KR102279275B9 - Printing Apparatus and Method for Forming Patterns Using the Same - Google Patents
Printing Apparatus and Method for Forming Patterns Using the SameInfo
- Publication number
- KR102279275B9 KR102279275B9 KR20140164528A KR20140164528A KR102279275B9 KR 102279275 B9 KR102279275 B9 KR 102279275B9 KR 20140164528 A KR20140164528 A KR 20140164528A KR 20140164528 A KR20140164528 A KR 20140164528A KR 102279275 B9 KR102279275 B9 KR 102279275B9
- Authority
- KR
- South Korea
- Prior art keywords
- same
- printing apparatus
- forming patterns
- patterns
- forming
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Printing Methods (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140164528A KR102279275B1 (en) | 2014-11-24 | 2014-11-24 | Printing Apparatus and Method for Forming Patterns Using the Same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140164528A KR102279275B1 (en) | 2014-11-24 | 2014-11-24 | Printing Apparatus and Method for Forming Patterns Using the Same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| KR20160061748A KR20160061748A (en) | 2016-06-01 |
| KR102279275B1 KR102279275B1 (en) | 2021-07-20 |
| KR102279275B9 true KR102279275B9 (en) | 2021-10-27 |
Family
ID=56138254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020140164528A Active KR102279275B1 (en) | 2014-11-24 | 2014-11-24 | Printing Apparatus and Method for Forming Patterns Using the Same |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR102279275B1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200061268A (en) * | 2018-11-23 | 2020-06-02 | 주식회사 나노엑스 | Imprinting machine and imprinting method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4694653B2 (en) * | 2008-12-17 | 2011-06-08 | シャープ株式会社 | Roller type imprint apparatus and imprint sheet manufacturing method |
| KR100988935B1 (en) * | 2009-10-28 | 2010-10-20 | 한국기계연구원 | Roll imprinting apparatus |
| KR101726625B1 (en) * | 2010-08-13 | 2017-04-14 | 엘지디스플레이 주식회사 | Roll mold, method and apparatus of fabricating the same, and method of fabricating thin film pattern using the same |
| KR101444604B1 (en) * | 2012-05-31 | 2014-09-26 | 주식회사 엘지화학 | Cliche and printing apparatus comprising the same |
-
2014
- 2014-11-24 KR KR1020140164528A patent/KR102279275B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR102279275B1 (en) | 2021-07-20 |
| KR20160061748A (en) | 2016-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| G170 | Publication of correction |