KR102460690B1 - Vacuum valve - Google Patents

Abstract

The present invention is characterized in that it maintains a stable driving state by making a constant vacuum pressure in the space in the bellows and the space in the sealed plate through a through line and a connection block of a fixed type.

Description

vacuum valve

The present invention relates to a vacuum valve, and to a vacuum valve characterized in that it maintains a stable driving state by making a constant vacuum pressure in a space in a bellows and a space in a closed blade through a through line and a fixed connection block.

In general, LCDs, LEDs, semiconductor devices, etc. require process precision, so high cleanliness, high precision, and special manufacturing technology are required.

For this reason, LCD, LED, and semiconductor devices are manufactured in a vacuum that can most completely block the contact of foreign substances in the air. affect.

Various types of gate valves (including angle valves and vacuum valves) are installed in the process section for manufacturing the semiconductor as described above, thereby performing a function of transferring or blocking the gas passing through the cleaning module between chambers.

In such a gate valve, in a state in which the inlet and outlet between the process chamber and the process chamber or the vibration pump are respectively coupled to each other, the outlet or the inlet is coupled to each other, and the sealing member opens and closes the corresponding inlet according to the operation of the cylinder. is actuated to be transmitted or blocked.

As an embodiment of such a gate valve, "Bellows Angle Valve with Damping Cylinder (Republic of Korea Patent Publication No. 10-1113062)" of the following Patent Document 1 has been published.

"Bellows angle valve with damping cylinder" of Patent Document 1 is a body 100 having a first passage 110 and a second passage 120 in different directions; And, on one side of the body 100 coupled, a first through hole 240 is formed at one end, and a first compressed air inlet 220 and a second compressed air inlet 230 are provided to reciprocate the first piston 210 installed therein. The air cylinder 200 formed; and the damping cylinder 300 coupled to one side of the air cylinder 200 and having the second piston 310 installed therein; and the coupling portion of the air cylinder 200 The seal plate 130 is disposed and fixed inside one side of the body 100, and the second through hole 131 is formed in the center; and the first through hole 240 and the second through hole 131. a shaft 400 through which the first piston 210 and the second piston 310 are connected; and a sealing plate 140 coupled to the other end of the shaft 400 to open and close the first passage 110 ; and a bellows 150 that connects and seals the seal plate 130 and the sealing plate 140 in the body 100; is stored, and an orifice 311 is formed in the second piston 310 to decelerate a sudden change in position of the sealing plate 140 according to the deceleration of the second piston 310, Due to this, it is possible to prevent the pressure change inside the chamber in which the semiconductor manufacturing equipment is installed by decelerating the sudden change in the position of the sealing plate, and consequently, there is an advantage in that it is possible to prevent the occurrence of semiconductor manufacturing defects.

However, in the "Bellows Angle Valve with Damping Cylinder" of Patent Document 1, a pressure change is structurally generated inside the vacuum or atmospheric pressure in the process of driving the angle valve, so the precision and accuracy of the drive is lowered, and the shaft shaft There is a problem that the sealing ring formed on the shaft shaft is deformed or worn due to friction and foreign substances as air is moved between the air and the space to move foreign substances such as particles.

Patent Document 1: Republic of Korea Patent Publication No. 10-1113062

The present invention has been devised to solve the above problems, and an object of the present invention is to keep the pressure in the vacuum valve constant according to the operation of the sealing blade during the cleaning process and the working process, and to install the bellows inside the cylinder part as the driving part By doing so, it is to provide a vacuum valve capable of preventing the bellows from being deformed or damaged through particles, process gases, or process by-products.

In order to solve the above problems, in the vacuum valve according to the present invention, the upper part is opened, the first inner space 111 is formed inside the upper part, and the first and second fluid passage paths 112 and 113 are formed on the lower side. ) is formed, and the first and second fluid passages 112 and 113 and the second inner space 114 communicating with the first inner space 111 are formed on the lower inner side of the body housing 110; and , The upper housing 120 coupled to the upper portion of the main housing 110, the inner cylinder space 121 is formed; And, a cylinder part including a shaft 131 formed in the cylinder space 121 ( 130); and fixedly installed on the inside between the body housing 110 and the upper housing 120, a shaft through hole 141 through which the shaft 131 passes in the center is perforated, and the A connection block 140 having one or more perforated pressure control holes 142 communicating with the first inner space 111 and the cylinder space 121; and the shaft 131 positioned in the cylinder space 121 ) The bellows 150 surrounding the outside; and located in the first inner space 111 to open and close the first fluid passage 112 and the second fluid passage 113 according to whether the cylinder part 130 is operated, but the shaft 131 and a sealing blade 160 including a connecting rod 161 connected to;

In addition, the upper portion of the bellows 150 is coupled to the lower surface of the piston 132 of the cylinder unit 130, and the lower portion of the bellows 150 is coupled to the upper surface of the connection block 140 do it with

In addition, the pressure control hole 142 is characterized in that it communicates with the inner side of the bellows (150).

