KR102575953B1 - Magnetic levitation transfer apparatus - Google Patents

Abstract

A magnetic levitation transfer device is disclosed. The device, a bogie for transporting goods, a levitation rail extending along the traveling direction of the trolley, a levitation electromagnet disposed to face the levitation rail and levitating the bogie, and on both sides of the traveling direction A pair of first propulsion rails and a pair of second propulsion rails each including permanent magnets arranged along the traveling direction, between the first propulsion rails and for the second propulsion First and second driving wheels each disposed between the rails and including permanent magnets arranged in a circumferential direction, and a driving unit generating thrust between the permanent magnets by rotating the first and second driving wheels do.

Description

Magnetic levitation transfer apparatus {Magnetic levitation transfer apparatus}

Embodiments of the invention relate to magnetic levitation transport devices. More specifically, it relates to a magnetic levitation transport device for moving a bogie for transporting objects along a traveling direction in a state in which a bogie is lifted using magnetic force.

In general, a semiconductor or display device can be manufactured by repeatedly performing a series of manufacturing processes on a substrate such as a silicon wafer or a glass substrate. For example, manufacturing processes such as deposition, photolithography, oxidation, ion implantation, and cleaning may be selectively and/or repeatedly performed to form circuit patterns on the substrate.

The above manufacturing processes are performed in a clean room where cleanliness is controlled to prevent contamination, and substrate transfer between the manufacturing processes may be performed using a substrate storage container such as a cassette or a FOUP. For example, the substrate storage container may be transported between the manufacturing processes by an unmanned transport device such as a Rail Guided Vehicle (RGV) or an Overhead Hoist Transport (OHT).

The unmanned transport device as described above may include a travel rail extending along the travel direction of the bogie and travel wheels disposed on the travel rail. However, particles generated by the frictional force between the running rail and the running wheels cause contamination of the inside of the clean room, and accordingly, a demand for a non-contact transfer device is continuously raised.

Republic of Korea Patent Publication No. 10-2013-0057955 (published on June 03, 2013)

Embodiments of the present invention are aimed at providing a magnetic levitation transport device capable of traveling in a non-contact manner.

Magnetic levitation transport device according to an aspect of the present invention for achieving the above object, a bogie for transporting goods, a levitation rail extending along the running direction of the trolley, and arranged to face the levitation rail, A pair of first propulsion rails and a pair of second propulsion rails including levitation electromagnets for lifting the bogie and permanent magnets disposed on both sides of the traveling direction and arranged along the traveling direction and first and second driving wheels each disposed between the first propulsion rails and between the second propulsion rails and including permanent magnets arranged in a circumferential direction, and the first and second driving wheels It may include a driving unit for generating driving force between the permanent magnets by rotating them.

According to embodiments of the present invention, N poles and S poles of the permanent magnets of the first and second propulsion rails may be disposed in the traveling direction, and the same polarities may be disposed to face each other in the traveling direction.

According to embodiments of the present invention, the permanent magnets of the first and second propulsion rails may be arranged in a Halbach arrangement.

According to embodiments of the present invention, the permanent magnets of the first and second driving wheels may be arranged in a Halbach arrangement.

According to embodiments of the present invention, the maglev transport device may further include a traveling body rotatably connected to an upper portion of the bogie, the levitation electromagnet is disposed on the levitation body, and the levitation rail may be disposed above the levitation electromagnet.

According to embodiments of the present invention, the driving body may be rotatably connected to an upper portion of the bogie.

According to embodiments of the present invention, the maglev transport device includes first and second guide rails disposed in parallel with the first and second propulsion rails, respectively, and the first and second inner rails. It is arranged to face each of the content rails and may further include first and second guide electromagnets for guiding the bogie along the traveling direction.

