KR101422350B1 - Method of mounting a collet to a pickup head - Google Patents

Abstract

A pick-up head having a collet with a plurality of suction holes for adsorbing the die, a pneumatic piping for providing a vacuum through the suction holes, the collet being mounted on the pick-up head, The pick-up head having a flat lower surface on which the collet is mounted, the pick-up head having a permanent magnet for holding the collet, wherein the pick-up head is mounted on the die- The method of mounting the collet on the pick-up head includes the steps of: providing a panel having a first region in which the collet is disposed; and mounting the collet on a lower surface of the pick-up head and between the die- Lowering the pick-up head to a predetermined position so as to generate an elastic displacement in the vertical direction , There is the collet by comparing the predetermined value and the displacement can include the step of determining that properly mounted to the pick-up head.

Description

Method for mounting a collet on a pick-up head

Embodiments of the invention relate to a method of mounting a collet. More particularly, the present invention relates to a method for mounting a new collet to a pick-up head after removing the collet from a pick-up head for replacement of a collet for picking up and transporting a die in a die bonding process.

Generally, in the die bonding process, a pick-up unit that picks up and transports the dies from a wafer to bond individualized dies to the substrate through a sawing process can be used. The pick-up unit may include a pick-up body to which the collet is coupled and a pick-up body to which the pick-up head is mounted, the collet for picking up the die using the vacuum. The pick-up unit may be mounted so as to be resiliently supported in a direction perpendicular to the die transferring portion for transferring the die.

The collet may be coupled to the pick-up head using a magnetic force, and may be made of a flexible material, such as synthetic rubber, in direct contact with the die. Therefore, the collet may be required to be replaced for reasons such as abrasion after a certain period of use.

When replacing the collet, the collet may be removed from the pick-up head and a new collet may be attached to the pick-up head. The pick-up replacement operation can be manually performed by the operator, and after the attachment of the new collet, visual inspection or the like can be performed to check whether the collet is normally attached. On the other hand, when the collet is not normally mounted, a vacuum for sucking the die may be leaked in the process of bonding the die picked up by the collet to the substrate, and the horizontal state of the collet may be poor, A uniform pressure may not be applied.

However, in the case of pick-up replacement which depends on manual operation as described above, it is possible to determine whether or not the collet is normally mounted according to the skill level of the operator, and a considerable time is required to perform the mounting, The overall operation rate of the die bonding equipment using the pick-up unit can be remarkably lowered.

Embodiments of the present invention are directed to a method of mounting a collet to a pick-up head in a die bonding process and to confirm a mounting state of the collet.

According to embodiments of the present invention, there is provided a method of manufacturing a semiconductor device, including a collet having a plurality of suction holes for sucking a die, a pickup head having a pneumatic piping for providing a vacuum through the suction holes, Wherein the pick-up head has a flat bottom surface on which the collet is mounted, and the pick-up head includes a pick-up body mounted on the die- And a permanent magnet. The method of mounting the collet on the pick-up head includes the steps of: providing a panel having a first region in which the collet is disposed and a second region having a flat top surface; Lowering the pick-up head to a predetermined position so as to generate a displacement in a vertical direction between the die transferring part and the pick-up body, comparing the displacement with a predetermined value, determining whether the collet is normally mounted on the pick- A step of bringing the lower surface of the collet mounted on the pick-up head into close contact with the upper surface of the second area; providing a vacuum inside the suction holes through the pneumatic piping; And measuring the degree of vacuum inside the suction holes to confirm the mounting state of the collet.

According to embodiments of the present invention, a guide member for guiding the collet to the normal mounting position may be provided at a lower edge portion of the pick-up head.

According to embodiments of the present invention, the first region may be provided with a collet receiving groove for receiving the collet.

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According to embodiments of the present invention, the second region may be provided with a chuck for supporting the die, and the lower surface of the collet mounted on the pickup head may be in close contact with the upper surface of the chuck.

According to embodiments of the present invention, the step of obtaining an image of the collet mounted on the pick-up head and comparing the obtained image with the reference image may be performed to confirm the mounting state of the collet.

