CN116675422B - Preparation method of quartz tube - Google Patents
Preparation method of quartz tubeInfo
- Publication number
- CN116675422B CN116675422B CN202310656170.4A CN202310656170A CN116675422B CN 116675422 B CN116675422 B CN 116675422B CN 202310656170 A CN202310656170 A CN 202310656170A CN 116675422 B CN116675422 B CN 116675422B
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- China
- Prior art keywords
- tube
- quartz glass
- transparent
- transparent quartz
- connecting end
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Glass Melting And Manufacturing (AREA)
Abstract
The invention discloses a preparation method of a quartz tube, which comprises the steps of cutting and grinding the connecting end parts of transparent quartz glass, S1, grinding the connecting end parts of the transparent quartz glass, S2, soaking the transparent quartz glass in 15% hydrofluoric acid solution, cleaning and drying, S3, grinding the connecting end parts of the opaque quartz glass, scrubbing with alcohol solution, drying, S4, presintering the connecting end parts of the opaque quartz glass by using a flame spray gun to enable the connecting end parts to naturally shrink, retracting the end parts to 8-10 mm, grinding and leveling, S5, sintering and connecting the connecting end parts of the transparent quartz glass and the opaque quartz glass by using the flame spray gun, and finishing the chamfer of the connecting end parts of the transparent quartz glass by using transparent quartz wire material, and S6, grinding and leveling the sintering joint between the transparent quartz glass and the opaque quartz glass. The invention provides a method for reducing the explosion probability during sintering connection between transparent quartz glass and opaque quartz glass, which reduces the production rejection rate and improves the economic benefit.
Description
Technical Field
The invention relates to the technical field of production and manufacturing of quartz appliances, in particular to a preparation method of a quartz tube.
Background
The quartz device has the excellent characteristics of high purity, no pollution, high temperature resistance and the like, and is widely applied to the fields of semiconductors, photovoltaics and the like as production equipment for processing and manufacturing products in the fields. Quartz glass generally includes transparent quartz glass and opaque quartz glass, and transparent quartz has high temperature resistance, low expansion coefficient, good chemical stability, and opaque quartz has good heat insulation, and according to process requirements, one equipment component often contains both transparent quartz and opaque quartz, such as a quartz long tube. In the sintering process, when the transparent quartz and the opaque quartz are connected, because of the difference of physical properties of the transparent quartz and the opaque quartz, the opaque quartz has large internal pores, low density and easy cracking, thereby causing loss.
In the existing processing and production process, the sintering process between transparent quartz and opaque quartz also depends on the experience of a processing master, and the rejection rate is reduced by slow sintering with tolerance. Thus, the production efficiency is lower and the production is unstable.
Disclosure of Invention
The invention provides a preparation method of a quartz tube, which aims to solve the problem that opaque quartz is cracked and scrapped when being sintered between transparent quartz and opaque quartz in the processing process of a quartz appliance.
The invention provides the following technical scheme:
A preparation method of a quartz tube, the quartz tube comprises transparent quartz glass and opaque quartz glass, the transparent quartz glass and the opaque quartz glass are connected through sintering, and the steps are as follows:
s1, cutting and chamfering the connecting end part of transparent quartz glass, and grinding;
s2, soaking transparent quartz glass in 15% hydrofluoric acid solution for cleaning and drying;
S3, grinding the connecting end part of the opaque quartz glass, scrubbing with alcohol solution, and drying;
s4, presintering the connecting end parts of the opaque quartz glass by using a flame spray gun to naturally shrink the connecting end parts, retracting the end parts by 8-10 mm, and grinding;
s5, sintering and connecting the transparent quartz glass connecting end part and the opaque quartz glass connecting end part through a flame spray gun, and complementing the chamfer angle of the transparent quartz glass connecting end part with a transparent quartz wire material;
and S6, grinding the sintering joint between the transparent quartz glass and the opaque quartz glass.
Opaque quartz is produced by quartz sand through two high-temperature melting treatments, and the internal gap of the material is large. When the transparent quartz glass and the opaque quartz glass are heated simultaneously by the flame spray gun, the heat resistance of the transparent quartz glass and the opaque quartz glass are different, and the opaque quartz with small density and large gaps is easier to expand by air in the inner pores of the opaque quartz glass, so that the explosion is caused.