According to embodiments of the present invention, the maglev transport device is spaced apart from ends of the branch rail for levitation and the levitation rail connected to the levitation rail, and the second propulsion rails at a predetermined distance from the first propulsion rails and A pair of third propulsion rails extending in parallel, a pair of first propulsion branch rails connected to ends of the second and third propulsion rails and extending parallel to each other, and a pair of Second branch rails for propulsion, a third guide rail spaced apart from an end of the second guide rail by a predetermined distance and extending in parallel with the first guide rail, and the second and third guide rails. It may further include first and second divergent guide rails respectively connected to the ends and extending parallel to each other.

According to embodiments of the present invention, the maglev transport device, while the bogie passes through the branching point between the second propulsion rails and the third propulsion rails and goes straight, the first and second inner A control unit for stopping the operation of the electromagnets may be further included.

According to embodiments of the present invention, the maglev transport device, the first and second connecting rails for propulsion connecting the second and third propulsion rails and the first and second branch rails for propulsion to each other. and first and second guide connecting rails connecting the second and third guide rails and the first and second branch guide rails to each other.

According to embodiments of the present invention, the maglev transport device, when the bogie rotates along the branch rail for levitation from the levitation rail, the guide electromagnet on the inside of the first and second guiding electromagnets. and a control unit controlling an operation of the inner electromagnet for guidance so that a distance between the inner guide rails among the first and second guide guide rails is maintained constant.

According to embodiments of the present invention, the maglev transport device includes first and second auxiliary rails disposed in parallel with the first and second propulsion rails, respectively, and the first and second auxiliary rails. It may further include first and second auxiliary wheels disposed on top of each of the levitating electromagnets to support the bogie when the levitation electromagnet is not operated.

Magnetic levitation transport device according to another aspect of the present invention for achieving the above object, a bogie for transporting goods, a levitation rail extending along the running direction of the bogie and disposed on both sides of the running direction, respectively, and the traveling A travel track including a pair of first propulsion rails and a pair of second propulsion rails including permanent magnets arranged along a direction, connected to the bogie and moving the bogie along the travel track It may include front and rear driving modules for In particular, the front and rear driving modules may include levitation electromagnets disposed to face the levitation rails in order to levitating the bogie, and at least one of the front and rear driving modules is for the first propulsion. First and second driving wheels including permanent magnets disposed between the rails and between the second propulsion rails and arranged in a circumferential direction, respectively, and rotating the first and second driving wheels to move the permanent magnets It may include a driving unit that generates a driving force between them.

According to embodiments of the present invention, N poles and S poles of the permanent magnets of the first and second propulsion rails are arranged in the running direction and the same polarities are arranged to face each other in the running direction, and the first and permanent magnets of the second driving wheels may be arranged in a Halbach arrangement.

According to embodiments of the present invention, the permanent magnets of the first and second propulsion rails and the permanent magnets of the first and second driving wheels may be arranged in a Halbach arrangement.

According to embodiments of the present invention, the front and rear driving modules each include front and rear driving bodies rotatably connected to an upper portion of the bogie, and the levitating electromagnets are disposed on the front and rear driving bodies. It can be.

According to embodiments of the present invention, the travel track includes first and second guide rails disposed on both sides of the front and rear travel bodies, respectively, and extending in parallel with the first and second propulsion rails. It may further include, on both sides of the front and rear running bodies, first and second guide electromagnets for guiding the bogie along the running direction face the first and second guide rails. each can be placed.

According to embodiments of the present invention, the maglev transfer device may further include a second travel track branched from the travel track. In particular, the second travel track is a propulsion connecting between a branch rail for lift connected to the rail for lift, a pair of branch rails for propulsion, and the second rails for propulsion and the branch rails for propulsion. It may include connecting rails for guidance, a branch rail for guidance, and a connecting rail for guidance connecting the second guide rail and the branch guide rail.

According to embodiments of the present invention, the maglev transport device controls the operation of the first and second electromagnets for guidance while the bogie passes through the branching point between the travel track and the second travel track and goes straight. A control unit for stopping may be further included.

