KR102515960B1 - 임프린트 장치 및 물품 제조 방법 - Google Patents
임프린트 장치 및 물품 제조 방법 Download PDFInfo
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Abstract
Description
도 2a 내지 도 2d는 계측 유닛의 복수의 예를 도시하는 도면이다.
도 3은 복수의 계측 유닛을 포함하는 기판 스테이지의 일례를 도시하는 도면이다.
도 4a 및 도 4b는 제2 실시형태에 따른 계측 유닛과 그 주변을 도시하는 도면이다.
도 5는 제3 실시형태에 따른 계측 유닛과 그 주변을 도시하는 도면이다.
도 6은 제4 실시형태에 따른 계측 유닛과 그 주변을 도시하는 도면이다.
도 7은 제5 실시형태에 따른 계측 유닛과 그 주변을 도시하는 도면이다.
도 8a 내지 도 8f는 물품 제조 방법을 도시하는 도면이다.
Claims (14)
- 몰드의 표면을 기판 상의 임프린트재에 접촉시켜서 상기 기판 상에 상기 몰드의 상기 표면의 형상을 전사하는 임프린트 장치이며,
상기 몰드를 보유지지하는 몰드 보유지지부와;
상기 기판을 보유지지하는 기판 보유지지부와;
상기 몰드 보유지지부 및 상기 기판 중 적어도 하나가 높이 방향으로 이동될 때에 상기 몰드 또는 상기 몰드 보유지지부와 접촉할 수 있고, 상기 기판 보유지지부에 의해 보유지지되는 상기 기판과 상이한 위치이면서, 상기 기판 보유지지부에 의해 보유지지된 상기 기판의 표면의 높이와 동일 또는 미리결정된 범위 내의 높이 위치에 설치되는 접촉부와;
상기 몰드 또는 상기 몰드 보유지지부가 상기 접촉부에 접촉할 때의 접촉력을 계측하는 계측 유닛을 포함하는 임프린트 장치. - 제1항에 있어서, 상기 미리결정된 범위 내는, 상기 접촉부가, 상기 기판 보유지지부에 의해 보유지지된 상기 기판의 표면과의 차이가 ± 0.1 mm 이내의 높이 위치인 임프린트 장치.
- 제1항에 있어서,
복수의 계측 유닛을 포함하며,
상기 복수의 계측 유닛은 서로 상이한 높이 위치에 설치되는 접촉부를 갖는 임프린트 장치. - 제1항에 있어서,
상기 계측 유닛의 계측 결과에 기초하여 상기 접촉력을 제어하는 제어부를 포함하는 임프린트 장치. - 제4항에 있어서, 상기 몰드 보유지지부 또는 상기 기판 보유지지부는 구동 유닛을 포함하며, 상기 제어부는 상기 구동 유닛의 구동력을 제어하여 상기 접촉력을 제어하는 임프린트 장치.
- 제5항에 있어서, 상기 제어부는 상기 접촉력과 상기 구동력 사이의 관계를 상기 제어를 위한 보정 정보로서 저장하는 메모리를 포함하고, 상기 제어부는 상기 메모리에 저장된 상기 보정 정보에 기초하여 접촉력을 제어하는 임프린트 장치.
- 제5항에 있어서,
상기 몰드의 표면의 형상을 가압을 통해 변형시키는 몰드 변형부를 포함하며,
상기 제어부는, 상기 접촉부가 상기 몰드의 표면에 접촉할 때의 상기 몰드 보유지지부의 위치 정보에 기초하여 상기 몰드 변형부의 가압량을 제어하는 임프린트 장치. - 제1항에 있어서, 상기 계측 유닛은 압력 센서를 포함하는 임프린트 장치.
- 제1항에 있어서, 상기 계측 유닛은 변위 센서를 포함하는 임프린트 장치.
- 제1항에 있어서, 상기 몰드 보유지지부는 상기 접촉부에 접촉하는 돌기부를 포함하고, 상기 돌기부는 상기 몰드의 상기 표면의 높이 위치에 대응하는 높이 위치에 설치되는 임프린트 장치.
- 제1항에 있어서, 상기 접촉부는 상기 기판 보유지지부에 설치되고, 상기 계측 유닛은 상기 몰드가 상기 접촉부에 접촉할 때의 상기 기판 보유지지부의 높이 위치의 변화로부터 상기 접촉력을 취득하는 임프린트 장치.
- 제1항에 있어서, 상기 접촉부의 표면의 적어도 일부는 수지 재료로 형성되는 임프린트 장치.
- 삭제
- 임프린트 장치를 사용한 물품 제조 방법이며, 상기 임프린트 장치는,
몰드를 보유지지하는 몰드 보유지지부와;
기판을 보유지지하는 기판 보유지지부와;
상기 몰드 보유지지부 및 상기 기판 중 적어도 하나가 높이 방향으로 이동될 때에 상기 몰드 또는 상기 몰드 보유지지부와 접촉할 수 있고, 상기 기판 보유지지부에 의해 보유지지되는 상기 기판의 미리결정된 평면 내의 위치와 상이한 상기 미리결정된 평면 내의 위치에 설치되며, 상기 기판 보유지지부에 의해 보유지지된 상기 기판의 표면의 높이에 대응하는 높이 위치에 설치되는 접촉부와;
상기 몰드 또는 상기 몰드 보유지지부가 상기 접촉부에 접촉할 때의 접촉력을 계측하는 계측 유닛을 포함하고,
상기 물품 제조 방법은,
상기 임프린트 장치를 사용하여, 상기 몰드의 표면을 상기 기판 상의 임프린트재에 접촉시켜서, 상기 기판 상에 상기 몰드의 상기 표면의 형상을 전사하는 단계와;
상기 단계에서 패턴이 형성된 상기 기판을 가공하는 단계를 포함하는 물품 제조 방법.
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