In addition, the sealing blade 160 is characterized in that it moves in the vertical direction in a sealed state in the first inner space 111 and the second inner space (114).

In addition, a bumper ring seating groove 143 is recessed in the inner surface of the shaft through hole 141 , and a bumper ring 144 is inserted into the bumper ring seating groove 143 .

In addition, in a state in which the sealing blade 160 performs a normal operation, any one of the bumper ring 144 and the shaft 131 or the connecting rod 161 is spaced apart from each other.

As described above, according to the present invention, there is an advantage in that it is possible to maintain a stable driving state by constant vacuum pressure generated in the space inside the bellows and the space of the sealed blade through the through-line and the fixed-type connection block.

In addition, by installing the bellows inside the upper housing in which the cylinder part is located, there is an advantage in that the bellows can be prevented from being deformed or damaged through particles, process gases, or process by-products.

1 is a perspective view showing the overall appearance of a vacuum valve according to a preferred embodiment of the present invention;
2 and 3 are exemplary views showing the operation of the vacuum valve according to the preferred embodiment of the present invention;
4 is a cross-sectional view showing a cross-sectional view of a vacuum valve according to another preferred embodiment of the present invention;

Hereinafter, the vacuum valve 100 according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that in the drawings, the same components or parts are denoted by the same reference numerals as much as possible. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted so as not to obscure the gist of the present invention.

1, 2 or 3 , the vacuum valve 100 according to an embodiment of the present invention has a main body housing 110 , an upper housing 120 , a cylinder part 130 , and a connection block 140 . ), it is composed of a bellows 150 and a sealing plate (160).

First, the main housing 110 will be described. As shown in FIG. 1, FIG. 2 or FIG. 3, the main housing 110 is a movement path through which a fluid such as process gas moves, and the upper housing 120, which will be described later, is coupled with the upper part open.

On the other hand, a first inner space 111 in which a sealing blade 160 to be described later is located is formed in the upper inner side of the main housing 110 according to the opening and closing operation.

At this time, the sealing blade 160 operated in the first inner space 111 maintains a tightly sealed state in the first inner space 111 so that the first inner space 111 is in a vacuum state. make it possible

On the other hand, a first fluid passage 112 connected to the chamber and a second fluid passage 113 connected to the pump are formed on the lower side of the main housing 110 to enable the movement of fluids such as process gas. do.

In addition, depending on whether the sealing blade 160 is positioned in communication with the first inner space 111 and the first and second fluid passageways 112 and 113 on the lower inner side of the main body housing 110 . A second inner space 114 that enables the first and second fluid passages 112 and 113 to be opened and closed is formed.

Next, the upper housing 120 will be described. As shown in FIGS. 1, 2 or 3, the upper housing 120 is a cylinder space 121 so that a cylinder part 130 to be described later is provided therein in a state coupled to the upper part of the main housing 110. As this component, one side of the upper housing 120 has an air in-fitting part 122 and an air-out fitting part 123 through which air for operating the cylinder part 130 is supplied and discharged from the outside. is formed

Next, the cylinder part 130 will be described. As shown in FIG. 2 or FIG. 3 , the cylinder part 130 is a component that is provided in the cylinder space 121 and transmits a driving force to the sealing blade 160 , and the lower part of the cylinder part 130 has A shaft 131 coupled to the connecting rod 161 of the sealing blade 160 is formed.

In addition, a piston 132 in close contact with the inner surface of the cylinder space 121 is formed on the outer surface of the shaft 131 , and an o-shaped ring having a sealing function is further provided on the outer surface of the piston 132 . It is preferable to be

Next, the connection block 140 will be described. As shown in FIG. 2 or FIG. 3, the connecting block 140 is fixedly installed inside between the main housing 110 and the upper housing 120, and the sealing blade 160 vertically moves. As a component for guiding that the vacuum pressure in the bellows 150 and the vacuum pressure of the first inner space 111 to be described later are kept constant, the shaft through hole 141 is provided in the center of the connection block 140. A perforation is formed so that the shaft 131 or the connecting rod 161 can pass therethrough.

On the other hand, it is characterized in that one or more pressure regulating holes 142 which are perforated in the vertical direction are perforated inside the connection block 140, and the pressure regulating hole 142 is formed in the first inner space 111 and By being formed to communicate with the inside of the bellows 150, as shown in FIG. 2, in the process of opening the first and second fluid passages 113 and 114, the vacuum pressure in the bellows 150 and the first inner space It synchronizes the pressure so that the vacuum pressure of 111 is constant, and serves to purge the inside of the bellows 150 in the process of closing the first and second fluid passages 113 and 114 .

