KR102649082B1 - Quartz sandwich structure - Google Patents

Abstract

A quartz sandwich structure is disclosed. According to one aspect of the present invention, it includes a pair of quartz glass layers and a shielding unit disposed between the pair of quartz glass layers to prevent the movement of light or heat, and the shielding units are spaced apart from each other and each faces a first direction. A quartz sandwich structure is provided, including a plurality of first shielding members and a plurality of second shielding members that intersect the plurality of first shielding members in a plane and are spaced apart from each other, each facing a second direction.

Description

Quartz sandwich structure {QUARTZ SANDWICH STRUCTURE}

The present invention relates to quartz sandwich structures.

The semiconductor manufacturing process is a chemical and physical process that can form fine circuits on a silicon wafer through deposition and oxidation etching. These processes are mainly carried out at high temperatures, and heat transfer is required to prevent yield decreases due to contamination by foreign substances. It can be performed using equipment that minimizes contamination and does not cause contamination.

In relation to the semiconductor manufacturing process, quartz is used as a process tube and wafer support structure in the chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes, It is used as a pedestal material for heat transfer and heat shielding.

This kind of quartz has advantages such as low thermal expansion coefficient, high ultraviolet light transmittance, and chemical stability, so it can be used as a material for equipment used in the semiconductor manufacturing process. It can be used in various ways to block transmitted and radiant heat and at the same time resist etching well. Research on quartz products is underway.

Republic of Korea Patent Publication No. 10-0976239 (2010.08.17.)

The present invention provides a quartz sandwich structure that reduces the movement of light or heat by interposing a shielding unit consisting of a first shielding member and a second shielding member that cross each other on a plane between a pair of quartz glass layers.

According to one aspect of the present invention, it includes a pair of quartz glass layers and a shielding unit disposed between the pair of quartz glass layers to prevent the movement of light or heat, and the shielding units are spaced apart from each other and each faces a first direction. A quartz sandwich structure is provided, including a plurality of first shielding members and a plurality of second shielding members that intersect the plurality of first shielding members in a plane and are spaced apart from each other, each facing a second direction.

The plurality of first shielding members and the plurality of second shielding members may intersect in three dimensions and be formed as one body.

The second shielding member may three-dimensionally intersect with the first shielding member to cover the upper or lower surface of each of the plurality of first shielding members.

The second shielding member may three-dimensionally intersect with the plurality of first shielding members so as to alternately cover the upper and lower surfaces of each of the plurality of neighboring first shielding members.

The second shielding member is arranged to cover one of the upper and lower surfaces of the plurality of first shielding members, and is arranged to cover the other one of the upper and lower surfaces of the first shielding member once per cycle of a preset reference number of first shielding members. can intersect.

The first direction and the second direction may be orthogonal.

A plurality of shielding units may be stacked.

A plurality of shielding units may be stacked so that each first shielding member is arranged in the same direction.

A plurality of neighboring shielding units may be stacked so that each first shielding member is arranged in a direction opposite to each other.

A pair of quartz glass layers may be joined at their ends to prevent external exposure of the shielding unit.

According to the present invention, the movement of light or heat can be reduced by interposing a shielding unit consisting of a first shielding member and a second shielding member that cross each other in a plane between a pair of quartz glass layers.

1 and 2 are cross-sectional views showing quartz sandwich structures according to each embodiment of the present invention.
Figures 3 and 4 are cross-sectional views showing the shielding unit of the quartz sandwich structure according to each embodiment of the present invention.
Figure 5 is a diagram showing the stacking direction of the shielding unit of the quartz sandwich structure according to each embodiment of the present invention.
Figure 6 is a graph showing the total reflectance of the quartz sandwich structure according to each embodiment of the present invention.
Figure 7 is a graph showing the combat transmission rate of the quartz sandwich structure according to each embodiment of the present invention.
Figure 8 is a graph showing the specific transmittance of the quartz sandwich structure according to each embodiment of the present invention.
Figure 9 is a photograph showing a specimen of a quartz sandwich structure according to an embodiment of the present invention.

Since the present invention can be modified in various ways and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all transformations, equivalents, and substitutes included in the spirit and technical scope of the present invention. In describing the present invention, if it is determined that a detailed description of related known technologies may obscure the gist of the present invention, the detailed description will be omitted.

