KR102209616B1 - Electroforming Apparatus - Google Patents

Abstract

Electroplating device that makes it possible to ensure uniformity of alloy components (at the center and the edge side) of the metal foil by implementing a gradient of the electrolyte supply rate in the width direction of the metal foil during electroplating for continuously manufacturing metal foil Is provided.
The electroplating apparatus of the present invention comprises: a rotating cathode for electrodepositing a metal foil; and an anode disposed opposite to the rotating cathode; And a supply rate gradient electrolyte supply unit that supplies an electrolyte solution between the rotating cathode and the anode, and is provided to form a gradient of the electrolyte supply rate in at least the width direction of the metal foil.

Description

Electroforming Apparatus {Electroforming Apparatus}

The present invention relates to an electroplating apparatus, and more particularly, when electroplating to continuously manufacture a product (metal foil), by implementing a gradient of the electrolyte supply rate in the width direction of the metal foil, at least securing uniformity of alloy components of the metal foil It relates to an electroplating device that enables.

The electroplating method in which metal ions are electrodeposited and removed from the cathode drum through an electric action enables the production of ultra-thin metal sheets compared to the rolling method.

For example, if a plating electrolyte in which one or more metal ions are mixed at a certain ratio is continuously sprayed between a rotating cylindrical anode material and a concentric arc cathode material, metal ions are electrodeposited on the cathode surface by electrolytic reaction to produce a thin metal plate. do.

On the other hand, if the electrolyte is supplied from the negative electrode material inlet or outlet in only one direction, or simultaneously supplied from both sides, a product having a uniform alloy component in the thickness direction of the metal foil can be obtained. There was a problem that component deviation occurred.

For example, looking at the component distribution in the width direction of the Invar sheet, which is an iron-nickel alloy manufactured by the electroplating method, a phenomenon in which the nickel component at the edge is increased compared to the center occurs, which is where the current is concentrated at the edge. It is due to the phenomenon.

Therefore, it is necessary to cut a large part of both edge portions in which the nickel component exceeds the product allowable range, which in turn lowers the product yield.

Accordingly, there has been a demand for a technique related to making the alloy component uniform in the width direction of the product at least during electroplating.

Meanwhile, KR 10-2004-0099972 A (2004.12.02) discloses an apparatus for manufacturing a thin metal plate using electroplating.

KR 10-2004-0099972 A (2004.12.02)

The present invention was conceived to solve the conventional problems as described above, and its object is to implement a gradient of the electrolyte supply rate in the width direction of the metal foil during electroplating for continuously manufacturing a product (metal foil), It is to provide an electroplating apparatus capable of ensuring uniformity of alloy components.

As a technical aspect for achieving the above object, the electroplating apparatus of the present invention includes: a rotating cathode for electrodepositing a metal foil; and an anode disposed opposite to the rotating cathode; And a supply rate gradient type electrolyte supply unit that supplies an electrolyte between the rotating cathode and the anode, and is provided to form a gradient of the electrolyte supply rate in at least the width direction of the metal foil.

In this case, the supply rate gradient type electrolyte supply unit includes an electrolyte supply head to which an electrolyte supply pipe is connected; And, a nozzle means provided on the electrolyte supply head; may be configured to include.

Preferably, the nozzle means includes a plurality of hole nozzles or slit nozzles, and the diameter of the hole nozzle or the height of the slit nozzle may be configured to be further reduced at the edge portion than at the center portion of the electrolyte supply head. .

Preferably, an intermediate plate provided with through holes inside the electrolyte supply head further comprises, a plurality of partition plates provided between the intermediate plate and the nozzle means in the longitudinal direction of the supply head; And a flow control valve provided in closed spaces formed between the supply head and the intermediate plate and the diaphragm.

More preferably, it may be configured to enable gradient control of the electrolyte supply rate via the flow control valve.

Preferably, a plurality of partition plates provided to partition the central portion and the edge portion of the electrolyte supply head; And, electrolyte supply pipes respectively connected to the central part side partition space and the edge part side partition space formed through the partition plates.

