KR102081838B1 - Laminated quartz and method for manufacturing the same - Google Patents

Abstract

A stacked quartz in which a plurality of quartz is stacked is provided. The stacked quartz includes a first quartz member in which a plate-shaped first body and a first protrusion formed to protrude outside the rim of the first body are formed; A second quartz member having a plate-shaped second body disposed to face the first quartz member and a second protrusion formed to protrude outside the rim of the second body; And a plate-shaped intermediate quartz member disposed between the first quartz member and the second quartz member; wherein the first protrusion and the second protrusion are each of the first quartz member and the second quartz member, respectively. The first projection and the second projection are formed at corresponding positions so as to face each other, and the suction holes passing through the first projection and the second projection are respectively provided, and the suction holes are the first quartz member and the second In communication with the inner space between the quartz member and the intermediate quartz member, a fluid located in the inner space may be discharged through the suction hole.

Description

Laminated quartz and method for manufacturing the same}

The present invention relates to a laminated quartz and a method of manufacturing the laminated quartz.

In semiconductor manufacturing, quartz products include process tubes and wafer support structures, heat transfer in chemical vapor deposition (hereinafter CVD) and physical vapor deposition (PVD) processes. And Pedestal for heat shielding. The semiconductor manufacturing process is a chemical and physical process, and microcircuits are formed on a silicon wafer through deposition and oxidation etching. These processes mainly proceed at high temperature, so that foreign objects should not penetrate during the process. In CVD and PVD processes, foreign contaminant contamination has been directly related to yield, and chemical and physically stable quartz materials have been used during the process.

Among quartz glass materials, opaque quartz (hereinafter referred to as OPQ) maintains an opaque state with uniform distribution of fine bubbles (10 m or less) in the quartz. Thus, OPQ materials are used to shield heat transferred and radiated from a heat source (1100 ° C.) in high temperature CVD and PVD processes.

Until the existing 90 nano-semiconductor process, these simple OPQ materials have been processed and used for heat transfer and radiation shielding purposes. Recently, however, the semiconductor manufacturing process has been gradually refined, and the existing opaque OPQ material has become a contaminant in processes below 65 nanometers. The microscopic bubbles of OPQ material are easily etched more than clear fused quartz (CFQ) in a process such as etching at high temperature, so particles may be generated and bubbles contained in the OPQ material itself may be contained in the bubbles. There is a possibility that foreign substances present may affect the semiconductor process.

In order to remove the element of the contaminant, that is, while blocking heat and radiant heat, a sandwich-type material coating CFQ on OPQ has been proposed to withstand etching at the same time. In order to make the sandwich type material, a technique of pressing and attaching different kinds of quartz materials is required.

Conventionally, in the state of superimposing two discs or plates in the form of a quartz material, it was compressed with the flame of a gas torch and a burner using a load in the direction of gravity, but with low yield, long working time and air bubbles Caused by the problem of defects

According to an embodiment of the present invention, to provide a laminated quartz manufacturing method and a manufacturing system and a laminated quartz manufactured accordingly, which are easier than conventional manufacturing processes, reduce unnecessary consumption of a processed surface, and shorten the process time.

According to an aspect of the present invention, a laminated quartz in which a plurality of quartz are stacked, a first quartz member in which a plate-shaped first body and a first protrusion formed protruding outside the rim of the first body are formed; A second quartz member having a plate-shaped second body disposed to face the first quartz member and a second protrusion formed to protrude outside the rim of the second body; And a plate-shaped intermediate quartz member disposed between the first quartz member and the second quartz member; wherein the first protrusion and the second protrusion are each of the first quartz member and the second quartz member, respectively. The first projection and the second projection are formed at corresponding positions so as to face each other, and the suction holes passing through the first projection and the second projection are respectively provided, and the suction holes are the first quartz member and the second There is provided a stacked quartz in communication with the inner space between the quartz member and the intermediate quartz member, so that the fluid located in the inner space can be discharged through the suction hole.

At this time, the first quartz member and the second quartz member may be formed of a transparent material.

At this time, the intermediate quartz member may be formed of an opaque material.