Secondly, the opaque quartz glass can not be soaked in acid solution during cleaning, and the acid solution with corrosion effect easily enters into the gaps of the transparent quartz glass, so that the transparent quartz glass is vaporized under high-temperature heating to cause cracking.
In terms of material cost, the unit price of the opaque quartz glass is higher than that of the transparent quartz glass, so that the cracking and explosion probability is reduced, and the cost is saved.
Therefore, in the preparation method of the invention, the opaque quartz glass is cleaned and scrubbed by alcohol solution. Before sintering, presintering the connecting end parts of the opaque quartz glass by using a flame spray gun to naturally shrink the connecting end parts, wherein the end parts are retracted by 8-10 mm.8 mm-10 mm is the experimental data of multiple experiments. The shrinkage of the opaque quartz glass is connected with the end part, so that the void ratio is greatly reduced, and the burst probability is reduced.
Preferably, the sintering connection between the transparent quartz glass comprises the following steps:
T1, optionally cutting and chamfering the connecting end part of transparent quartz glass, and grinding;
t2, soaking transparent quartz glass in 15% hydrofluoric acid solution for cleaning and drying;
The connecting end parts of the transparent quartz glass are sintered and connected through a flame spray gun, and chamfer angles of the connecting end parts of the transparent quartz glass are complemented by transparent quartz wire materials;
and T4, grinding the sintering joint between the transparent quartz glass.
The method for eliminating the bubbles is that bubbles are found before annealing, the bubbles are extruded by drawing the transparent quartz wire material, the bubbles are found after annealing, the bubbles are broken by grinding, and then the transparent quartz wire material is added for sintering and completing.
During sintering, the existence of bubbles in the sintering joint is a serious problem. Quartz does not deform even when used at high temperature 1150 ℃ for a long time. At such high temperature, if cold bubbles are formed inside the quartz material, cracking is very likely to occur. When two quartz materials are sintered, cavity bubbles are inevitably generated, and the two quartz materials need to be treated. The hot bubbles before annealing are softened at the sintering part, and the transparent quartz wire material is pulled to squeeze out the bubbles. The cooled cold bubbles cannot be squeezed out by heating, and can burst, so that the bubbles need to be ground and broken, and then the cold bubbles are filled and replenished.
By adopting the preparation method, a quartz tube is prepared as follows:
The utility model provides a quartz capsule, includes main part long tube, ball-milling pipe and annular limit, ball-milling pipe includes transparent tubule, milky white tubule, transparent tubule, milky white ball-milling in proper order sintering, and milky white ball-milling and milky white tubule adopt opaque quartz glass, and main part long tube end diameter-changing back and ball-milling pipe sintering, annular limit sintering is outside main part long tube diameter-changing top, the sintering adopts foretell preparation method.
Preferably, when the annular edge and the variable-diameter starting end of the main body long tube are sintered outside, the end part of the annular edge is cut and chamfered, the difference of the diameter of the main body long tube after reduction is compensated by the thickness of the annular edge, and the outer side wall of the main body long tube and the outer side wall of the annular edge are kept at the same level.
Preferably, the quartz long tube is machined to a specified size by a lathe to obtain a main long tube, one end of the main long tube is subjected to diameter changing by a tube blowing process, and the milky ball milling and the milky small tube are integrally milled in a machining center.
Preferably, the process of the blowpipe is that the main long pipe is transversely clamped on a rotary workbench, in the rotating process, a flame spray gun is used for heating and softening, a working knife is used for pressing the rotary main long pipe outside to reduce the diameter, the working knife is used for pressing the rotary main long pipe inside to increase the diameter, and the rotary process is used for polishing.
Preferably, the ball milling tube is sintered at the center of the long tube of the main body, and a second ball milling tube is further arranged on the side edge of the end part of the long tube of the main body, and comprises a second transparent small tube, a second milky white small tube, a second transparent small tube and transparent ball milling which are sintered in sequence.
Preferably, the transparent ball milling is carried out by adding material into one end of transparent quartz glass tube, piling into a ball shape by a blowpipe, turning into corresponding size by a lathe, finally ball milling, adding fine sand powder by a pig iron grinding tool, and processing.
The beneficial effects of the invention are as follows:
(1) The method for reducing the explosion probability during sintering connection between the transparent quartz glass and the opaque quartz glass is provided, the production rejection rate is reduced, and the economic benefit is improved.
