KR102055046B1 - Dlc 및 다이아몬드 박막이 이중 코팅된 펀칭공구 및 그 제조방법 - Google Patents
Dlc 및 다이아몬드 박막이 이중 코팅된 펀칭공구 및 그 제조방법 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- B21D28/00—Shaping by press-cutting; Perforating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
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Abstract
상술한 목적을 달성하기 위한 본 발명의 특징에 의하면, DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구 제조방법은 HRC (Hardness Rockwell C)가 40 ~ 48인 펀치금형모재(10)를 제조하는 모재제조단계; 펀치금형 표면의 이물질 및 유분을 제거하는 전처리단계; 상기 펀치금형 표면에 Si를 0.1~1㎛의 두께로 접착층(20)을 형성하는 접착층형성단계; 상기 접착층(20)이 형성된 펀치금형에 CH4 분위기와 10-3 ~ 10-6 torr 압력 상태에서 75 내지 85분 동안 플라즈마를 발생시켜 카본(carbon)층을 형성하는 1차증착단계; 및 Ar 분위기 하에서 CH4를 전구체로 하여 상기 카본(carbon)층이 형성된 펀치금형 표면에 마이크로웨이브파를 조사하여 15 내지 20nm 두께의 나노다이아몬드층을 코팅하는 2차증착단계;를 포함하되, 상기 1차증착단계 및 2차증착단계에서 상기 펀치금형이 공전하면서 증착되는 것을 특징으로 하는 것을 특징으로 한다.
Description
도 2는 본 발명인 DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구 제조방법에 의해 제조된 펀칭공구의 측면도이다.
도 3은 본 발명에 의해 제조된 펀칭공구에서 펀치금형(10)를 포함한 코팅층을 나타낸 도면이다.
도 4는 제2습식처리단계(S212)를 실시하는 사진이다.
도 5는 제3습식처리단계(S213)를 실시하는 사진이다.
도 6은 제4습식처리단계(S214)를 실시하는 사진이다.
도 7은 건식전처리단계(S220)를 실시하는 사진이다.
도 8은 DLC 코팅 전(좌)와 1차증착단계(S400)를 통해 DLC 코팅된 펀칭공구(우)를 나타낸 사진이다.
도 9는 부착력 테스트를 위해 주사형탐침현미경을 위해 표면조도를 측정한 사진이다.
도 10은 본 발명에 의해 제조된 펀치공구의 110톤 프레스를 나타낸 사진이다.
도 11은 본 발명에 의해 제조된 펀치공구의 지그 및 주축대를 나타낸 사진이다.
도 12는 본 발명에 의해 제조된 DLC박막층(30) 및 나노다이아몬드박막층(40) 분석의 라만 측정결과 그래프이다.
도 13은 본 발명에 의해 제조된 DLC박막층(30) 및 나노다이아몬드박막층(40)의 SEM촬영을 실시한 사진이다.
도 14는 DLC박막층(30) 및 나노다이아몬드박막층(40)의 표면 경도를 측정하는 장비와인덴터 압자가 들어가는 깊이(X축)와, 인가하는 하중(Y축)을 나타내는 그래프이다.
도 15는 본 발명에 의해 제조된 DLC박막층(30) 및 나노다이아몬드박막층(40)의 경도 그래프이다.
