KR101563630B1 - 반도체 패키지 - Google Patents
반도체 패키지 Download PDFInfo
- Publication number
- KR101563630B1 KR101563630B1 KR1020090088040A KR20090088040A KR101563630B1 KR 101563630 B1 KR101563630 B1 KR 101563630B1 KR 1020090088040 A KR1020090088040 A KR 1020090088040A KR 20090088040 A KR20090088040 A KR 20090088040A KR 101563630 B1 KR101563630 B1 KR 101563630B1
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor chip
- semiconductor
- chip module
- connecting member
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48145—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48145—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
- H01L2224/48147—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked with an intermediate bond, e.g. continuous wire daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8538—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/85399—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06506—Wire or wire-like electrical connections between devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0651—Wire or wire-like electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
- H01L2225/06562—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking at least one device in the stack being rotated or offset
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06572—Auxiliary carrier between devices, the carrier having an electrical connection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims (12)
- 기판;상기 기판 상에 부착된 제1 반도체 칩 모듈;상기 제1 반도체 칩 모듈 상에 부착되며, 전도성 플레이트, 상기 전도성 플레이트와 제1 반도체 칩 모듈 사이에 접속되어 이들 상호 간을 전기적으로 연결하는 접속부재, 및 상기 전도성 플레이트와 제1 반도체 칩 모듈 사이에 개재된 간격 유지 부재를 포함하는 전도성 연결부재; 및상기 전도성 연결부재 상에 상기 제1 반도체 칩 모듈과 지그재그 배열을 이루도록 부착된 제2 반도체 칩 모듈;을 포함하는 것을 특징으로 하는 반도체 패키지.
- 삭제
- 제 1 항에 있어서, 상기 전도성 플레이트는 전기적 연결패턴을 구비한 기판 또는 테이프인 것을 특징으로 하는 반도체 패키지.
- 제 1 항에 있어서, 상기 제1 반도체 칩 모듈은 적어도 둘 이상이 페이스-업 타입 및 계단식으로 스택되며, 각 계단면에 제1 본딩패드들이 배열된 제1 반도체 칩들과, 상기 제1 반도체 칩들 중 최하부 제1 반도체 칩과 기판 및 상기 제1 반도 체 칩들 상호 간을 전기적으로 연결하는 제1 연결부재를 포함하는 것을 특징으로 하는 반도체 패키지.
- 제 1 항에 있어서, 상기 제2 반도체 칩 모듈은 적어도 둘 이상이 페이스 업 타입 및 계단식으로 스택되며, 각 계단면에 제2 본딩패드들이 배열된 제2 반도체 칩들과, 상기 제2 반도체 칩들 중 최하부 제2 반도체 칩과 상기 전도성 연결부재 및 상기 제2 반도체 칩들 상호 간을 전기적으로 연결하는 제2 연결부재를 포함하는 것을 특징으로 하는 반도체 패키지.
- 제 1 항에 있어서, 상기 제1 및 제2 반도체 칩 모듈과 전도성 연결부재를 포함한 기판 상면을 밀봉하도록 형성된 봉지부와, 상기 기판 하면에 부착된 외부접속단자를 더 포함하는 것을 특징으로 하는 반도체 패키지.
- 기판; 및상기 기판 상에 스택된 적어도 둘 이상의 패키지 유닛;을 포함하고,상기 패키지 유닛은,제1 반도체 칩 모듈;상기 제1 반도체 칩 모듈 상에 부착되며, 전도성 플레이트, 상기 전도성 플레이트와 제1 반도체 칩 모듈 사이에 접속되어 이들 상호 간을 전기적으로 연결하는 접속부재, 및 상기 전도성 플레이트와 제1 반도체 칩 모듈 사이에 개재된 간격 유지 부재를 포함하는 전도성 연결부재; 및상기 전도성 연결부재 상에 상기 제1 반도체 칩 모듈과 지그재그 배열을 이루도록 부착된 제2 반도체 칩 모듈;을 포함하는 것을 특징으로 하는 반도체 패키지.
- 삭제
- 제 7 항에 있어서, 상기 전도성 플레이트는 전기적 연결패턴을 구비한 기판 또는 테이프인 것을 특징으로 하는 반도체 패키지.
- 제 7 항에 있어서, 상기 제1 반도체 칩 모듈은 적어도 둘 이상이 페이스-업 타입 및 계단식으로 스택되며, 각 계단면에 제1 본딩패드들이 배열된 제1 반도체 칩들과, 상기 제1 반도체 칩들 중 최하부 제1 반도체 칩과 기판 및 상기 제1 반도체 칩들 상호 간을 전기적으로 연결하는 제1 연결부재를 포함하는 것을 특징으로 하는 반도체 패키지.