At this time, one surface of the intermediate quartz member may be in contact with the other surface of the first quartz member, and the other surface of the intermediate quartz member may be in contact with one surface of the second quartz member.

In this case, the first protrusion and the second protrusion may be formed in a trapezoidal shape or a triangular shape extending radially outwardly from the centers of the first quartz member and the second quartz member, respectively.

At this time, the first protrusion and the second protrusion are respectively made of the first quartz member and the second quartz member, and then are members coupled to the first quartz member and the second quartz member or the first quartz The member and the second quartz member may be integrally formed on one side of the first quartz member and the second quartz member.

At this time, the first protrusion and the second protrusion may be formed to have a smaller cross-sectional area toward the radially outward direction of the first quartz member and the second quartz member.

At this time, the rims of the first quartz member, the second quartz member, and the intermediate quartz member may be compressed so that the inner space is sealed.

According to another aspect of the present invention, a method of manufacturing a laminated quartz for manufacturing the laminated quartz, the method comprising: providing a first quartz member and a second quartz member having protrusions in which suction holes are formed; Disposing an intermediate quartz member between the first quartz member and the second quartz member; Aligning the first quartz member and the second quartz member so that the suction holes of each of the first quartz member and the second quartz member communicate with each other; Heating and bonding the edges of the protrusions of the first quartz member and the second quartz member; A rim crimping step of applying a negative pressure to the suction hole and crimping the rims of the first quartz member, the intermediate quartz member and the second quartz member; A first central compression step of heating the first quartz member and the upper surfaces of the second quartz member while moving in a central direction and a circumferential direction; And a second center pressing step of heating the lower surfaces of the first quartz member and the second quartz member in a central direction and a circumferential direction. The rim pressing step and the first and second center pressing step are provided by a method of manufacturing a laminated quartz including a vacuum forming step of discharging a fluid between the first quartz member and the second quartz member through the suction hole. do.

At this time, the crimping step of the first quartz member and the second quartz member in the circumferential direction from the one side of the protrusion to the other side of the protrusion to heat the rim of the first quartz member and the second quartz member You can.

At this time, in the step of compressing the central portion, the flames may be moved from the rims of the first quartz member and the second quartz member to the respective central directions at predetermined intervals, and then heated in the circumferential direction.

At this time, in the pressing step of the central portion, the upper surface of the first quartz member and the lower surface of the second quartz member along a helical path from the rims of the first quartz member and the second quartz member to the respective central directions. It can be heated.

At this time, in the frame pressing step and the center pressing step, the first quartz member and the second quartz member may be heated using an oxyhydrogen flame of 1800 degrees or more.

At this time, the vacuum forming step may be performed by applying a suction pressure of 2kg / cm ^ 2 to the suction hole.

In this case, a flame polishing step of flame polishing the upper surface of the first quartz member and the lower surface of the second quartz member after the second central compression step may be further included.

At this time, after the flame polishing step may further include a heat treatment step of heat-treating the flame-polluted laminated quartz.

At this time, after the vacuum forming step may further include the step of obtaining a circular quartz member by removing the edge of the laminated quartz.

According to an exemplary embodiment of the present invention, including a projection in which a suction hole is formed for sucking the internal space fluid of the quartz member, it is possible to shorten the working time and solve the problem of defects caused by air bubbles.

1 is a view showing a vacuum pump is coupled to the protrusion of the laminated quartz according to an embodiment of the present invention.
2 is a view showing that the vacuum pump is coupled to the protrusions of the laminated quartz according to an embodiment of the present invention.
Figure 3 is a combined view of each quartz member of the laminated quartz according to an embodiment of the present invention.
4 is a flowchart of a method of manufacturing a laminated quartz according to another embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains may easily practice. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. In the drawings, parts not related to the description are omitted in order to clearly describe the present invention, and the same reference numerals are attached to the same or similar elements throughout the specification.

In this specification, terms such as “include” or “have” are intended to indicate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, and one or more other features. It should be understood that the presence or addition possibilities of fields or numbers, steps, actions, components, parts or combinations thereof are not excluded in advance.