(2) The method for eliminating bubbles during sintering connection of quartz glass is provided, so that the product quality is improved, and defective products are reduced.
(3) The preparation method comprises the working procedures of cutting, reducing, sintering and the like, and is convenient for processing and manufacturing quartz equipment in the fields of semiconductors, photovoltaics and the like.
Drawings
FIG. 1 is a schematic view of the structure of a quartz tube of the present invention;
in the figure, a main body long tube 1, an annular edge (2), a ball milling tube (3), a transparent small tube (31), a milky white small tube (32), a milky white ball milling (33), a second ball milling tube (4), a second transparent small tube (41), a second milky white small tube (42) and a transparent ball milling (43).
Detailed Description
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustration and explanation of the present invention only, and are not intended to limit the present invention.
Examples:
Materials are prepared, namely transparent quartz long tubes with different diameters.
S300 (the outer diameter is 30mm, the same applies below) transparent quartz long tube is cut, one end of the transparent quartz long tube is changed to S75 through a blowing tube process, and an S300 annular edge 2 is cut for the main body long tube 1.
And (3) ball milling the tube preparation, namely cutting two sections of transparent small tubes 31 from the S75 transparent quartz long tube, milling the S75 milky small tube 32 by a processing center, and performing milky ball milling 33 by S102/75. The transparent small tube 31, the milky white small tube 32, the transparent small tube 31 and the milky white ball mill 33 are sintered in sequence to form a ball mill tube. The end of the long tube 1 of the main body is sintered with a ball milling tube after diameter change.
And (3) preparing a second ball milling pipe, cutting the S28 transparent quartz long pipe into two sections of second transparent small pipes 41, milling the S28 second milky small pipes 42 by a processing center, piling one end of the S28 transparent quartz glass pipe by a blowing pipe for transparent ball milling 43, turning the transparent quartz glass pipe into corresponding sizes by a lathe, finally, putting the transparent quartz glass pipe into a ball mill, and adding fine sand powder by a pig iron grinding tool to obtain the transparent ball milling pipe. The second transparent small tube 41, the second milky white small tube 42, the second transparent small tube 41 and the transparent ball mill 43 are sintered in sequence to form a second ball mill tube. And (3) opening the side edge of the end part of the main long tube 1 and sintering with a second ball milling tube.
S300, the annular edge 2 is sintered on the outer side of the main body long tube 1, and the annular edge is sintered on the outer part of the reducing starting end of the main body long tube. When the outer sintering of the reducing starting end of the annular edge and the main body long tube is performed, the end part of the annular edge is cut and chamfered, the difference of the reduced diameter of the main body long tube is compensated by the thickness of the annular edge, and the outer side wall of the main body long tube and the outer side wall of the annular edge are kept at the same level. Polishing and flattening after sintering.
During the sintering, the sintering steps between the transparent quartz glass and the opaque quartz glass are as follows:
s1, cutting and chamfering the connecting end part of transparent quartz glass, and grinding;
s2, soaking transparent quartz glass in 15% hydrofluoric acid solution for cleaning and drying;
S3, grinding the connecting end part of the opaque quartz glass, scrubbing with alcohol solution, and drying;
s4, presintering the connecting end parts of the opaque quartz glass by using a flame spray gun to naturally shrink the connecting end parts, retracting the end parts by 8-10 mm, and grinding;
s5, sintering and connecting the transparent quartz glass connecting end part and the opaque quartz glass connecting end part through a flame spray gun, and complementing the chamfer angle of the transparent quartz glass connecting end part with a transparent quartz wire material;
and S6, grinding the sintering joint between the transparent quartz glass and the opaque quartz glass.
The sintering method is applied to sintering between the transparent small tube 31 and the opal small tube 32, sintering between the transparent small tube 31 and the opal ball mill 33 and sintering between the second transparent small tube 41 and the second opal small tube 42.
During the sintering, the sintering steps between the transparent quartz glass and the transparent quartz glass are as follows:
T1, optionally cutting and chamfering the connecting end part of transparent quartz glass, and grinding;
t2, soaking transparent quartz glass in 15% hydrofluoric acid solution for cleaning and drying;
The connecting end parts of the transparent quartz glass are sintered and connected through a flame spray gun, and chamfer angles of the connecting end parts of the transparent quartz glass are complemented by transparent quartz wire materials;
and T4, grinding the sintering joint between the transparent quartz glass.
