 디스플레이 장치나 카메라 등에 적용되어 우수한 성능을 발휘할 수 있다. A photosensitive resin film manufactured using a photosensitive resin composition according to one embodiment has excellent pattern straightness, and thus can be applied to display devices, cameras, etc., to exhibit excellent performance.
도 1은 실시예 1에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막 패턴의 단면을 찍은 주사전자현미경 사진(정면 사진)이다.
도 2는 실시예 1에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막 패턴을 위에서 찍은 주사전자현미경 사진(평면 사진)이다.
도 3은 비교예 1에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막 패턴의 단면을 찍은 주사전자현미경 사진(정면 사진)이다.
도 4는 비교예 1에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막 패턴을 위에서 찍은 주사전자현미경 사진(평면 사진)이다.
도 5는 비교예 2에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막 패턴의 단면을 찍은 주사전자현미경 사진(정면 사진)이다.
도 6은 비교예 2에 따른 감광성 수지 조성물을 이용하여 제조된 감광성 수지막 패턴을 위에서 찍은 주사전자현미경 사진(평면 사진)이다.
도 7은 감광성 수지막 패턴의 테이퍼 각도(θ)를 설명하는 그림이다.Figure 1 is a scanning electron microscope photograph (front view photograph) of a cross-section of a photosensitive resin film pattern manufactured using a photosensitive resin composition according to Example 1.
FIG. 2 is a scanning electron microscope photograph (planar photograph) taken from above of a photosensitive resin film pattern manufactured using a photosensitive resin composition according to Example 1.
Figure 3 is a scanning electron microscope photograph (front view photograph) of a cross-section of a photosensitive resin film pattern manufactured using a photosensitive resin composition according to Comparative Example 1.
Figure 4 is a scanning electron microscope photograph (planar photograph) taken from above of a photosensitive resin film pattern manufactured using a photosensitive resin composition according to Comparative Example 1.
Figure 5 is a scanning electron microscope photograph (front view photograph) of a cross-section of a photosensitive resin film pattern manufactured using a photosensitive resin composition according to Comparative Example 2.
Figure 6 is a scanning electron microscope photograph (planar photograph) taken from above of a photosensitive resin film pattern manufactured using a photosensitive resin composition according to Comparative Example 2.
Figure 7 is a drawing explaining the taper angle (θ) of the photosensitive resin film pattern.
이하, 본 발명의 구현예들을 상세히 설명하기로 한다. 다만, 이는 예시로서 제시되는 것으로, 이에 의해 본 발명이 제한되지는 않으며 본 발명은 후술할 청구범위의 범주에 의해 정의될 뿐이다. Hereinafter, embodiments of the present invention will be described in detail. However, these are presented as examples, and the present invention is not limited thereby, and the present invention is defined only by the scope of the claims described below.
본 명세서에서 특별한 언급이 없는 한, "알킬기"란 C1 내지 C20 알킬기를 의미하고, "알케닐기"란 C2 내지 C20 알케닐기를 의미하고, "사이클로알케닐기"란 C3 내지 C20 사이클로알케닐기를 의미하고, "헤테로사이클로알케닐기"란 C3 내지 C20 헤테로사이클로알케닐기를 의미하고, "아릴기"란 C6 내지 C20 아릴기를 의미하고, "아릴알킬기"란 C6 내지 C20 아릴알킬기를 의미하며, "알킬렌기"란 C1 내지 C20 알킬렌기를 의미하고, "아릴렌기"란 C6 내지 C20 아릴렌기를 의미하고, "알킬아릴렌기"란 C6 내지 C20 알킬아릴렌기를 의미하고, "헤테로아릴렌기"란 C3 내지 C20 헤테로아릴렌기를 의미하고, "알콕실렌기"란 C1 내지 C20 알콕실렌기를 의미한다.Unless otherwise specified herein, "alkyl group" means a C1 to C20 alkyl group, "alkenyl group" means a C2 to C20 alkenyl group, "cycloalkenyl group" means a C3 to C20 cycloalkenyl group, "heterocycloalkenyl group" means a C3 to C20 heterocycloalkenyl group, "aryl group" means a C6 to C20 aryl group, "arylalkyl group" means a C6 to C20 arylalkyl group, "alkylene group" means a C1 to C20 alkylene group, "arylene group" means a C6 to C20 arylene group, "alkylarylene group" means a C6 to C20 alkylarylene group, "heteroarylene group" means a C3 to C20 heteroarylene group, and "alkoxylene group" means a C1 to C20 It refers to a C20 alkoxylene group.
본 명세서에서 특별한 언급이 없는 한, "치환"이란 적어도 하나의 수소 원자가 할로겐 원자(F, Cl, Br, I), 히드록시기, C1 내지 C20 알콕시기, 니트로기, 시아노기, 아민기, 이미노기, 아지도기, 아미디노기, 히드라지노기, 히드라조노기, 카르보닐기, 카르바밀기, 티올기, 에스테르기, 에테르기, 카르복실기 또는 그것의 염, 술폰산기 또는 그것의 염, 인산이나 그것의 염, C1 내지 C20 알킬기, C2 내지 C20 알케닐기, C2 내지 C20 알키닐기, C6 내지 C20 아릴기, C3 내지 C20 사이클로알킬기, C3 내지 C20 사이클로알케닐기, C3 내지 C20 사이클로알키닐기, C2 내지 C20 헤테로사이클로알킬기, C2 내지 C20 헤테로사이클로알케닐기, C2 내지 C20 헤테로사이클로알키닐기, C3 내지 C20 헤테로아릴기 또는 이들의 조합의 치환기로 치환된 것을 의미한다.Unless otherwise specified herein, "substitution" means that at least one hydrogen atom is substituted with a halogen atom (F, Cl, Br, I), a hydroxy group, a C1 to C20 alkoxy group, a nitro group, a cyano group, an amine group, an imino group, an azido group, an amidino group, a hydrazino group, a hydrazono group, a carbonyl group, a carbamyl group, a thiol group, an ester group, an ether group, a carboxyl group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid or a salt thereof, a C1 to C20 alkyl group, a C2 to C20 alkenyl group, a C2 to C20 alkynyl group, a C6 to C20 aryl group, a C3 to C20 cycloalkyl group, a C3 to C20 cycloalkenyl group, a C3 to C20 cycloalkynyl group, a C2 to C20 heterocycloalkyl group, a C2 to C20 heterocycloalkenyl group, a C2 to C20 It means substituted with a C20 heterocycloalkynyl group, a C3 to C20 heteroaryl group, or a combination thereof.
또한 본 명세서에서 특별한 언급이 없는 한, "헤테로"란, 화학식 내에 N, O, S 및 P 중 적어도 하나의 헤테로 원자가 적어도 하나 포함된 것을 의미한다.Additionally, unless otherwise specifically stated herein, “hetero” means that the chemical formula contains at least one heteroatom of at least one of N, O, S, and P.
또한 본 명세서에서 특별한 언급이 없는 한, "(메타)아크릴레이트"는 "아크릴레이트"와 "메타크릴레이트" 둘 다 가능함을 의미하며, "(메타)아크릴산"은 "아크릴산"과 "메타크릴산" 둘 다 가능함을 의미한다. Additionally, unless otherwise specifically stated herein, “(meth)acrylate” means both “acrylate” and “methacrylate”, and “(meth)acrylic acid” means both “acrylic acid” and “methacrylic acid”.
본 명세서에서 특별한 언급이 없는 한, "조합"이란 혼합 또는 공중합을 의미한다.Unless otherwise specified herein, “combination” means a mixture or copolymerization.
본 명세서에서 특별한 언급이 없는 한, 불포화 결합은 탄소-탄소원자 간의 다중결합뿐만 아니라, 카보닐결합, 아조결합 등과 같이 다른 분자를 포함하는 것도 포함한다.Unless otherwise specified herein, unsaturated bonds include not only multiple bonds between carbon-carbon atoms, but also those involving other molecules, such as carbonyl bonds and azo bonds.
본 명세서 내 화학식에서 별도의 정의가 없는 한, 화학 결합이 그려져야 하는 위치에 화학결합이 그려져 있지 않은 경우는 상기 위치에 수소 원자가 결합되어 있음을 의미한다.Unless otherwise defined in the chemical formulas herein, if a chemical bond is not drawn at a position where a chemical bond should be drawn, it means that a hydrogen atom is bonded at that position.
본 명세서에서 카도계 수지란, 하기 화학식 3-1 내지 화학식 3-11로 이루어진 군에서 선택된 하나 이상의 관능기가 수지 내 주골격(backbone)에 포함되는 수지를 의미한다.In this specification, the cardo-based resin means a resin in which at least one functional group selected from the group consisting of the following chemical formulas 3-1 to 3-11 is included in the backbone of the resin.
또한 본 명세서에서 특별한 언급이 없는 한, "*"는 동일하거나 상이한 원자 또는 화학식과 연결되는 부분을 의미한다.Additionally, unless otherwise specified herein, “*” means a moiety that is connected to the same or different atoms or chemical formulas.
일 구현예에 따른 감광성 수지 조성물은 (A) 바인더 수지; (B) 광중합성 단량체; (C) 광중합 개시제; (D) 착색제; 및 (E) 용매를 포함하고, 상기 광중합 개시제는 하기 화학식 1로 표시되는 제1 광중합 개시제 및 하기 화학식 2로 표시되는 제2 광중합 개시제를 포함하고, 상기 제1 광중합 개시제 및 제2 광중합 개시제는 70:30 내지 79:21의 중량비로 포함된다.According to one embodiment, a photosensitive resin composition comprises (A) a binder resin; (B) a photopolymerizable monomer; (C) a photopolymerization initiator; (D) a colorant; and (E) a solvent, wherein the photopolymerization initiator comprises a first photopolymerization initiator represented by the following chemical formula 1 and a second photopolymerization initiator represented by the following chemical formula 2, and the first photopolymerization initiator and the second photopolymerization initiator are contained in a weight ratio of 70:30 to 79:21.
[화학식 1][Chemical Formula 1]
[화학식 2][Chemical formula 2]
상기 화학식 1 및 화학식 2에서,In the above chemical formulas 1 and 2,
R1 및 R6은 각각 독립적으로 할로겐기, 히드록시기, 니트로기, 시아노기, 치환 또는 비치환된 C1 내지 C20 알킬기, 치환 또는 비치환된 C1 내지 C20 알콕시기, 치환 또는 비치환된 C3 내지 C20 사이클로알킬기 또는 치환 또는 비치환된 C6 내지 C20 아릴기이고,R 1 and R 6 are each independently a halogen group, a hydroxy group, a nitro group, a cyano group, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C1 to C20 alkoxy group, a substituted or unsubstituted C3 to C20 cycloalkyl group or a substituted or unsubstituted C6 to C20 aryl group,
R2 내지 R5는 각각 독립적으로 수소원자, 치환 또는 비치환된 C1 내지 C20 알킬기 또는 치환 또는 비치환된 C1 내지 C20 알콕시기이고,R 2 to R 5 are each independently a hydrogen atom, a substituted or unsubstituted C1 to C20 alkyl group, or a substituted or unsubstituted C1 to C20 alkoxy group,
n1 및 n2는 각각 독립적으로 0 내지 4의 정수이다.n1 and n2 are each independently an integer from 0 to 4.