1 is a view showing a vacuum pump is coupled to the protrusion of the laminated quartz according to an embodiment of the present invention. 2 is a view showing that the vacuum pump is coupled to the protrusions of the laminated quartz according to an embodiment of the present invention. Figure 3 is a combined view of each quartz member of the laminated quartz according to an embodiment of the present invention.

The stacked quartz 1 according to an embodiment of the present invention may include a first quartz member 12, a second quartz member 16, an intermediate quartz member 14 and protrusions 17a and 17b.

1 and 2, the first quartz member 12 may mean a quartz member disposed on an upper side based on a drawing among a plurality of stacked quartz members. At this time, the first quartz member 12 is shown in a circular disk shape, but may be formed in a polygonal plate shape.

The first quartz member 12 may have a plate-shaped first body. The first body may be formed in a disc shape. A first protrusion 17a may be formed at an edge portion of the first body. The first protrusion 17a may be formed to protrude radially outwardly from the rim as shown in FIG. 1. The position of the first protrusion 17a may be formed in an arbitrary radially outward direction of the first quartz member 12, but with the second protrusion 17b formed on the side of the second quartz member 16, as will be described later. It can be formed in a corresponding position.

The second quartz member 16 may have a plate-shaped second body. At this time, a second protrusion 17b may be formed at the edge of the second body, and may be formed in a shape corresponding to a position corresponding to the first protrusion 17a.

The first protrusion and the second protrusion may be formed in a trapezoidal or triangular shape, and may be formed to have a smaller cross-sectional area from the center of each of the first body and the second body toward the radially outward direction.

The lower surface of the first quartz member 12 and the upper surface of the second quartz member 16 face each other, and may be arranged to be spaced apart at a predetermined distance, between the first quartz member 12 and the second quartz member 16 In the intermediate quartz member 14 may be disposed.

At this time, the second protrusion 17b of the second quartz member 16 may be formed to correspond to a position facing the first protrusion 17a of the first quartz member 12.

The first protrusion 17a and the second protrusion 17b may be formed to extend from the first quartz member 12 and the second quartz member 16, respectively. The first protrusion 17a and the second protrusion 17b may be formed to have thicknesses corresponding to the first quartz member 12 and the second quartz member 16.

The first protrusion 17a and the second protrusion 17b may be separate members coupled to the first quartz member 12 and the second quartz member 16, respectively, or a member formed by heat deformation.

At this time, the first protrusion 17a and the second protrusion 17b may be formed such that the cross-sectional area decreases from the center of the first quartz member 12 and the second quartz member 16 in a radially outward direction.

Suction holes 15a and 15b may be formed in the first protrusion 17a and the second protrusion 17b so as to penetrate each. The suction holes 15a and 15b are connected to the fluid suction pipe 22 of the vacuum pump 20, as described later, so that the fluid between the first protrusion 17a and the second protrusion 17b can be discharged.

At this time, the edges of the first protrusion and the second protrusion may be heat-sealed and joined. In addition, the first quartz member 12 and the second quartz member 16 are joined to the respective rim portions to form suction holes 15a and 15b between the first quartz member 12 and the second quartz member 16. Except, a closed inner space may be formed.

Specifically, the remaining portions of the rim portions of the first quartz member 12 and the second quartz member 16 except for the portions where the first protrusions 17a and the second protrusions 17b are formed may be joined or heat-sealed. . Thus, the fluid located between the first quartz member 12 and the intermediate quartz member 14 and the second quartz member 16 and the intermediate quartz member 14 can only communicate with the outside through the suction holes 15a, 15b. You can.

To this end, as described later, the vacuum pump 20 is connected to the first protrusions 17a and the second protrusions 17b of the first quartz member 12 and the second quartz member 16, and the first quartz The top surface of the member 12 can be flame polished.

At this time, in order to fuse the rim portion, the rim portion of the upper surface of the first quartz member 12 may be heated first. When the heating of the edge portion is completed, the upper surface may be heated while drawing a spiral toward the center of the first quartz member 12.