- 제 7 항에 있어서, 상기 제2 반도체 칩 모듈은 적어도 둘 이상이 페이스 업 타입 및 계단식으로 스택되며, 각 계단면에 제2 본딩패드들이 배열된 제2 반도체 칩들과, 상기 제2 반도체 칩들 중 최하부 제2 반도체 칩과 상기 전도성 연결부재 및 상기 제2 반도체 칩들 상호 간을 전기적으로 연결하는 제2 연결부재를 포함하는 것을 특징으로 하는 반도체 패키지.
- 제 7 항에 있어서, 상기 스택된 패키지 유닛을 포함한 기판 상면을 밀봉하도록 형성된 봉지부와, 상기 기판 하면에 부착된 외부접속단자를 더 포함하는 것을 특징으로 하는 반도체 패키지.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090088040A KR101563630B1 (ko) | 2009-09-17 | 2009-09-17 | 반도체 패키지 |
US12/835,921 US8390114B2 (en) | 2009-09-17 | 2010-07-14 | Semiconductor package |
US13/756,831 US8492889B2 (en) | 2009-09-17 | 2013-02-01 | Semiconductor package |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090088040A KR101563630B1 (ko) | 2009-09-17 | 2009-09-17 | 반도체 패키지 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20110030087A KR20110030087A (ko) | 2011-03-23 |
KR101563630B1 true KR101563630B1 (ko) | 2015-10-28 |
Family
ID=43729686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090088040A Expired - Fee Related KR101563630B1 (ko) | 2009-09-17 | 2009-09-17 | 반도체 패키지 |
Country Status (2)
Country | Link |
---|---|
US (2) | US8390114B2 (ko) |
KR (1) | KR101563630B1 (ko) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4776675B2 (ja) * | 2008-10-31 | 2011-09-21 | 株式会社東芝 | 半導体メモリカード |
KR101563630B1 (ko) * | 2009-09-17 | 2015-10-28 | 에스케이하이닉스 주식회사 | 반도체 패키지 |
US9230942B2 (en) | 2013-02-26 | 2016-01-05 | Sandisk Information Technology (Shanghai) Co., Ltd. | Semiconductor device including alternating stepped semiconductor die stacks |
US20160307873A1 (en) * | 2015-04-16 | 2016-10-20 | Mediatek Inc. | Bonding pad arrangment design for semiconductor package |
US20170033087A1 (en) * | 2015-07-31 | 2017-02-02 | Samsung Electronics Co., Ltd. | Stack semiconductor package structure and method of manufacturing the same |
WO2017095401A1 (en) * | 2015-12-02 | 2017-06-08 | Intel Corporation | Die stack with cascade and vertical connections |
WO2017166325A1 (en) * | 2016-04-02 | 2017-10-05 | Intel Corporation | Semiconductor package with supported stacked die |
KR102556518B1 (ko) * | 2018-10-18 | 2023-07-18 | 에스케이하이닉스 주식회사 | 상부 칩 스택을 지지하는 서포팅 블록을 포함하는 반도체 패키지 |
JP7242366B2 (ja) * | 2019-03-22 | 2023-03-20 | キオクシア株式会社 | 半導体装置 |
KR20220015066A (ko) * | 2020-07-30 | 2022-02-08 | 삼성전자주식회사 | 멀티-칩 패키지 |
JP2023118538A (ja) * | 2022-02-15 | 2023-08-25 | キオクシア株式会社 | 半導体装置およびその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080303131A1 (en) * | 2007-06-11 | 2008-12-11 | Vertical Circuits, Inc. | Electrically interconnected stacked die assemblies |
KR100886717B1 (ko) * | 2007-10-16 | 2009-03-04 | 주식회사 하이닉스반도체 | 적층 반도체 패키지 및 이의 제조 방법 |
US20090065948A1 (en) | 2007-09-06 | 2009-03-12 | Micron Technology, Inc. | Package structure for multiple die stack |
Family Cites Families (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1214464C (zh) * | 1998-10-14 | 2005-08-10 | 株式会社日立制作所 | 半导体器件及其制造方法 |
US7385286B2 (en) * | 2001-06-05 | 2008-06-10 | Matsushita Electric Industrial Co., Ltd. | Semiconductor module |
US6900528B2 (en) * | 2001-06-21 | 2005-05-31 | Micron Technology, Inc. | Stacked mass storage flash memory package |
DE10231385B4 (de) * | 2001-07-10 | 2007-02-22 | Samsung Electronics Co., Ltd., Suwon | Halbleiterchip mit Bondkontaktstellen und zugehörige Mehrchippackung |
JP2003110091A (ja) * | 2001-09-28 | 2003-04-11 | Toshiba Corp | 半導体装置及び半導体装置の製造方法 |