According to embodiments of the present invention, in the magnetic levitation transport device, when the bogie changes a path from the travel track to the second travel track, the distance between the second electromagnet for guidance and the connecting rail for guidance is It may further include a control unit that controls the operation of the second electromagnet for guidance so as to be kept constant.

According to the embodiments of the present invention as described above, the magnetic levitation transport device is arranged to face a bogie for transporting goods, a levitation rail extending along the traveling direction of the trolley, and the levitation rail. A pair of first propulsion rails and a pair of second propulsion rails including levitation electromagnets for lifting the bogie and permanent magnets disposed on both sides of the traveling direction and arranged along the traveling direction and first and second driving wheels each disposed between the first propulsion rails and between the second propulsion rails and including permanent magnets arranged in a circumferential direction, and the first and second driving wheels It may include a driving unit for generating driving force between the permanent magnets by rotating them.

The permanent magnets of the first and second propulsion rails may be arranged such that the same polarities face each other in the driving direction, and the permanent magnets of the first and second driving wheels may be arranged in a Halbach arrangement. Therefore, the bogie can be moved in a non-contact manner by the levitation force generated by the levitation electromagnet and the propulsive force generated by the first and second driving wheels.

As a result, when the magnetic levitation transport device as described above is used for transporting materials such as substrates in a clean room for manufacturing semiconductors or display devices, generation of contaminants such as particles can be greatly reduced. Accordingly, the semiconductor Alternatively, productivity of the display device may be greatly improved.

1 is a schematic configuration diagram for explaining a magnetic levitation transport device according to an embodiment of the present invention.
Figure 2 is a schematic plan view for explaining the magnetic levitation transfer device shown in Figure 1;
FIG. 3 is an enlarged plan view for explaining front and rear driving modules shown in FIG. 2 .
FIG. 4 is a schematic plan view illustrating the first propulsion rails and the first driving wheel shown in FIG. 1 .
FIG. 5 is a schematic side view illustrating the first propulsion rails and the first driving wheel shown in FIG. 4 .
FIG. 6 is a schematic plan view for explaining another example of the first propulsion rails shown in FIG. 4 .
7 and 8 are schematic diagrams for explaining straight driving and rotational driving passing through a branching point between the driving trajectory shown in FIG. 2 and the second driving trajectory.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention does not have to be configured as limited to the embodiments described below and may be embodied in various other forms. The following examples are not provided to fully complete the present invention, but rather to fully convey the scope of the present invention to those skilled in the art.

In the embodiments of the present invention, when one element is described as being disposed on or connected to another element, the element may be directly disposed on or connected to the other element, and other elements may be interposed therebetween. It could be. Alternatively, when an element is described as being directly disposed on or connected to another element, there cannot be another element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and/or parts, but the items are not limited by these terms. will not

Technical terms used in the embodiments of the present invention are only used for the purpose of describing specific embodiments, and are not intended to limit the present invention. In addition, unless otherwise limited, all terms including technical and scientific terms have the same meaning as can be understood by those skilled in the art having ordinary knowledge in the technical field of the present invention. The above terms, such as those defined in conventional dictionaries, shall be construed to have a meaning consistent with their meaning in the context of the relevant art and description of the present invention, unless expressly defined, ideally or excessively outwardly intuition. will not be interpreted.

Embodiments of the present invention are described with reference to schematic illustrations of idealized embodiments of the present invention. Accordingly, variations from the shapes of the illustrations, eg, variations in manufacturing methods and/or tolerances, are fully foreseeable. Accordingly, embodiments of the present invention are not to be described as being limited to specific shapes of regions illustrated as diagrams, but to include variations in shapes, and elements described in the drawings are purely schematic and their shapes is not intended to describe the exact shape of the elements, nor is it intended to limit the scope of the present invention.

1 is a schematic configuration diagram for explaining a magnetic levitation transport device according to an embodiment of the present invention, FIG. 2 is a schematic plan view for explaining the magnetic levitation transport device shown in FIG. 1, and FIG. 2 is an enlarged plan view for explaining the front and rear driving modules.