Terms such as first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another.

The terms used in this application are only used to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

In addition, coupling does not mean only the case of direct physical contact between each component in the contact relationship between each component, but also means that another component is interposed between each component, and the component is in that other component. It should be used as a concept that encompasses even the cases where each is in contact.

Hereinafter, an embodiment of the quartz sandwich structure 100 according to the present invention will be described in detail with reference to the accompanying drawings. In the description with reference to the accompanying drawings, identical or corresponding components will be assigned the same drawing numbers and Redundant explanations will be omitted.

According to one embodiment of the present invention, it includes a pair of quartz glass layers 110 and a shielding unit 120 disposed between the pair of quartz glass layers 110 to prevent the movement of light or heat, and the shielding unit (120) intersects a plurality of first shielding members 122 and a plurality of first shielding members 122, which are spaced apart from each other and are respectively oriented toward a first direction, and are spaced apart from each other and are respectively oriented toward a second direction. A quartz sandwich structure (100) including a plurality of second shielding members (124) is provided.

This embodiment prevents the movement of light or heat by interposing a shielding unit 120 consisting of a first shielding member 122 and a second shielding member 124 that intersect each other in a plane between a pair of quartz glass layers 110. It can be reduced.

More specifically, in this embodiment, the shielding unit 120 in which a gap is formed as the first shielding member 122 and the second shielding member 124 intersect increases the reflectivity of light or heat, thereby reducing the movement of light or heat. .

Hereinafter, each configuration of the quartz sandwich structure 100 according to the present invention will be described with reference to FIGS. 1 to 9.

As shown in FIGS. 1, 2, and 9, the quartz glass layer 110 may be made of transparent quartz glass and may be formed as a pair to cover both sides of the shielding unit 120. Although this quartz glass layer 110 does not have a significant effect in reducing the movement of light or heat, it has high corrosion resistance and can prevent the shielding unit 120 from being corroded during an etching process during the semiconductor manufacturing process.

1 to 4 and 9, the shielding unit 120 may be disposed between a pair of quartz glass layers 110 to prevent the movement of light or heat, and more specifically, the shielding unit ( 120) is a plurality of first shielding members 122 that are spaced apart from each other and are aligned in a first direction, and a plurality of first shielding members 122 are intersected in a plane and are spaced apart from each other and are aligned in a second direction. It may include a second shielding member 124.

Here, the first direction and the second direction are orthogonal to each other, and the plurality of first shielding members 122 and the plurality of second shielding members 124 may be arranged orthogonal to each other in a plane.

In addition, the plurality of first shielding members 122 and the plurality of second shielding members 124 may intersect in three dimensions and support each other to be integrally formed. More specifically, the second shielding member 124 may be formed as a single piece. It may three-dimensionally intersect with the first shielding member 122 to cover the upper or lower surfaces of each of the first shielding members 122.

The structure of the plurality of three-dimensionally intersecting first shielding members 122 and the plurality of second shielding members 124 is such that the first shielding member 122 supports the gap between the plurality of second shielding members 124 and The second shielding member 124 may support the gap between the plurality of first shielding members 122 so that they are formed as a whole.

In addition, the three-dimensional structure of the plurality of first shielding members 122 and the plurality of second shielding members 124 forms a gap between each first shielding member 122 and the second shielding member 124 to allow light or The movement of light or heat can be reduced by inducing diffuse reflection of heat.

Meanwhile, as shown in FIG. 3, the second shielding member 124 intersects the plurality of first shielding members 122 in three dimensions so as to alternately cover the upper and lower surfaces of each of the plurality of neighboring first shielding members 122. 4, the second shielding member 124 is arranged to cover either the upper or lower surfaces of the plurality of first shielding members 122, and the preset first shielding member 122 ) may be crossed to cover the other of the upper and lower surfaces of the first shielding member 122 once per cycle.

Depending on the arrangement structure of the first shielding member 122 and the second shielding member 124, the reflectance and transmittance of light or heat may appear different, and details will be described later.

Meanwhile, the first shielding member 122 and the second shielding member 124 may be made of a material containing SiO ₂ , and the first shielding member 122 and the second shielding member 124 may intersect each other in three dimensions. It must be sufficiently ductile and is made of plates, wires, etc., so there are no restrictions on its shape, thickness, or width.