More preferably, the electrolyte supply pipe connected to the central partition space may have a larger electrolyte supply capacity than the electrolyte supply pipe connected to the edge partition space.

Preferably, an intermediate plate provided with through holes provided inside the electrolyte supply head, further comprising, between the intermediate plate and the rear surface of the supply head, by separating the central portion and the edge portion to separate the central side separation space and the edge side separation space It may be configured to include; a plurality of separation plates provided to form a.

More preferably, the electrolyte supply pipe may be connected only to the central part side separation space.

Preferably, the separating plate may be configured to be connected with a drive cylinder penetrating the sidewall of the electrolyte supply head to control a gradient of the electrolyte supply speed.

Preferably, the supply rate gradient type electrolyte supply unit may be disposed on one or both sides of the rotating cathode.

According to the present invention, since the concentration of the nickel component increases according to the (electrolyte) supply rate during electroplating of the Invar sheet, which is an alloy steel of iron and nickel, the electrolyte supply rate is increased at the edge portion rather than the central portion in the width direction of the Invar sheet. By reducing the amount of increase in concentration due to current concentration, it will be possible to produce a product with more uniform components in the width direction of the Invar sheet.

Accordingly, the present invention implements a gradient of the electrolyte supply rate in the width direction of the metal foil during electroplating in which a metal foil (thin plate) is continuously manufactured, so that at least the uniformity of the alloy component (on the center and edge sides) of the metal foil can be secured. Provides a stimulating effect.

Therefore, the present invention prevents deviation of the alloy component in the width direction of the metal foil due to the difference in the current density between the center and the edge due to the concentration of the existing current at the edge of the cathode material, and ultimately provides another effect of improving the product yield. do.

1 is a front configuration diagram showing the entire configuration of an electroplating apparatus related to the present invention
2 is a schematic graph showing the distribution of nickel components in the width direction of a metal foil during electroplating
3 is a schematic graph showing the gradient (distribution) of the electrolyte supply rate in the width direction of the product through the electrolyte supply unit in the electroplating apparatus according to the present invention
4 and 5 are perspective views showing electrolyte supply units of an electroplating apparatus having a hole nozzle according to the present invention
6A and 6B are partial perspective views showing electrolyte supply units of an electroplating apparatus having a slit nozzle according to the present invention.
7 is a front view showing an embodiment of the present invention electrolyte supply unit of FIGS. 4 and 5
Figure 8 is a front view showing another embodiment of the present invention electrolyte supply unit of Figure 6
9 is a plan view showing another embodiment of the present invention electrolyte supply unit
10 is a plan view showing another embodiment of the present invention electrolyte supply unit
11 is a plan view showing another embodiment of the present invention electrolyte supply unit
12 is a plan view showing a modified example of the present invention electrolyte supply unit of FIG. 11

Hereinafter, the present invention will be described in detail through exemplary drawings. In adding reference numerals to elements of each drawing, it should be noted that the same elements are assigned the same numerals as possible even if they are indicated on different drawings. In addition, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the subject matter of the present invention, a detailed description thereof will be omitted.

Hereinafter, the electroplating apparatus 100 according to the present invention will be described.

First, a product, for example, a metal foil (thin plate) may be manufactured by continuously rolling a metal in a plate state to a desired thickness or electrodepositing metal ions on a rotating cathode drum.

However, in the case of manufacturing a metal foil through rolling, there is a limitation in that the thickness cannot be made thinner, but the electroplating method according to the present invention enables the production of ultra-thin 20㎛ or less, so that metal ions are used as a rotating cathode (cathode drum ), it makes it possible to produce ultra-thin metal sheets that cannot be manufactured by rolling.

On the other hand, Figure 1 shows the electroplating apparatus 100 according to the present invention.

That is, as shown in FIG. 1, a drum-shaped rotating cathode 120 to which the plating electrolyte 110 is supplied and a concentric arc-shaped anode 130 are disposed in the electrolyzer 140 at regular intervals.