Referring to FIGS. 1 to 3 , the magnetic levitation transport device 10 according to an embodiment of the present invention may be used to transport objects in a non-contact manner. For example, the maglev transport device 10 may be used for transporting materials such as silicon wafers and glass substrates in a semiconductor or display manufacturing process performed in a clean room. Also, as an example, the magnetic levitation transport device 10 may be used as an unmanned transport device such as an OHT for transporting a substrate storage container in which substrates are stored in the clean room.

According to one embodiment of the present invention, the maglev transfer device 10 includes a travel track 100 installed on the ceiling of the clean room and a bogie 20 configured to be movable along the travel track 100. can include Although not shown in detail, the cart 20 may include a hoist module for picking up and placing an object to be transferred such as the substrate storage container.

The maglev transport device 10 may include driving modules 200 and 300 for moving the bogie 20 along the driving track 100 . As an example, the driving modules 200 and 300 may be disposed above the bogie 20 and may be connected to the bogie 20 through connecting shafts 202 and 302 . In particular, a front driving module 200 and a rear driving module 300 may be disposed on the top of the bogie 20, and each of the front and rear driving modules 200 and 300 is connected to the connecting shafts 202 and 300. 302) as a central axis.

According to an embodiment of the present invention, the front and rear driving modules 200 and 300 can move along the driving track 100 and in particular, in a non-contact manner, for example, in a magnetically levitated state, the driving track ( 100) can be moved along. For example, the travel track 100 may include a rail 102 for levitation extending along the travel direction of the trolley 20, and the front and rear travel modules 200 and 300 may include the levitation rail 102. It may include levitation electromagnets 210 and 310 disposed to face the rail 102, respectively.

Specifically, as shown in FIGS. 1 to 3 , the rear driving module 300 is rotatably connected to the top of the bogie 20 and the rear driving body 304 on the rear driving body 304. It may include a pair of left and right rear levitation electromagnets 310 disposed thereon, and the front traveling module 200 includes a front traveling body 204 rotatably connected to the top of the bogie 20 and the front traveling A pair of left and right front levitation electromagnets 210 disposed on the body 204 may be included. At this time, the rail 102 for levitation may be disposed above the front and rear electromagnets 210 and 310 for levitation.

According to one embodiment of the present invention, the travel track 100 is a pair of first propulsion rails disposed on both sides of the travel direction, that is, on both sides of the front and rear travel modules 200 and 300, respectively. 110) and a pair of second propulsion rails 120, the rear driving module 300 is between the first propulsion rails 110 and the second propulsion rails 120 ) may include first and second driving wheels 340 and 350 respectively disposed between the first and second driving wheels 340 and 350 and a driving unit 360 for rotating the first and second driving wheels 340 and 350 .

As shown, the rear driving module 300 is provided with first and second driving wheels 340 and 350 and a driving unit 360, but unlike the front driving module 200, the first and second driving wheels 340 and 350 are provided. Two driving wheels 340 and 350 and a driving unit 360 may be provided, and a pair of driving wheels and a driving unit may be provided in both the front and rear driving modules 200 and 300, respectively.

4 is a schematic plan view for explaining the first propulsion rails and the first driving wheel shown in FIG. 1, and FIG. 5 is a schematic plan view for explaining the first propulsion rails and the first driving wheel shown in FIG. This is a schematic side view for

Referring to FIGS. 4 and 5 , the first driving wheel 340 may generate driving force in a non-contact manner using magnetic force. For example, the first propulsion rails 110 may include permanent magnets 112 disposed along the traveling direction, and the first driving wheel 340 may include the first propulsion rails. 110 and may include permanent magnets 342 arranged in a circumferential direction.

As shown, the first propulsion rails 110 may be disposed above and below the first driving wheel 340, respectively, and the first driving wheel 340 is the first propulsion rails. It may be arranged to be spaced apart from (110) by a predetermined distance. In particular, as shown, a part of the first driving wheel 340 may be disposed between the first rails 110 for propulsion, and when the first driving wheel 340 is rotated, the first propulsion Propulsion may be generated by magnetic force between the permanent magnets 112 of the rails 110 and the permanent magnets 342 of the first driving wheel 340 .