The sintering method is applied to sintering between the main long tube 1 and the ball milling tube 3, sintering between the main long tube 1 and the annular edge 2 and sintering between the second transparent rubber tube 41 and the transparent ball milling tube 43.
In all sintering processes, bubbles are preferably eliminated when the transparent quartz glass and the opaque quartz glass are sintered or when the transparent quartz glass and the transparent quartz glass are sintered, wherein the bubble elimination method comprises the steps of finding bubbles before annealing, extruding and breaking the bubbles by drawing the transparent quartz wire material, finding the bubbles after annealing, breaking the bubbles by grinding, and then adding the transparent quartz wire material for sintering and completing.
The blowing pipe process comprises the steps of transversely clamping a main long pipe on a rotary workbench, heating and softening the main long pipe by using a flame spray gun in the rotating process, pressing the main long pipe in the rotating process by using a working knife outside to reduce the diameter, pressing the main long pipe in the rotating process by using the working knife inside to increase the diameter, and polishing the main long pipe in the rotating process.
The quartz tube prepared by the method comprises a main body long tube 1, a ball milling tube 3 and an annular edge 2, wherein the ball milling tube comprises a transparent small tube 31, a milky white small tube 32, the transparent small tube and a milky white ball mill 33 which are sequentially sintered, the milky white ball mill and the milky white small tube are made of opaque quartz glass, the end part of the main body long tube is sintered with the ball milling tube after being changed in diameter, and the annular edge is sintered outside the reducing starting end of the main body long tube. The ball milling tube is sintered at the center of the long tube of the main body, and the side edge of the end part of the long tube of the main body is also provided with a second ball milling tube 4, which comprises a second transparent small tube 41, a second milky white small tube 42, a second transparent small tube and a transparent ball milling 43 which are sintered in sequence.
Claims (9)
1. The preparation method of the quartz tube is characterized in that the quartz tube comprises transparent quartz glass and opaque quartz glass, and the transparent quartz glass and the opaque quartz glass are connected through sintering, and the preparation method comprises the following steps:
s1, cutting and chamfering the connecting end part of transparent quartz glass, and grinding;
s2, soaking transparent quartz glass in 15% hydrofluoric acid solution for cleaning and drying;
S3, grinding the connecting end part of the opaque quartz glass, scrubbing with alcohol solution, and drying;
s4, presintering the connecting end parts of the opaque quartz glass by using a flame spray gun to naturally shrink the connecting end parts, retracting the end parts by 8-10 mm, and grinding;
s5, sintering and connecting the transparent quartz glass connecting end part and the opaque quartz glass connecting end part through a flame spray gun, and complementing the chamfer angle of the transparent quartz glass connecting end part with a transparent quartz wire material;
and S6, grinding the sintering joint between the transparent quartz glass and the opaque quartz glass.
2. The method for manufacturing a quartz tube according to claim 1, wherein the sintering connection between the transparent quartz glass comprises the steps of:
T1, optionally cutting and chamfering the connecting end part of transparent quartz glass, and grinding;
t2, soaking transparent quartz glass in 15% hydrofluoric acid solution for cleaning and drying;
The connecting end parts of the transparent quartz glass are sintered and connected through a flame spray gun, and chamfer angles of the connecting end parts of the transparent quartz glass are complemented by transparent quartz wire materials;
and T4, grinding the sintering joint between the transparent quartz glass.
3. The method for preparing the quartz tube according to claim 2, wherein bubbles are eliminated when the transparent quartz glass and the opaque quartz glass are sintered or when the transparent quartz glass and the transparent quartz glass are sintered, wherein the bubble elimination method is that bubbles are found before annealing, the bubbles are extruded by drawing the transparent quartz wire material, the bubbles are found after annealing, the bubbles are broken by grinding, and then the transparent quartz wire material is added for sintering and complement.
4. The quartz tube is characterized by comprising a main long tube (1), a ball milling tube (3) and an annular edge (2), wherein the ball milling tube comprises a transparent small tube (31), a milky small tube (32), a transparent small tube and a milky ball milling (33) which are sequentially sintered, the transparent quartz glass and the opaque quartz glass are sintered according to the sintering method in the preparation method of the quartz tube in claim 1, the opaque quartz glass is adopted in the milky ball milling and the milky small tube, the end part of the main long tube is subjected to diameter changing and is sintered with the ball milling tube, the transparent quartz glass is sintered according to the sintering method in the preparation method of the quartz tube in claim 2, and the annular edge is sintered outside the diameter changing starting end of the main long tube, and the transparent quartz glass is sintered according to the preparation method of the quartz tube in claim 2.