As shown in Figures 1 and 2, a pair of quartz glass layers 110 may be joined at their ends to prevent external exposure of the shielding unit 120, e.g. (110) may be joined at the ends by heat or may be joined using a separate adhesive.

As shown in FIG. 1, the ends of a pair of quartz glass layers 110 may be integrally joined by thermal melting, and this may be performed through welding or pressure welding using a base material. More specifically, the pair of quartz glass layers 110 may be bonded using heat generated by an oxyhydrogen flame, radiant heat, or a laser.

This method of joining a pair of quartz glass layers 110 through thermal melting does not add additional foreign substances and can prevent quality deterioration by using a base material of the same material as the quartz glass layer 110.

As shown in FIG. 2, by combining a pair of quartz glass layers 110, the sealing material 130 can cover the outer peripheral surface of the shielding unit 120 between the pair of quartz glass layers 110. In addition, the sealing material 130 can support the pair of quartz glass layers 110 with each other to integrate the quartz sandwich structure 100 of this embodiment, and the shielding unit 120 together with the pair of quartz glass layers 110 ) can be covered to prevent the shielding unit 120 from being corroded by etchant in the semiconductor manufacturing process.

Meanwhile, the quartz glass layer 110 is formed in a plate shape as shown in FIGS. 1 and 2 and can form a plate-shaped quartz sandwich structure 100 together with the plate-shaped shielding unit 120.

In addition, the quartz glass layer 110 may be curved and the ends may be in contact with each other to form a tube shape. Depending on the shape of the quartz glass layer 110, the quartz sandwich structure 100 of this embodiment may be formed in a tube shape. .

As shown in (b) and (c) of FIGS. 1 and 2, a plurality of shielding units 120 may be stacked, and a quartz sandwich structure having a structure in which a plurality of shielding units 120 are stacked ( 100) can reduce the movement of light or heat compared to the quartz sandwich structure 100 including the single-layer shielding unit 120.

In addition, as shown in (b) of FIGS. 1 and 2, the plurality of shielding units 120 may be stacked so that each first shielding member 122 is arranged in the same direction. As shown in (c), a plurality of neighboring shielding units 120 may be stacked so that each first shielding member 122 is arranged in a perpendicular direction.

Furthermore, the plurality of neighboring shielding units 120 may be stacked so that the directions of each first shielding member 122 are opposite to each other, as shown in Figures 5 (a) and (b). Likewise, they may be stacked alternately at a 45° angle.

The quartz sandwich structure 100 of this embodiment may have different light or heat transmittance depending on the three-dimensional structure of the first shielding member 122 and the second shielding member 124 described above, and is a single shielding unit 120. And the light or heat transmittance may be different depending on the stacked structure of the plurality of shielding units 120, and in the near infrared region (NIR) of each embodiment of the quartz sandwich structure 100 of the present invention shown in FIGS. 6 to 8. The explanation will be based on total reflectance, total transmittance, and specific transmittance.

In FIGS. 6 to 8, (a-1) is an embodiment in which the shielding unit 120 of the structure of FIG. 3 is made of a single layer, and (a-2) is an embodiment of the shielding unit 120 of the structure of FIG. 3 with a two-layer structure. This is an embodiment in which each first shielding member 122 is stacked so that it is arranged in the same direction. In (a-3), the shielding unit 120 of the structure of FIG. 3 is made of two layers, and each first shielding member 122 is composed of two layers. This is an embodiment in which (122) are stacked so that they are arranged in orthogonal directions.

In addition, in FIGS. 6 to 8, (b-1) is an embodiment in which the shielding unit 120 of the structure of FIG. 4 is made of a single layer, and (b-2) is an embodiment of the shielding unit 120 of the structure of FIG. 4. This is an embodiment in which two layers are stacked so that each first shielding member 122 is arranged in the same direction. In (b-3), the shielding unit 120 of the structure of FIG. 4 is made of two layers, and each first shielding member 122 is stacked in the same direction. This is an embodiment in which the shielding members 122 are stacked so that they are arranged in orthogonal directions.