Thereafter, as illustrated in FIG. 2, the edge portion of the lower surface of the second quartz member 16 may be heated. When the edge portion of the lower surface of the second quartz member 16 is completed, the lower surface may be heated while drawing a spiral toward the center of the second quartz member 16.

The rim portion of the first quartz member 12 and the second quartz member 16 is a first protrusion 17a and a second protrusion formed to protrude to one side of the first quartz member 12 and the second quartz member 16 It may mean a border portion excluding (17b).

That is, it can be heated from one side of the first projection 17a to the other side of the first projection 17a along the circumferential direction of the first quartz member 12. Similarly, it is possible to heat from one side of the second protrusion 17b to the other side of the second protrusion 17b along the circumferential direction of the second quartz member 16. Further, such heating can be carried out repeatedly.

The first quartz member 12 and the second quartz member 16 may be formed of transparent quartz, and the intermediate quartz member 14 may be formed of opaque quartz. In the course of performing a high-temperature semiconductor process, air bubbles contained in the opaque quartz are discharged to the outside to act as impurities in the semiconductor process. Therefore, the stacked quartz according to an embodiment of the present invention can prevent the bubbles of the opaque quartz from being discharged even in a high-temperature semiconductor process by stacking transparent quartz on both sides of the opaque quartz.

4 is a flowchart illustrating a method of manufacturing a laminated quartz according to another embodiment of the present invention.

According to another embodiment of the present invention, a method of manufacturing a laminated quartz includes a protrusion preparation step (S10), a protrusion engagement step (S20), an intermediate quartz member placement step (S30), a quartz member alignment step (S40), and a vacuum pump connection step (S50). ), A protrusion bonding step (S60), a rim pressing step (S70), a central pressing step (S80), a flame polishing step (S90) and a heat treatment step (S100).

At this time, the first quartz member, the intermediate quartz member and the second quartz member may be sequentially arranged and stacked, the first quartz member and the second quartz member may be made of a transparent material, and the intermediate quartz member is an opaque material It can be made of.

In the step of preparing the protrusion (S10), the protrusion is coupled to the edge of the quartz member, and may be formed in a shape in which the cross-sectional area becomes smaller from the center of the quartz member toward the outside in the radial direction. At this time, as shown in Figure 1, it may be made of a trapezoidal shape or a triangular shape.

In the step of preparing the protrusion (S10), a suction hole may be formed in the protrusion formed to protrude to one side of the quartz member. At this time, the suction hole may be formed in a direction perpendicular to the protrusion.

In the step of engaging the protrusion (S20), the protrusion may be coupled to the edge portions of the first quartz member and the second quartz member. Protrusions may be protruded from the edges of each quartz member.

Each member can be joined by heating each quartz member and the protrusion. As an example, each member can be joined by welding. At this time, the quartz member and the protruding portion can be joined so that the surfaces of the quartz member and the protruding portion are parallel.

In the step of placing the intermediate quartz member (S30), the intermediate quartz member may be disposed between the first quartz member and the second quartz member. One surface of the first quartz member may be arranged to be in surface contact with one surface of the intermediate quartz member, and the rear surface of the intermediate quartz member may be arranged to be in surface contact with one surface of the second quartz member.

In the step of aligning the first quartz member and the second quartz member (S40), the side portions of the first quartz member and the second quartz member may be aligned to coincide. At this time, the side portions of the intermediate quartz member disposed between the first quartz member and the second quartz member may be arranged to coincide. That is, the edges of the three quartz members can be arranged to be stacked side by side.

In addition, the first quartz member and the second quartz member can be aligned so that the suction holes formed in the protrusions coupled to the rim of each quartz member communicate.

In the vacuum pump connection step (S50), the fluid suction pipe of the vacuum pump may be connected to the suction hole. At this time, when a vacuum pressure is formed in the fluid suction pipe of the vacuum pump, the fluid may be discharged through the suction hole of the protrusion.

In the step of pressing the protrusion (S60), in the quartz in which the aligned first quartz member, the intermediate quartz member, and the second quartz member are stacked, the first protrusion and the second protrusion formed on one side of the first quartz member and the second quartz member Can be compressed.

