KR102010769B1 - 아연도금층에 형성되는 주석/마그네슘 박막 및 그 제조방법 - Google Patents
아연도금층에 형성되는 주석/마그네슘 박막 및 그 제조방법 Download PDFInfo
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- 239000011777 magnesium Substances 0.000 title claims abstract description 140
- 229910052749 magnesium Inorganic materials 0.000 title claims abstract description 99
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 title claims abstract description 92
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 239000010409 thin film Substances 0.000 title claims abstract description 75
- 239000011701 zinc Substances 0.000 title claims abstract description 53
- 229910052725 zinc Inorganic materials 0.000 title claims abstract description 39
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 239000011135 tin Substances 0.000 claims abstract description 137
- 229910052718 tin Inorganic materials 0.000 claims abstract description 82
- 230000007797 corrosion Effects 0.000 claims abstract description 57
- 238000005260 corrosion Methods 0.000 claims abstract description 57
- 238000010438 heat treatment Methods 0.000 claims abstract description 48
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 18
- 229910000765 intermetallic Inorganic materials 0.000 claims abstract description 15
- 229910000861 Mg alloy Inorganic materials 0.000 claims abstract description 10
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 7
- 229910001128 Sn alloy Inorganic materials 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 32
- 238000009713 electroplating Methods 0.000 claims description 6
- 229910001297 Zn alloy Inorganic materials 0.000 claims description 3
- 238000007598 dipping method Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract description 13
- 230000015572 biosynthetic process Effects 0.000 abstract description 11
- 239000013078 crystal Substances 0.000 abstract description 8
- 238000005755 formation reaction Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 28
- 239000010410 layer Substances 0.000 description 25
- 230000008569 process Effects 0.000 description 18
- 238000000576 coating method Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 17
- 238000012360 testing method Methods 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 15
- 239000011247 coating layer Substances 0.000 description 15
- 238000007747 plating Methods 0.000 description 15
- 229910000831 Steel Inorganic materials 0.000 description 12
- 239000010959 steel Substances 0.000 description 12
- 238000004458 analytical method Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004453 electron probe microanalysis Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 229910020944 Sn-Mg Inorganic materials 0.000 description 3
- 238000005275 alloying Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910001868 water Inorganic materials 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910001335 Galvanized steel Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000008397 galvanized steel Substances 0.000 description 2
- 238000005246 galvanizing Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000003225 biodiesel Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
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- 239000011261 inert gas Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- -1 neutral media Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- UGZADUVQMDAIAO-UHFFFAOYSA-L zinc hydroxide Chemical compound [OH-].[OH-].[Zn+2] UGZADUVQMDAIAO-UHFFFAOYSA-L 0.000 description 1
- 229940007718 zinc hydroxide Drugs 0.000 description 1
- 229910021511 zinc hydroxide Inorganic materials 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
- C23C28/025—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only with at least one zinc-based layer
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Abstract
이에 의해 물리증착법 및 열처리를 통해 성분간 확산이동, 금속간 화합물 형성으로 인해 차폐 효과 및 희생양극 특성을 부여함은 물론, 제작조건에 따른 결정배향성의 영향을 종합적으로 고려 제어함으로써 안정적이고 치밀-안정적으로 빠르게 생성가능하도록 주석/마그네슘 박막이 아연도금 기판 상에 제조되는 효과를 얻을 수 있다.
Description
도 3은 마그네슘 및 주석의 증착률을 나타낸 그래프이고,
도 4는 Sn/Mg 박막의 표면, 단면 모폴로지 관찰 결과 및 GDS 분석을 통한 코팅층 조건별 모식도를 나타낸 것이고,
도 5는 제작 후 열처리한 Sn/Mg 시험편 및 비교재의 박막 표면, 단면 모폴로지이고,
도 6은 Sn/Mg 박막의 조성분포를 갈색선(Sn), 녹색선(Mg), 적색선(O), 핑크선(Zn) 그리고 파란선(Fe)으로 표면에서부터 깊이방향으로 측정한 결과를 나타낸 그래프이고,
도 7은 Sn/Mg 박막의 EPMA 분석결과를 나타낸 이미지이고,
도 8은 염수분무 시험편의 외관관찰 결과를 그래프로 나타낸 것이다.
Claims (7)
- 아연도금층이 형성된 기판을 준비하는 단계;
상기 아연도금층의 표면에 순수 금속 마그네슘(Mg)을 이용하여 DC 마그네트론 스퍼터링(DC-magnetron sputtering)을 통한 물리증착으로 마그네슘박막을 형성하는 단계;
상기 마그네슘박막 표면에 순수 금속 주석(Sn)을 이용하여 DC 마그네트론 스퍼터링(DC-magnetron sputtering)을 통한 물리증착으로 주석박막을 형성하는 단계; 및
200℃ 이하로 5 내지 15분간 열처리를 통해 아연, 마그네슘 및 주석원자가 확산이동하여 주석/마그네슘 상호고용 및 금속간 화합물이 존재하는 주석/마그네슘박막을 형성하는 단계;를 포함하는 것으로,
주석/마그네슘박막을 형성하는 단계에서는,
상기 열처리를 통해 아연 및 마그네슘은 주석을 향해 확산이동하고 주석은 아연 및 마그네슘을 향해 확산이동하면서 상기 주석/마그네슘박막에 고용된 아연/마그네슘 합금 및 주석/마그네슘 합금의 아연 및 주석이 마그네슘 원자와 결합된 상태에서 분리되지 않아 단계적으로 부식을 지연시켜 상기 주석/마그네슘박막의 내식성이 증가되도록 하는 것을 특징으로 하는 아연도금층에 형성되는 주석/마그네슘박막 제조방법. - 제 1항에 있어서,
상기 아연도금층은, 전기도금(electrodeposition), 용융도금(hot-dipping) 또는 물리증착도금(PVD) 방법을 통해 형성되는 것을 특징으로 하는 아연도금층에 형성되는 주석/마그네슘 박막 제조방법. - 삭제
- 제 1항에 있어서,
상기 마그네슘박막 및 상기 주석 박막의 두께는서로 0.5 내지 2배의 두께비를 이루도록 형성되는 것을 특징으로 하는 아연도금층에 형성되는 주석/마그네슘 박막 제조방법. - 삭제
- 삭제
- 삭제
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