KR101672770B1 - Coating apparatus and coating method - Google Patents

Abstract

Provided is a coating apparatus and a coating method which can improve productivity and can achieve a reduction in cost without increasing the size of the entire apparatus.
The coating apparatus has a pair of transfer pins 21, 22 for applying a paste-like coating agent P to the coated portion 20. And is alternately displaced from the state displacement means 25 to the first state and the second state. In the first state, the first transfer pin 21 corresponds to the upper side of the coating agent paste to which the paste-like coating agent P is adhered, and the second transfer pin 22 corresponds to the upper side of the coated portion 20. In the second state, the second transfer pin 22 corresponds to the upper side of the coating agent paste in which the paste-like coating agent P is held, and the first transfer pin 21 corresponds to the upper side of the receiving portion 20. The transfer pins 21 and 22 are moved in the vertical Z-axis direction in the first state and the second state by the Z-axis direction moving means.

Description

[0001] COATING APPARATUS AND COATING METHOD [0002]

The present invention relates to a coating apparatus and a coating method.

In a semiconductor manufacturing apparatus, there is a step of applying a paste to a lead frame or the like. For this reason, conventionally, a transferring pin is used as a coating device for applying a paste (Patent Document 1 and Patent Document 2). As shown in Figs. 10 and 11, the use of such a transfer pin is a coating apparatus.

This coating apparatus is provided with an XYZ stage 2 arranged in the base 1 and a transfer pin 3 laid on the XYZ stage 2. The XYZ stage 2 includes a first table 6 which reciprocates on the base 1 in the X-axis direction through a linear guide mechanism 5 and a second table 6 which reciprocates on the first table 6 via the linear guide mechanism 7 A second table 8 reciprocating in the Y-axis direction, and a third table 10 reciprocating in the Z-axis direction on the second table 8 via the linear guide mechanism 9. [ A transfer pin 3 is laid on the third table 10.

In this case, the first table 6 is provided with an L-shaped arm 11a formed of a first portion 11a extending in the vertical direction and a second portion 11b extending in the horizontal direction from the lower end of the first portion 11a And a paste tray 12 for holding the paste is provided on the second portion 11b of the arm 11. [

Next, a method of applying the paste to the work (coated portion) 13 using such a coating apparatus will be described. 12, the transfer pin 3 is lowered from this state so that the lower end of the transfer pin 3 is placed on the paste plate 12 12, and then the transfer pin 3 is lifted up as shown by the arrow A in FIG. As a result, the paste is attached to the transfer pin 3. In this state, the transfer pin 3 is horizontally moved in the direction of the arrow B to be positioned above the work 13. Thereafter, the transfer pin 3 is lowered as indicated by an arrow C to transfer the paste P attached to the transfer pin 3 to the surface of the work 13, thereby applying the paste. Thereafter, after the transfer pin 3 is raised, it is moved in the horizontal direction in the direction opposite to the arrow B and returned to the initial state. This operation is repeated.

Japanese Unexamined Patent Application Publication No. 1-183827 Japanese Patent Application Laid-Open No. 2002-198382

10 and 11, it is necessary to reciprocate the transfer pin 3 between the paste tray 12 and the work 13. However, since the paste P is attached to the transfer pin 3, the transfer of the paste P from the transfer pin 3 to the workpiece 13 is performed at a high speed, There is a concern. Therefore, it is not possible to move at such a high speed that the coating operation time is lengthened and the productivity is lowered.

Therefore, it is possible to propose to shorten the working time by arranging two such devices. However, when the two units are installed, the entire apparatus becomes larger and the cost becomes higher.

It is also possible to provide a pair of transfer pins for transferring the coating agent to the donut portion, and to receive the coating agent from one transfer pin and to transfer the coating agent from the other transfer pin to the donated portion. For example, the transfer pin may be disposed at a position opposite to the rotational axis of the rotating body by 180 degrees.

In this case, when one rotary transfer pin is made to correspond to the paste tray and the other transferring pin is made to correspond to the rotary shaft, the rotating body is lowered so that one rotary transfer pin receives the rotary transfer agent, The coating agent can be transferred from the transfer pin on the side of the substrate to the substrate. When the rotating body is rotated to bring the other transferring pin into contact with the paste plate and one transferring pin is brought into correspondence with the receiving portion so that the rotating body is lowered, The coating agent can be transferred from the one transferring pin to the receiving portion simultaneously with the receiving operation.

As a result, it is possible to shorten the coating operation time as a whole. Incidentally, in such a coating operation, there is a case where the transfer pin is desired to be brought into contact with the to-be-exposed portion on the application side, or the transfer pin is not desired to be contacted. Further, there is a case where the transfer pin is desired to be deeply immersed in the paste on the side of the paste plate, or it is desired to be dipped into the paste in a shallow manner. However, since the upper and lower amounts of the pair of transfer pins are set to the same value, they can not cope with such needs.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a coating apparatus and a coating method capable of improving productivity in view of such a situation and achieving a reduction in cost as a whole of the apparatus. Another object of the present invention is to provide a coating apparatus capable of applying a coating agent with high accuracy in accordance with the amount of the coating agent to be used and the coating agent to be used.

A first coating device of the present invention is a coating device having a pair of transfer pins for applying a paste-like coating agent to a to-be-coated part, wherein the first transfer pin corresponds to the upper side of the coating agent paste part in which the paste- The first transfer pin corresponds to the upper side of the coated part and the second transfer pin corresponds to the upper side of the coating agent paste part in which the paste type coating agent is poured, And a Z-axis direction moving means for moving the transfer pins in the Z-axis direction in the vertical direction in the first state and the second state.

According to the application device of the present invention, the first state and the second state can be alternately displaced by the state displacement means. When the first transfer pin corresponds to the upper side of the coating agent layer, the second transfer pin is positioned above the coated portion. When the second transfer pin corresponds to the upper side of the coating agent layer, As shown in FIG. The first transfer pin (or the second transfer pin) can receive the coating agent from the coating agent superimposed portion by lowering the transfer pins in the first state or the second state through the Z-axis direction moving means, The coating agent can be transferred from the pin (or the first transfer pin) to the to-be-coated portion of the work. That is, the coating agent can be applied to the other transfer pins while receiving the coating agent from the coating agent paste in one transfer pin. Therefore, it is possible to improve the workability twice as much as that of the conventional apparatus.

The state displacement means is provided in a displacement stage which is an XYZ stage, and the Z-axis direction moving means can be constituted by a Z-axis direction moving mechanism of the displacement stage. With this structure, the state displacement means can be moved in the vertical direction by the Z-axis direction moving mechanism of the displacement stage, and the coating agent can be applied to the other transfer pins while stably receiving the coating agent from the coating agent reservoir at one transfer pin have.

The Z-axis direction moving means may include a moving mechanism for independently displacing the respective transfer pins in the Z-axis direction, and the state displacement means may be disposed in the XY-stage displacement stage. Each transfer pin can be independently displaced in the Z-axis direction, so that even if the height positions of the coating agent paste and the to-be-coated portion are different, the transfer pins can be moved up and down so as to correspond to their height positions.

A paste dish is preferably provided on the displacement stage. In this manner, when the paste plate is provided on the displacement stage, the distance between the paste plate and the to-be-exposed portion can be prevented from being distanced.

Wherein said state displacement means comprises a belt member on which said pair of transfer pins are laid, a drive mechanism for driving said belt member, and a control means for controlling said drive mechanism so that first and second transfer pins 2 state, as shown in FIG.

In this state displacement means, the first transfer pin and the second transfer pin can be alternately and stably displaced to the first state and the second state by driving the belt member by the driving mechanism while being controlled by the control means.