항목 | C | Si | Mn | P | S | Ni | Cr | Mo | V |
규격(wt%) | ~0.10 | ~0.45 | ~0.03 | ~0.06 | ~0.25 | 4.0~6.0 | 1.0~2.0 | 0.5~1.5 | |
실적(wt%) | 0.016 | 0.004 | 0.106 | 0.008 | 0.057 | - | 5.50 | 1.50 | 1.20 |
가스 종류 | 유량 | 시간 | RF 파워에 따른 부착력 (N) | ||
300W | 500W | 700W | |||
HMDSO | 20 sccm | 0 sec 30 sec 50 sec |
8.5 8.9 11.3 |
12.4 13.0 13.5 |
7.8 10.6 12.4 |
30 sccm | 0 sec 30 sec 50 sec |
9.6 13.2 15.3 |
10.3 17.5 17.0 |
8.7 10.5 14.8 |
|
50 sccm | 0 sec 30 sec 50 sec |
12.0 13.6 15.4 |
12.0 14.3 15.7 |
10.2 15.3 17.1 |
S200. 상기 펀치금형모재(10) 표면의 이물질 및 유분을 제거하는 전처리단계;
S210. 상기 펀치금형에 초음파세척을 실시하는 습식전처리단계;
S211. 증류수 100 중량부에 대하여 초음파세척제 1 중량부를 혼합한 혼합액을 이용하여 초음파세척을 실시하는 제1습식처리단계;
S212. 증류수 1 중량부에 대하여 아세톤 0.5~1.5 중량부를 혼합한 혼합액을 이용하여 초음파세척을 1회 실시하는 제2습식처리단계;
S213. 증류수와 알코올을 각각 20분씩 세척을 실시하는 제3습식처리단계;
S214. 에어를 이용하여 건조하는 제4습식처리단계;
S220. 상기 펀치금형을 진공에서 수소 및 산소주입 후, 플라즈마 방전 처리를 통해 잔류불순물을 휘발시키는 건식전처리단계;
S300.상기 펀치금형 표면에 접착층(20)을 형성하는 접착층형성단계;
S400. 카본(carbon)층을 형성하는 1차증착단계;
S500. 나노다이아몬드층을 코팅하는 2차증착단계;
100. 펀치금형본체
10. 펀치금형
20. 접착층
30. DLC박막층
40. 나노다이아몬드박막층
Claims (5)
- 화학조성물의 혼합 비율이 C가 0.10wt% 이하, Mn이 0.45wt% 이하, P가 0.03wt% 이하, S가 0.06wt% 이하, Ni가 0.25wt% 이하, Cr가 4.0~6.0wt%, Mo가 1.0~2.0wt%, V가 0.5~1.5wt%로 제조되어 HRC (Hardness Rockwell C)가 40 ~ 48인 펀치금형 모재를 제조하는 모재제조단계;
상기 펀치금형 모재 표면의 이물질 및 유분을 제거하여 펀치금형(10)을 제조하는 전처리단계;
상기 펀치금형(10) 표면에 Si를 0.1~1㎛의 두께로 접착층(20)을 형성하는 접착층형성단계;
상기 접착층(20)이 형성된 펀치금형(10)에 CH4 분위기에서 플라즈마를 발생시켜 카본(carbon)층을 형성하는 1차증착단계; 및
상기 카본(carbon)층이 형성된 펀치금형(10) 표면에 Ar 분위기 하에서 CH4를 전구체로 하여 마이크로웨이브파를 조사하여 15 내지 20nm 두께의 나노다이아몬드박막층(40)을 코팅하는 2차증착단계;를 포함하되,
상기 1차증착단계 및 2차증착단계에서 상기 펀치금형(10)이 공전되면서 증착되는 것을 특징으로 하는 DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구 제조방법. - 제1항에 있어서,
상기 전처리단계는,
상기 펀치금형(10)에 초음파세척을 실시하는 습식전처리단계; 및
상기 펀치금형(10)을 진공에서 수소 및 산소주입 후, 플라즈마 방전 처리를 통해 잔류불순물을 휘발시키는 건식전처리단계;를 실시하고,
상기 습식전처리단계는,
증류수와 초음파세척제를 혼합한 혼합액을 이용하여 초음파세척을 실시하고, 상기 증류수와 초음파세척제를 혼합한 용액은 주기적으로 교체하며 세척을 실시하는 제1습식처리단계;
증류수와 아세톤을 혼합한 혼합액을 이용하여 초음파세척을 실시하는 제2습식처리단계;
증류수와 알코올으로 각각 세척을 실시하는 제3습식처리단계;
상기 제3습식처리단계 후, 에어를 이용하여 건조하는 제4습식처리단계;로 제조하는 것을 특징으로 하는 DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구 제조방법. - 제1항에 있어서,
상기 접착층형성단계는,