KR100430001B1 (ko) * | 2001-12-18 | 2004-05-03 | 엘지전자 주식회사 | 다층기판의 제조방법, 그 다층기판의 패드 형성방법 및 그다층기판을 이용한 반도체 패키지의 제조방법 |
US20050067694A1 (en) * | 2003-09-30 | 2005-03-31 | Pon Florence R. | Spacerless die stacking |
JP2005150647A (ja) * | 2003-11-20 | 2005-06-09 | Renesas Technology Corp | 半導体装置及びその製造方法 |
US8324725B2 (en) * | 2004-09-27 | 2012-12-04 | Formfactor, Inc. | Stacked die module |
DE102004049356B4 (de) * | 2004-10-08 | 2006-06-29 | Infineon Technologies Ag | Halbleitermodul mit einem internen Halbleiterchipstapel und Verfahren zur Herstellung desselben |
US20060267173A1 (en) * | 2005-05-26 | 2006-11-30 | Sandisk Corporation | Integrated circuit package having stacked integrated circuits and method therefor |
JP2007134486A (ja) * | 2005-11-10 | 2007-05-31 | Toshiba Corp | 積層型半導体装置及びその製造方法 |
KR100681263B1 (ko) * | 2006-01-17 | 2007-02-09 | 삼성전자주식회사 | 반도체 패키지 |
US8357566B2 (en) * | 2006-08-25 | 2013-01-22 | Micron Technology, Inc. | Pre-encapsulated lead frames for microelectronic device packages, and associated methods |
TWI358815B (en) * | 2006-09-12 | 2012-02-21 | Chipmos Technologies Inc | Stacked chip package structure with lead-frame hav |
JP4921937B2 (ja) * | 2006-11-24 | 2012-04-25 | 株式会社東芝 | 半導体集積回路 |
US8242607B2 (en) * | 2006-12-20 | 2012-08-14 | Stats Chippac Ltd. | Integrated circuit package system with offset stacked die and method of manufacture thereof |
US7875985B2 (en) * | 2006-12-22 | 2011-01-25 | Qimonda Ag | Memory device |
TWI327365B (en) * | 2007-01-19 | 2010-07-11 | Chipmos Technologies Inc | Zigzag-stacked chip package structure |
KR100874925B1 (ko) * | 2007-06-04 | 2008-12-19 | 삼성전자주식회사 | 반도체 패키지, 그 제조 방법, 이를 포함하는 카드 및 이를포함하는 시스템 |
KR100881198B1 (ko) * | 2007-06-20 | 2009-02-05 | 삼성전자주식회사 | 반도체 패키지 및 이를 실장한 반도체 패키지 모듈 |
KR100876889B1 (ko) * | 2007-06-26 | 2009-01-07 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이를 이용한 멀티칩 반도체 패키지 |
US7880309B2 (en) * | 2007-07-30 | 2011-02-01 | Qimonda Ag | Arrangement of stacked integrated circuit dice having a direct electrical connection |
US7781877B2 (en) * | 2007-08-07 | 2010-08-24 | Micron Technology, Inc. | Packaged integrated circuit devices with through-body conductive vias, and methods of making same |
JP4498403B2 (ja) * | 2007-09-28 | 2010-07-07 | 株式会社東芝 | 半導体装置と半導体記憶装置 |
US7952183B2 (en) * | 2007-10-29 | 2011-05-31 | Kabushiki Kaisha Toshiba | High capacity memory with stacked layers |
KR101554761B1 (ko) * | 2008-03-12 | 2015-09-21 | 인벤사스 코포레이션 | 지지부에 실장되는 전기적으로 인터커넥트된 다이 조립체 |
US7989941B2 (en) * | 2008-03-19 | 2011-08-02 | Stats Chippac Ltd. | Integrated circuit package system with support structure for die overhang |
US7687921B2 (en) * | 2008-05-05 | 2010-03-30 | Super Talent Electronics, Inc. | High density memory device manufacturing using isolated step pads |
US8030136B2 (en) * | 2008-05-15 | 2011-10-04 | Stats Chippac, Ltd. | Semiconductor device and method of conforming conductive vias between insulating layers in saw streets |
KR100997793B1 (ko) * | 2008-09-01 | 2010-12-02 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
JP2010245383A (ja) * | 2009-04-08 | 2010-10-28 | Elpida Memory Inc | 半導体装置および半導体装置の製造方法 |
JP2010245412A (ja) * | 2009-04-09 | 2010-10-28 | Renesas Electronics Corp | 半導体集積回路装置の製造方法 |
KR20100112446A (ko) * | 2009-04-09 | 2010-10-19 | 삼성전자주식회사 | 적층형 반도체 패키지 및 그 제조 방법 |