(The position of the coating agent grommet) at which the transfer pin receives the paste-like coating agent is higher than the position where the coating agent is transferred, or is lower than the position where the coating agent is transferred, or the position where the receiving position and the receiving position are the same do.

The belt member of the state displacement means may be inclined with respect to the horizontal plane corresponding to the receiving position and the to-be-covered portion. As a result, the lengths of the first transfer pin and the second transfer pin can be set to be the same in the vertical direction, and the stroke in the Z-axis direction can be made the same.

The movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when viewed in a plan view, and when the transfer pin is positioned above the to-be-covered portion, the transfer pin is moved close to the intersection of the movement locus On the end point. Here, the end point is the turning point of the transfer pin (point at which the transfer pin returns to the coating agent side). The end point near the intersection of the movement trajectory shall include the coating agent high end side and the opposite side of the coating agent high end side than the intersection point. The proximity means that the transfer pin on the end point is allowed to be transferred to the intended area when the transfer pin is lowered along the vertical direction.

Wherein the movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when viewed in a plan view, and when the transfer pin is positioned above the to-be-covered portion, the transfer pin is moved on the intersection of the movement locus It is preferable to place it.

However, when the belt member having the pair of transfer pins is used as the state displacement means as described above, the positions of the transfer fins when transferring the coating agent are shifted in the direction orthogonal to the first state and the direction in which the second state is displaced Inevitably. Therefore, in this case, when transferring to the first transferring pin and transferring to the second transferring pin, it is necessary to displace the transferring pin in the direction of absorbing the shift. On the other hand, when the pair of transfer fins each form a crisscrossing trajectory when seen in a plane, when transferring the coating agent to the to-be-coated portion with the transfer pin, The transfer pins can be lowered along the vertical direction). Therefore, even when transferring to the first transferring pin, transferring to the second transferring pin, the transferring can be performed from the same position to almost the same position, and there is no need to adjust the position of the transferring pin.

Wherein said state displacement means comprises: a support arm for supporting said pair of transfer pins, an arm guide mechanism for guiding movement of each support arm along said movement locus, and a pair of support arms, The other support arm moves from the to-be-coated part side to the coating agent holding part side, and when one of the support arms moves from the to-be-coated part side to the coating agent holding part side, And an arm control mechanism for controlling the arm guide mechanism to move the arm guide mechanism.

If the support arm, the arm guide mechanism, and the arm control mechanism are provided, each transfer pin can be accurately positioned on the intersection of the movement locus by stably moving the crest trajectory.

The second coating device of the present invention is provided with a pair of transfer pins for receiving the coating agent in the form of dipping or contacting the lower end of the coating agent of the coating agent and for transferring the coating agent to the coated part, Receiving the coating agent from one of the transfer pins and transferring the coating agent from the other transfer pin to the coated portion while receiving the coating agent from the other transfer pin and transferring the coating agent from one transfer pin to the coated portion, Wherein the transfer fin is lowered along the vertical direction when the coating agent is received and when the coating agent is transferred, the paste pan constituting the coating agent paste in which the coating agent is held, And a position adjusting mechanism for performing adjustment.

According to the coating apparatus of the present invention, when one transfer pin is made to correspond to a paste plate and the other transfer pin is made to correspond to the to-be-coated portion and each transfer pin is lowered, And at the same time, the coating agent can be transferred from the other transfer pin to the to-be-coated portion. When the other transfer pin is brought into contact with the paste plate and the transfer pin is lowered in a state in which one transfer pin is on the to-be-capped portion, the transfer agent is received from the other transfer pin, The coating agent can be transferred from the transfer pin to the donor portion.

It is possible to adjust the height position of the paste dish in the vertical direction by the position adjusting mechanism. Therefore, if the paste plate is positioned at the upper position, when the transfer pin corresponding to the paste plate is lowered, it can be deeply immersed in the coating agent held in the paste plate. If the transfer plate corresponding to the paste plate is lowered when the paste plate is positioned at the lower position, the transfer plate may be dipped into the coating agent adhering to the paste plate, or the upper surface of the transfer agent may be in contact with the upper surface of the transfer plate . In addition, when immersed deeply in the coating agent, the immersion time can be lengthened, and when immersed in the coating agent in a shallow manner, the immersion time can be shortened. Therefore, the application amount of the coating agent to be adhered to the transfer pin can be adjusted. In addition, even if it is contacted with the to-bead portion at the lowermost position of the transfer pin, the tip of the transfer pin does not come into contact with the to-be-embraced portion at the lowermost position of the tip of the transfer pin, A predetermined small clearance may be generated.

It is possible to make the vertical transfer amount of the pair of transfer pins the same or to synchronize the vertical transfer of the pair of transfer pins.

It is possible to adjust the height position of the paste plate based on the height position of the tip (lower end) of the transfer pin on the side of the to-be-caught portion at the time of descent when the upper and lower amounts of the transfer fins are the same. That is, the tip of the transfer pin comes into contact with the to-be-exposed portion at the lowermost position of the transfer pin, or the tip of the transfer pin does not contact the to-be-exposed portion at the lowermost position of the transfer pin, Or the like.

The coating method of the present invention is a coating method for applying a paste-like coating agent to a to-be-coated portion, wherein the tip of the first transfer pin is dipped or contacted with a pasty coating agent to receive the coating agent, A first step of transferring and applying the applied coating agent to the to-be-coated part; and a step of coating the top of the second transfer fin with the paste-like coating agent in a dipping form or a contact form to receive the coating agent, And the second step of transferring and applying the coating liquid to the to-be-covered part, and performing the first step and the second step alternately. Here, the dipping form or the contact form refers to a state in which the tip of the transfer pin is immersed in the coating agent, or the tip of the transfer pin is in contact with the coating agent, and a state in which the coating agent can adhere to the tip of the transfer pin Or a state in which the coating agent can adhere to the tip end near the tip end surface from the tip end surface).

According to the coating method of the present invention, the coating agent can be applied from another transfer pin while receiving the coating agent from the coating agent paste in one transfer pin. Therefore, it is possible to improve the workability twice as much as the conventional method.

In this method, when the first step and the second step are carried out alternately, the locus of movement of each transfer pin has a crisscross shape in plan view, and when transferring the coating agent to the to-be- Can be positioned on the end point close to the intersection of the movement locus.

When the first step and the second step are alternately performed, the locus of movement of each transfer pin has a crisscross shape in plan view, and the transfer pin when transferring the coating agent to the to-be- It is preferable to arrange it on the intersection of the locus.

Thus, even when transferring to the first transferring pin, transferring to the second transferring pin, the transferring to the same or almost the same area can be performed.

(Effects of the Invention)

In the first coating device and coating method of the present invention, the workability can be improved twice as much as that of the conventional apparatus and method, and the productivity is excellent. In addition, the entire device can be made compact, and the cost can be reduced.

When the Z-axis direction moving means is constituted by the Z-axis direction moving mechanism of the displacement stage, the first transfer pin and the second transfer pin can be moved up and down simultaneously, thereby further shortening the working time. In addition, the number of shafts can be reduced, and the cost can be reduced.

In the case where the transfer pins can be independently displaced in the Z-axis direction, the transfer fins can be moved up and down so as to correspond to the height positions of the coating agent paste and the to-be-coated portion. By this, stable drawing of the coating agent and stable application of the coating agent are possible.

When the paste plate is provided on the displacement stage, it is possible to prevent the distance between the paste plate and the to-be-coated portion from being distanced and to reduce the amount of movement of the transfer pin, thereby effectively preventing the transfer time from being prolonged, I can do it.