In addition, a plating electrolyte 110 in which one or more metal ions (iron, copper, nickel, chromium, etc.) are mixed at a predetermined ratio in the electrolytic cell 140 is provided with an electrolyte supply source 202 and a supply pipe 204 and an electrolyte supply unit 200. Through ), it is supplied to the electrolyte flow path 160, which is a space between the cathode 120 and the anode 130.

The electrolyte supply unit 200 may be provided as a supply rate gradient type electrolyte supply unit 200, as described in detail below.

At this time, metal ions are electrodeposited on the surface of the cathode by an electrolytic reaction to form the metal foil 10, and the metal foil 10 thus formed is separated from the surface of the rotating cathode 120 by the peeling roll 150.

On the other hand, in order for metal ions to be uniformly electrodeposited on the surface of the rotating cathode 120, the electrolyte must be smoothly supplied to the electrolyte flow path 160 that is a space between the rotating cathode 120 and the anode 130.

In addition, in FIG. 1, the electrolyte supply unit 200 is illustrated as being disposed on only one side of the rotating cathode 120, but the electrolyte supply units 200 are disposed on both sides of the rotating cathode 120, and the electrolyte distribution path 160 ) It will be possible to supply the electrolyte 110 from both sides.

By the way, if the electrolyte 110 is supplied from the inlet or outlet of the rotating cathode 120 in only one direction, or simultaneously supplied from both sides, a product having a uniform alloy component in the thickness direction of the metal foil 10 can be obtained. In the width direction of the metal foil 10, component deviation may occur at the center portion and the edge portion.

For example, in FIG. 2, a graph schematically shows a general distribution of components in the width direction of an Invar sheet, an iron-nickel alloy manufactured by the electroplating method, showing that the nickel component at the edge portion increases significantly compared to the center portion. Able to know.

This tendency is caused by a phenomenon in which the current is concentrated to the edge portion, and a large portion of both edge portions in which the nickel component exceeds the product allowable range is cut off, which reduces the product yield.

Therefore, as shown in Fig. 3, if the supply speed of the electrolyte is reduced at the edge portion rather than the center portion in the width direction of the Invar sheet, the increase in concentration due to the current concentration is offset, thereby enabling the production of products with more uniform components in the width direction of the Invar sheet. This will improve product yield as a result.

Thus, the conductive plating apparatus 100 of the present invention, through various embodiments of the electrolyte supply unit 200 outlined in FIG. 1, at least the edge portion than the central portion in the width direction of the metal foil 10 (Invar sheet, etc.) The electrolyte supply unit 200 will be provided so that the electrolyte supply rate can be further reduced.

Therefore, hereinafter, the electroplating apparatus 100 based on the electrolyte supply unit 200 according to the present invention will be described.

However, in the following description of the present embodiment, the main components related to the electroplating apparatus 100 of FIG. 1 are described by reference numerals of 100, and the components related to the electrolyte supply unit 200 according to the present invention are 200. It will be described separately by the above reference numerals.

In addition, the basic description of the electroplating apparatus 100 related to the present invention described in FIG. 1 is brief in the description of the present embodiment below.

Accordingly, the following describes the electroplating apparatus 100 based on the supply rate gradient type electrolyte supply unit 200 according to the present invention.

For example, FIG. 1 shows an electroplating apparatus 100 according to the present invention, and FIGS. 4 to 6 show an electrolyte supply unit 200 provided in the electroplating apparatus 100, and in particular FIG. 7 12 to 12 illustrate various embodiments of the supply rate gradient type electrolyte supply unit 200 according to the present invention.

That is, as shown in Figure 1, the electroplating apparatus 100 according to the present invention is largely arranged along the circumferential shape of the rotating cathode 120 for electrodepositing the metal foil 10 and the rotating cathode 120 Provided to supply the electrolyte 110 to the anode 130 and the electrolyte flow path 160 between the rotating cathode and the anode, at least a supply rate gradient electrolyte that forms a gradient of the electrolyte supply rate in the width direction of the metal foil It may be provided including the supply unit 200.

Here, electroplating through the rotating cathode 120 and the anode 130 has been described above.