종래 감광성 수지 조성물은 기판 위 코팅 및 베이크 공정을 통하여 열경화가 일어난다. 이후, 노광 공정을 통해 원하는 모양의 패턴을 형성시키는 과정을 거치게 된다. 모든 공정이 끝난 뒤 만들어진 패턴 픽셀의 테이퍼 각도가 심하게 기울어져 있거나 또는 안으로 들어가는 형태(역테이퍼)를 나타내면 우수한 특성을 나타낼 수 없게 된다. 본 발명은 상기 화학식 1 및 화학식 2로 표시되는 제1 광중합 개시제 및 제2 광중합 개시제를 70:30 내지 79:21의 중량비로 혼합 사용함으로써, 패턴 픽셀의 테이퍼 각도가 90°에 가깝도록 제어함으로써, 테이퍼 특성을 개선시킬 수 있다. 즉, 일 구현예에 따른 감광성 수지 조성물을 이용하여 제조되는 감광성 수지막은 패턴 픽셀 벽면의 직진성 개선을 꾀할 수 있다. Conventionally, a photosensitive resin composition undergoes thermal curing through a coating and baking process on a substrate. Thereafter, a process of forming a pattern of a desired shape is performed through an exposure process. If the taper angle of the pattern pixel formed after all processes are completed is severely tilted or shows a shape that goes inward (reverse taper), excellent characteristics cannot be exhibited. The present invention improves the taper characteristics by controlling the taper angle of the pattern pixel to be close to 90° by mixing and using the first photopolymerization initiator and the second photopolymerization initiator represented by the chemical formulas 1 and 2 in a weight ratio of 70:30 to 79:21. That is, the photosensitive resin film manufactured using the photosensitive resin composition according to one embodiment can improve the straightness of the pattern pixel wall.
이하에서 각 성분에 대하여 구체적으로 설명한다.Each component is described in detail below.
(C) 광중합 개시제(C) Photopolymerization initiator
상기 제1 광중합 개시제 및 제2 광중합 개시제는 70:30 내지 79:21의 중량비로 포함되어야 패턴 직진성 개선을 꾀할 수 있으며, 상기 제1 광중합 개시제 및 제2 광중합 개시제의 혼합 중량비가 상기 범위를 벗어날 경우, 패턴 테이퍼 각도가 둔각 또는 예각을 가지게 되어 90°에서 멀어짐으로써, 패턴 직진성을 개선시키기 어려워진다.The first photopolymerization initiator and the second photopolymerization initiator should be included in a weight ratio of 70:30 to 79:21 to improve pattern straightness. If the mixing weight ratio of the first photopolymerization initiator and the second photopolymerization initiator is outside the above range, the pattern taper angle becomes an obtuse or acute angle and moves away from 90°, making it difficult to improve pattern straightness.
구체적으로, 상기 제1 광중합 개시제 및 제2 광중합 개시제는 72:28 내지 78:22의 중량비로 포함될 수 있으며, 이 경우 패턴 직진성 개선이 보다 용이할 수 있다.Specifically, the first photopolymerization initiator and the second photopolymerization initiator may be included in a weight ratio of 72:28 to 78:22, in which case pattern straightness may be more easily improved.
예컨대, 상기 화학식 1 및 화학식 2에서, R4 및 R5는 각각 독립적으로 치환 또는 비치환된 C1 내지 C20 알킬기일 수 있다. 구체적으로, 상기 R4 및 R5는 각각 독립적으로 비치환된 C1 내지 C20 알킬기이고, 상기 R4의 탄소수는 상기 R5의 탄소수보다 적을 수 있다. 이 경우, 패턴 직진성 개선에 보다 우수한 효과를 기대할 수 있다.For example, in the chemical formulas 1 and 2, R 4 and R 5 may each independently be a substituted or unsubstituted C1 to C20 alkyl group. Specifically, R 4 and R 5 may each independently be an unsubstituted C1 to C20 alkyl group, and the number of carbon atoms in R 4 may be less than the number of carbon atoms in R 5. In this case, a better effect in improving pattern straightness can be expected.
예컨대, 상기 제1 광중합 개시제는 하기 화학식 1-1 내지 화학식 1-3 중 적어도 하나 이상을 포함할 수 있으나, 반드시 이에 한정되는 것은 아니다.For example, the first photopolymerization initiator may include at least one of the following chemical formulae 1-1 to 1-3, but is not necessarily limited thereto.
[화학식 1-1][Chemical Formula 1-1]
[화학식 1-2][Chemical Formula 1-2]
[화학식 1-3][Chemical Formula 1-3]
예컨대, 상기 제2 광중합 개시제는 하기 화학식 2-1 내지 화학식 2-3 중 적어도 하나 이상을 포함할 수 있으나, 반드시 이에 한정되는 것은 아니다.For example, the second photopolymerization initiator may include at least one of the following chemical formulas 2-1 to 2-3, but is not necessarily limited thereto.
[화학식 2-1][Chemical Formula 2-1]
[화학식 2-2][Chemical Formula 2-2]
[화학식 2-3][Chemical Formula 2-3]
한편, 일 구현예에 따른 감광성 수지 조성물은 상기 제1 광중합 개시제 및 제2 광중합 개시제 외에, 추가로 벤조페논계 화합물, 티오크산톤계 화합물, 벤조인계 화합물, 트리아진계 화합물, 옥심계 화합물, 아세토페논계 화합물 또는 이들의 조합을 더 포함할 수 있다.Meanwhile, the photosensitive resin composition according to one embodiment may further include, in addition to the first photopolymerization initiator and the second photopolymerization initiator, a benzophenone-based compound, a thioxanthone-based compound, a benzoin-based compound, a triazine-based compound, an oxime-based compound, an acetophenone-based compound, or a combination thereof.
상기 벤조페논계 화합물의 예로는, 벤조페논, 벤조일안식향산, 벤조일안식향산메틸, 4-페닐벤조페논, 히드록시벤조페논, 아크릴화벤조페논, 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논, 4,4'-디메틸아미노벤조페논, 4,4'-디클로로벤조페논, 3,3'-디메틸-2-메톡시벤조페논 등을 들 수 있다.Examples of the above benzophenone compounds include benzophenone, benzoyl benzoic acid, methyl benzoyl benzoate, 4-phenylbenzophenone, hydroxybenzophenone, acrylated benzophenone, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, 4,4'-dimethylaminobenzophenone, 4,4'-dichlorobenzophenone, 3,3'-dimethyl-2-methoxybenzophenone, etc.
상기 티오크산톤계 화합물의 예로는, 티오크산톤, 2-메틸티오크산톤, 이소프로필티오크산톤, 2,4-디에틸티오크산톤, 2,4-디이소프로필티오크산톤, 2-클로로티오크산톤 등을 들 수 있다.Examples of the above thioxanthone compounds include thioxanthone, 2-methylthioxanthone, isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone, 2-chlorothioxanthone, etc.
상기 벤조인계 화합물의 예로는, 벤조인, 벤조인메틸에테르, 벤조인에틸에테르, 벤조인이소프로필에테르, 벤조인이소부틸에테르, 벤질디메틸케탈 등을 들 수 있다.Examples of the above benzoin compounds include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzyl dimethyl ketal, etc.
상기 트리아진계 화합물의 예로는, 2,4,6-트리클로로-s-트리아진, 2-페닐-4,6-비스(트리클로로메틸)-s-트리아진, 2-(3',4'-디메톡시스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4'-메톡시나프틸)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(p-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(p-톨릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-비페닐-4,6-비스(트리클로로메틸)-s-트리아진, 비스(트리클로로메틸)-6-스티릴-s-트리아진, 2-(나프토-1-일)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시나프토-1-일)-4,6-비스(트리클로로메틸)-s-트리아진, 2-4-비스(트리클로로메틸)-6-피페로닐-s-트리아진, 2-4-비스(트리클로로메틸)-6-(4-메톡시스티릴)-s-트리아진, 2-[4-(4-에틸페닐)-페닐]-4,6-비스(트리클로로메틸)-1,3,5-트리아진 등을 들 수 있다.Examples of the above triazine compounds include 2,4,6-trichloro-s-triazine, 2-phenyl-4,6-bis(trichloromethyl)-s-triazine, 2-(3',4'-dimethoxystyryl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4'-methoxynaphthyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(p-methoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(p-tolyl)-4,6-bis(trichloromethyl)-s-triazine, 2-biphenyl-4,6-bis(trichloromethyl)-s-triazine, bis(trichloromethyl)-6-styryl-s-triazine, Examples thereof include 2-(naphtho-1-yl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxynaphtho-1-yl)-4,6-bis(trichloromethyl)-s-triazine, 2-4-bis(trichloromethyl)-6-piperonyl-s-triazine, 2-4-bis(trichloromethyl)-6-(4-methoxystyryl)-s-triazine, and 2-[4-(4-ethylphenyl)-phenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine.
상기 옥심계 화합물의 예로는 O-아실옥심계 화합물, 2-(O-벤조일옥심)-1-[4-(페닐티오)페닐]-1,2-옥탄디온, 1-(O-아세틸옥심)-1-[9-에틸-6-(2-메틸벤조일)-9H-카르바졸-3-일]에탄온, O-에톡시카르보닐-α-옥시아미노-1-페닐프로판-1-온 등을 사용할 수 있다. 상기 O-아실옥심계 화합물의 구체적인 예로는, 1,2-옥탄디온, 2-디메틸아미노-2-(4-메틸벤질)-1-(4-모르폴린-4-일-페닐)-부탄-1-온, 1-(4-페닐술파닐페닐)-부탄-1,2-디온-2-옥심-O-벤조에이트, 1-(4-페닐술파닐페닐)-옥탄-1,2-디온-2-옥심-O-벤조에이트, 1-(4-페닐술파닐페닐)-옥탄-1-온옥심-O-아세테이트, 1-(4-페닐술파닐페닐)-부탄-1-온옥심-O-아세테이트 등을 사용할 수 있다. Examples of the above oxime compounds include O-acyloxime compounds, 2-(O-benzoyloxime)-1-[4-(phenylthio)phenyl]-1,2-octanedione, 1-(O-acetyloxime)-1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]ethanone, O-ethoxycarbonyl-α-oxyamino-1-phenylpropan-1-one, etc. Specific examples of the above O-acyloxime compounds include 1,2-octanedione, 2-dimethylamino-2-(4-methylbenzyl)-1-(4-morpholin-4-yl-phenyl)-butan-1-one, 1-(4-phenylsulfanylphenyl)-butane-1,2-dione-2-oxime-O-benzoate, 1-(4-phenylsulfanylphenyl)-octane-1,2-dione-2-oxime-O-benzoate, 1-(4-phenylsulfanylphenyl)-octane-1-one oxime-O-acetate, 1-(4-phenylsulfanylphenyl)-butane-1-one oxime-O-acetate, etc.
상기 아세토페논계 화합물의 예로는, 2,2'-디에톡시아세토페논, 2,2'-디부톡시아세토페논, 2-히드록시-2-메틸프로피오페논, p-t-부틸트리클로로아세토페논, p-t-부틸디클로로아세토페논, 4-클로로아세토페논, 2,2'-디클로로-4-페녹시아세토페논, 2-메틸-1-(4-(메틸티오)페닐)-2-모폴리노프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모폴리노페닐)-부탄-1-온 등을 들 수 있다.Examples of the above acetophenone compounds include 2,2'-diethoxyacetophenone, 2,2'-dibutoxyacetophenone, 2-hydroxy-2-methylpropiophenone, p-t-butyltrichloroacetophenone, p-t-butyldichloroacetophenone, 4-chloroacetophenone, 2,2'-dichloro-4-phenoxyacetophenone, 2-methyl-1-(4-(methylthio)phenyl)-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-butan-1-one, etc.