According to embodiments of the present invention as described above, the vertical displacement amount of the pick-up head while mounting the collet positioned on the panel to the pick-up head is measured, and the measured displacement amount is compared with a preset value, You can check the mounting status.

Further, it is possible to additionally confirm the mounting state of the collet by bringing the collet into close contact with the chuck, then providing a vacuum to the collet and confirming the degree of vacuum inside the collet, further obtaining an image of the mounted collet, The mounting state of the collet can be finally confirmed.

As described above, the mounting of the collet is automatically performed, and the mounting state of the collet is automatically confirmed through various steps, so that the time required for mounting the collet can be significantly shortened as compared with the prior art, The problem of being mounted can be sufficiently improved.

1 is a flowchart illustrating a method of mounting a collet on a pick-up head according to an embodiment of the present invention.
2 is a schematic diagram for explaining a pickup unit and a die transferring unit used in the die bonding process.
3 is a schematic cross-sectional view for explaining the pickup unit shown in Fig.
4 is a schematic plan view for explaining a panel for removal and replacement of a collet;
Figs. 5 and 6 are schematic cross-sectional views showing a state where the collet is abnormally mounted on the pickup head. Fig.

Hereinafter, a head replacement apparatus and a die bonding system including the head replacement apparatus according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

1 is a flowchart illustrating a method of mounting a collet on a pick-up head according to an embodiment of the present invention. 2 is a schematic structural view for explaining a pick-up unit and a die feeder used in a die bonding process, and Fig. 3 is a schematic sectional view for explaining a pick-up unit shown in Fig.

Referring to FIGS. 1 to 3, a collet mounting method according to an embodiment of the present invention includes a pick-up unit 10 for picking up a die from a wafer in a die bonding process and transferring the die, Can be used to mount the collet (20) on the base (30).

The pick-up unit 10 may include a pick-up head 30 and a collet 20 attached to the pick-up head 30. The collet 20 may be mounted to the pick-up head 30 using a magnetic force. . In particular, the collet 20 may be provided with a plurality of suction holes 22 for sucking the die, and the pick-up head 30 may be provided with a pneumatic pipe 22 for supplying vacuum to the suction holes 22, (32) may be provided.

In addition, the pick-up unit 10 may include a pick-up body 40 on which the pick-up head 30 is mounted. In particular, the pick-up body 40 may be mounted on a die transfer part 50 capable of moving the pick-up unit 10 vertically and horizontally. As an example, although not shown in detail, the die transferring portion 50 may have a rectangular coordinate robot shape, and may be configured to pick up the die from the wafer and mount the pick-up unit 10 vertically And in the horizontal direction.

According to an embodiment of the present invention, although not shown in detail, the pick-up body 40 may be mounted so as to be resiliently supported in the die feeder 50 in the vertical direction. That is, the pick-up body 40 can be mounted on the die transferring part 50 by using an elastic member such as a spring so as to allow elastic movement in the vertical direction. This is to utilize the elastic force of the spring when pressing to press the die or to bond the die to the substrate, and to prevent breakage of the die.

The die transferring unit 50 may be provided with a sensor for measuring the amount of elastic displacement of the pick-up unit 10 in the vertical direction. An encoder 60 for measuring the amount of elastic displacement of the pick-up unit 10 in the vertical direction, that is, the relative positional change of the pick-up unit 10 with respect to the die transferring unit 50, is provided in the die transferring unit 50 . That is, although not shown, the elastic member may be disposed between the pick-up body 40 and the encoder 60 so that the pick-up body 40 is moved in a direction perpendicular to the die feed portion 50 Relative movement is possible. Particularly, after the pick-up unit 10 is lowered by the die feeder 50 and the collet 20 is brought into close contact with the die, the pick-up unit 10 is moved up relative to the die feeder 50 . The vertical elastic displacement amount of the pick-up unit 10 means a relative vertical displacement of the pick-up unit 10 with respect to the die transfer part 50, which can be measured by the encoder 60.