In particular, the supply rate gradient type electrolyte supply unit 200 of the present invention, as described in FIG. 3, is at least a gradient of the electrolyte supply rate in the width direction of the metal foil 10 (the electrolyte supply rate at the edge portion than at the center portion). To reduce the gradient), it is possible to more stably secure the uniformity of the alloy component between the center portion and the edge portion of the metal foil 10.

Meanwhile, as described above, the supply rate gradient type electrolyte supply unit 200 may be disposed on one side or both sides of the electrolyte flow path 160 (of the rotating cathode 120).

Accordingly, hereinafter, the supply rate gradient type electrolyte supply unit 200, which is a substantial characteristic component in the electroplating apparatus 100 of the present invention, will be described in more detail.

First, in FIGS. 4 to 6, basic forms of the electrolyte supply unit 200 of the present invention are shown.

That is, as shown in Figures 4 to 6, the (electrolyte) supply rate gradient type electrolyte supply unit 200 of the present invention, the electrolyte supply head 210 to which the electrolyte supply source 202 and the supply pipe 204 are connected. And, a nozzle means provided on the front surface 212 of the electrolyte supply head 210, for example, may include a plurality of hole nozzles 230 or a slit nozzle 240.

In addition, it may further include an intermediate plate 220 provided inside the electrolyte supply head 210 and provided with through holes 222.

The electrolyte supply head 210 as described above may be provided as a circular pipe 210a as shown in FIGS. 4 and 6A, or may be provided as a square pipe 210b as shown in FIGS. 5 and 6B.

However, in the following description of the present embodiment, the electrolyte supply head is collectively described by reference numeral '210' without distinguishing between a circular pipe and a square pipe.

Meanwhile, although schematically shown in the drawing, the electrolyte supply source 202 and the supply pipe 204 may be provided to maintain a desired level of electrolyte supply speed based on a pressure and flow rate set through a pump, etc., and supply the electrolyte The head 210 is provided as a plate structure assembled with a flange, so that the intermediate plate 220 and various components 310, 320, 410, and 510 described in detail below are included in the electrolyte supply head. Could be placed inside.

And, as shown in Figures 4 and 5, the intermediate plate 220 provided with through holes 222 at a predetermined diameter and at a predetermined interval, so that the electrolyte 100 maintains a constant flow inside the electrolyte supply head 210 something to do.

In addition, as shown in FIGS. 4 and 5, a nozzle means, for example, an electrolyte solution 110, is provided on the front surface 212 of the electrolyte supply head 210 made of the circular pipe 210a or the square pipe 210b. Hole nozzles 230 that enable ejection into the flow path (160 in FIG. 1) are provided at appropriate intervals, or, as shown in FIGS. 6A and 6B, the electrolyte 110 is transferred to the electrolyte solution flow path (FIG. 1 A slit nozzle 240 may be provided to enable ejection to 160 of the

Next, hereinafter, based on FIGS. 7 to 12, various embodiments of the (electrolyte) supply rate gradient type electrolyte supply unit 200 of the present invention having the basic configurations described in FIGS. 4 to 6 will be described in detail. do.

That is, the supply rate gradient type electrolyte supply unit 200 of the present invention further reduces the electrolyte supply speed at the edge portion than at the center portion in the width direction of the metal foil 10 such as an Invar sheet, as described above, thereby By offsetting the increase in concentration, it is possible to produce products with more uniform components in the width direction of the metal foil.

First, FIGS. 7 and 8 illustrate a supply rate gradient electrolyte supply unit 200 according to the present invention in the first embodiment.

That is, as shown in FIG. 7, the diameter R2 of the edge E is further reduced than the diameter R1 of the central portion C of the hole nozzle 230 provided in the electrolyte supply head 210.

Therefore, the electrolyte 110 injected from the hole nozzle 230 of the electrolyte supply head 210 is supplied from the edge portion E rather than the central portion C in the width direction (length direction of the head) of the metal foil 10 Since the speed is lowered, a gradient of the electrolyte supply speed is formed.

As a result, as shown in Figure 3, the metal foil 10, for example, to further reduce the supply speed of the electrolyte 110 supplied to the electrolyte flow path 160 from the edge portion (E) than the central portion (C) in the width direction of the invar sheet. Therefore, the increase in concentration due to the current concentration is canceled out, thereby enabling the production of products with more uniform components in the width direction of the Invar sheet.