상기 광중합 개시제는 상기 화합물 이외에도 카바졸계 화합물, 디케톤류 화합물, 술포늄보레이트계 화합물, 디아조계 화합물, 이미다졸계 화합물, 비이미다졸계 화합물, 플루오렌계 화합물 등을 사용할 수 있다.In addition to the above compound, the photopolymerization initiator may also include a carbazole compound, a diketone compound, a sulfonium borate compound, a diazo compound, an imidazole compound, a biimidazole compound, a fluorene compound, etc.
상기 광중합 개시제는 빛을 흡수하여 들뜬 상태가 된 후 그 에너지를 전달함으로써 화학반응을 일으키는 광증감제와 함께 사용될 수도 있다.The above photopolymerization initiator may also be used together with a photosensitizer that causes a chemical reaction by absorbing light, becoming excited, and then transferring the energy.
상기 광증감제의 예로는, 테트라에틸렌글리콜비스-3-머캡토프로피오네이트, 펜타에리트리톨테트라키스-3-머캡토프로피오네이트, 디펜타에리트리톨테트라키스-3-머캡토프로피오네이트 등을 들 수 있다. Examples of the above photosensitizer include tetraethylene glycol bis-3-mercaptopropionate, pentaerythritol tetrakis-3-mercaptopropionate, dipentaerythritol tetrakis-3-mercaptopropionate, and the like.
상기 광중합 개시제는 감광성 수지 조성물 총량에 대하여 0.1 중량% 내지 5 중량%, 예컨대 0.1 중량% 내지 3 중량%로 포함될 수 있다. 상기 광중합 개시제가 상기 범위 내로 포함될 경우, 패턴 형성 공정에서 노광 시 경화가 충분히 일어나 우수한 신뢰성을 얻을 수 있으며, 패턴의 내열성, 내광성 및 내화학성이 우수하고, 해상도 및 밀착성 또한 우수하며, 미반응 개시제로 인한 투과율의 저하를 막을 수 있다.The above photopolymerization initiator may be included in an amount of 0.1 wt% to 5 wt%, for example, 0.1 wt% to 3 wt%, based on the total amount of the photosensitive resin composition. When the photopolymerization initiator is included within the above range, sufficient curing occurs upon exposure in the pattern forming process, thereby obtaining excellent reliability, and the pattern has excellent heat resistance, light resistance, and chemical resistance, and also excellent resolution and adhesion, and can prevent a decrease in transmittance due to unreacted initiator.
(A) 바인더 수지(A) Binder resin
상기 바인더 수지는 카도계 바인더 수지, 아크릴계 바인더 수지, 폴리이미드계 바인더 수지, 폴리우레탄계 바인더 수지 또는 이들의 조합의 수지를 사용할 수 있다. The above binder resin may be a cardo-based binder resin, an acrylic-based binder resin, a polyimide-based binder resin, a polyurethane-based binder resin, or a combination thereof.
상기 바인더 수지는 상기 종류 중 좋게는 상기 카도계 바인더 수지와 상기 아크릴계 바인더 수지의 혼합물을 사용할 수 있다. 이 경우 상기 감광성 수지 조성물의 내열성 및 내화학성이 개선될 수 있으며, 무엇보다도 저반사 특성 확보에 매우 유리할 수 있다. The above binder resin may preferably be a mixture of the above cardo-based binder resin and the above acrylic-based binder resin among the above types. In this case, the heat resistance and chemical resistance of the photosensitive resin composition may be improved, and above all, it may be very advantageous in securing low-reflection characteristics.
상기 카도계 바인더 수지의 중량평균분자량은 1,000 g/mol 내지 50,000 g/mol일 수 있고, 구체적으로는 3,000 g/mol 내지 35,000 g/mol일 수 있다. 상기 카도계 바인더 수지의 중량평균분자량이 상기 범위 내일 경우 블랙 매트릭스나 차광용 격벽 제조 시 우수한 패턴성 및 현상성을 얻을 수 있다.The weight average molecular weight of the above-mentioned cardo-based binder resin may be 1,000 g/mol to 50,000 g/mol, and specifically, may be 3,000 g/mol to 35,000 g/mol. When the weight average molecular weight of the above-mentioned cardo-based binder resin is within the above range, excellent patterning properties and developability can be obtained when manufacturing a black matrix or a light-shielding barrier.
상기 카도계 바인더 수지는 하기 화학식 3으로 표시되는 반복단위를 포함하는 화합물일 수 있다.The above-mentioned cardo-based binder resin may be a compound including a repeating unit represented by the following chemical formula 3.
[화학식 3][Chemical Formula 3]
상기 화학식 3에서,In the above chemical formula 3,
R24 내지 R27은 각각 독립적으로 수소 원자, 할로겐 원자, 또는 치환 또는 비치환된 C1 내지 C20 알킬기일 수 있고, R 24 to R 27 can each independently be a hydrogen atom, a halogen atom, or a substituted or unsubstituted C1 to C20 alkyl group,
R28 및 R29는 각각 독립적으로 수소 원자, 또는 CH2ORa(Ra는 비닐기, 아크릴기 또는 메타크릴기)일 수 있고,R 28 and R 29 can each independently be a hydrogen atom, or CH 2 OR a (R a is a vinyl group, an acrylic group, or a methacrylic group),
R30은 수소 원자, 치환 또는 비치환된 C1 내지 C20 알킬기, 치환 또는 비치환된 C2 내지 C20 알케닐기, 아크릴기, 또는 메타크릴기일 수 있고,R 30 may be a hydrogen atom, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C2 to C20 alkenyl group, an acrylic group, or a methacryl group,
Z1은 단일결합, O, CO, SO2, CRbRc, SiRdRe(여기서, Rb 내지 Re는 서로 동일하거나 상이하며, 수소 원자, 또는 치환 또는 비치환된 C1 내지 C20 알킬기임), 또는 하기 화학식 3-1 내지 화학식 3-11로 표시되는 화합물로 이루어진 군에서 선택되는 어느 하나일 수 있고,Z 1 may be any one selected from the group consisting of a single bond, O, CO, SO 2 , CR b R c , SiR d R e (wherein, R b to R e are the same as or different from each other and are hydrogen atoms, or substituted or unsubstituted C1 to C20 alkyl groups), or compounds represented by the following chemical formulas 3-1 to 3-11,
Z2는 산무수물 잔기 또는 산이무수물 잔기일 수 있다.Z 2 can be an acid anhydride residue or an acid dianhydride residue.
[화학식 3-1][Chemical Formula 3-1]
[화학식 3-2][Chemical Formula 3-2]
[화학식 3-3][Chemical Formula 3-3]
[화학식 3-4][Chemical Formula 3-4]
[화학식 3-5][Chemical Formula 3-5]
상기 화학식 3-5에서,In the above chemical formula 3-5,
Rf는 수소 원자, 에틸기, C2H4Cl, C2H4OH, CH2CH=CH2, 또는 페닐기이다.R f is a hydrogen atom, an ethyl group, C 2 H 4 Cl, C 2 H 4 OH, CH 2 CH=CH 2 , or a phenyl group.
[화학식 3-6][Chemical Formula 3-6]
[화학식 3-7][Chemical Formula 3-7]
[화학식 3-8][Chemical Formula 3-8]
[화학식 3-9][Chemical Formula 3-9]
[화학식 3-10][Chemical Formula 3-10]
[화학식 3-11][Chemical Formula 3-11]
상기 카도계 바인더 수지는 구체적으로 하기 화학식 4로 표시되는 화합물을 테트라카르복실산 이무수물과 반응시켜 얻을 수 있다. The above-mentioned cardo-based binder resin can be specifically obtained by reacting a compound represented by the following chemical formula 4 with tetracarboxylic dianhydride.
[화학식 4][Chemical Formula 4]
상기 테트라카르복시산 이무수물은 방향족 테트라카르복시산 이무수물일 수 있다. 상기 방향족 테트라카르복시산 이무수물의 예로는, 피로멜릭산 이무수물, 3,3',4,4'-비페닐테트라카르복시산 이무수물, 2,3,3',4-비페닐테트라카르복시산 이무수물, 2,2',3,3'-비페닐테트라카르복시산 이무수물, 3,3',4,4'-벤조페논테트라카르복시산 이무수물, 3,3',4,4'-비페닐에테르테트라카르복시산 이무수물, 3,3',4,4'-디페닐술폰테트라카르복시산 이무수물, 1,2,3,4-사이클로펜탄테트라카르복시산 이무수물, 1,2,5,6-나프탈렌테트라카르복시산 이무수물, 2,3,6,7-나프탈렌테트라카르복시산 이무수물, 1,4,5,8-나프탈렌테트라카르복시산 이무수물, 2,3,5,6-피리딘테트라카르복시산 이무수물, 3,4,9,10-페릴렌테트라카르복시산 이무수물, 2,2-비스(3,4-디카르복시페닐)헥사플루오로프로판 이무수물 등을 들 수 있으나, 이에 한정되는 것은 아니다.The above tetracarboxylic acid dianhydride may be an aromatic tetracarboxylic acid dianhydride. Examples of the above aromatic tetracarboxylic dianhydrides include pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, 2,3,3',4-biphenyltetracarboxylic dianhydride, 2,2',3,3'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-benzophenonetetracarboxylic dianhydride, 3,3',4,4'-biphenylethertetracarboxylic dianhydride, 3,3',4,4'-diphenylsulfonetetracarboxylic dianhydride, 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, Examples thereof include, but are not limited to, 1,4,5,8-naphthalenetetracarboxylic acid dianhydride, 2,3,5,6-pyridinetetracarboxylic acid dianhydride, 3,4,9,10-perylenetetracarboxylic acid dianhydride, and 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride.
상기 아크릴계 바인더 수지는 제1 에틸렌성 불포화 단량체 및 이와 공중합 가능한 제2 에틸렌성 불포화 단량체의 공중합체로, 하나 이상의 아크릴계 반복단위를 포함하는 수지이다. The above acrylic binder resin comprises a first ethylenically unsaturated monomer A resin comprising a copolymer of a second ethylenically unsaturated monomer copolymerizable therewith and one or more acrylic repeating units.
상기 제1 에틸렌성 불포화 단량체는 하나 이상의 카르복시기를 함유하는 에틸렌성 불포화 단량체이며, 이의 구체적인 예로는 아크릴산, 메타크릴산, 말레산, 이타콘산, 푸마르산 또는 이들의 조합을 들 수 있다.The above first ethylenically unsaturated monomer is an ethylenically unsaturated monomer containing at least one carboxyl group, and specific examples thereof include acrylic acid, methacrylic acid, maleic acid, itaconic acid, fumaric acid, or a combination thereof.
상기 제1 에틸렌성 불포화 단량체는 상기 아크릴계 바인더 수지 총량에 대하여 5 내지 50 중량%로 포함될 수 있고, 구체적으로는 10 내지 40 중량%로 포함될 수 있다.The first ethylenically unsaturated monomer may be included in an amount of 5 to 50 wt%, and specifically, 10 to 40 wt%, based on the total amount of the acrylic binder resin.