Referring to FIG. 3, the collet 20 may have a generally rectangular shape and may include a hard upper pad 24 and a soft lower pad 26. The suction holes 22 for sucking the die may be provided through the upper pad 24 and the lower pad 26 and communicate with the pneumatic piping 32 of the pickup head 30 .

For example, the pick-up head 30 may have a substantially rectangular shape so that the collet 20 can be mounted thereon, and may include a connection shaft for mounting to the pick-up body 40. The connection shaft may be a hollow shaft, and may function as the pneumatic piping (32). However, the shape of the pick-up head 30 and the collet 20 is not limited to a square, and various shapes such as a circle may be used in some cases, so that the scope of the present invention is not limited thereto.

On the other hand, the cicolette 20 can be mounted on the flat bottom surface of the pick-up head 30. In particular, the pickup head 30 and the collet 20 may be coupled to each other by a magnetic force. As an example, the pick-up head 30 may be provided with a permanent magnet 34 to provide the magnetic force, and the upper pad 24 of the collet 20 may be made of a magnetic material. On the other hand, guide members 36 for guiding the collet 20 to a normal mounting position may be disposed on a lower edge of the pick-up head 30.

When the collet 20 needs to be replaced due to abrasion of the collet 20 or the like, the collet 20 is removed from the pickup head 30 and then a new collet 20 is attached to the pickup head 30 Can be mounted.

4 is a schematic plan view for explaining a panel for removal and replacement of a collet;

Referring to FIG. 4, the removal of the collet 20 may include a panel 102 having an opening 104 through which the pick-up head 30 and the collet 20 pass vertically.

Engagement members 110 for removing the collet 20 from the pickup head 30 may be provided on both inner sides of the opening 104. The catching members 110 may allow downward and upward movement of the pick-up head 30, but allow the downward movement of the collet 20 but limit upward movement thereof. As a result, the engaging members 110 can separate the collet 20 from the pick-up head 30 while the pick-up head 30 is moved upward through the opening 104.

For example, the locking members 110 may be mounted on the inner side surfaces of the opening 104 so as to be downwardly rotated by a spring (not shown), for example, a coil spring or a torsion spring . The collet 20 may be rotated downward to allow the collet 20 to move downward. However, after the collet 20 is passed downward, the collet 20 is returned to its initial position by the torsion spring, 20 can be restricted. Alternatively, the engaging members 110 may be configured to be able to move forward and backward by a spring from the inner side of the opening 104.

Although not shown in detail, a recess may be provided on both sides of the pick-up head 30, and in the vertical movement of the pick-up head 30, Can be prevented.

According to one embodiment of the present invention, the panel 102 may have first areas in which a plurality of collets 20 are disposed for replacement of the collet 20. The first areas may include collet receiving grooves 106 in which the collets 20 are received. For example, the panel 102 may have a disk shape, and the opening 104 and the collet receiving grooves 106 may be disposed in the circumferential direction of the panel 102. Also, although not shown, the panel 102 may be connected to a driving unit (not shown), and the driving unit may be configured to rotate the panel 102 and to move the panel 102 in the vertical and horizontal directions .

In addition, the panel 102 may have a second region, and the second region may be provided with a chuck 70 for supporting the die. The chuck 70 may have a flat upper surface and may, for example, be disposed at a central portion of the panel 102 as shown.

Next, a collet mounting method according to an embodiment of the present invention will be described with reference to the accompanying drawings.

Referring to FIG. 1, a panel 102 having a first area in which a collet 20 for replacement is disposed, as shown in FIG. 4, is provided in step S100. In step S110, The pick-up head 30 may be lowered toward the upper surface of the collet 20 in order to mount the collet 20 on the lower surface of the collet 20.

For example, the drive may rotate the panel 102 such that one of the collets 20 is positioned below the pick-up head 30, and the die transfer unit 50 may rotate the pick- Can be lowered toward the upper surface of the collet (20). Alternatively, however, the die transfer portion 50 may move the pick-up head 30 to be positioned above one of the collets 20. [

Particularly, the die transferring part 50 is arranged such that the collet 20 is mounted on the lower surface of the pick-up head 30 and then displaced vertically between the die transferring part 50 and the pick- The pickup head 30 can be lowered to a predetermined position. At this time, the displacement can be measured by the encoder 60.