KR20100117977A (ko) * | 2009-04-27 | 2010-11-04 | 삼성전자주식회사 | 반도체 패키지 |
JP2010278318A (ja) * | 2009-05-29 | 2010-12-09 | Renesas Electronics Corp | 半導体装置 |
KR20100134354A (ko) * | 2009-06-15 | 2010-12-23 | 삼성전자주식회사 | 반도체 패키지, 스택 모듈, 카드 및 전자 시스템 |
KR101715426B1 (ko) * | 2009-06-26 | 2017-03-10 | 인벤사스 코포레이션 | 지그재그 구조로 적층된 다이용 전기 인터커넥트 |
US8183678B2 (en) * | 2009-08-04 | 2012-05-22 | Amkor Technology Korea, Inc. | Semiconductor device having an interposer |
KR101026488B1 (ko) * | 2009-08-10 | 2011-04-01 | 주식회사 하이닉스반도체 | 반도체 패키지 |
KR101563630B1 (ko) * | 2009-09-17 | 2015-10-28 | 에스케이하이닉스 주식회사 | 반도체 패키지 |
-
2009
- 2009-09-17 KR KR1020090088040A patent/KR101563630B1/ko not_active Expired - Fee Related
-
2010
- 2010-07-14 US US12/835,921 patent/US8390114B2/en not_active Expired - Fee Related
-
2013
- 2013-02-01 US US13/756,831 patent/US8492889B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080303131A1 (en) * | 2007-06-11 | 2008-12-11 | Vertical Circuits, Inc. | Electrically interconnected stacked die assemblies |
US20090065948A1 (en) | 2007-09-06 | 2009-03-12 | Micron Technology, Inc. | Package structure for multiple die stack |
KR100886717B1 (ko) * | 2007-10-16 | 2009-03-04 | 주식회사 하이닉스반도체 | 적층 반도체 패키지 및 이의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
KR20110030087A (ko) | 2011-03-23 |
US20110062581A1 (en) | 2011-03-17 |
US8492889B2 (en) | 2013-07-23 |
US20130147060A1 (en) | 2013-06-13 |
US8390114B2 (en) | 2013-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101563630B1 (ko) | 반도체 패키지 | |
KR101219484B1 (ko) | 반도체 칩 모듈 및 이를 갖는 반도체 패키지 및 패키지 모듈 | |
US8237291B2 (en) | Stack package | |
KR20110055985A (ko) | 스택 패키지 | |
KR20090088271A (ko) | 스택 패키지 | |
KR101219086B1 (ko) | 패키지 모듈 | |
KR20100020766A (ko) | 스택 패키지 | |
KR20110012675A (ko) | 반도체 패키지 및 이를 이용한 스택 패키지 | |
KR100743649B1 (ko) | 멀티 칩 패키지 | |
KR20080067891A (ko) | 멀티 칩 패키지 | |
KR20110105161A (ko) | 반도체 패키지 | |
KR20110050028A (ko) | 인쇄회로기판 및 이를 포함하는 반도체 패키지 | |
KR20090077580A (ko) | 멀티 칩 패키지 | |
KR20110107117A (ko) | 반도체 패키지 | |
KR20080020372A (ko) | 듀얼 다이 패키지 | |
KR20090108393A (ko) | 메모리 모듈 | |
KR20080074662A (ko) | 스택 패키지 | |
KR100826982B1 (ko) | 메모리 모듈 | |
KR20110123506A (ko) | 반도체 패키지용 기판 및 이를 포함하는 반도체 패키지 | |
KR20070088058A (ko) | 멀티 칩 패키지 | |
KR20120093580A (ko) | 반도체 패키지 | |
KR20090011969A (ko) | 스택 패키지 | |
KR20100051332A (ko) | 반도체 패키지 및 그의 제조방법 | |
KR20110001183A (ko) | 스택 패키지 | |
KR20090098075A (ko) | 스택 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20090917 |
|
PG1501 | Laying open of application | ||
A201 | Request for examination | ||
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20140424 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20090917 Comment text: Patent Application |
|
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20150528 Patent event code: PE09021S01D |
|
E701 | Decision to grant or registration of patent right | ||
PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20151020 |
|
GRNT | Written decision to grant | ||
PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20151021 Patent event code: PR07011E01D |
|
PR1002 | Payment of registration fee |
Payment date: 20151022 End annual number: 3 Start annual number: 1 |
|
PG1601 | Publication of registration | ||
LAPS | Lapse due to unpaid annual fee | ||
PC1903 | Unpaid annual fee |
Termination category: Default of registration fee Termination date: 20190801 |