상기 제2 에틸렌성 불포화 단량체는 스티렌, α-메틸스티렌, 비닐톨루엔, 비닐벤질메틸에테르 등의 방향족 비닐 화합물; 메틸(메타)아크릴레이트, 에틸(메타)아크릴레이트, 부틸(메타)아크릴레이트, 2-히드록시에틸(메타)아크릴레이트, 2-히드록시 부틸(메타)아크릴레이트, 벤질(메타)아크릴레이트, 사이클로헥실(메타)아크릴레이트, 페닐(메타)아크릴레이트 등의 불포화 카르복시산 에스테르 화합물; 2-아미노에틸(메타)아크릴레이트, 2-디메틸아미노에틸(메타)아크릴레이트 등의 불포화 카르복시산 아미노 알킬 에스테르 화합물; 초산비닐, 안식향산 비닐 등의 카르복시산 비닐 에스테르 화합물; 글리시딜(메타)아크릴레이트 등의 불포화 카르복시산 글리시딜 에스테르 화합물; (메타)아크릴로니트릴 등의 시안화 비닐 화합물; (메타)아크릴아미드 등의 불포화 아미드 화합물; 등을 들 수 있으며, 이들을 단독으로 또는 둘 이상 혼합하여 사용할 수 있다.The above second ethylenically unsaturated monomer is selected from the group consisting of aromatic vinyl compounds such as styrene, α-methylstyrene, vinyltoluene, and vinylbenzyl methyl ether; unsaturated carboxylic acid ester compounds such as methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxy butyl (meth)acrylate, benzyl (meth)acrylate, cyclohexyl (meth)acrylate, and phenyl (meth)acrylate; unsaturated carboxylic acid amino alkyl ester compounds such as 2-aminoethyl (meth)acrylate and 2-dimethylaminoethyl (meth)acrylate; carboxylic acid vinyl ester compounds such as vinyl acetate and vinyl benzoate; unsaturated carboxylic acid glycidyl ester compounds such as glycidyl (meth)acrylate; Examples thereof include cyanide vinyl compounds such as (meth)acrylonitrile; unsaturated amide compounds such as (meth)acrylamide; etc., and these may be used alone or in combination of two or more thereof.
상기 아크릴계 바인더 수지의 구체적인 예로는 메타크릴산/벤질메타크릴레이트 공중합체, 메타크릴산/벤질메타크릴레이트/스티렌 공중합체, 메타크릴산/벤질메타크릴레이트/2-히드록시에틸메타크릴레이트 공중합체, 메타크릴산/벤질메타크릴레이트/스티렌/2-히드록시에틸메타크릴레이트 공중합체 등을 들 수 있으나, 이에 한정되는 것은 아니며, 이들을 단독 또는 2종 이상을 배합하여 사용할 수도 있다. Specific examples of the above acrylic binder resin include, but are not limited to, a methacrylic acid/benzyl methacrylate copolymer, a methacrylic acid/benzyl methacrylate/styrene copolymer, a methacrylic acid/benzyl methacrylate/2-hydroxyethyl methacrylate copolymer, a methacrylic acid/benzyl methacrylate/styrene/2-hydroxyethyl methacrylate copolymer, and the like. These may be used singly or in combination of two or more.
상기 아크릴계 바인더 수지의 중량평균분자량은 3,000 g/mol 내지 150,000 g/mol일 수 있고, 구체적으로는 5,000 g/mol 내지 50,000 g/mol일 수 있고, 더욱 구체적으로는 20,000 g/mol 내지 30,000 g/mol일 수 있다. 상기 아크릴계 바인더 수지의 중량평균분자량이 상기 범위 내일 경우, 상기 흑색 감광성 수지 조성물의 물리적 및 화학적 물성이 우수하고 점도가 적절하며, 차광층 제조시 기판과의 밀착성이 우수하다.The weight average molecular weight of the above acrylic binder resin may be 3,000 g/mol to 150,000 g/mol, specifically 5,000 g/mol to 50,000 g/mol, and more specifically 20,000 g/mol to 30,000 g/mol. When the weight average molecular weight of the above acrylic binder resin is within the above range, the physical and chemical properties of the black photosensitive resin composition are excellent, the viscosity is appropriate, and the adhesion to the substrate is excellent when manufacturing a light-shielding layer.
상기 아크릴계 바인더 수지의 산가는 15 mgKOH/g 내지 60 mgKOH/g일 수 있고, 구체적으로는 20 mgKOH/g 내지 50 mgKOH/g일 수 있다. 상기 아크릴계 바인더 수지의 산가가 상기 범위 내일 경우 픽셀 패턴의 해상도가 우수하다.The acid value of the above acrylic binder resin may be 15 mgKOH/g to 60 mgKOH/g, and specifically may be 20 mgKOH/g to 50 mgKOH/g. When the acid value of the above acrylic binder resin is within the above range, the resolution of the pixel pattern is excellent.
상기 카도계 바인더 수지와 상기 아크릴계 바인더 수지가 혼합 사용되는 경우, 상기 아크릴계 바인더 수지는 상기 카도계 바인더 수지보다 많은 함량으로 포함될 수 있다. 이 경우 현상성 및 공정마진 향상을 꾀할 수 있다.When the above-mentioned cardo-based binder resin and the above-mentioned acrylic-based binder resin are used in combination, the acrylic-based binder resin may be included in a greater amount than the cardo-based binder resin. In this case, the developability and process margin can be improved.
상기 바인더 수지는 상기 감광성 수지 조성물 총량에 대하여 0.1 중량% 내지 1 중량%, 예컨대 0.3 중량% 내지 0.8 중량%로 포함될 수 있다. 상기 바인더 수지가 상기 범위 내로 포함될 경우, 점도가 적절히 유지되어 감광성 수지막 제조 시 패턴성, 공정성 및 현상성이 우수하다.The above binder resin may be included in an amount of 0.1 wt% to 1 wt%, for example, 0.3 wt% to 0.8 wt%, based on the total amount of the photosensitive resin composition. When the binder resin is included within the above range, the viscosity is appropriately maintained, so that patternability, processability, and developability are excellent when manufacturing a photosensitive resin film.
(B) 광중합성 단량체(B) Photopolymerizable monomer
상기 광중합성 단량체는 모노머 또는 올리고머로서, 적어도 1개의 에틸렌성 불포화 이중결합을 가지는 (메타)아크릴산의 일관능 또는 다관능(이관능, 삼관능 등) 에스테르가 사용될 수 있다.The above photopolymerizable monomer may be a monomer or oligomer, and a monofunctional or polyfunctional (difunctional, trifunctional, etc.) ester of (meth)acrylic acid having at least one ethylenically unsaturated double bond may be used.
상기 광중합성 단량체는 상기 에틸렌성 불포화 이중결합을 가짐으로써, 패턴 형성 공정에서 노광시 충분한 중합을 일으켜 내열성, 내광성 및 내화학성이 우수한 패턴을 형성할 수 있다.The above photopolymerizable monomer has the above ethylenically unsaturated double bond, and thus can sufficiently polymerize upon exposure to light in a pattern forming process to form a pattern with excellent heat resistance, light resistance, and chemical resistance.
상기 광중합성 단량체는 예컨대, 에틸렌 글리콜 디(메타)아크릴레이트, 디에틸렌 글리콜 디(메타)아크릴레이트, 트리에틸렌 글리콜 디(메타)아크릴레이트, 프로필렌 글리콜 디(메타)아크릴레이트, 네오펜틸 글리콜 디(메타)아크릴레이트, 1,4-부탄디올 디(메타)아크릴레이트, 1,6-헥산디올 디(메타)아크릴레이트, 비스페놀A 디(메타)아크릴레이트, 펜타에리트리톨 디(메타)아크릴레이트, 펜타에리트리톨 트리(메타)아크릴레이트, 펜타에리트리톨 테트라(메타)아크릴레이트, 펜타에리트리톨 헥사(메타)아크릴레이트, 디펜타에리트리톨 디(메타)아크릴레이트, 디펜타에리트리톨 트리(메타)아크릴레이트, 디펜타에리트리톨 펜타(메타)아크릴레이트, 디펜타에리트리톨 헥사(메타)아크릴레이트, 비스페놀A 에폭시(메타)아크릴레이트, 에틸렌 글리콜 모노메틸에테르 (메타)아크릴레이트, 트리메틸올 프로판 트리(메타)아크릴레이트, 트리스(메타)아크릴로일옥시에틸 포스페이트, 노볼락에폭시 (메타)아크릴레이트 또는 이들의 조합일 수 있다.The photopolymerizable monomers include, for example, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,4-butanediol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, bisphenol A di(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, pentaerythritol hexa(meth)acrylate, dipentaerythritol di(meth)acrylate, dipentaerythritol tri(meth)acrylate, dipentaerythritol. It may be penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, bisphenol A epoxy(meth)acrylate, ethylene glycol monomethyl ether (meth)acrylate, trimethylol propane tri(meth)acrylate, tris(meth)acryloyloxyethyl phosphate, novolac epoxy (meth)acrylate, or a combination thereof.
상기 광중합성 단량체의 시판되는 제품을 예로 들면 다음과 같다. 상기 (메타)아크릴산의 일관능 에스테르의 예로는, 도아 고세이 가가꾸 고교(주)社의 아로닉스 M-101®, 동 M-111®, 동 M-114® 등; 니혼 가야꾸(주)社의 KAYARAD TC-110S®, 동 TC-120S® 등; 오사카 유끼 가가꾸 고교(주)社의 V-158®, V-2311® 등을 들 수 있다. 상기 (메타)아크릴산의 이관능 에스테르의 예로는, 도아 고세이 가가꾸 고교(주)社의 아로닉스 M-210®, 동 M-240®, 동 M-6200® 등; 니혼 가야꾸(주)社의 KAYARAD HDDA®, 동 HX-220®, 동 R-604® 등; 오사카 유끼 가가꾸 고교(주)社의 V-260®, V-312®, V-335 HP® 등을 들 수 있다. 상기 (메타)아크릴산의 삼관능 에스테르의 예로는, 도아 고세이 가가꾸 고교(주)社의 아로닉스 M-309®, 동 M-400®, 동 M-405®, 동 M-450®, 동 M-7100®, 동 M-8030®, 동 M-8060® 등; 니혼 가야꾸(주)社의 KAYARAD TMPTA®, 동 DPCA-20®, 동-30®, 동-60®, 동-120® 등; 오사카 유끼 가야꾸 고교(주)社의 V-295®, 동-300®, 동-360®, 동-GPT®, 동-3PA®, 동-400® 등을 들 수 있다. 상기 제품을 단독 사용 또는 2종 이상 함께 사용할 수 있다.Examples of commercially available products of the above photopolymerizable monomers are as follows. Examples of monofunctional esters of (meth)acrylic acid include Aronix M- 101® , M- 111® , M- 114® from Toagosei Chemical Co., Ltd.; KAYARAD TC- 110S® , TC- 120S® from Nihon Kayaku Co., Ltd.; V- 158® , V- 2311® from Osaka Yuki Chemical Co., Ltd. Examples of bifunctional esters of (meth)acrylic acid include Aronix M- 210® , M- 240® , M- 6200® from Toagosei Chemical Co., Ltd.; Examples thereof include KAYARAD HDDA ® , HX-220 ® , R-604 ® from Nihon Kayaku Co., Ltd.; V-260 ® , V-312 ® , V-335 HP ® from Osaka Yuki Chemical Industry Co., Ltd.; and the like. Examples of the trifunctional ester of (meth)acrylic acid include Aronix M-309 ® , M-400 ® , M-405 ® , M-450 ® , M-7100 ® , M-8030 ® , M-8060 ® from Toagosei Chemical Industry Co., Ltd.; Examples thereof include KAYARAD TMPTA® , DONG DPCA- 20® , DONG- 30® , DONG- 60® , DONG- 120® from Nihon Kayaku Co., Ltd.; and V- 295® , DONG- 300® , DONG- 360® , DONG- GPT® , DONG- 3PA® , DONG- 400® from Osaka Yuki Kayaku Kogyo Co., Ltd. The above products can be used alone or in combination of two or more.