By providing the paste plate on the displacement stage, the paste plate can be disposed at a higher position than the portion to be coated where the coating agent is to be transferred. This makes it possible to position the paste plate on the workpiece to be coated and stably apply the coating agent to the to-be-coated portion of all the workpieces to which the coating agent is to be transferred.

The first transfer pin and the second transfer pin can be alternately and stably displaced to the first state and the second state in the case where the state displacement means is provided with the belt member, the drive mechanism and the control means, And can be configured at low cost.

The length of the first transfer pin and that of the second transfer pin can be set to be equal to each other, and the length of the belt in the Z-axis direction Stroke can also be made to be the same and small stroke, and the Z-axis can be a single axis, thereby achieving cost reduction. Particularly, in this coating apparatus, by adding a state displacement means provided with a belt member or the like, it is improved in vertex movement. Therefore, positioning and the like are facilitated, and the state displacement means can be constituted by an inexpensive member (such as a belt member), thereby achieving low cost.

In the case where the pair of transfer fins each form a crisscrossing trajectory when viewed in a plane, even when transferring to the first transfer pin, transferring to the second transfer pin, Transfer can be performed, stabilization of the transfer operation can be achieved, and high precision transfer can be achieved. Even when the first state is shifted from the first state to the second state, even when the second state is shifted to the first state, adjustment in the X direction or the Y direction of the transfer pin is not required and the controllability is excellent.

If the support arm, the arm guide mechanism, and the arm control mechanism are provided, each transfer pin can stably move the crest-shaped movement locus, and can be accurately positioned on the intersection of the locus of movement, have.

According to the second application device of the present invention, the application device of the present invention can improve workability twice as much as that of the conventional device and method, and is excellent in productivity. In addition, the entire device can be made compact, and the cost can be reduced.

The kind of the coating agent using the application amount of the coating agent to be adhered to the transfer pin on the side of the paste plate, and the coating amount of the coating agent to be coated can be used. The kind of the coating agent, The height position of the transfer pin with respect to the to-bead portion can be adjusted according to the amount of the application agent applied to the transfer pin. Therefore, a chip or the like can be mounted to the to-be-covered portion with high accuracy.

Particularly, when the upper and lower amounts of the pair of transfer pins are the same, by adjusting the height position of the paste plate, it is possible to prevent the film from being dipped deeply in the coating agent or dipped into the coating agent or the top surface of the transfer agent Quot; state " can be stabilized, and the application amount of the coating agent to the to-be-coated portion by the transfer pin can be adjusted with high accuracy. In addition, by synchronizing the vertical movement of the pair of transfer pins, the application of the coating agent by one transfer pin and the application by the other transfer pin can be stably performed at the same time, and productivity can be improved.

1 is a schematic side view of a coating apparatus according to an embodiment of the present invention.
2 is a simplified front view of the coating device of FIG.
FIG. 3A is a schematic view showing a first state of the coating apparatus of FIG. 1; FIG.
FIG. 3B is a schematic view showing the second state of the coating apparatus of FIG. 1; FIG.
4 is a simplified block diagram of the state displacement means.
5 is a simplified side view of a coating apparatus according to another embodiment of the present invention.
6 is a simplified front view of the applicator of FIG.
7A is a simplified plan view of a coating device according to another embodiment of the present invention in a state in which the second transfer pin corresponds to the upper side of the coating agent paste.
FIG. 7B is a simplified plan view of a main part in a neutral state, showing a coating device according to another embodiment of the present invention. FIG.
Fig. 7C is a simplified plan view of a coating device according to another embodiment of the present invention in a state in which the first transfer pin corresponds to the upper side of the coating agent paste.
Fig. 8 is a simplified perspective view of the main part of the coating device shown in Fig. 7; Fig.
Fig. 9 is a side view of the main part of the coating device shown in Fig. 7;
10 is a simplified side view of a conventional applicator.
11 is a simplified front view of the applicator of Fig.
12 is a schematic view showing a coating process.

1 and 2 show a coating apparatus according to the present invention in which a pair of transfer pins 21 and 22 for applying a paste-like coating agent P to a workpiece 20 of a work W, ). Examples of the paste-like coating agent (P) include resin adhesives such as epoxy resin and polyimide resin, silver paste and the like. The transfer fins 21 and 22 are provided with a coating agent P adhered to the distal end portion of the distal end face in the vicinity of the distal end face or distal end face thereof.

The transfer pins 21 and 22 are allowed to be displaced by the state displacement means 25 in the state (position). The state displacement means 25 includes a belt member 26 on which the pair of transfer pins 21 and 22 are laid and a drive mechanism 27 for driving the belt member 26 And control means 28 for controlling the driving mechanism 27 to shift the first transfer pin 21 and the second transfer pin 22 alternately to the first state and the second state.

2, the drive mechanism 27 includes a belt drive motor M such as a servo motor and a transmission mechanism for transmitting the rotational drive force of the motor M to the belt member 26 Omitted). Further, the running is guided to the linear guide mechanism (30). The linear guide mechanism 30 includes a guide rail 31 and traveling blocks 32a and 32b running along the guide rail 31. [ A first transfer pin 21 is laid on one travel block 32a and a second transfer pin 22 is laid on the other travel block 32b. The control means 28 is, for example, a microcomputer.

The belt member 26 is an endless belt and is provided in an elliptical shape as shown in Figs. 3A and 3B, and the travel blocks 32a and 32b are respectively attached to the inner sides of the long sides 26a and 26b. In this case, in the state shown in Fig. 3A, the first running block 32a is located on one side of the arc-shaped side 26c, and the second running block 32b is located on the side of the other arc- do. 3B, the first travel block 32a is located on the side of the other arc side 26d, and the second travel block 32b is located on the side of one arc side 26c .

The state shown in Fig. 3A is referred to as a first state, and the state shown in Fig. 3B may be referred to as a second state, and the first state and the second state are alternately shifted. That is, the displacement from the first state to the second state is determined by moving the belt member 26 from the state shown in Fig. 3A to the state shown in Fig. 3B in the direction of the arrow E, and moving from the second state to the first state 3B until the belt member 26 is in the state shown in Fig. 3A in the direction of the arrow F. As shown in Fig.

The belt member 26 of this state displacement means is attached to a displacement stage 35 made up of an XYZ stage as shown in Figs. The displacement stage 35 includes a first table 38 which reciprocates in the X-axis direction on the base 36 through a linear guide mechanism 37 and a second table 38 which reciprocates on the first table 38 via the linear guide mechanism 39 A second table 40 reciprocating in the Y axis direction and a third table 43 reciprocating in the Z axis direction along the vertical wall 42 of the second table 40 via the linear guide mechanism 41 do.

The linear guide mechanism 37 includes a pair of parallel guide rails 45 and 45 extending along the X axis direction and traveling bodies 46 and 46 running on the respective guide rails 45 and 45. Guide rails 45 and 45 are disposed on the upper surface of the base 36 and the traveling bodies 46 and 46 are connected to the lower surface of the first table 38. Therefore, the first table 38 travels in the X-axis direction in accordance with the travel of the traveling bodies 46, 46 along the guide rails 45, 45.

The linear guide mechanism 39 has a pair of parallel guide rails 47 and 47 extending along the Y axis direction and traveling bodies 48 and 48 running on the respective guide rails 47 and 47. The guide rails 47 and 47 are disposed on the upper surface of the first table 38 and the traveling bodies 48 and 48 are connected to the lower surface of the second table 40. For this reason, the second table 40 travels in the Y-axis direction in accordance with the travel of the traveling bodies 48, 48 along the guide rails 47, 47.