As an example, the N poles and S poles of the first propulsion rails 110 may be disposed in the traveling direction, and in particular, as shown, the same polarities may be disposed to face each other in the traveling direction. In addition, the permanent magnets 342 of the first driving wheel 340 may be arranged in a circumferential direction to have a Halbach array shape as shown in FIG. 4 .

Since the second propulsion rails 120 and the second driving wheel 350 may have the same configuration as the first propulsion rails 110 and the first driving wheel 340, additional A detailed description is omitted. Meanwhile, the driving unit 360 may include a motor for rotating the first and second driving wheels 340 and 350 . As shown in FIG. 1, although the driving unit 360 includes two motors to rotate the first and second driving wheels 340 and 350, respectively, the first and second driving wheels 340 and 350 are used by one motor. The second driving wheels 340 and 350 may be rotated.

FIG. 6 is a schematic plan view for explaining another example of the first propulsion rails shown in FIG. 4 .

Referring to FIG. 6 , the first propulsion rails 110 may each include a plurality of permanent magnets 114 disposed in the traveling direction, and the permanent magnets 114 are disposed in the traveling direction. It can be arranged in the form of a Halbach array.

Referring back to FIGS. 1 to 3 , the maglev transport device 10 includes first and second guide rails disposed parallel to the first and second propulsion rails 110 and 120, respectively. (130, 132) and the first and second guide rails (130, 132) are arranged to face each other and the first and second guide electromagnets for guiding the bogie 20 along the traveling direction s (220, 222, 320, 322) may be included.

For example, the first and second guide rails 130 and 132 may be disposed under the first and second propulsion rails 110 and 120, respectively, and Content electromagnets (220, 222, 320, 322) may be disposed on the side surfaces of the front and rear running bodies (204, 304) facing the first and second guide rails (130, 132). can More specifically, first and second electromagnets 220 and 222 for front guidance may be disposed on both side surfaces of the front running body 204, and on both side surfaces of the rear running body 304, the first and second electromagnets 220 and 222 may be disposed. First and second electromagnets 320 and 322 for backward guidance may be disposed.

In addition, the maglev transport device 10 includes first and second auxiliary rails 140 and 142 disposed parallel to the first and second propulsion rails 110 and 120, respectively, and the first and second propulsion rails 110 and 120, respectively. First and second auxiliary wheels 330 disposed above the first and second auxiliary rails 140 and 142 and supporting the bogie 20 when the levitation electromagnets 210 and 310 are not operated. , 332).

For example, the first and second auxiliary rails 140 and 142 may be disposed below the first and second guide rails 130 and 132, respectively, and the first and second auxiliary wheels (330, 332) may be mounted below the front and rear running bodies (204, 304) to be positioned on top of the first and second auxiliary rails (140, 142). More specifically, first and second front auxiliary wheels (not shown) may be mounted on the lower part of the front driving body 204, and the first and second rear auxiliary wheels are mounted on the lower part of the rear driving body 304. (330, 332) can be mounted.

The first and second auxiliary wheels 330 and 332 support the truck 20 while the levitation electromagnets 210 and 310 are not operated, that is, when the truck 20 is parked or stopped. can be used for

On the other hand, although not shown, the maglev transport device 10 controls the operation of the levitation electromagnets 210 and 310, the guidance electromagnets 220, 222, 320 and 322 and the driving unit 360. A control unit (not shown) may be included. For example, the control unit may apply power to the levitation electromagnets 210 and 310 for driving of the trolley 20, and the levitation electromagnets 210 and 310 and the levitation rail ( 102), the bogie 20 may be lifted by the suction force generated between them. In addition, in order to move and guide the bogie 20, the controller may apply power to the electromagnets 220, 222, 320, and 322 for guidance and rotate the driving wheels 340 and 350. The bogie ( 20) enables stable driving in a non-contact manner.