상기 광중합성 단량체는 보다 우수한 현상성을 부여하기 위하여 산무수물로 처리하여 사용할 수도 있다. The above photopolymerizable monomer can also be used after being treated with an acid anhydride to provide better developing properties.
상기 광중합성 단량체는 감광성 수지 조성물 총량에 대하여 1 중량% 내지 10 중량%, 예컨대 1 중량% 내지 5 중량%로 포함될 수 있다. 상기 광중합성 단량체가 상기 범위 내로 포함될 경우, 패턴 형성 공정에서 노광시 경화가 충분히 일어나 신뢰성이 우수하며, 패턴의 내열성, 내광성 및 내화학성이 우수하며, 해상도 및 밀착성 또한 우수하다.The photopolymerizable monomer may be included in an amount of 1 wt% to 10 wt%, for example 1 wt% to 5 wt%, based on the total amount of the photosensitive resin composition. When the photopolymerizable monomer is included within the above range, sufficient curing occurs upon exposure in the pattern forming process, resulting in excellent reliability, excellent heat resistance, light resistance, and chemical resistance of the pattern, and also excellent resolution and adhesion.
(D) 착색제(D) Colorant
상기 착색제는 안료, 예컨대 적색 안료, 녹색 안료, 황색 안료, 청색 안료 또는 이들의 조합을 포함할 수 있다.The colorant may include a pigment, such as a red pigment, a green pigment, a yellow pigment, a blue pigment, or a combination thereof.
예컨대, 상기 청색 안료는 프탈로시아닌계 화합물을 포함할 수 있다. 예컨대, 상기 청색 안료는 프탈로시아닌계 화합물일 수 있다.For example, the blue pigment may include a phthalocyanine-based compound. For example, the blue pigment may be a phthalocyanine-based compound.
예컨대 상기 청색 안료의 예로는 C.I. 청색 안료 15:6, C.I. 청색 안료 15, C.I. 청색 안료 15:1, C.I. 청색 안료 15:2, C.I. 청색 안료 15:3, C.I. 청색 안료 15:4, C.I. 청색 안료 15:5, C.I. 청색 안료 16 등과 같은 구리 프탈로시아닌 안료를 들 수 있다. 예컨대, 상기 청색 안료는 하기 화학식 4로 표시될 수 있으나, 반드시 이에 한정되는 것은 아니다.For example, examples of the blue pigment include copper phthalocyanine pigments such as C.I. Blue Pigment 15:6, C.I. Blue Pigment 15, C.I. Blue Pigment 15:1, C.I. Blue Pigment 15:2, C.I. Blue Pigment 15:3, C.I. Blue Pigment 15:4, C.I. Blue Pigment 15:5, C.I. Blue Pigment 16, etc. For example, the blue pigment may be represented by the following chemical formula 4, but is not necessarily limited thereto.
[화학식 4][Chemical Formula 4]
상기 적색 안료의 예로는 C.I. 적색 안료 254, C.I. 적색 안료 255, C.I. 적색 안료 264, C.I. 적색 안료 270, C.I. 적색 안료 272, C.I. 적색 안료 177, C.I. 적색 안료 89 등을 들 수 있다. 상기 녹색 안료의 예로는 C.I. 녹색 안료 36, C.I. 녹색 안료 7, C.I. 녹색 안료 58, C.I. 녹색 안료 59, C.I. 녹색 안료 62 등을 들 수 있다. 상기 황색 안료의 예로는 C.I. 황색 안료 139 등과 같은 이소인돌린계 안료, C.I. 황색 안료 138 등과 같은 퀴노프탈론계 안료, C.I. 황색 안료 150 등과 같은 니켈 컴플렉스 안료 등을 들 수 있다. 상기 안료는 이들을 단독으로 또는 둘 이상 혼합하여 사용할 수 있으며, 이들의 예에 한정되는 것은 아니다. Examples of the red pigments include C.I. Red Pigment 254, C.I. Red Pigment 255, C.I. Red Pigment 264, C.I. Red Pigment 270, C.I. Red Pigment 272, C.I. Red Pigment 177, C.I. Red Pigment 89, etc. Examples of the green pigments include C.I. Green Pigment 36, C.I. Green Pigment 7, C.I. Green Pigment 58, C.I. Green Pigment 59, C.I. Green Pigment 62, etc. Examples of the yellow pigments include isoindoline pigments such as C.I. Yellow Pigment 139, quinophthalone pigments such as C.I. Yellow Pigment 138, nickel complex pigments such as C.I. Yellow Pigment 150, etc. The above pigments may be used alone or in combination of two or more, and are not limited to these examples.
상기 안료를 분산시키기 위해 분산제를 함께 사용할 수 있다. 구체적으로는, 상기 안료를 분산제로 미리 표면처리하여 사용하거나, 조성물 제조 시 안료와 함께 분산제를 첨가하여 사용할 수 있다.A dispersant may be used together to disperse the pigment. Specifically, the pigment may be used by pre-surface-treating it with a dispersant, or the dispersant may be added together with the pigment during the preparation of the composition.
상기 분산제로는 비이온성 분산제, 음이온성 분산제, 양이온성 분산제 등을 사용할 수 있다. 상기 분산제의 구체적인 예로는, 폴리 알킬렌 글리콜 및 이의 에스테르, 폴리 옥시 알킬렌, 다가 알코올 에스테르 알킬렌 옥사이드 부가물, 알코올 알킬렌 옥사이드 부가물, 술폰산에스테르, 술폰산염, 카르복실산 에스테르, 카르복실산염, 알킬 아미드 알킬렌 옥사이드 부가물, 알킬 아민 등을 들 수 있으며, 이들을 단독으로 또는 둘 이상 혼합하여 사용할 수 있다.Nonionic dispersants, anionic dispersants, cationic dispersants, etc. can be used as the above dispersant. Specific examples of the above dispersant include polyalkylene glycol and its esters, polyoxyalkylene, polyhydric alcohol ester alkylene oxide adducts, alcohol alkylene oxide adducts, sulfonic acid esters, sulfonates, carboxylic acid esters, carboxylates, alkyl amide alkylene oxide adducts, alkyl amines, etc., and these can be used alone or in mixtures of two or more.
상기 분산제의 시판되는 제품을 예로 들면, BYK社의 DISPERBYK-101, DISPERBYK-130, DISPERBYK-140, DISPERBYK-160, DISPERBYK-161, DISPERBYK-162, DISPERBYK-163, DISPERBYK-164, DISPERBYK-165, DISPERBYK-166, DISPERBYK-170, DISPERBYK-171, DISPERBYK-182, DISPERBYK-2000, DISPERBYK-2001등; EFKA 케미칼社의 EFKA-47, EFKA-47EA, EFKA-48, EFKA-49, EFKA-100, EFKA-400, EFKA-450 등; Zeneka社의 Solsperse 5000, Solsperse 12000, Solsperse 13240, Solsperse 13940, Solsperse 17000, Solsperse 20000, Solsperse 24000GR, Solsperse 27000, Solsperse 28000 등; 또는 Ajinomoto社의 PB711, PB821 등이 있다.Examples of commercially available products of the above dispersants include DISPERBYK-101, DISPERBYK-130, DISPERBYK-140, DISPERBYK-160, DISPERBYK-161, DISPERBYK-162, DISPERBYK-163, DISPERBYK-164, DISPERBYK-165, DISPERBYK-166, DISPERBYK-170, DISPERBYK-171, DISPERBYK-182, DISPERBYK-2000, DISPERBYK-2001 from BYK; EFKA-47, EFKA-47EA, EFKA-48, EFKA-49, EFKA-100, EFKA-400, EFKA-450 from EFKA Chemicals; Zeneka's Solsperse 5000, Solsperse 12000, Solsperse 13240, Solsperse 13940, Solsperse 17000, Solsperse 20000, Solsperse 24000GR, Solsperse 27000, Solsperse 28000, etc.; or Ajinomoto's PB711, PB821, etc.
상기 분산제는 감광성 수지 조성물 총량에 대하여 0.1 중량% 내지 15 중량%로 포함될 수 있다. 분산제가 상기 범위 내로 포함될 경우, 조성물의 분산성이 우수함에 따라 블랙 컬럼 스페이서 제조 시 안정성, 현상성 및 패턴성이 우수하다. The above dispersant may be included in an amount of 0.1 wt% to 15 wt% based on the total amount of the photosensitive resin composition. When the dispersant is included within the above range, the composition has excellent dispersibility, and thus stability, developability, and patternability are excellent when manufacturing a black column spacer.
상기 안료는 수용성 무기염 및 습윤제를 이용하여 전처리하여 사용할 수도 있다. 안료를 상기 전처리하여 사용할 경우 안료의 평균입경을 미세화할 수 있다.The above pigment can also be used after being pretreated with a water-soluble inorganic salt and a wetting agent. If the pigment is used after being pretreated as described above, the average particle size of the pigment can be made finer.
상기 전처리는 상기 안료를 수용성 무기염 및 습윤제와 함께 니딩(kneading)하는 단계, 그리고 상기 니딩단계에서 얻어진 안료를 여과 및 수세하는 단계를 거쳐 수행될 수 있다.The above pretreatment can be performed through a step of kneading the pigment together with a water-soluble inorganic salt and a wetting agent, and a step of filtering and washing the pigment obtained in the kneading step.
상기 니딩은 40℃ 내지 100℃의 온도에서 수행될 수 있고, 상기 여과 및 수세는 물 등을 사용하여 무기염을 수세한 후 여과하여 수행될 수 있다.The above-mentioned kneading can be performed at a temperature of 40°C to 100°C, and the above-mentioned filtration and washing can be performed by washing away the inorganic salt using water or the like and then filtering.
상기 수용성 무기염의 예로는 염화나트륨, 염화칼륨 등을 들 수 있으나, 이에 한정되는 것은 아니다. 상기 습윤제는 상기 안료 및 상기 수용성 무기염이 균일하게 섞여 안료가 용이하게 분쇄될 수 있는 매개체 역할을 하며, 그 예로는 에틸렌 글리콜 모노에틸에테르, 프로필렌 글리콜 모노메틸에테르, 디에틸렌 글리콜 모노메틸에테르 등과 같은 알킬렌 글리콜 모노알킬에테르; 에탄올, 이소프로판올, 부탄올, 헥산올, 시클로헥산올, 에틸렌글리콜, 디에틸렌글리콜, 폴리에틸렌글리콜, 글리세린폴리에틸렌글리콜 등과 같은 알코올 등을 들 수 있으며, 이들을 단독 또는 둘 이상 혼합하여 사용할 수 있다.Examples of the water-soluble inorganic salt include, but are not limited to, sodium chloride, potassium chloride, etc. The wetting agent acts as a medium that allows the pigment and the water-soluble inorganic salt to be uniformly mixed and the pigment to be easily pulverized, and examples thereof include alkylene glycol monoalkyl ethers such as ethylene glycol monoethyl ether, propylene glycol monomethyl ether, diethylene glycol monomethyl ether, etc.; alcohols such as ethanol, isopropanol, butanol, hexanol, cyclohexanol, ethylene glycol, diethylene glycol, polyethylene glycol, glycerin polyethylene glycol, etc., and these may be used alone or in combination of two or more.