Figure 6 shows the total reflectance of the quartz sandwich structure 100 of each example, (b-2) was the highest, (b-3), (b-1), (a-2), (a- 3) and (a-1) were measured to be low.

Figure 7 shows the combat penetration rate of the quartz sandwich structure 100 of each example, (b-2) was the lowest, (b-3), (b-1), (a-2), (a- 3) and (a-1) were measured to be higher in the order.

Figure 6 shows the constant transmittance of the quartz sandwich structure 100 of each example, (b-3) was the lowest, (b-2), (b-1), (a-3), (a- It was measured to be high in the order of 2) and (a-1). In terms of reflectivity, the shielding unit 120 of the structure of FIG. 3 has each of the first shielding members 122 and the second shielding members 124 adjacent to each other regularly. By arranging them alternately up and down, a gap is formed between the overlapping parts, which can increase the transmittance.

On the other hand, in the shielding unit 120 of the structure of FIG. 4, one area may be floated by intersecting the first shielding member 122 and the second shielding member 124 per preset number of cycles, and this structure has the structure of FIG. 3. Light transmission can be minimized due to relatively smaller air gaps than the structural shielding unit 120.

In the shielding unit 120 having the structure of FIG. 4, the light source is incident or reflected at various angles to the shielding unit, so that more scattered reflections can occur, and thus the total reflectance can be increased. Furthermore, this structure can absorb the light source and heat energy. Since it does not pass through the shielding unit 120 and stays for a long time, the absorption rate and insulation properties can also increase proportionally.

Meanwhile, each embodiment of the quartz sandwich structure 100 of the present invention was shown to have a single or two-layer shielding unit 120, but a quartz sandwich structure in which a larger number of shielding units 120 were optionally stacked. (100) may also be provided.

Additionally, as the number of shielding units 120 stacked in the quartz sandwich structure 100 of this embodiment increases, reflectance, absorption, and thermal insulation properties may increase, and transmittance may decrease.

Above, an embodiment of the present invention has been described, but those skilled in the art can add, change, delete or add components without departing from the spirit of the present invention as set forth in the patent claims. The present invention may be modified and changed in various ways, and this will also be included within the scope of rights of the present invention.

100: Quartz sandwich structure
110: Quartz glass layer
120: shielding unit
122: first shielding member
124: second shielding member
130: Sealing material

Claims (10)

A pair of quartz glass layers; and
A shielding unit disposed between the pair of quartz glass layers to prevent the movement of light or heat,
The shielding unit includes a plurality of first shielding members that are spaced apart from each other and are aligned in a first direction, and a plurality of first shielding members that intersect the plurality of first shielding members in a plane, and are spaced apart from each other and are aligned in a second direction. 2 comprising a shielding member,
The second shielding member intersects the first shielding member in plan and three-dimensionally intersects the first shielding member to cover the upper or lower surfaces of each of the plurality of first shielding members,
The first shielding member and the second shielding member increase the total reflectance of light or heat through a structure that intersects in three dimensions while intersecting in the plane, and induce diffuse reflection of light or heat through the gap formed as they intersect with each other. Reduces heat transfer,
A quartz sandwich structure, wherein the pair of quartz glass layers are joined at ends to prevent external exposure of the shielding unit, thereby preventing corrosion of the shielding unit.
delete delete According to paragraph 1,
The second shielding member intersects the first shielding member in plan and three-dimensionally intersects the plurality of first shielding members so as to alternately cover the upper and lower surfaces of each of the plurality of neighboring first shielding members. structure.
According to paragraph 1,
The second shielding member is disposed to intersect the first shielding member in plan and simultaneously covers one of the upper and lower surfaces of the plurality of first shielding members, once per cycle of a preset reference number of first shielding members. A quartz sandwich structure that intersects to cover the other of the upper and lower surfaces of the first shielding member.
According to paragraph 1,
The first direction and the second direction are orthogonal to each other, a quartz sandwich structure.
According to clause 6,
A quartz sandwich structure in which the shielding unit consists of a plurality of units and is stacked.
In clause 7,
A quartz sandwich structure, wherein the plurality of shielding units are stacked so that each first shielding member is arranged in the same direction.
In clause 7,
A quartz sandwich structure wherein the plurality of neighboring shielding units are stacked so that each of the first shielding members is arranged in a direction opposite to each other.
delete