According to one embodiment of the present invention, the maglev transfer device 10 may include a second travel track 150 branching from the travel track 100 . For example, as shown in FIG. 2 , the traveling track 100 is spaced apart from ends of the second propulsion rails 120 by a predetermined distance and parallel to the first propulsion rails 110. A pair of third propulsion rails 122 extending equally, and a third eye spaced apart from the end of the second guide rail 132 by a predetermined distance and extending in parallel with the first guide rail 130 It may include a content rail 134, and the second travel track 150, as shown in FIG. 2, a branch rail 152 for levitation connected to the levitation rail 102, and the second and a pair of first propulsion branch rails 160 and a pair of second propulsion branch rails 162 connected to ends of the third propulsion rails 120 and 122 and extending parallel to each other. ), and first and second divergent guide rails 170 and 172 connected to ends of the second and third guide rails 132 and 134 and extending parallel to each other. .

In addition, the second travel track 150 connects the second and third propulsion rails 120 and 122 and the first and second propulsion branch rails 160 and 162 to each other. and connecting the second connection rails 180 and 182 for propulsion, the second and third guide rails 132 and 134, and the first and second branch guide rails 170 and 172 to each other. It may include first and second connecting rails 190 and 192 for guiding.

7 and 8 are schematic diagrams for explaining straight driving and rotational driving passing through a branching point between the driving trajectory shown in FIG. 2 and the second driving trajectory.

According to one embodiment of the present invention, the control unit, as shown in FIG. 7, when the bogie 20 goes straight through the branching point between the travel track 100 and the second travel track 150, Operations of the first and second guide electromagnets 220, 222, 320, and 322 may be stopped. Specifically, when the bogie 20 passes straight through the branching point, there is no guide rail corresponding to the second electromagnet 222 for front guidance and the second electromagnet 322 for rear guidance at the branching point. Therefore, the first electromagnet 220 for front guidance and the first electromagnet 320 for rear guidance can be attached to the first guide rail 130 by a suction force, whereby the bogie 20 runs stably. this may become impossible. In order to solve this problem, the control unit may stop the operation of the first and second guide electromagnets 220, 222, 320, 322 while the bogie 20 passes straight through the branching point. Through this, stable straight driving of the bogie 20 can be achieved at the branching point.

In addition, as shown in FIG. 8, when the control unit 20 rotates along the branch rail 152 for levitation from the levitation rail 102, that is, the trolley 20 is the traveling track ( 100) to the second travel track 150, the inner guidance electromagnets among the first and second guidance electromagnets 220, 222, 320, 322 and the first and second guidance electromagnets The operation of the inner electromagnets for guidance may be controlled so that a distance between the inner guide rails 190 and 192 is maintained constant.

Specifically, as shown, the control unit maintains a constant distance between the second electromagnets 222 and 322 for guidance and the first connecting rail 190 for guidance, so that the second front and rear guides are maintained constant. Power applied to the electromagnets 222 and 322 for guidance may be controlled. In particular, when the cart 20 rotates, the centrifugal force of the cart 20 and the suction force of the second front and rear guide electromagnets 222 and 322 can be equally controlled, and accordingly, the second drive The wheels 350 may not be separated from the first connecting rails 180 for propulsion, and stable rotational driving of the bogie 20 may be achieved.

In the above, the right turn of the cart 20 has been described, but in the case of the left turn of the cart 20, the operations of the first and second guide electromagnets 220, 222, 320, 322 are controlled in a similar manner to the above. can be done

According to the embodiments of the present invention as described above, the magnetic levitation transport device 10 includes a bogie 20 for transporting objects, and a levitation rail 102 extending along the running direction of the bogie 20 And, levitation electromagnets 210 and 310 disposed to face the levitation rail 102 and levitating the bogie 20, and permanent magnets disposed on both sides of the traveling direction and arranged along the traveling direction A pair of first propulsion rails 110 and a pair of second propulsion rails 120 including magnets, between the first propulsion rails 110 and the second propulsion rails 120 and first and second driving wheels 340 and 350 including permanent magnets arranged in a circumferential direction, respectively, and rotating the first and second driving wheels 340 and 350 to obtain the permanent magnets. It may include a driving unit 360 that generates a driving force between the magnets.