At this time, the edges of the first protrusion and the second protrusion may be heat-sealed. Accordingly, a closed space may be formed between the first protrusion and the second protrusion. The space can be communicated to the outside only through the suction hole.

The edge pressing step (S70) may include first heating the rim portion of the quartz in which the aligned first quartz member, the intermediate quartz member, and the second quartz member are stacked.

Using a vacuum pump while heating the rim, the fluid between the stacked quartz can be sucked. As a result, a space in which the edges of the respective quartz elements are compressed and the first quartz member and the second quartz member is blocked from the outside can be formed.

At this time, in heating the edges of the first quartz member and the second quartz member, it is possible to heat the circumferential direction from one side of the protrusion to the other side of the protrusion. At this time, the direction of heating the rim is not limited, but may be preferably formed in a clockwise direction.

That is, the first quartz member and the second quartz member can be compressed by heating the remaining rim portion without heating the portion where the protrusion is connected. As a result, the stacked quartz inner space can communicate with the outside only through the suction hole formed in the protrusion.

Next, in the central heating step (S80), the upper surface of the first quartz member and the lower surface of the second quartz member may be heated. At this time, the flame can be first moved from the rim heated to the center direction of the first quartz member and the second quartz member, and then heated by the circumferential direction. At the same time, through the vacuum pump connected to the suction hole, the interior space can be formed into a vacuum. At this time, the pressure of the vacuum pump may be formed at 2kg / cm ^ 2.

The central heating step (S80) may include an upper surface heating step and a lower surface heating step, and may be compressed by heating one and then compressing the other.

At this time, the flame temperature of the edge heating step and the central heating step may be formed to 1800 degrees or more.

It is possible to draw a concentric circle whose radius decreases from the center of the first quartz member or the second quartz member to the center of the circle. Or it can be heated along a spiral path.

In the flame polishing step (S90), the upper surface of the first quartz member and the lower surface of the second quartz member may be entirely polished.

Finally, in the heat treatment step (S100), the laminated quartz, in which the first quartz member and the second quartz member, which are surface polished in the flame polishing step, are stacked, may be heat-treated by being put in an oven.

The heat treatment is to prevent surface cracks that may occur in the polishing step, and it is possible to remove thermal history or damage to the lattice structure remaining inside each quartz member. It is preferable that the heat-treated laminated quartz has a flat surface. At this time, the heat treatment temperature may be maintained at 1050 degrees.

Subsequently, an annealing process is further performed on the laminated quartz with full adhesion, so that the laminated quartz, the laminated quartz manufacturing system, and the laminated quartz manufacturing method according to an embodiment of the present invention have the following advantageous effects compared to the conventional technology. .

In the semiconductor process, opaque quartz (OPQ) generates particles from the opaque quartz during a high temperature etching process, despite the advantages of blocking heat transfer and heat radiation, and in this process, foreign substances contained in the bubbles of the opaque quartz are transferred to the semiconductor process. There was a problem that could interfere. However, in one embodiment of the present invention, the above-described problem can be solved by forming a vacuum between the plurality of quartz layers to be stacked, and removing bubbles contained in the intermediate quartz formed of opaque quartz.

Although one embodiment of the present invention has been described above, the spirit of the present invention is not limited to the embodiments presented herein, and an average person skilled in the art to understand the spirit of the present invention is within the scope of the same spirit In, other embodiments may be easily proposed by adding, changing, deleting, adding components, etc., but it will also be said to be within the scope of the present invention.

1: Stacked quartz 12: No 1st quartz
14: No intermediate quartz 16: No second quartz
20: vacuum pump 22: fluid suction pipe

Claims (17)