Meanwhile, a bumper ring seating groove 143 is recessed in the inner surface of the shaft through hole 141 , and a bumper ring 144 made of an elastic material is inserted into the bumper ring seating groove 143 .

At this time, in a state in which the sealing blade 160 performs a normal operation, the bumper ring 144 and the shaft 131 or the connecting rod 161 are spaced apart from each other by a predetermined distance d, so that the sealing blade ( During normal vertical movement, the bumper ring 144 and the shaft 131 or the connecting rod 161 do not contact each other, and when the sealing blade 160 is shaken by vibration or external force, the shaking is canceled to guide the sealing blade 160 to move vertically.

Next, the bellows 150 will be described. As shown in FIG. 2 or FIG. 3 , the bellows 150 is a component positioned in the cylinder space 121 to surround the outside of the shaft 131 , and the upper portion of the bellows 150 is the cylinder part. (130) is coupled to the lower surface of the piston 132, the lower portion of the bellows 150 is coupled to the upper surface of the connection block (140).

For this reason, even when the first and second fluid passages 113 and 114 are opened, the bellows 150 does not exist in the exposed position, thereby preventing the bellows 150 from being damaged or deformed by particles or process by-products. does it

Next, the sealing blade 160 will be described. As shown in FIG. 2 or 3 , the sealing blade 160 is located in the first inner space 111 and the first fluid passage 112 and the second 2 As a component for opening and closing the fluid passage 113 , a connecting rod 161 connected to the shaft 131 is formed on the upper portion of the sealing blade 160 .

On the other hand, the sealing blade 160 is vertically movable within the first inner space 111 and the second inner space 114 in a tightly sealed state in the first inner space 111 and the second inner space. It is preferable that the O-shaped ring be installed on the outside, upper and lower portions of the sealing blade 160 in contact with the inner surface of the space 114 .

Meanwhile, the vacuum valve 100 according to an embodiment of the present invention may be manufactured as an angle valve type as shown in FIG. 1 , or may be manufactured as a gate valve type as shown in FIG. 4 in another embodiment.

Best embodiments have been disclosed in the drawings and specification. Although specific terms are used herein, they are used only for the purpose of describing the present invention, and are not used to limit the meaning or scope of the present invention described in the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

100: vacuum valve
110: body housing
111: first inner space 112: first fluid passage
113: second fluid passage 114: second inner space
120: upper housing
121: cylinder space 122: air in fitting part
123: air out fitting part
130: cylinder part
131: shaft 132: piston
140: connection block
141: shaft through hole 142: pressure control hole
143: bumper ring seating groove 144: bumper ring
150: bellows
160: sealing blade
161: connecting rod

Claims (6)

The upper part is opened, the first inner space 111 is formed inside the upper part, the first and second fluid passageways 112 and 113 are formed on the lower side, and the first and second fluid passageways ( 112, 113) and a body housing 110 in which a second inner space 114 communicating with the first inner space 111 is formed;
an upper housing 120 coupled to an upper portion of the main housing 110, and having a cylinder space 121 formed therein;
a cylinder part 130 including a shaft 131 formed in the cylinder space 121;
It is fixedly installed on the inside between the main body housing 110 and the upper housing 120, and a shaft passing hole 141 through which the shaft 131 passes is formed in the center, and the first inner space ( 111) and a connection block 140 in which one or more pressure control holes 142 communicating with the cylinder space 121 are perforated;
a bellows 150 positioned in the cylinder space 121 to surround the outside of the shaft 131; and
It is located in the first inner space 111 and opens and closes the first fluid passage 112 and the second fluid passage 113 according to whether the cylinder part 130 is operated, but the shaft 131 and A vacuum valve (100) comprising; a sealing blade (160) including a connecting rod (161) to be connected. According to claim 1,
The upper part of the bellows 150 is coupled to the lower surface of the piston 132 of the cylinder part 130,
A lower portion of the bellows (150) is a vacuum valve (100), characterized in that coupled to the upper surface of the connection block (140). 3. The method of claim 2,
The pressure control hole (142) is a vacuum valve (100), characterized in that in communication with the inner side of the bellows (150). 4. The method of claim 3,
The sealing blade 160 is a vacuum valve (100), characterized in that it moves in the vertical direction in a sealed state in the first inner space (111) and the second inner space (114). According to claim 1,
A bumper ring seating groove 143 is recessed in the inner surface of the shaft through hole 141,
The vacuum valve (100), characterized in that the bumper ring (144) of an elastic material is inserted into the bumper ring seating groove (143). 6. The method of claim 5,
In a state in which the sealing blade 160 performs a normal operation, any one of the bumper ring 144 and the shaft 131 or the connecting rod 161 is spaced apart from each other.

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