The permanent magnets of the first and second propulsion rails 110 and 120 may be arranged so that the same polarities face each other in the driving direction, and the permanent magnets of the first and second driving wheels 340 and 350 may be arranged in the form of a Halbach array. Therefore, the bogie 20 can be moved in a non-contact manner by the levitation force generated by the levitation electromagnets 210 and 310 and the propulsive force generated by the first and second driving wheels 340 and 350. there is.

As a result, when the magnetic levitation transport device 10 as described above is used for transporting materials such as substrates in a clean room for manufacturing semiconductors or display devices, generation of contaminants such as particles can be greatly reduced. Accordingly, productivity of the semiconductor or display device can be greatly improved.

Although the above has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention described in the claims below. You will understand that there is

10: magnetic levitation transfer device 20: bogie
100: driving track 102: floating rail
110, 120, 122: propulsion rail 130, 132, 134: guide rail
140, 142: auxiliary rail 150: second driving track
152: second floating rail 160, 162: branch rail for propulsion
170, 172: Branch rail for guidance 180, 182: Connecting rail for propulsion
190, 192: connecting rail for guidance 200: front driving module
202: connecting shaft 204: front running body
210: electromagnet for forward levitation 220, 222: electromagnet for forward guidance
300: rear driving module 302: connecting shaft
304: rear running body 310: electromagnet for rear levitation
320, 322: electromagnet for rear guidance 340, 350: driving wheel
360: driving unit

Claims (20)