On the other hand, as shown in Figure 8, when the slit nozzle 240 is provided in the electrolyte supply head 210, the height (H1) of the slit nozzle 240 of the central portion (C) of the electrolyte supply head 210 It is to be smaller than the height (H2) of the slit nozzle (240) of the part (E).

As a result, even in the case of FIG. 8, the electrolyte 110 sprayed from the slit nozzle 230 of the electrolyte supply head 210 is in the width direction of the metal foil 10 (the lengthwise direction of the head) than the central part C. In E), the feed rate is lower, so it will form a gradient of the electrolyte feed rate.

For example, if the electrolyte supply pressure is constant, the smaller the diameter or the size (height) of the nozzles, the electrolyte supply speed will decrease.

Next, FIG. 9 shows a supply rate gradient type electrolyte supply unit 200 according to the present invention of the second embodiment.

That is, as shown in Fig. 9, the supply rate gradient type electrolyte supply unit 200 of the second embodiment of the present invention includes the intermediate plate 220 and the nozzles 230 and 240 of the electrolyte supply head 210. A flow rate provided in a plurality of diaphragms 310 provided at regular intervals in the longitudinal direction of the electrolyte supply head therebetween, and a closed space 312 formed between the supply head and the intermediate plate 220 and the diaphragm 310 It may be provided including control valves 320.

In this case, only the hole nozzle 230 provided in the electrolyte supply head 210 is illustrated in FIG. 9, but it is of course possible to use the slit nozzle 240 as well.

Therefore, as shown in FIG. 9, the closed spaces 312 formed by the plurality of partition plates 310 between the intermediate plate 220 of the electrolyte supply head 210 and the nozzles 230 and 240 It will be possible to control the supply rate of the ejected electrolyte through the operation control of the flow control valve 320 provided individually to.

As a result, when the operation of the flow control valves 320 provided in the closed spaces 312 at regular intervals in the longitudinal direction of the electrolyte supply head 210 is controlled, the electrolyte is supplied from the edge portion than the central portion of the electrolyte supply head 210 It becomes possible to feed at a lower speed.

Accordingly, as shown in FIG. 3 described above, since it is possible to further reduce the supply speed of the electrolyte 110 at the edge portion E than the central portion C in the width direction of the metal foil 10, for example, the invar sheet, The resulting increase in concentration will be offset, thereby enabling the production of products with more uniform components in the width direction of the Invar sheet.

On the other hand, in the case of the supply rate gradient type electrolyte supply unit 200 of the present invention shown in FIG. 9, in addition to forming a gradient that makes the electrolyte supply rate different at the center and edge portions in the width direction of the metal foil 10, Control of increasing or lowering the electrolyte supply speed itself through the flow control valves 320 independently provided in the unit enclosed spaces 312. This will enable more precise electroplating according to the component (composition) environment of the metal foil 10.

Next, FIG. 10 shows a supply rate gradient type electrolyte supply unit 200 according to the present invention according to the third embodiment.

That is, as shown in FIG. 10, the supply rate gradient type electrolyte supply unit 200 according to the third embodiment of the present invention includes a central portion C and both edge portions E of the electrolyte supply head 210. A plurality of partition plates 410 provided to be divided, and an electrolyte supply pipe 204a independently connected to the central partition space 412 and the edge partition space 414 formed through each of the partition plates 410 It may be provided to form a gradient of the electrolyte supply rate at least in the width direction of the metal foil including the 204b.

In this case, the electrolyte supply pipe 204a connected to the central partition space 412 may have a larger electrolyte supply amount (capacity) than the electrolyte supply pipes 204b connected to the edge partition space 414.

That is, the diameter of the central portion side electrolyte supply pipe 204a may be formed to be larger than the edge portion side electrolyte solution supply pipe 204b.