The linear guide mechanism 41 includes a pair of parallel guide rails 49 and 49 extending along the Z axis direction and traveling bodies 50 and 50 running on the respective guide rails 49 and 49. The guide rails 49 and 49 are disposed on the surface (outer surface) of the vertical wall 42 of the second table 40 and the traveling bodies 50 and 50 are disposed on the back surface (inner surface) of the third table 43 It is connected. For this reason, the third table 43 travels in the Z-axis direction in accordance with the traveling along the guide rails 49, 49 of the traveling bodies 50, 50. Guide rails 31 and 31 for guiding the traveling blocks 32a and 32b are disposed on the inclined arms 51 of the third table 43. [ Therefore, as shown in Fig. 2, the belt member 26 is provided so as to be inclined along the inclined arm 51. As shown in Fig. The belt member 26 can travel in the directions of the arrows E and F as shown in Figs. 3A and 3B in accordance with the running along the guide rails 31 and 31 of the travel blocks 32a and 32b.

However, the traveling bodies 46, 48, and 50 may be self-propelled or may be driven by power from other power sources. When power is supplied from another power source, it may be directly applied to the traveling bodies 46, 48, 50, or may be imparted to the tables 38, 40, 43 by an actuator such as a cylinder mechanism.

Thus, the belt member 26 can be displaced in the Z-axis direction, and the Z-axis direction moving means can be constituted by a Z-axis direction moving mechanism of the displacement stage 35 which is an XYZ stage. That is, when the third table 43 is vertically moved along the Z-axis direction while being guided by the linear guide mechanism 41, the transfer guides 21 and 22 attached to the belt member 26 move up and down along the axial direction .

A horizontal table 52 is provided on the vertical wall 42 of the second table 40 and a paste tray 53 on which the coating agent P is held is disposed on the horizontal table 52. By the way, the paste plate 53 is arranged at a position higher than the area to be coated of the work W to which the coating agent P is to be applied. Therefore, as described above, the belt member 26 is inclined at a predetermined angle with respect to the horizontal plane. 3A, the first transfer pins 21 are arranged on the paste tray 53 and the second transfer pins 22 are arranged on the work W in the application position, . The second transfer pin 22 is arranged on the paste tray 53 and the first transfer pin 21 is placed on the work W on which the first transfer pin 21 is arranged at the application position .

The position of the horizontal table 52 can be adjusted by the position adjusting mechanism 55 in the vertical direction. The position adjusting mechanism 55 is provided with, for example, a linear guide mechanism 56. The linear guide mechanism includes a guide rail 57 extending in the vertical direction and a traveling body 58 running on the guide rail 57. A guide rail 57 is attached to the vertical wall 42 and a traveling body 58 is provided on the horizontal table 52.

Therefore, when the traveling body 58 vertically moves along the guide rail 57, the horizontal table 52 moves up and down, and the paste dish 53 arranged on the horizontal table 52 moves up and down. The traveling body 58 may be self-propelled or may be driven by power from another power source. The horizontal table 52 may be provided with an urging force by an actuator such as a cylinder mechanism. The position adjusting mechanism 55 may be configured as a cylinder mechanism, a ball nut mechanism, a piezoelectric actuator, or the like without using the linear guide mechanism as described above. It may also be constituted by a motor and a cam mechanism for directly converting the rotational driving force of the motor.

Next, a method of applying the coating agent (P) using the apparatus will be described with reference to Fig. 1 and Fig. The workpiece W is a semiconductor chip, and a plurality of workpieces W are stacked on an XY table (not shown). The belt member 26 is moved in the X-axis direction and / or the Y-axis direction through the displacement stage 35 to position the second transfer pin 22 on the work W to which the coating agent P is to be applied .

That is, the first transfer pin 21 is placed on the paste tray 53 in the first state shown in FIG. 3A, and the second transfer pin 22 is placed on the work W arranged at the application position . In this state, the belt member 26 is lowered along the Z-axis direction. The lower end of the first transfer pin 21 is immersed or contacted with the coating agent P of the paste plate 53 and is attached to the tip of the second transfer pin 22, (Coating agent attaching portion) 20 of the work W from the second transfer pin 22 to be coated. Here, the dipping form or the contact form refers to a state in which the tip of the transfer pin is immersed in the coating agent, or the tip of the transfer pin is in contact with the coating agent, and a state in which the coating agent can adhere to the tip of the transfer pin Or a state in which the coating agent can adhere to the tip end near the tip end surface from the tip end surface). The height difference of the coating agent paste (paste position 53, receiving position of the coating agent P) and the to-be-coated portion 20 of the workpiece W is, for example, about 5 mm. In the first state, The difference between the lower end of the transfer pin 21 and the coating agent sealant and the difference between the lower end of the second transfer pin 22 and the workpiece W is 20 mm.

After the belt member 26 is lifted along the Z-axis direction, the belt member 26 is caused to travel from the first state shown in Fig. 3A in the direction of the arrow E and the belt member 26 Is moved in the X-axis direction and / or the Y-axis direction and the first transfer pin 21 is placed on the next work W to which the coating agent P is to be applied to bring it into the second state. That is, in this second state, the second transfer pin 22 is disposed on the workpiece W on which the first transfer pin 21 is disposed at the application position, and the paste is disposed on the paste dish 53. The difference between the lower end of the second transfer pin 22 and the difference between the lower end of the first transfer pin 21 and the upper end of the workpiece W is about 5 mm .

Thereafter, the belt member 26 is lowered along the Z-axis direction. The lower end of the second transfer pin 22 is dipped or contacted with the coating agent P of the paste plate 53 and the first transfer pin 21 is moved from the first transfer pin 21 to the workpiece W And transferred onto the application section 20 for application.

Then, the belt member 26 is raised along the Z-axis direction. This rise leads to the second state as shown in Fig. 3B. The belt member 26 is moved in the direction of arrow F from the second state and the belt member 26 is moved in the X axis direction and / or the Y axis direction through the displacement stage 35, The substrate 22 is placed on the next work W to be coated with the coating agent P and returned to the first state shown in Fig. The amount of movement of the belt member 26 in the direction of the arrow F and the amount of movement in the direction of the arrow E are made equal.

After returning to the first state in this way, it is lowered along the Z-axis direction again. The lower end of the first transfer pin 21 is dipped or contacted with the coating agent P of the paste plate 53 and the second transfer pin 22 is moved from the second transfer pin 22 to the workpiece W (Coating agent attaching portion) 20 to be coated.

Thereafter, the process is repeatedly changed in order to finish the application work of the coating agent (P) to all the works (W) on the XY table. That is, in this coating method, the front end of the first transfer pin 21 is immersed or contacted with the paste-like coating agent to receive the coating agent, and at the same time, the coating agent P adhered to the second transfer pin 22 (P) in a dipping form or a contact form with the paste-like coating agent (P) at the tip end of the second transfer pin (22) and transferring the coating agent (P) And a second step of transferring and applying the coating agent (P) attached to the pin (21) to the coated part (20). The first step and the second step are alternately performed.

According to the application device of the present invention, the first state and the second state can be alternately displaced by the state displacement means. When the first transfer pin 21 corresponds to the upper portion of the coating agent paste (the paste pan 53 and the receiving position of the coating agent P), the second transfer pin 22 is located above the upper portion of the receiving portion 20 When the second transfer pin 22 corresponds to the upper side of the coating agent paste (the paste plate 53 and the receiving position of the coating agent P), the first transfer pin 21 is located above the receiving portion 20 As shown in FIG. That is, the coating agent P can be applied to the other transfer pins 22 (21) while one of the transfer pins 21 (22) is receiving the coating agent P from the coating agent reservoir. Therefore, it is possible to improve the workability twice as much as that of the conventional apparatus, and the productivity is excellent. In addition, the entire device can be made compact, and the cost can be reduced.