bogies for transporting goods;
a floating rail extending along the traveling direction of the bogie;
A levitation electromagnet disposed to face the levitation rail and levitating the bogie;
a pair of first propulsion rails and a pair of second propulsion rails each disposed on both sides of the traveling direction and including permanent magnets arranged along the traveling direction;
first and second drive wheels respectively disposed between the first propulsion rails and between the second propulsion rails and including permanent magnets arranged in a circumferential direction; and
and a driving unit generating thrust between the permanent magnets by rotating the first and second driving wheels. The magnetic levitation transfer according to claim 1, characterized in that the N poles and S poles of the permanent magnets of the first and second propulsion rails are arranged in the running direction and the same polarities are arranged to face each other in the running direction. Device. [Claim 2] The maglev transport device according to claim 1, wherein the permanent magnets of the first and second propulsion rails are arranged in a Halbach arrangement. [Claim 2] The maglev transport device according to claim 1, wherein the permanent magnets of the first and second driving wheels are arranged in a Halbach arrangement. The method of claim 1, further comprising a driving body rotatably connected to an upper portion of the bogie,
The magnetic levitation transport device, characterized in that the levitation electromagnet is disposed on the traveling body, and the levitation rail is disposed above the levitation electromagnet. According to claim 1, First and second guide rails disposed in parallel with the first and second propulsion rails, respectively; and
and first and second guide electromagnets disposed to face the first and second guide rails and guiding the bogie along the traveling direction. According to claim 6, The floating branch rail connected to the floating rail;
a pair of third propulsion rails spaced apart from ends of the second propulsion rails by a predetermined distance and extending in parallel with the first propulsion rails;
a pair of first propulsion branch rails and a pair of second propulsion branch rails connected to ends of the second and third propulsion rails and extending in parallel with each other;
a third guide rail spaced apart from an end of the second guide rail by a predetermined distance and extending in parallel with the first guide rail; and
The magnetically levitated transport device further comprises first and second divergent guide rails connected to ends of the second and third guide rails and extending in parallel with each other. 8. The method of claim 7 , further comprising a control unit for stopping operation of the first and second electromagnets for guidance while the bogie passes through the branching point between the second propulsion rails and the third propulsion rails and goes straight. Magnetic levitation transfer device comprising a. 8. The system of claim 7, further comprising: first and second connection rails for propulsion connecting the second and third propulsion rails and the first and second propulsion branch rails to each other; and
The magnetically levitated transport device further comprises first and second connecting rails for guiding connecting the second and third guiding rails and the first and second branching rails for guiding to each other. 10. The method of claim 9, wherein when the bogie rotates from the lift rail along the lift branch rail, an inner drive wheel of the first and second drive wheels is one of the first and second connection rails for propulsion. A gap between an inner guide electromagnet of the first and second guide electromagnets and an inner guide guide rail of the first and second guide guide rails so as not to be separated from the inner propulsion link rails Magnetically levitated transport device further comprising a control unit for controlling the operation of the inner guidance electromagnet so as to be kept constant. According to claim 1, First and second auxiliary rails disposed in parallel with the first and second propulsion rails, respectively; and
The magnetic levitation transfer device further comprises first and second auxiliary wheels disposed above the first and second auxiliary rails and supporting the bogie when the levitation electromagnet is not operated. bogies for transporting goods;
A pair of first propulsion rails and a pair of second propulsion rails including levitation rails extending along the traveling direction of the bogie and permanent magnets disposed on both sides of the traveling direction and arranged along the traveling direction a running track including rails for use;
It is connected to the bogie and includes front and rear driving modules for moving the bogie along the travel track,
The front and rear driving modules include levitation electromagnets disposed to face the levitation rail in order to levitating the bogie,
At least one of the front and rear driving modules,
first and second drive wheels respectively disposed between the first propulsion rails and between the second propulsion rails and including permanent magnets arranged in a circumferential direction; and
and a driving unit generating thrust between the permanent magnets by rotating the first and second driving wheels. 13. The method of claim 12, wherein N poles and S poles of the permanent magnets of the first and second propulsion rails are disposed in the traveling direction and the same polarities are disposed to face each other in the traveling direction;
The permanent magnets of the first and second driving wheels are arranged in a Halbach arrangement. 13. The magnetically levitated transport apparatus according to claim 12, wherein the permanent magnets of the first and second propulsion rails and the permanent magnets of the first and second driving wheels are arranged in a Halbach arrangement. The method of claim 12, wherein the front and rear driving modules each include front and rear driving bodies rotatably connected to the top of the bogie,
The magnetic levitation transport device, characterized in that the electromagnets for levitation are disposed on the front and rear traveling bodies. 16. The method of claim 15, wherein the travel track further comprises first and second guide rails respectively disposed on both sides of the front and rear travel bodies and extending in parallel with the first and second propulsion rails; ,
Characterized in that first and second guide electromagnets for guiding the bogie along the traveling direction are disposed on both sides of the front and rear running bodies to face the first and second guide rails, respectively. magnetic levitation transfer device. The method of claim 16, further comprising a second travel trajectory branched from the travel trajectory,
The second driving trajectory,
A branch rail for levitation connected to the levitation rail;
a pair of branch rails for propulsion;
connecting rails for propulsion connecting between the second propulsion rails and the propulsion branch rails;
branch rails for guidance; and
Magnetically levitated transport device comprising a guide connecting rail connecting the second guide rail and the guide branch rail. 18. The method of claim 17, further comprising a control unit for stopping the operation of the first and second electromagnets for guidance while the bogie passes through the branching point between the travel track and the second travel track and goes straight. magnetic levitation transfer device. 18. The method of claim 17, wherein when the bogie changes its path from the driving track to the second driving track, a driving wheel adjacent to the connecting rails for propulsion among the first and second driving wheels is the connecting rail for propulsion. Controlling the operation of the guidance electromagnet so that the distance between the guidance electromagnet adjacent to the guidance connection rail and the guidance connection rail is maintained constant among the first and second guidance electromagnets so as not to be separated from the guide Magnetic levitation transfer device further comprising a control unit. delete

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