A laminated quartz in which a plurality of quartz are stacked,
A first quartz member in which a plate-shaped first body and a first protrusion formed to protrude outside the rim of the first body are formed;
A second quartz member having a plate-shaped second body disposed to face the first quartz member and a second protrusion formed to protrude outside the rim of the second body; And
Including; a plate-shaped intermediate quartz member disposed between the first quartz member and the second quartz member;
The first protrusion and the second protrusion are respectively formed at corresponding positions of the first quartz member and the second quartz member to face each other,
The first protrusion and the second protrusion respectively have suction holes penetrating the first protrusion and the second protrusion,
The suction hole is in communication with the inner space between the first quartz member and the second quartz member and the intermediate quartz member, so that the fluid located in the inner space can be discharged through the suction hole,
The first protrusion and the second protrusion are stacked quartz formed so that the cross-sectional area decreases from the center of the first quartz member and the second quartz member in a radially outward direction, respectively. According to claim 1,
The first quartz member and the second quartz member are laminated quartz formed of a transparent material. According to claim 1,
The intermediate quartz member is a laminated quartz formed of an opaque material. According to claim 1,
A layered quartz in which one surface of the intermediate quartz member is in contact with the other surface of the first quartz member, and the other surface of the intermediate quartz member is in contact with one surface of the second quartz member. According to claim 1,
The first protrusion and the second protrusion are stacked quartz having a trapezoidal shape or a triangular shape extending radially outward from the centers of the first quartz member and the second quartz member, respectively. The method of claim 5,
The first protrusion and the second protrusion are respectively manufactured separately from the first quartz member and the second quartz member, and are members coupled to the first quartz member and the second quartz member, or the first quartz member and the A laminated quartz formed integrally with a second quartz member and formed on one side of the first quartz member and the second quartz member. The method of claim 5,
The first protruding portion and the second protruding portion are laminated quartz formed so that the cross-sectional area becomes smaller toward the radially outward direction of the first quartz member and the second quartz member. According to claim 1,
A laminated quartz in which the edges of the first quartz member, the second quartz member, and the intermediate quartz member are compressed so that the inner space is sealed. A method for manufacturing a laminated quartz according to any one of claims 1 to 8,
Providing a first quartz member and a second quartz member having protrusions in which suction holes are formed;
Disposing an intermediate quartz member between the first quartz member and the second quartz member;
Aligning the first quartz member and the second quartz member so that the suction holes of each of the first quartz member and the second quartz member communicate with each other;
Heating and bonding the edges of the protrusions of the first quartz member and the second quartz member;
A rim crimping step of applying a negative pressure to the suction hole and crimping the rims of the first quartz member, the intermediate quartz member and the second quartz member;
A first central compression step of heating the first quartz member and the upper surfaces of the second quartz member while moving in a central direction and a circumferential direction; And
A second center pressing step of heating the lower surfaces of the first quartz member and the second quartz member in a central direction and a circumferential direction;
The edge pressing step and the first and second center pressing step include a vacuum forming step of discharging the fluid between the first quartz member and the second quartz member through the suction hole. The method of claim 9,
The crimping step of manufacturing a laminated quartz heating the edges of the first quartz member and the second quartz member from one side of the protrusion to the other side of the protrusion along the circumferential direction of the first quartz member and the second quartz member. Way. The method of claim 9,
In the step of compressing the central portion, a method of manufacturing a laminated quartz is performed by moving a flame from a rim of the first quartz member and the second quartz member to a respective central direction at predetermined intervals and heating in a circumferential direction. The method of claim 9,
In the central compression step, the stacked type of heating the upper surface of the first quartz member and the lower surface of the second quartz member along a spiral path from the rims of the first quartz member and the second quartz member to the respective central directions. How to make quartz. The method of claim 9,
In the crimping step and the center crimping step, a method of manufacturing a laminated quartz in which the first quartz member and the second quartz member are heated using an oxyhydrogen flame of 1800 degrees or more. The method of claim 9,
The vacuum forming step, a stacked quartz manufacturing method is performed by applying a suction pressure of 2kg / cm ^ 2 to the suction hole. The method of claim 9,
And a flame polishing step of flame polishing the upper surface of the first quartz member and the lower surface of the second quartz member after the second central pressing step. The method of claim 15,
A method of manufacturing a laminated quartz further comprising a heat treatment step of heat-treating the flame-polished laminated quartz after the flame polishing step. The method of claim 9,
The method of manufacturing a laminated quartz further comprising the step of obtaining a circular quartz member by removing the edge of the laminated quartz after the vacuum forming step.

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