Since the Z-axis direction moving means for moving the transfer pins 21 and 22 in the Z-axis direction is constituted by the Z-axis direction moving mechanism of the displacement stage 35, the first transfer pin 21 and the second transfer pin 22 can be simultaneously moved up and down, thereby further shortening the movement time.

A paste plate 53 is laid on the displacement stage 35, specifically, on the second table 40 of the displacement stage 35. Therefore, it is possible to prevent the distance between the paste plate 53 and the to-beaten portion from becoming long, and to reduce the amount of movement of the transfer pin 21 (22), thereby effectively preventing the transfer time from becoming long.

If the state displacement means 25 is provided with the belt member 26, the drive mechanism 27 and the control means 28, the first transfer pin 21 and the second transfer pin 22 are alternately 1 state and the second state, so that it is possible to perform a stable coating operation with a simple structure and to construct it at a low cost.

Since the receiving position where the transfer pin 21 (22) receives the paste-like coating agent P (located at the coating agent reservoir) is higher than the receiving portion 20 to which the coating agent P is transferred, It is possible to stably apply the coating agent to the to-be-coated portion of all the work to be transferred with the coating agent.

Since the belt member 26 of the state displacement means 25 is provided so as to be inclined relative to the horizontal position in correspondence with the receiving position and the to-be-covered portion 20, the first transfer pin 21 and the second transfer pin 22 ) Can be set to be the same in the vertical direction, and the stroke in the Z-axis direction can be made the same and small, and the Z-axis can be uniaxially reduced. Particularly, in this coating apparatus, by adding the state displacement means 25 provided with the belt member 26 or the like, it is improved in peak movement. Therefore, positioning and the like are facilitated, and the state displacement means 25 can be constituted by an inexpensive member (such as a belt member), thereby achieving cost reduction.

The position adjustment mechanism 55 can adjust the height position of the paste dish 53 in the vertical direction. Therefore, when the paste plate 53 is positioned at the upper position, when the transfer pins 21 and 22 corresponding to the paste plate 53 are lowered, the paste can be immersed deeply in the coating agent have. When the transfer plate corresponding to the paste plate is lowered by placing the paste plate 53 at a lower position, the transfer plate may be dipped into a coating agent adhering to the paste plate 53, The upper surface of the coating agent P may be brought into contact with the tip. In addition, when immersed in the coating agent (P), the immersion time can be lengthened, and when immersed in the coating agent (P) in a shallow manner, the immersion time can be shortened. Therefore, the application amount of the coating agent P to be adhered to the transfer pins 21, 22 can be adjusted. The tip ends of the transfer pins 21 and 22 are brought into contact with the to-be-covered portion 20 at the lowermost position of the transfer pins 21 and 22 at the side of the receiving portion, The tip of the transfer pins 21 and 22 does not come into contact with the to-be-covered portion 20, and a predetermined small clearance is formed between the to-be-exposed portion 20 and the transfer pin 21. [

The kind of the coating agent P using the coating amount of the coating agent P adhered to the transfer pins 21 and 22 on the side of the paste plate 53 and the coating amount of the coating agent P on the coated portion 22 of the transfer fins 21 and 22 can be determined in accordance with the type of the coating agent P used in the intended receiving portion side and the application amount of the coating agent P to the coated portion, The height position can be adjusted, so that chips and the like can be mounted with high accuracy.

In this embodiment, since the belt member 25 is displaced along the Z-axis direction, the vertical transfer amounts of the transfer pins 21, 22 provided on the belt member 25 are the same. When the upper and lower amounts of the pair of transfer pins 21 and 22 are made the same, the height position of the paste plate 53 is adjusted to " deeply immerse in the coating agent P or shallowly immerse in the coating agent P Or the state in which the top surface of the application agent P comes into contact with the tips of the transfer pins 21 and 22 "can be stably performed. In addition, the transfer fins 21, Can be adjusted with high accuracy.

Since the belt member 25 is displaced along the Z-axis direction, the up and down movements of the transfer pins 21 and 22 attached to the belt member 25 are synchronized. By synchronizing the up and down movements of the pair of transfer pins 21 and 22 in this manner, it is possible to stably receive the application agent P by the transfer fins 21 and 22 and the application by the other transfer pins 21 and 22 Can be performed at the same time, so that the productivity can be improved.

5 and Fig. 6 show another embodiment. In this case, the belt member 26 is arranged horizontally as shown in Fig. Therefore, the first transfer pin 21 and the second transfer pin 22 can reciprocate independently in the Z-axis direction.

This displacement stage 35 is constituted by an XY stage. That is, in the XYZ stage shown in Fig. 1, the support substrate 60 and the like are disposed in place of the linear guide mechanism 41, the third table 43, and the like. A guide plate 63, on which the guide rails 31, 31 are disposed, is provided on the support substrate 60.

The travel blocks 32a and 32b are supported by the pin support blocks 61 and 62 and the transfer pins 21 and 22 are supported by the pin support blocks 61 and 62 respectively. The transfer pins 21 and 22 reciprocate along the Z-axis direction through a moving mechanism including linear motors 65a and 65b such as VCM, for example. Further, the moving mechanism is controlled by control means (not shown) comprising a microcomputer or the like.

The pin support blocks 61 and 62 are attached to the belt member 26 in the same manner as in the case shown in Figs. 3A and 3B. The belt member 26 in this case is provided along the horizontal direction as shown in Fig. A pin supporting block 61 is attached to the belt member 26 instead of the first running block 32a and a pin supporting block 62 is attached to the belt member 26 instead of the second driving block 32b. It is. In this embodiment, therefore, the first transfer pin 21 corresponds to the upper portion of the coating agent paste in which the paste-like coating agent P is held, and the second transfer pin 22 is arranged above the upper portion of the to- The first transfer pin 21 corresponds to the first transfer pin 21 corresponding to the first transfer pin 21 and the second transfer pin 22 corresponds to the first transfer pin 21 corresponding to the upper side of the coating agent paste in which the paste- To the second state corresponding to the second state.

Next, a coating method using the coating apparatus shown in Figs. 5 and 6 will be described. In this case also, the first transfer pin 21 and the second transfer pin 22 are brought into the first state. That is, the first transfer pin 21 is arranged on the paste plate 53 and the second transfer pin 22 is arranged on the work W arranged at the application position.

In this first state, the first transfer pin 21 and the second transfer pin 22 are lowered along the Z-axis direction, respectively. At this time, the amount of descent of the first transfer pin 21 is such that the tip of the transfer pin 21 becomes dipped or contacted with the coating agent P, and the coating agent P can be received. The amount of descent of the second transfer pin 22 is an amount by which the coating agent P attached to the tip of the transfer pin 22 can transfer the coating agent P to the receiving portion 20. [

As a result, the first transfer pin 21 receives the coating agent P from the paste tray 53 and the second transfer pin 22 transfers the coating agent P onto the receiving portion 20 of the work W. [ Can be transferred. Thereafter, the transfer fins 21 and 22 are raised to return to the first state. In this case, it is necessary to raise the transfer fins 21 and 22 so that they do not come into contact with the paste plate 53 or the like when the belt member 26 travels. Subsequently, the belt member 26 is driven from the first state, and the belt member 26 is moved in the X-axis direction and / or the Y-axis direction through the displacement stage 35 to the second state. That is, the second transfer pin 22 is disposed on the workpiece W, which is disposed on the paste tray 53 and the first transfer pin 21 is disposed at the application position.