상기 니딩 단계를 거친 안료는 5 nm 내지 200 nm, 예컨대 5 nm 내지 150 nm의 평균 입경을 가질 수 있다. 안료의 평균 입경이 상기 범위 내인 경우, 안료 분산액에서의 안정성이 우수하고, 픽셀의 해상성 저하의 우려가 없다. The pigment that has undergone the above-mentioned kneading step may have an average particle size of 5 nm to 200 nm, for example, 5 nm to 150 nm. When the average particle size of the pigment is within the above range, the stability in the pigment dispersion is excellent, and there is no concern about a decrease in pixel resolution.
구체적으로, 상기 안료는 상기 분산제 및 후술하는 용매를 포함하는 안료분산액의 형태로 사용될 수 있고, 상기 안료분산액은 고형분의 안료, 분산제 및 용매를 포함할 수 있다. 상기 고형분의 안료는 상기 안료분산액 총량에 대해 5 중량% 내지 20 중량%, 예컨대 8 중량% 내지 15 중량%로 포함될 수 있다.Specifically, the pigment may be used in the form of a pigment dispersion containing the dispersant and the solvent described below, and the pigment dispersion may contain a pigment in solid content, a dispersant, and a solvent. The pigment in solid content may be contained in an amount of 5 wt% to 20 wt%, for example, 8 wt% to 15 wt%, based on the total amount of the pigment dispersion.
상기 착색제는 상기 감광성 수지 조성물 총량에 대하여 50 중량% 내지 80 중량%, 예컨대 60 중량% 내지 80 중량%로 포함될 수 있다. 상기 착색제가 상기 범위 내로 포함될 경우, 착색 효과 및 현상 성능이 우수하다.The above colorant may be included in an amount of 50 wt% to 80 wt%, for example 60 wt% to 80 wt%, based on the total amount of the photosensitive resin composition. When the colorant is included within the above range, the coloring effect and developing performance are excellent.
(E) 용매(E) Solvent
상기 용매는 상기 바인더 수지, 상기 착색제, 상기 광중합 개시제 및 상기 광중합성 단량체와의 상용성을 가지되 반응하지 않는 물질들이 사용될 수 있다.The solvent may be a substance that is compatible with, but does not react with, the binder resin, the colorant, the photopolymerization initiator, and the photopolymerizable monomer.
상기 용매의 예로는, 메탄올, 에탄올 등의 알코올류; 디클로로에틸에테르, n-부틸에테르, 디이소아밀에테르, 메틸페닐에테르, 테트라히드로퓨란등의에테르류; 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 에틸렌글리콜디메틸에테르(EDM) 등의 글리콜에테르류; 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트, 디에틸셀로솔브아세테이트 등의 셀로솔브아세테이트류; 메틸에틸카르비톨, 디에틸카르비톨, 디에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노에틸에테르, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜메틸에틸에테르, 디에틸렌글리콜디에틸에테르 등의 카르비톨류; 프로필렌글리콜메틸에테르아세테이트, 프로필렌글리콜프로필에테르아세테이트 등의 프로필렌글리콜알킬에테르아세테이트류; 톨루엔, 크실렌 등의 방향족 탄화수소류; 메틸에틸케톤, 사이클로헥사논, 4-히드록시-4-메틸-2-펜타논, 메틸-n-프로필케톤, 메틸-n-부틸케톤, 메틸-n-아밀케톤, 2-헵타논 등의 케톤류; 초산에틸, 초산-n-부틸, 초산이소부틸 등의 포화지방족 모노카르복실산알킬에스테르류; 젖산메틸, 젖산에틸 등의 젖산 에스테르류; 옥시초산메틸, 옥시초산에틸, 옥시초산부틸등의옥시초산알킬에스테르류; 메톡시초산메틸, 메톡시초산에틸, 메톡시초산부틸, 에톡시초산메틸, 에톡시초산에틸 등의 알콕시초산 알킬에스테르류; 3-옥시프로피온산메틸, 3-옥시프로피온산에틸 등의 3-옥시프로피온산 알킬에스테르류; 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-에톡시프로피온산에틸, 3-에톡시프로피온산메틸 등의 3-알콕시프로피온산 알킬에스테르류; 2-옥시프로피온산메틸, 2-옥시프로피온산에틸, 2-옥시프로피온산프로필 등의 2-옥시프로피온산 알킬에스테르류; 2-메톡시프로피온산메틸, 2-메톡시프로피온산에틸, 2-에톡시프로피온산에틸, 2-에톡시프로피온산메틸 등의 2-알콕시프로피온산 알킬에스테르류; 2-옥시-2-메틸프로피온산메틸, 2-옥시-2-메틸프로피온산에틸등의 2-옥시-2-메틸프로피온산 에스테르류, 2-메톡시-2-메틸프로피온산메틸, 2-에톡시-2-메틸프로피온산에틸 등의 2-알콕시-2-메틸프로피온산 알킬류의 모노옥시모노카르복실산 알킬에스테르류; 2-히드록시프로피온산에틸, 2-히드록시-2-메틸프로피온산에틸, 히드록시초산에틸, 2-히드록시-3-메틸부탄산메틸 등의 에스테르류; 피루빈산 에틸 등의 케톤산 에스테르류 등이 있으며, 또한, N-메틸포름아미드, N,N-디메틸포름아미드, N-메틸포름아닐라드, N-메틸아세트아미드, N,N-디메틸아세트아미드, N-메틸피롤리돈, 디메틸술폭시드, 벤질에틸에테르, 디헥실에테르, 아세틸아세톤, 이소포론, 카프론산, 카프릴산, 1-옥탄올, 1-노난올, 벤질알코올, 초산벤질, 안식향산에틸, 옥살산디에틸, 말레인산디에틸, γ-부티로락톤, 탄산에틸렌, 탄산프로필렌, 페닐셀로솔브아세테이트 등의 고비점 용매를 들 수 있다.Examples of the solvent include alcohols such as methanol and ethanol; ethers such as dichloroethyl ether, n-butyl ether, diisoamyl ether, methylphenyl ether, and tetrahydrofuran; glycol ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, and ethylene glycol dimethyl ether (EDM); cellosolve acetates such as methyl cellosolve acetate, ethyl cellosolve acetate, and diethyl cellosolve acetate; carbitols such as methyl ethyl carbitol, diethyl carbitol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, and diethylene glycol diethyl ether; propylene glycol alkyl ether acetates such as propylene glycol methyl ether acetate and propylene glycol propyl ether acetate; aromatic hydrocarbons such as toluene and xylene; Ketones such as methyl ethyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone, methyl-n-propyl ketone, methyl-n-butyl ketone, methyl-n-amyl ketone, and 2-heptanone; Saturated aliphatic monocarboxylic acid alkyl esters such as ethyl acetate, n-butyl acetate, and isobutyl acetate; Lactic acid esters such as methyl lactate and ethyl lactate; Oxyacetic acid alkyl esters such as methyl oxyacetate, ethyl oxyacetate, and butyl oxyacetate; Alkoxyacetic acid alkyl esters such as methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, and ethyl ethoxyacetate; 3-oxypropionic acid alkyl esters such as methyl 3-oxypropionate and ethyl 3-oxypropionate; 3-Alkoxypropionic acid alkyl esters, such as methyl 3-methoxypropionate, ethyl 3-methoxypropionate, ethyl 3-ethoxypropionate, and methyl 3-ethoxypropionate; 2-oxypropionic acid alkyl esters, such as methyl 2-oxypropionate, ethyl 2-oxypropionate, and propyl 2-oxypropionate; 2-alkoxypropionic acid alkyl esters, such as methyl 2-methoxypropionate, ethyl 2-methoxypropionate, ethyl 2-ethoxypropionate, and methyl 2-ethoxypropionate; 2-oxy-2-methylpropionic acid esters such as methyl 2-oxy-2-methylpropionate, ethyl 2-oxy-2-methylpropionate, etc., monooxymonocarboxylic acid alkyl esters of 2-alkoxy-2-methylpropionic acid alkyls such as methyl 2-methoxy-2-methylpropionate, ethyl 2-ethoxy-2-methylpropionate; Esters such as ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, ethyl hydroxyacetate, and methyl 2-hydroxy-3-methylbutanoate; Examples include ketone acid esters such as ethyl pyruvate, and also high boiling point solvents such as N-methylformamide, N,N-dimethylformamide, N-methylformanilide, N-methylacetamide, N,N-dimethylacetamide, N-methylpyrrolidone, dimethyl sulfoxide, benzyl ethyl ether, dihexyl ether, acetylacetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonanol, benzyl alcohol, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, and phenyl cellosolve acetate.
이들 중 좋게는 상용성 및 반응성을 고려하여, 사이클로헥사논 등의 케톤류; 에틸렌글리콜모노에틸에테르, 에틸렌디글리콜메틸에틸에테르, 에틸렌글리콜디메틸에테르, 에틸렌글리콜디에틸에테르 등의 글리콜에테르류; 에틸셀로솔브아세테이트 등의 에틸렌글리콜알킬에테르아세테이트류; 2-히드록시프로피온산에틸 등의 에스테르류; 디에틸렌글리콜모노메틸에테르 등의 카르비톨류; 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜프로필에테르아세테이트 등의 프로필렌글리콜알킬에테르아세테이트류가 사용될 수 있다.Among these, taking compatibility and reactivity into consideration, preferred examples thereof include ketones such as cyclohexanone; glycol ethers such as ethylene glycol monoethyl ether, ethylene diglycol methyl ethyl ether, ethylene glycol dimethyl ether, and ethylene glycol diethyl ether; ethylene glycol alkyl ether acetates such as ethyl cellosolve acetate; esters such as ethyl 2-hydroxypropionate; carbitols such as diethylene glycol monomethyl ether; and propylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate and propylene glycol propyl ether acetate.
상기 용매는 감광성 수지 조성물 총량에 대하여 잔부량, 예컨대 15 중량% 내지 40 중량%로 포함될 수 있다. 상기 용매가 상기 범위 내로 포함될 경우 감광성 수지 조성물이 적절한 점도를 가짐에 따라 감광성 수지막 제조 시 공정성이 우수하다.The above solvent may be included as a remainder, for example, 15 wt% to 40 wt%, based on the total amount of the photosensitive resin composition. When the solvent is included within the above range, the photosensitive resin composition has an appropriate viscosity, thereby providing excellent processability in the production of the photosensitive resin film.
(F) 기타 첨가제(F) Other additives
한편, 상기 감광성 수지 조성물은 말론산, 3-아미노-1,2-프로판디올, 실란계 커플링제, 레벨링제, 불소계 계면활성제, 라디칼 중합개시제 또는 이들의 조합의 첨가제를 더 포함할 수 있다.Meanwhile, the photosensitive resin composition may further include an additive of malonic acid, 3-amino-1,2-propanediol, a silane coupling agent, a leveling agent, a fluorinated surfactant, a radical polymerization initiator, or a combination thereof.
상기 실란계 커플링제는 기판과의 밀착성 등을 개선하기 위해 비닐기, 카르복실기, 메타크릴옥시기, 이소시아네이트기, 에폭시기 등의 반응성 치환기를 가질 수 있다. The above silane coupling agent may have a reactive substituent such as a vinyl group, a carboxyl group, a methacryloxy group, an isocyanate group, or an epoxy group to improve adhesion to a substrate, etc.