진공챔버 내에서 10-5 ~ 10-6 torr로 배기 후, 3 X 10-3 torr에서 HMDSO를 30초간 500W의 전력으로 플라즈마를 발생시켜 접착력이 10 내지 30N으로 제조하는 것을 특징으로 하는 DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구 제조방법. - 제1항에 있어서,
상기 1차증착단계 및 2차증착단계에 의해 코팅된 박막은,
두께가 2 내지 4㎛ 이내이고,
막경도가 1,300 내지 1,800Hv인 것을 특징으로 하는 DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구 제조방법. - 제1항 내지 제4항 중 어느 한 항의 방법으로 제조되는 DLC 및 다이아몬드 박막이 이중 코팅된 펀칭공구.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2025018598A1 (ko) * | 2023-07-14 | 2025-01-23 | 주성엔지니어링(주) | 그래핀막의 형성 방법 |
WO2025018599A1 (ko) * | 2023-07-14 | 2025-01-23 | 주성엔지니어링(주) | 탄소 함유막의 형성 방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000297353A (ja) | 1999-02-12 | 2000-10-24 | Hitachi Metals Ltd | 被削性に優れた高強度金型用鋼材 |
JP2004501793A (ja) | 2000-04-12 | 2004-01-22 | ユナキス・バルツェルス・アクチェンゲゼルシャフト | 滑り特性が向上したdlc層システム、およびそのような層システムを生成するためのプロセス |
JP2004323973A (ja) | 2003-04-08 | 2004-11-18 | Kurita Seisakusho:Kk | Dlc膜の成膜方法およびdlc成膜物 |
JP2005213613A (ja) | 2004-01-30 | 2005-08-11 | Nachi Fujikoshi Corp | 高機能カーボン被覆膜 |
KR101660557B1 (ko) | 2009-02-18 | 2016-09-27 | 카운슬 오브 사이언티픽 앤드 인더스트리얼 리서치 | 성형 물품의 내부 표면 상에 보호 코팅으로서 다이아몬드상 카본을 증착하는 방법 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007131893A (ja) | 2005-11-09 | 2007-05-31 | Osg Corp | Dlc被膜、およびdlc被膜被覆工具 |
-
2017
- 2017-12-29 KR KR1020170183450A patent/KR102055046B1/ko active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000297353A (ja) | 1999-02-12 | 2000-10-24 | Hitachi Metals Ltd | 被削性に優れた高強度金型用鋼材 |
JP2004501793A (ja) | 2000-04-12 | 2004-01-22 | ユナキス・バルツェルス・アクチェンゲゼルシャフト | 滑り特性が向上したdlc層システム、およびそのような層システムを生成するためのプロセス |
JP2004323973A (ja) | 2003-04-08 | 2004-11-18 | Kurita Seisakusho:Kk | Dlc膜の成膜方法およびdlc成膜物 |
JP2005213613A (ja) | 2004-01-30 | 2005-08-11 | Nachi Fujikoshi Corp | 高機能カーボン被覆膜 |
KR101660557B1 (ko) | 2009-02-18 | 2016-09-27 | 카운슬 오브 사이언티픽 앤드 인더스트리얼 리서치 | 성형 물품의 내부 표면 상에 보호 코팅으로서 다이아몬드상 카본을 증착하는 방법 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2025018598A1 (ko) * | 2023-07-14 | 2025-01-23 | 주성엔지니어링(주) | 그래핀막의 형성 방법 |
WO2025018599A1 (ko) * | 2023-07-14 | 2025-01-23 | 주성엔지니어링(주) | 탄소 함유막의 형성 방법 |
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