In this state, the transfer fins 21 and 22 are lowered along the Z-axis direction. At this time, the amount of descent of the second transfer pin 22 is such that the tip of the transfer pin 22 becomes dipped or contacted with the coating agent P, and the coating agent P can be received. The amount of descent of the first transfer pin 21 is an amount by which the coating agent P adhered to the tip of the transfer pin 21 is capable of transferring the coating agent P to the intended portion 20. [

As described above, even in this coating apparatus, the tip of the first transfer pin 21 is immersed or contacted with the paste-like coating agent to receive the coating agent P and the coating agent ( P to the to-be-covered part 20 and applying the coating agent P to the to-be-coated part 20; and a second step of transferring the coating agent P by immersing the tip of the second transfer pin 22 into the paste- And the second step of transferring and applying the coating agent (P) adhered to the first transfer pin (21) to the coated part (20) are carried out alternately. Thereafter, the process is repeatedly changed in order to finish the application work of the coating agent P to the entire work W on the XY table.

Therefore, even in the coating apparatuses shown in Figs. 5 and 6, it is possible to improve the workability twice as much as that of the conventional apparatus, and the productivity is excellent. In addition, the entire device can be made compact, and the cost can be reduced. Particularly, even if the height positions of the coating agent paste (paste plate 53) and the to-be-coated portion 20 are different, if the transfer fins 21 and 22 can independently displace in the Z-axis direction, The transfer fins 21 and 22 can be moved up and down corresponding to their height positions and the height adjustment at the lowest point of each transfer pin 21 and 22 can be easily performed. The transfer fins 21 and 22 can be deeply or deeply immersed in the coating agent P on the side of the paste plate 53 and the transfer pins 21 And 22 can be made to contact the to-be-covered portion 20 or to form a minute gap between the to-be-covered portions 20 without being brought into contact with each other.

It is not necessary to vertically move the paste dish 53 through the position adjusting mechanism 55 along the Z axis direction if the transfer fins 21 and 22 independently move up and down along the Z axis direction. In the case where the transfer fins 21 and 22 independently move up and down, a moving mechanism having a motor or the like is required to move the transfer fins 21 and 22 up and down as described above, (21, 22) side becomes larger and the weight becomes larger. On the contrary, if the transfer plates 21 and 22 are not vertically movable independently of each other and the paste plate 53 is vertically moved, the transfer pins 21 and 22 are made more compact and lightweight can be achieved .

However, if the transfer fins 21 and 22 independently move up and down along the Z-axis direction, it is not necessary to tilt the belt member 26 and the like. Therefore, (53) may be vertically moved along the Z-axis direction.

In the above embodiment, the belt member 26 is moved in the X-axis direction and / or the Y-axis direction through the displacement stage 35 to transfer the transfer pins 21 (22) onto the work to which the coating agent P is applied The transfer pin 21 (22) may be arranged on the work to which the coating agent P is applied by moving the table on which the work W is placed in the X-axis direction and / or the Y-axis direction .

In each of the above-described embodiments, when changing from the first state to the second state or changing from the second state to the first state, the transfer pins 21, As shown in Fig. 3, the movable member moves in a state in which it is separated at a predetermined interval in a direction orthogonal to the moving direction. Therefore, when transferring from the first transfer pin 21 and transferring from the second transfer pin 22, it is necessary to displace the transfer pins 21, 22 in the direction of absorbing the shift.

Therefore, the state displacement means 25 shown in Figs. 7 to 9 is configured such that the movement loci L1 and L2 of the pair of transfer fins 21 and 22 form a crisscross shape in a plan view. In a state where the transfer pins 21 and 22 are positioned above the to-be-covered portion 20, the transfer pins 21 and 22 are positioned on the intersection O of the movement trajectories L1 and L2 have.

The state displacement means 25 includes support arms 71 and 72 for respectively supporting the pair of transfer pins 21 and 22 and a pair of support arms 71 and 72 for moving the support arms 71 and 72 along movement trajectories L1 and L2 (Second) support arm 72 (second) when the first (first) support arm 71 moves from the side of the application agent paste (paste plate) And the other support arm 72 is moved from the side of the coating agent to the side of the coating agent from the side of the coating agent to the side of the coating agent, And a arm control mechanism (75) for controlling the arm guide mechanisms (73, 74) so as to move to the side.

The arm guide mechanisms 73 and 74 include guide rails 80 and 80 provided on the inclined side surfaces 78 and 78 of the base 77 and guide blocks 80 and 81 running along the guide rails 80 and 80 And the support arms 71 and 72 are fixed to the travel blocks 81 and 81 through the supports 82 and 82. [

The base 77 is composed of a base end first portion 77a and a tip side second portion 77a extending from the base end first portion 77a and the side surface of the tip side second portion 77a is inclined Thereby forming the side surfaces 78 and 78. The base 77 is inclined downward from the base end side toward the tip end side (refer to Fig. 8). Further, the oblique side surfaces 78, 78 are inclined so as to approach sequentially from the proximal end side toward the distal end side. 8, the illustration of the support arms 71 and 72 is omitted.

Therefore, the guide rails 80, 80 provided on the oblique side face are also arranged so as to approach sequentially from the base end side toward the tip end side. The support arms 71 and 72 attached to the traveling blocks 81 and 81 running along the guide rails 80 and 80 slide while being guided by the guide rails 80 and 80. [ The transfer pins 21 and 22 are attached to the transfer pin supporting portions 83 and 83 at the ends of the support arms 71 and 72, respectively. As a result, the transfer fins 21 and 22 are moved along the movement loci L1 and L2 by traveling of the support arms 71 and 72. [ Although the base 77 is inclined downward from the base end side toward the tip end side, the support arms 71 and 72 extend in the horizontal direction as shown in Fig.

The arm control mechanism 75 includes a driving motor (not shown) disposed on the back side of the base end first portion 77a of the base 77 and a driving motor (not shown) disposed on the front surface side of the base end first portion 77a of the base 77 A connecting member 86a for connecting one end of the swinging bar 85 to the supporting member 82 of one supporting arm 71 and a connecting member 86b for connecting the other end of the swinging bar 85 And a connecting body 86b for connecting the supporting body 82 of the other supporting arm 72 with each other.

The driving shaft of the driving motor is connected to the central portion 87 of the swinging bar 85. A portion between the central portion 87 and one end portion of the swing bar 85 and the one support 82 are connected by a spring 88a as indicated by imaginary lines, The portion between the center portion 87 and the other end portion and the other support member 82 are connected by a spring 88b as indicated by imaginary lines. Also, the spring 88a is disposed higher than the connecting member 86a, and the spring 88b is disposed higher than the connecting member 86b.

7C, a paste dish 53 is arranged below the tip end side of the tip second portion 77b of the base 77. As shown in Fig. The paste plate 53 may be provided on the vertical wall 42 (see FIG. 1, etc.) of the second table 40 as in the above embodiment.