상기 실란계 커플링제의 예로는, 트리메톡시실릴벤조산, γ-메타크릴옥시프로필트리메톡시실란, 비닐트리아세톡시실란, 비닐트리메톡시실란, γ-이소시아네이트프로필트리에톡시실란, γ-글리시독시프로필트리메톡시실란, β-(3,4-에폭시사이클로헥실)에틸트리메톡시실란 등을 들 수 있으며, 이들을 단독 또는 2종 이상 혼합하여 사용할 수 있다. Examples of the above silane coupling agent include trimethoxysilylbenzoic acid, γ-methacryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatepropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, β-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, etc., and these may be used alone or in combination of two or more.
상기 실란계 커플링제는 감광성 수지 조성물 100 중량부에 대하여 0.01 중량부 내지 10 중량부로 포함될 수 있다. 상기 실란계 커플링제가 상기 범위 내로 포함될 경우 밀착성, 저장성 등이 우수하다. The above silane coupling agent may be included in an amount of 0.01 to 10 parts by weight per 100 parts by weight of the photosensitive resin composition. When the silane coupling agent is included within the above range, the adhesion, storability, etc. are excellent.
또한 상기 감광성 수지 조성물은 필요에 따라 코팅성 향상 및 결점생성 방지효과를 위해 계면활성제, 예컨대 불소계 계면활성제를 더 포함할 수 있다. In addition, the photosensitive resin composition may further include a surfactant, such as a fluorinated surfactant, to improve coating properties and prevent defects, if necessary.
상기 불소계 계면활성제로는, BM Chemie社의 BM-1000®, BM-1100®등; 다이닛폰잉키가가꾸고교(주)社의 메카팩 F 142D®, 동 F 172®, 동 F 173®, 동 F 183®, 동 F 554® 등; 스미토모스리엠(주)社의 프로라드 FC-135®, 동 FC-170C®, 동 FC-430®, 동 FC-431®등; 아사히그라스(주)社의 사프론 S-112®, 동 S-113®, 동 S-131®, 동 S-141®, 동 S-145®등; 도레이실리콘(주)社의 SH-28PA®, 동-190®, 동-193®, SZ-6032®, SF-8428® 등의 명칭으로 시판되고 있는 불소계 계면활성제를 사용할 수 있다.Examples of the above fluorinated surfactants include BM Chemie's BM- 1000® , BM-1100® , etc.; Dainippon Ink Chemical Co., Ltd.'s Mecapac F 142D® , Dong F 172®, Dong F 173® , Dong F 183® , Dong F 554® , etc.; Sumitomo Re-EM Co., Ltd.'s Prorad FC- 135® , Dong FC- 170C® , Dong FC- 430® , Dong FC-431® , etc.; Asahi Glass Co., Ltd.'s Saffron S- 112® , Dong S- 113® , Dong S-131®, Dong S- 141® , Dong S- 145®, etc .; Fluorinated surfactants sold commercially by Doray Silicone Co., Ltd. under the names SH- 28PA® , Dong- 190® , Dong- 193® , SZ- 6032® , and SF- 8428® can be used.
상기 불소계 계면활성제는 감광성 수지 조성물 100 중량부에 대하여 0.001 중량부 내지 5 중량부로 사용될 수 있다. 상기 계면활성제가 상기 범위 내로 포함될 경우 코팅 균일성이 확보되고, 얼룩이 발생하지 않으며, IZO 기판 또는 유리기판에 대한 습윤성(wetting)이 우수하다.The above fluorine-based surfactant can be used in an amount of 0.001 to 5 parts by weight per 100 parts by weight of the photosensitive resin composition. When the above surfactant is included within the above range, coating uniformity is secured, no staining occurs, and wetting for an IZO substrate or glass substrate is excellent.
또한 상기 감광성 수지 조성물은 물성을 저해하지 않는 범위 내에서 산화방지제, 안정제 등의 기타 첨가제가 일정량 첨가될 수도 있다. In addition, other additives such as antioxidants and stabilizers may be added in a certain amount to the photosensitive resin composition as long as the physical properties are not impaired.
다른 일 구현예는 전술한 감광성 수지 조성물을 노광, 현상 및 경화하여 제조된 감광성 수지막을 제공한다. Another embodiment provides a photosensitive resin film manufactured by exposing, developing, and curing the photosensitive resin composition described above.
상기 감광성 수지막 제조방법은 다음과 같다.The method for manufacturing the above photosensitive resin film is as follows.
(1) 도포 및 도막 형성 단계(1) Application and film formation stage
감광성 수지 조성물을 소정의 전처리를 한 기판 상에 스핀 또는 슬릿 코트법, 롤 코트법, 스크린 인쇄법, 어플리케이터법 등의 방법을 사용하여 원하는 두께로 도포한 후, 70~100℃에서 1~10분 동안 가열하여 용제를 제거함으로써 도막을 형성한다. A photosensitive resin composition is applied to a substrate that has undergone a predetermined pretreatment to a desired thickness using a method such as spin or slit coating, roll coating, screen printing, or applicator, and then heated at 70 to 100°C for 1 to 10 minutes to remove the solvent, thereby forming a coating film.
(2) 노광 단계(2) Exposure stage
상기 얻어진 도막에 필요한 패턴 형성을 위해 블랙 매트릭스 패턴을 구현할 Full tone 부분 구성된 마스크를 개재한 뒤, 200~500 nm의 활성선을 조사한다. 조사에 사용되는 광원으로는 저압 수은등, 고압 수은등, 초고압 수은등, 금속 할로겐화물 램프, 아르곤 가스 레이저 등을 사용할 수 있으며, 경우에 따라 X선, 전자선 등도 이용할 수 있다.In order to form the pattern required for the obtained film, a mask composed of a full tone part that implements a black matrix pattern is interposed, and then an active line of 200 to 500 nm is irradiated. As a light source used for the irradiation, a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, an argon gas laser, etc. can be used, and in some cases, X-rays, electron beams, etc. can also be used.
노광량은 조성물 각 성분의 종류, 배합량 및 건조 막 두께에 따라 다르지만, 고압 수은등을 사용하는 경우에는 80 mJ/cm2 이하이다.The exposure dose varies depending on the type, mixing amount, and dry film thickness of each component of the composition, but is 80 mJ/ cm2 or less when using a high-pressure mercury lamp.
(3) 현상 단계(3) Phenomenon stage
현상 방법으로는 상기 노광 단계에 이어 알칼리성 수용액을 현상액으로 이용하여 불필요한 부분을 용해, 제거함으로써 노광 부분만을 잔존시켜 패턴을 형성시킨다. In the developing method, after the above exposure step, an alkaline aqueous solution is used as a developer to dissolve and remove unnecessary parts, thereby leaving only the exposed parts to form a pattern.
(4) 후처리 단계(4) Post-processing step
상기 공정에서 현상에 의해 수득된 화상 패턴을 후가열 공정(230℃)을 진행하여 패턴을 얻는다. In the above process, the image pattern obtained by the phenomenon is subjected to a post-heating process (230°C) to obtain a pattern.
전술한 감광성 수지 조성물을 이용함으로써, 테이퍼 특성이 우수한, 즉 직진성이 우수한 패턴을 얻을 수 있다. By using the photosensitive resin composition described above, a pattern having excellent taper characteristics, i.e. excellent straightness, can be obtained.
또 다른 일 구현예는 상기 감광성 수지막을 포함하는 컬러필터를 제공한다. Another embodiment provides a color filter including the photosensitive resin film.
또 다른 일 구현예는 상기 감광성 수지막을 포함하는 CMOS 이미지 센서를 제공한다. Another embodiment provides a CMOS image sensor including the photosensitive resin film.
또 다른 일 구현예는 상기 컬러필터를 포함하는 디스플레이 장치를 제공한다.Another embodiment provides a display device including the color filter.
또 다른 일 구현예는 상기 CMOS 이미지 센서를 포함하는 카메라를 제공한다.Another embodiment provides a camera including the CMOS image sensor.
이하, 본 발명의 바람직한 실시예를 기재한다. 다만, 하기의 실시예는 본 발명의 바람직한 일실시예일 뿐, 본 발명이 하기 실시예에 의해 한정되는 것은 아니다.Hereinafter, preferred embodiments of the present invention will be described. However, the following embodiments are only preferred embodiments of the present invention, and the present invention is not limited to the following embodiments.
(실시예)(Example)
(제1 광중합 개시제)(First photopolymerization initiator)
예 1Example 1
하기 화학식 1-1로 표시되는 광중합 개시제(SPI-03 3; 삼양) A photopolymerization initiator represented by the following chemical formula 1-1 (SPI-03 3; Samyang)
[화학식 1-1][Chemical Formula 1-1]
예 2Example 2
화학식 1-2로 표시되는 광중합 개시제(SPI-03 0; 삼양)Photopolymerization initiator represented by chemical formula 1-2 (SPI-03 0; Samyang)
[화학식 1-2][Chemical Formula 1-2]
예 3Example 3
화학식 1-3으로 표시되는 광중합 개시제(SPI-03 41; 삼양)Photopolymerization initiator represented by chemical formula 1-3 (SPI-03 41; Samyang)
[화학식 1-3][Chemical Formula 1-3]
(제2 광중합 개시제)(Second photopolymerization initiator)
예 4Example 4
화학식 2-1로 표시되는 광중합 개시제(SPI-02 27; 삼양)Photopolymerization initiator represented by chemical formula 2-1 (SPI-02 27; Samyang)
[화학식 2-1][Chemical Formula 2-1]
예 5Example 5
화학식 2-2로 표시되는 광중합 개시제(SPI-02 2; 삼양) Photopolymerization initiator represented by chemical formula 2-2 (SPI-02 2; Samyang)
[화학식 2-2][Chemical Formula 2-2]
예 6Example 6
화학식 3-3으로 표시되는 광중합 개시제(SPI-02 1; 삼양) Photopolymerization initiator represented by chemical formula 3-3 (SPI-02 1; Samyang)
[화학식 2-3][Chemical Formula 2-3]
(감광성 수지 조성물 제조: 실시예 1 내지 실시예 7, 비교예 1 및 비교예 2)(Preparation of photosensitive resin composition: Examples 1 to 7, Comparative Examples 1 and 2)
실시예 1Example 1
하기 표 1에 나타낸 조성으로 실시예 1 내지 실시예 7, 비교예 1 및 비교예 2에 따른 감광성 수지 조성물을 제조하였다.Photosensitive resin compositions according to Examples 1 to 7 and Comparative Examples 1 and 2 were prepared with the compositions shown in Table 1 below.
구체적으로, 광중합 개시제의 함량을 정확히 측정한 뒤 용매를 투입하고, 광중합 개시제(제1 광중합 개시제 및 제2 광중합 개시제)가 다 녹을 때까지 충분히 교반하였다(30분 이상). 여기에 바인더 수지와 광중합성 단량체를 순차적으로 첨가한 뒤, 다시 1시간 가량 교반하였다. 이어서, 첨가제를 투입하고, 착색제(안료분산액)를 넣은 후 최종적으로 조성물 전체를 2시간 이상 교반하여, 감광성 수지 조성물을 제조하였다.Specifically, after accurately measuring the content of the photopolymerization initiator, the solvent was added, and the mixture was sufficiently stirred (for 30 minutes or more) until the photopolymerization initiators (the first photopolymerization initiator and the second photopolymerization initiator) were completely dissolved. The binder resin and the photopolymerizable monomer were sequentially added, and the mixture was stirred for another hour or so. Then, the additive was added, the colorant (pigment dispersion) was added, and finally, the entire composition was stirred for 2 hours or more, thereby producing a photosensitive resin composition.