5. The quartz tube of claim 4, wherein the annular edge is cut and chamfered at the end of the annular edge when the annular edge and the beginning end of the main body long tube with variable diameter are sintered, and the difference of the diameter of the main body long tube after the diameter is reduced is compensated by the thickness of the annular edge, so that the outer side wall of the main body long tube and the outer side wall of the annular edge are kept at the same level.
6. The quartz tube of claim 4, wherein the quartz tube is lathed to a specified size to provide a body tube, one end of the body tube is reduced by a blow tube process, and the milky ball mill and the milky small tube are integrally milled in a machining center.
7. The quartz tube according to claim 6, wherein the torch is constructed by transversely clamping a long main body tube on a rotary table, heating and softening the long main body tube by a flame spray gun during rotation, pressing the long main body tube by a working knife from the outside to reduce the diameter, pressing the long main body tube by the working knife from the inside to increase the diameter, and polishing the long main body tube during rotation.
8. The quartz tube according to claim 7, wherein the ball milling tube is sintered at the center of the long tube of the main body, and a second ball milling tube (4) is further arranged at the side edge of the end of the long tube of the main body, and the second ball milling tube comprises a second transparent small tube (41), a second opal small tube (42), a second transparent small tube and a transparent ball milling tube (43) which are sintered in sequence, and the sintering method between the transparent quartz glass and the opaque quartz glass is adopted in the preparation method of the quartz tube according to claim 1.
9. A quartz tube according to claim 8, wherein the transparent ball milling is carried out by piling a ball shape from a transparent quartz glass tube by feeding material at one end through a blow tube, turning to a corresponding size, turning to a ball mill, and adding fine sand powder by a pig iron grinding tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310656170.4A CN116675422B (en) | 2023-06-05 | 2023-06-05 | Preparation method of quartz tube |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310656170.4A CN116675422B (en) | 2023-06-05 | 2023-06-05 | Preparation method of quartz tube |
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| CN116675422A CN116675422A (en) | 2023-09-01 |
| CN116675422B true CN116675422B (en) | 2025-10-17 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0816297A1 (en) * | 1996-07-04 | 1998-01-07 | Tosoh Corporation | Opaque quartz glass and process for production thereof |
| CN114315174A (en) * | 2021-12-28 | 2022-04-12 | 上海菲利华石创科技有限公司 | Welding method for thickened opaque quartz glass plate |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2292362Y (en) * | 1997-03-19 | 1998-09-23 | 葛世名 | Infrared quartz heater |
| DE10019693B4 (en) * | 2000-04-20 | 2006-01-19 | Heraeus Quarzglas Gmbh & Co. Kg | Method for producing a component of opaque, synthetic quartz glass, quartz glass tube produced by the method, and use thereof |
| JP2004091314A (en) * | 2002-07-08 | 2004-03-25 | Shinetsu Quartz Prod Co Ltd | Multi-layer quartz glass plate and quartz glass jig |
| CN103626386A (en) * | 2013-12-17 | 2014-03-12 | 刘亮 | Processing method of thick-wall quartz tube |
| WO2017011002A1 (en) * | 2015-07-15 | 2017-01-19 | Heraeus Quartz America Llc | Process for joining opaque fused quartz to clear fused quartz |
| JP6901913B2 (en) * | 2017-06-26 | 2021-07-14 | 信越石英株式会社 | Opaque quartz glass |
| KR102081838B1 (en) * | 2017-07-12 | 2020-04-23 | 주식회사 원익큐엔씨 | Laminated quartz and method for manufacturing the same |
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2023
- 2023-06-05 CN CN202310656170.4A patent/CN116675422B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0816297A1 (en) * | 1996-07-04 | 1998-01-07 | Tosoh Corporation | Opaque quartz glass and process for production thereof |
| CN114315174A (en) * | 2021-12-28 | 2022-04-12 | 上海菲利华石创科技有限公司 | Welding method for thickened opaque quartz glass plate |
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