7B from the state in which the swinging bar 85 is arranged along the direction orthogonal to the longitudinal direction of the base 77 as shown in Fig. 7A by the drive motor, The supporting body 82 of the other supporting arm 72 is pulled toward the proximal end of the connecting body 86b and at the same time the supporting body 82 of the one supporting arm 71 The support 82 is pressed against the tip side. As a result, the transfer pin 21 attached to the support arm 71 moves from the coating agent retaining side (paste plate side) to the receiving side along the movement locus L1. At this time, the transfer pin 21 stops at a position corresponding to the intersection O between the movement locus L1 and the movement locus L2. In addition, the transfer pin 22 attached to the support arm 72 moves along the movement locus L2 from the side of the object to be coated to the side of the application agent paste (paste plate side). At this time, the transfer pin 22 stops at a position corresponding to the paste plate 53. [

7B, the supporting body 82 of one of the supporting arms 71 is pulled toward the base end side of the coupling body 86a, and the supporting body 82 of the coupling body 86b The support 82 of the other support arm 72 is pressed against the tip end side. This causes the transfer pin 22 attached to the support arm 72 to move from the coating agent retaining portion side (paste plate side) to the receiving portion side along the movement locus L2. At this time, the transfer pin 22 stops at a position corresponding to the intersection O of the movement locus L2 and the movement locus L2. In addition, the transfer pin 21 attached to the support arm 71 moves along the movement locus L1 from the coated portion side to the coating agent retaining portion side (paste plate side). At this time, the transfer pin 21 stops at a position corresponding to the paste plate 53. [ 1 and the like, the base 77 can be vertically moved in the Z-axis direction through the linear guide mechanism 41. As shown in Fig.

The movement of the support arms 71 and 72 along the movement trajectories L1 and L2 does not mean that the entire support arms 71 and 72 move on the movement trajectories L1 and L2, The transfer pin support portion 83 of the transfer pin 83 may move on the movement trajectories L1 and L2.

The apparatus having the state displacement means 25 shown in Figs. 7 to 9 can perform the same transfer operation as the apparatus provided with the state displacement means 25 shown in Fig. 7C, the first transfer pin 21 corresponds to the upper side of the coating agent paste (paste dish 53), and the second transfer pin 22 corresponds to the upper side of the to-be- 7A, the second transfer pin 22 corresponds to the upper side of the coating agent paste (the paste pan 53), and the first transfer pin 21 corresponds to the upper side of the to- And the second state corresponding to the upward direction.

When the base 77 is lowered in the first state, the tip of the first transfer pin 21 is brought into contact with the paste (coating agent P) of the paste dish 53 or in a dipping form, (Coating agent P)] can be received from the second transfer pin 22 and the paste (coating agent P) can be transferred from the second transfer pin 22 to the receiving portion 20. When the second state is reached, the tip of the second transfer pin 22 is brought into contact with the paste (coating agent P) of the paste pan 53 or in an immersed form to receive the paste (coating agent P) And the paste (coating agent P) can be transferred from the first transfer pin 21 to the receiving portion 20. The position of the second transfer pin 22 in the first state and the position of the first transfer pin 21 in the second state are both on the intersection O of the movement trajectories L1 and L2, Do.

Therefore, when the pair of transfer pins 21 and 22 form a trajectory of crisscrossing in a plan view, even when transferring to the first transfer pin 21, the second transfer pins 22 It is possible to transfer the toner image to the same portion even in the case of transferring, so that the transferring operation can be stabilized and the transferring accuracy can be improved. Even when the first state is shifted from the first state to the second state, adjustment of the transfer pins 21, 22 in the X and Y directions is not required, Is excellent.

In this case as well, the paste pan 53 is vertically moved along the Z-axis direction. As in the case of the coating apparatus shown in Fig. 1, the amount of the coating agent P to be used and the coating agent P to be used So that the coating agent (P) can be applied with high accuracy.

7 to 9, the planarizing member 90 for flattening the upper surface of the coating agent P of the paste plate 53 in a planar shape is provided as shown in Fig. The paste dish 53 has a bottom wall 53a, a peripheral wall 53b provided along the periphery of the bottom wall 53a and a shaft portion 53c at the center of the bottom wall 53a. Then, the paste dish 53 is rotated around the shaft portion 53c through a driving means not shown. The planarizing member 90 is formed of a flat plate and is arranged corresponding to the ring shaped paste holder between the peripheral wall 53b and the shaft portion 53c and the paste plate 53 is arranged around the shaft portion 53c The lower edge 90a of the flattening member 90 is brought into contact with the upper surface of the coating agent of the ring-shaped paste paste and the depression of the upper surface of the coating agent P formed by the immersion of the transfer pins 21, The upper surface can be formed into a planar shape.

In this case, on the contrary, the paste plate 53 may be fixed and the planarizing member 90 may be rotated. In either case, when the coating agent P is received from the paste tray 53 on the transfer pins 21, 22, it is necessary to dispose the flattening member 90 so as not to become an obstacle. For this reason, the planarizing member 90 may be movable. Further, since the amount of the coating agent (P) in the ring-shaped paste paste portion varies, it is preferable to vertically move.

As described above, when the flattening member 90 is provided, the top surface of the coating agent P becomes flat, so that the transfer fins 21 and 22 receive the coating agent P from the paste dish 53 in a stable manner, Work becomes possible.

7 to 9, in the state where the transfer pins 21 (22) are positioned above the to-be-covered portion 20, the transfer pins 21 (22) (O). However, the transfer pins 21 (22) may be placed on the end point near the intersection O, not on the cross point O. Here, the end point is the turning point of the transfer pin 21 (22) (point at which the transfer pin returns to the coating agent brine side). The end point near the intersection O of the movement locus L1 and L2 includes the side of the coating agent paste part (paste plate) side than the intersection point O and the part of the end face nearer to the intersection point than the intersection point O. Further, the proximity means a range in which the transfer pins 21 (22) on this end point can be transferred to the receiving portion 20 when the transfer pins 21 (22) are lowered along the vertical direction. For this reason, the range of proximity can be variously changed depending on the area of the to-be-covered portion 20. [

Therefore, even in the case of transferring to the first transfer pin, transfer to the second transfer pin can be carried out to almost the same area, so that the transfer operation can be stabilized and transfer precision can be achieved .

Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment and can be modified in various ways. For example, without using the belt member 26 as the state displacement means 25, May be used. In the embodiment, the running of the belt member 26 is a reciprocating running, but it may be a one-way running running. Although the motor is used in the above embodiment as the drive mechanism 27 for the belt member 26, various conventional mechanisms (actuators) such as a solenoid mechanism and a cylinder mechanism can be used.

As shown in FIG. 1 and the like, when the entire belt member 26 moves up and down in the Z-axis direction, the transfer pins 21 and 22 themselves need not be moved up and down. However, errors of the transfer pins 21 and 22 So that the transfer pins 21 and 22 can be slightly avoided in the Z-axis direction.

Further, as shown in FIG. 5 and the like, a cylinder mechanism, a ball screw mechanism, or the like may be used as a moving mechanism in which the transfer fins 21 and 22 independently move up and down in the Z-axis direction.

The movement of the belt member 26 in the X-axis direction and / or the Y-axis direction and the movement of the belt member 26 in the direction of the arrow E (F (F) direction of the belt 26 even if the belt 26 travels in the direction of the arrow E (F) after the movement in the X-axis direction and / or the Y- Axis direction and / or the Y-axis direction may be performed after the vehicle is running.

As a difference in height between the coating agent retaining portion and the workpiece W to be covered 20, a table on which the workpiece W is mounted is moved in a range in which the horizontal table 52 supporting the paste plate 53 can pass It can be set up in various ways. It is also possible that there is no such difference in level. 1, when the belt member 26 is lowered to lower the transfer pin 21 (22), the lower end of the transfer pin 21 (22) Or the transfer pin 21 (22) can be changed variously within a range in which the transfer of the coating agent P to the to-be-coated portion 20 of the work W is possible.