(C-1) 화학식 1-1로 표시되는 광중합 개시제(C-1) Photopolymerization initiator represented by chemical formula 1-1
(C-2) 화학식 1-2로 표시되는 광중합 개시제(C-2) Photopolymerization initiator represented by chemical formula 1-2
(C-3) 화학식 1-3으로 표시되는 광중합 개시제(C-3) Photopolymerization initiator represented by chemical formula 1-3
(C-4) 화학식 2-1로 표시되는 광중합 개시제(C-4) Photopolymerization initiator represented by chemical formula 2-1
(C-5) 화학식 2-2로 표시되는 광중합 개시제(C-5) Photopolymerization initiator represented by chemical formula 2-2
(C-6) 화학식 2-3으로 표시되는 광중합 개시제(C-6) Photopolymerization initiator represented by chemical formula 2-3
(평가: 테이퍼 각도)(Evaluation: Taper Angle)
실시예 1 내지 실시예 7, 비교예 1 및 비교예 2의 감광성 수지 조성물을 소정의 전처리를 한 10cm * 10cm의 글라스 위에 스핀 코팅기(Mikasa社, Opticoat MS-A150)를 사용하여 1.3㎛ 두께로 코팅한 후, 열판(hot-plate)을 이용하여 80℃에서 150초 동안 소프트-베이킹(soft-baking)을 하고, 노광기(Ushio社, HB-50110AA)와 포토 패턴 마스크를 사용하여 50mJ로 노광하였다. 이어서 현상기(SVS社, SSP-200)를 사용하여 0.2 중량%의 수산화칼륨(KOH) 수용액으로 현상하고, 오븐에서 230℃로 30분 동안 하드-베이킹(Hard-baking)을 진행하여, 패터닝된 유리 시편을 얻을 수 있었다. 상기 유리 시편을 line pattern으로 사선으로 자른 후, 잘린 패턴을 FE-SEM (X10K)로 측정하여 그 결과를 하기 표 2 및 도 1 내지 도 6에 나타내었다.Examples 1 to 7 and Comparative Examples 1 and 2 of the photosensitive resin compositions were coated at a thickness of 1.3 ㎛ on a 10 cm x 10 cm glass that had been pretreated using a spin coater (Mikasa, Opticoat MS-A150), soft-baked at 80° C. for 150 seconds using a hot plate, and exposed at 50 mJ using an exposure device (Ushio, HB-50110AA) and a photo pattern mask. Subsequently, development was performed with a 0.2 wt% potassium hydroxide (KOH) aqueous solution using a developer (SVS, SSP-200), and hard-baking was performed at 230° C. for 30 minutes in an oven to obtain a patterned glass specimen. After cutting the above glass specimen diagonally into a line pattern, the cut pattern was measured using FE-SEM (X10K), and the results are shown in Table 2 and Figures 1 to 6 below.
상기 표 2 및 도 1 내지 도 6으로부터, 일 구현예에 따른 감광성 수지 조성물은, 비교예 1 및 비교예 2에 따른 감광성 수지 조성물보다, 테이퍼 특성이 우수하여 패턴 직진성을 개선시킬 수 있음을 확인할 수 있다. 또한, 실시예 1 내지 실시예 7로부터, 제1 광중합 개시제 및 제2 광중합 개시제의 혼합중량비 및 종류에 따라 테이퍼 특성을 제어하여 패턴 직진성을 개선시킬 수 있음도 확인할 수 있다.From the above Table 2 and FIGS. 1 to 6, it can be confirmed that the photosensitive resin composition according to one embodiment has better taper characteristics than the photosensitive resin compositions according to Comparative Examples 1 and 2, thereby improving pattern straightness. In addition, it can be confirmed from Examples 1 to 7 that the pattern straightness can be improved by controlling the taper characteristics depending on the mixing weight ratio and type of the first photopolymerization initiator and the second photopolymerization initiator.
본 발명은 상기 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 제조될 수 있으며, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자는 본 발명의 기술적 사상이나 필수적인 특징을 변경하지 않고서 다른 구체적인 형태로 실시될 수 있다는 것을 이해할 수 있을 것이다. 그러므로 이상에서 기술한 실시예들은 모든 면에서 예시적인 것이며 한정적이 아닌 것으로 이해해야만 한다.The present invention is not limited to the above embodiments, but can be manufactured in various different forms, and a person having ordinary skill in the art to which the present invention pertains will understand that the present invention can be implemented in other specific forms without changing the technical idea or essential characteristics of the present invention. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.
Claims (17)
(A) 바인더 수지 0.1 중량% 내지 1 중량%;
(B) 광중합성 단량체 1 중량% 내지 10 중량%;
(C) 광중합 개시제 0.1 중량% 내지 5 중량%;
(D) 착색제 50 중량% 내지 80 중량%; 및
(E) 용매 잔부량
을 포함하고,
상기 광중합 개시제는 하기 화학식 1로 표시되는 제1 광중합 개시제 및 하기 화학식 2로 표시되는 제2 광중합 개시제를 포함하고,
상기 제1 광중합 개시제 및 제2 광중합 개시제는 70:30 내지 79:21의 중량비로 포함되는 감광성 수지 조성물:
[화학식 1]
[화학식 2]
상기 화학식 1 및 화학식 2에서,
R1 및 R6은 각각 독립적으로 할로겐기, 히드록시기, 니트로기, 시아노기, 치환 또는 비치환된 C1 내지 C20 알킬기, 치환 또는 비치환된 C1 내지 C20 알콕시기, 치환 또는 비치환된 C3 내지 C20 사이클로알킬기 또는 치환 또는 비치환된 C6 내지 C20 아릴기이고,
R2 내지 R5는 각각 독립적으로 수소원자, 치환 또는 비치환된 C1 내지 C20 알킬기 또는 치환 또는 비치환된 C1 내지 C20 알콕시기이고,
n1 및 n2는 각각 독립적으로 0 내지 4의 정수이다.
Regarding the total amount of photosensitive resin composition,
(A) 0.1 wt% to 1 wt% of binder resin;
(B) 1 to 10 wt% of a photopolymerizable monomer;
(C) 0.1 to 5 wt% of photopolymerization initiator;
(D) 50 to 80 wt% of colorant; and
(E) Solvent residue
Including,
The above photopolymerization initiator comprises a first photopolymerization initiator represented by the following chemical formula 1 and a second photopolymerization initiator represented by the following chemical formula 2,
A photosensitive resin composition in which the first photopolymerization initiator and the second photopolymerization initiator are included in a weight ratio of 70:30 to 79:21:
[Chemical Formula 1]
[Chemical formula 2]
In the above chemical formulas 1 and 2,
R 1 and R 6 are each independently a halogen group, a hydroxy group, a nitro group, a cyano group, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C1 to C20 alkoxy group, a substituted or unsubstituted C3 to C20 cycloalkyl group or a substituted or unsubstituted C6 to C20 aryl group,
R 2 to R 5 are each independently a hydrogen atom, a substituted or unsubstituted C1 to C20 alkyl group, or a substituted or unsubstituted C1 to C20 alkoxy group,
n1 and n2 are each independently an integer from 0 to 4.
상기 제1 광중합 개시제 및 제2 광중합 개시제는 72:28 내지 78:22의 중량비로 포함되는 감광성 수지 조성물.
In the first paragraph,
A photosensitive resin composition wherein the first photopolymerization initiator and the second photopolymerization initiator are contained in a weight ratio of 72:28 to 78:22.
상기 화학식 1 및 화학식 2에서,
R4 및 R5는 각각 독립적으로 치환 또는 비치환된 C1 내지 C20 알킬기인 감광성 수지 조성물.
In the first paragraph,
In the above chemical formulas 1 and 2,
A photosensitive resin composition wherein R 4 and R 5 are each independently a substituted or unsubstituted C1 to C20 alkyl group.
상기 R4 및 R5는 각각 독립적으로 비치환된 C1 내지 C20 알킬기이고, 상기 R4의 탄소수는 상기 R5의 탄소수보다 적은 감광성 수지 조성물.
In the third paragraph,
A photosensitive resin composition wherein R 4 and R 5 are each independently an unsubstituted C1 to C20 alkyl group, and the carbon number of R 4 is less than the carbon number of R 5 .
상기 제1 광중합 개시제는 하기 화학식 1-1 내지 화학식 1-3 중 적어도 하나 이상을 포함하는 감광성 수지 조성물.
[화학식 1-1]
[화학식 1-2]
[화학식 1-3]
In the first paragraph,
A photosensitive resin composition wherein the first photopolymerization initiator comprises at least one of the following chemical formulae 1-1 to 1-3.
[Chemical Formula 1-1]
[Chemical Formula 1-2]
[Chemical Formula 1-3]
상기 제2 광중합 개시제는 하기 화학식 2-1 내지 화학식 2-3 중 적어도 하나 이상을 포함하는 감광성 수지 조성물.
[화학식 2-1]
[화학식 2-2]
[화학식 2-3]
In the first paragraph,
A photosensitive resin composition wherein the second photopolymerization initiator comprises at least one of the following chemical formulas 2-1 to 2-3.
[Chemical Formula 2-1]
[Chemical Formula 2-2]
[Chemical Formula 2-3]
상기 바인더 수지는 상기 감광성 수지 조성물 총량에 대해 0.1 중량% 내지 1 중량%로 포함되는 감광성 수지 조성물.
In the first paragraph,
A photosensitive resin composition wherein the binder resin is contained in an amount of 0.1 wt% to 1 wt% based on the total amount of the photosensitive resin composition.
상기 바인더 수지는 상기 광중합성 단량체보다 적은 함량으로 포함되는 감광성 수지 조성물.
In the first paragraph,
A photosensitive resin composition wherein the binder resin is contained in a smaller amount than the photopolymerizable monomer.
상기 착색제는 안료를 포함하는 감광성 수지 조성물.
In the first paragraph,
The above colorant is a photosensitive resin composition containing a pigment.
상기 착색제는 상기 감광성 수지 조성물 총량에 대해 50 중량% 내지 80 중량%로 포함되는 감광성 수지 조성물.
In Article 9,
A photosensitive resin composition wherein the colorant is contained in an amount of 50 to 80 wt% based on the total amount of the photosensitive resin composition.
상기 감광성 수지 조성물은 말론산, 3-아미노-1,2-프로판디올, 실란계 커플링제, 레벨링제, 불소계 계면활성제, 라디칼 중합 개시제 또는 이들의 조합의 첨가제를 더 포함하는 감광성 수지 조성물.
In the first paragraph,
The photosensitive resin composition further comprises an additive selected from the group consisting of malonic acid, 3-amino-1,2-propanediol, a silane coupling agent, a leveling agent, a fluorinated surfactant, a radical polymerization initiator, or a combination thereof.
A photosensitive resin film manufactured using the photosensitive resin composition of any one of claims 1 to 10 and 12.
A color filter comprising a photosensitive resin film of claim 13.
A CMOS image sensor comprising a photosensitive resin film of claim 13.
A display device comprising a color filter according to claim 14.
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