Therefore, in the case of the present invention supply rate gradient type electrolyte supply unit 200 of FIG. 10, the supply amount (supply rate) of the electrolyte supplied to the edge portion (E) partition space 414 is the central portion (C) partition space 412 ), the supply rate of the electrolyte ejected from the nozzle of the edge portion E will be further reduced than that of the central portion C, under the condition that the same pressure is applied.

As a result, as shown in FIG. 3, since the supply speed of the electrolyte solution 110 is further reduced at the edge portion E than the central portion C in the width direction of the metal foil 10, for example, the invar sheet, the concentration increase according to the current concentration This will be canceled out, allowing the production of products with more uniform components in the width direction of the Invar sheet.

However, although the intermediate plate 220 is shown in FIG. 10, when the partition plates 410 are based, each independent supply pipe is connected, so there is no problem in forming a gradient of the electrolyte supply rate even without the intermediate plate. will be.

Next, Fig. 11 shows a supply rate gradient type electrolyte supply unit 200 according to the present invention in a fourth embodiment.

That is, as shown in Fig. 11, the supply rate gradient type electrolyte supply unit 200 of the fourth embodiment of the present invention has a central portion between the intermediate plate 220 and the rear surface 214 of the electrolyte supply head 210. Including a plurality of separation plates 510 provided to form a central separation space 512 and an edge separation space 514 by separating (C) and both edge portions (E), at least in the width direction of the metal foil It can be provided to form a gradient of the electrolyte supply rate.

In addition, the electrolyte supply pipe 204 is connected so as to communicate only with the separation space 512 on the central part side.

Therefore, even in the case of the supply rate gradient type electrolyte supply unit 200 of the fourth embodiment of the present invention, the electrolyte 110 is supplied only to the central separation space 512, and the edge portion ( Electrolyte supply is cut off to the E) side.

Eventually, the electrolyte 110 passes through the through holes 220 of the intermediate plate 220 of the central portion (C) side separation space 512, and then again ejects first through the central portion side nozzles 230 and 240 Since it is ejected through the next edge-side nozzles 230 and 240, as a result, the electrolyte supply speed in the edge-side (E) will decrease more than the central-side supply speed.

Accordingly, as shown in FIG. 3, since the supply speed of the electrolyte solution 110 is further reduced at the edge portion E than the central portion C in the width direction of the metal foil 10, for example, the invar sheet, the concentration increase according to the current concentration This will be offset, and it will be possible to produce a product with a more uniform component in the width direction of the Invar sheet.

Next, FIG. 12 shows another modified example of the supply rate gradient electrolyte supply unit 200 of the fourth embodiment of the present invention described in FIG. 11.

For example, supplying the electrolyte to each of the separating plates 510 provided between the rear surface 214 and the intermediate plate 220 of the head to separate the central portion (C) and the edge portion (E) shown in FIG. It is connected with the drive cylinder 520 penetrating through both side walls 216 of the head 210.

For example, the drive cylinder 520 is mounted as a bracket 522 horizontally on both side walls 216 of the electrolyte supply head 210, and the rod (not shown) of the drive cylinder 520 is the head side wall ( Passing through the sealing member 524 provided in 216 so that the electrolyte does not leak, and the separating plates 510 may be fixed to the end of the rod of the driving cylinder 520.

Therefore, in the case of the supply rate gradient type electrolyte supply unit 200 of the present invention of FIG. 12, in addition to forming a gradient of the electrolyte supply rate in the width direction of the metal foil 10, as in FIG. 11, the drive cylinder ( By means of the separation plates 510 whose positions are changed according to the operation of the 520, it will be possible to further control the electrolyte supply rate gradient itself.

That is, like the flow control valves 320 of FIG. 9, the drive cylinder 520 of FIG. 12 supplies the electrolyte to the edge portion E of the electrolyte supply head 210 through the position of the separator 510. In addition to making the speed lower than that of the central part C, it is possible to control the electrolyte supply speed itself at least at the edge part.

As a result, in the case of FIG. 12, it is possible to control the electrolyte supply rate more accurately than that of FIG. 11, so that it is possible to more accurately form a gradient of the electrolyte supply rate in the width direction of the metal foil 10, which is ) For example, by reducing the supply speed of the electrolyte 110 in the edge portion (E) than in the center portion (C) in the width direction of the Invar sheet, it is more uniform in the width direction of the Invar sheet by offsetting the concentration increase according to the current concentration. It will enable the production of one-component products.