The diameter dimension and the material of the transfer pins 21 (22) are also dipped or contacted with the coating agent paste so that the coating agent (P) can be received and the coating agent (20) P) can be transferred. Further, the shape of the end face of the transfer pin 21 (22) may be flat or may have a concavo-convex portion. The displacement speed from the first state to the second state and the displacement speed from the second state to the first state can also be adjusted in the range in which the coating agent P attached to the transfer pin 21 (22) , The material of the transfer pin 21 (22), the shape, the size, and the like of the transfer pin (21).

In the apparatuses shown in Figs. 7 to 9, the support arms 71 and 72 are connected to each other by a link mechanism (a link mechanism including the swing bar 85 and the link members 86a and 86b) The support arms 71 and 72 may be displaced without using such a link mechanism or the like. That is, the support arms 71 and 72 may be moved along the movement trajectories L1 and L2 using a cylinder mechanism or a ball screw mechanism.

In the apparatuses shown in Figs. 7 to 9, as shown in Fig. 5 and Fig. 6, the transfer fins 21 and 22 may be independently moved up and down. With this setting, it is possible to stably carry out the transfer operation of the coating agent P from the paste plate and the application work of the coating agent to the coated portion 20, and it is not necessary to make the base 77 inclined with respect to the horizontal plane. In addition, the planarizing member 90 may be arranged in the apparatus shown in Fig. 1 or Fig.

7 to 9, when the transfer fin 21 (22) is lowered along the vertical direction to the end point near the crossing point O, did. However, the transfer pins 21 (22) can be lowered by moving the transfer pins 21 (22) toward the center line passing through the intersection O. Therefore, in the vicinity, the transfer pin 21 (22) on the end point is not limited to the range that can be transferred to the intended portion 20 when the transfer pin 21 (22) is lowered along the vertical direction.

As the state displacement means 25, a transfer pin may be arranged at a position opposite to the rotational axis of the rotating body by 180 °.

In the manufacture of semiconductors, it is used in the step of applying a paste-like coating agent to a lead frame or the like to be coated. The coating agent is a resin adhesive such as an epoxy resin or a polyimide resin, a silver paste, or the like. Use transfer pins. The lower end of the transfer pin is immersed in a coating agent held in a paste dish to receive the coating agent. The received coating agent is transferred to the donor portion.

20: donut portion 21, 22: transfer pin
25: state displacement means 26: belt member
27: drive mechanism 28: control means
35: Displacement stage 53: Paste plate
55: position adjusting mechanism 71, 72: support arm
73, 74: arm guide mechanism 75: arm control mechanism
P: Coating agent (paste)

Claims (16)

A coating apparatus comprising a pair of transfer pins for applying a paste-like coating agent to a to-be-coated portion, comprising:
Wherein the first transfer pin corresponds to the upper side of the coating agent paste in which the paste-like coating agent is held, the first state in which the second transfer pin corresponds to the upper side of the coated portion, and the second state in which the second transfer pin is in contact with the paste- State shifting means for countering the upward direction of the coating agent holding portion and alternately displacing the first transfer pin to a second state corresponding to the upper side of the to-be-sunken portion; And
And Z-axis direction moving means for moving the transfer pins in the Z-axis direction in the vertical direction in the first state and the second state,
The state displacing means is configured such that when the first transfer pin and the second transfer pin reciprocate in a straight line between the coating agent retaining portion and the receiving portion and the first transferring pin is displaced from the coating agent retaining portion to the receiving portion, When the second transfer pin is displaced from the coated portion to the coating agent layer and the second transfer pin is displaced from the coating agent layer to the coated portion, the first transfer pin is displaced from the coated portion to the coating agent layer . The method according to claim 1,
Wherein said state displacement means is provided in a displacement stage which is an XYZ stage and said Z axis direction moving means is constituted by a Z axis direction moving mechanism of said displacement stage. The method according to claim 1,
Wherein said Z-axis direction moving means is provided with a moving mechanism for independently displacing each of the transfer pins in the Z-axis direction, and said state displacement means is disposed in a displacement stage which is an XY stage. The method according to claim 2 or 3,
Wherein a paste plate constituting the coating agent paste is provided on the displacement stage. 4. The method according to any one of claims 1 to 3,
Wherein the receiving position at which the transfer pin receives the paste-like coating agent is higher than the to-be-delivered portion to which the coating agent is transferred. 4. The method according to any one of claims 1 to 3,
Wherein said state displacement means comprises a belt member on which said pair of transfer pins are laid, a drive mechanism for driving said belt member, and a control means for controlling said drive mechanism so that first and second transfer pins 2 state to a state in which the substrate is in contact with the substrate. 6. The method of claim 5,
Wherein the belt member of said state displacement means is inclined with respect to a horizontal plane corresponding to said receiving position and said to-be-covered portion. 4. The method according to any one of claims 1 to 3,
Wherein the movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when seen in a plan view, and when the transfer pin is positioned above the to-be-covered portion, the transfer pin is moved to the intersection of the movement locus Wherein the coating unit is positioned on the near end point. 4. The method according to any one of claims 1 to 3,
Wherein the movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when viewed in a plan view, and when the transfer pin is positioned above the to-be-concealed portion, In the coating device. 10. The method of claim 9,
Wherein said state displacement means comprises:
A support arm for supporting the pair of transfer pins;
An arm guide mechanism for guiding movement of each support arm along the movement locus; And
When one support arm moves from the coating agent holding portion side to the to-beating portion side, the other supporting arm moves from the to-be-coated portion side to the coating agent holding portion side, and when one of the supporting arms moves to the coating agent holding portion side from the to- And an arm control mechanism for controlling the arm guide mechanism so that the other support arm moves from the application agent holding portion side to the to-bead portion side. And a pair of transfer pins for receiving the coating agent in a form of dipping or contacting the lower end of the coating agent for transferring the paste-like coating agent to the donor portion, and transferring the coating agent to the donor portion;
Receiving the coating agent from one of the transfer pins and simultaneously transferring the coating agent from the other transfer pin to the to-be-coated portion, receiving the coating agent from the other transfer pin and transferring the coating agent from the one transfer pin to the to- ;
Wherein when the application agent is received and the application agent is transferred, the transfer pin is lowered along the vertical direction,
And a position adjusting mechanism for adjusting the height position of the paste plate in the vertical direction. The method according to claim 1,
Wherein the upper and lower amounts of the pair of transfer pins are the same. The method according to claim 1,
And the upper and lower motions of the pair of transfer pins are synchronized with each other. A coating method for applying a paste-like coating agent to a to-be-coated portion:
A first step of transferring the coating agent adhered to the second transfer pin to the to-be-coated portion and applying the coating agent while the tip of the first transfer pin is immersed or in contact with the paste-like coating agent,
And a second step of transferring the coating agent adhered to the first transfer fin to the to-be-coated portion and applying the coating agent while the tip of the second transfer pin is immersed or in contact with the paste-like coating agent;
The first transferring pin and the second transferring pin each reciprocate between the coating agent holding portion and the receiving portion in a straight line, and when the first transferring pin is displaced from the coating agent holding portion to the receiving portion, When the first transfer pin is displaced from the aspiration part to the coating agent layer and the second transfer pin is displaced from the coating agent layer to the coated part, Wherein the coating is carried out alternately. 15. The method of claim 14,
Wherein the movement locus of each transfer pin when the first step and the second step are alternately formed has a crisscross shape in plan view and is characterized in that the transfer pin when transferring the coating agent to the to- Is located on the end point close to the intersection of the trajectory. 15. The method of claim 14,
Wherein the movement locus of each transfer pin when the first step and the second step are alternately formed has a crisscross shape in plan view and is characterized in that the transfer pin when transferring the coating agent to the to- And a second step of disposing the second substrate on an intersection of the trajectories.

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