Accordingly, according to the present invention described so far, it is possible to implement a gradient of the electrolyte supply rate in the width direction of the metal foil during electroplating for continuously manufacturing a metal foil (thin plate). It is possible to secure uniformity of alloy components.

this is. As the current is concentrated on the edge of the cathode material, the deviation of the alloy component in the width direction of the metal foil is prevented by the difference in current density between the center and the edge, thereby improving product yield.

The above description is merely illustrative of the technical idea of the present invention, and those of ordinary skill in the art to which the present invention pertains will be able to make various modifications and variations without departing from the essential characteristics of the present invention.

Accordingly, the embodiments disclosed in the specification and drawings are not intended to limit the technical idea of the present invention, but to explain the technical idea, and the scope of the technical idea of the present invention is not limited by these embodiments.

The scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be interpreted as being included in the scope of the present invention.

10.... Metal foil 100.... Electroplating equipment
110.... electrolyte 120.... rotating cathode
130.... anode 140.... electrolytic
160.... electrolyte distribution route
200.... Feed rate gradient type electrolyte supply unit of the present invention
204,204a,204b.... Electrolyte supply pipe 210.... Electrolyte supply head
220.... middle plate 222.... through hole
230.... hole nozzle 240.... slit nozzle
310.... diaphragm 312... confined space
320.... flow control valve 410.... partition plate
412,414.... Compartment space 510.... Separator
512,514.... Separation space 520.... Drive cylinder

Claims (11)

A rotating cathode electrodepositing a metal foil;
An anode disposed opposite to the rotating cathode;
A supply rate gradient type electrolyte supply unit that supplies an electrolyte between the rotating cathode and the anode, and is provided to form a gradient of the electrolyte supply rate in at least a width direction of the metal foil;
The supply rate gradient type electrolyte supply unit includes an electrolyte supply head to which an electrolyte supply pipe is connected;
Nozzle means provided on the electrolyte supply head; And
An intermediate plate provided with through holes inside the electrolyte supply head;
Including,
A plurality of separating plates provided between the intermediate plate and the rear surface of the supply head to separate a central portion and an edge portion to form a central portion side separation space and an edge portion side separation space;
Electroplating device comprising a.
delete The method of claim 1,
The nozzle means includes a plurality of hole nozzles or slit nozzles,
The electroplating apparatus configured to further decrease the diameter of the hole nozzle or the height of the slit nozzle at an edge portion than at a central portion of the electrolyte supply head.
The method of claim 1,
An intermediate plate provided with through holes inside the electrolyte supply head;
Including more,
A plurality of diaphragms provided between the intermediate plate and the nozzle means in the longitudinal direction of the supply head; And,
A flow control valve provided in closed spaces formed between the supply head and the intermediate plate and the diaphragm;
Electroplating device comprising a.
The method of claim 4,
Electroplating apparatus configured to enable the gradient control of the electrolyte supply rate through the flow control valve.
The method of claim 1,
A plurality of partition plates provided to partition a central portion and an edge portion of the electrolyte supply head; And,
Electrolyte supply pipes respectively connected to the central part side partition space and the edge part side partition space formed through the partition plates;
Electroplating device comprising a.
The method of claim 6,
An electroplating apparatus in which the electrolyte supply pipe connected to the central portion side partition space has a larger electrolyte supply capacity than the electrolyte solution supply pipe connected to the edge portion side partition space.
delete The method of claim 1,
Electroplating apparatus in which the electrolyte supply pipe is connected to the separation space on the central part side.
The method of claim 1,
The separating plate is connected to a drive cylinder penetrating through a side wall of the electrolyte supply head to control a gradient of the electrolyte supply speed.
The method according to any one of claims 1, 3 to 7, 9 and 10,
The supply rate gradient type electrolyte supply unit is an electroplating apparatus disposed on one or both sides of the rotating cathode.

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