Then, in step S120, the measured displacement may be compared with a predetermined value to determine whether the collet 20 is properly mounted on the pick-up head 30. As an example, the comparison between the measured displacement and the predetermined value may be performed by a controller (not shown), and when the difference between the measured displacement and the predetermined value is out of a predetermined error range, (20) is abnormally mounted on the pick-up head (30).

Figs. 5 and 6 are schematic cross-sectional views showing a state where the collet is abnormally mounted on the pickup head. Fig.

5, when the collet 20 is mounted abnormally on the pick-up head 30, for example, as shown in FIG. 5, one side of the collet 20 is in contact with the guide member 36 , The measured displacement may be greater than the predetermined value, thereby determining that the collet 20 is abnormally mounted.

However, when the difference between the measured displacement and the predetermined value is within the error range, the collet 20 is not sufficiently adhered to the lower surface of the pickup head 30 as shown in FIG. 6, The controller may determine that the collet 20 is normally mounted on the pick-up head 30.

According to an embodiment of the present invention, in step S130, the lower surface of the collet 20 mounted on the pick-up head 30 is positioned on the upper surface of the second area, And may provide a vacuum in the suction holes 22 through the pneumatic piping 32 in step S140. Then, in step S150, the degree of vacuum of the inside of the pneumatic piping 32 and the suction holes 22 may be measured to check the mounting state of the collet 20.

The lower surface of the collet 20 is brought into close contact with the upper surface of the chuck 70 so that the suction holes 22 are formed on the upper surface of the chuck 70 And the degree of vacuum inside the pneumatic piping 32 and the suction holes 22 can be measured in the same or within an error range as a predetermined value.

However, when the collet 20 is mounted abnormally as shown in FIG. 6, a fine gap may be formed between the collet 20 and the pick-up head 30, The surface of the chuck 70 may not be sufficiently adhered to the upper surface of the chuck 70. As a result, a vacuum leak may occur between the chuck 70 and the collet 20 and the pick-up head 30, thereby confirming that the collet 20 is abnormally mounted.

Also, even when the collet 20 is not mounted on the pick-up head 30, the presence or absence of the collet 20 can be determined by measuring the degree of vacuum. That is, when the mounting step of the collet 20 is performed in a state where the collet is not provided in the collet receiving groove 106, the collet 20 is not provided on the upper surface of the chuck 70, It is possible to confirm that the collet 20 is not attached to the pick-up head 30 through the confirmation of the vacuum degree.

On the other hand, the degree of vacuum can be measured by mounting a vacuum sensor (not shown) on a vacuum line connected to the pneumatic piping 32.

When the collet 20 is brought into close contact with the upper surface of the chuck 70 to further check the mounting state of the collet 20 as described above, The collet 20 mounted abnormally may be sufficiently adhered to the lower surface of the pick-up head 30. That is, even when the collet 20 is mounted abnormally and there is a small gap between the pick-up head 30 and the collet 20, the collet 20 is moved by the vertical load to the pickup head 30 So that the mounting state of the collet 20 can be normally corrected.

Although not shown, an under-vision camera (not shown) for inspecting a die picked up by the pick-up unit 10 may be provided at one side of the panel 102.

According to an embodiment of the present invention, an image of the collet 20 mounted on the pick-up head 30 may be acquired in step S160, and in step S170, the image of the collet 20 may be compared with the reference image. The mounting state can be finally confirmed.

The image of the collet 20 may be obtained using the under vision camera, and the controller may finally check the mounting state of the collet 20 by comparing the obtained image with the reference image.

According to the embodiments of the present invention as described above, the vertical displacement amount of the pick-up head 30 is measured while the collet 20 positioned on the panel 102 is mounted on the pick-up head 30, The mounting state of the collet 20 can be confirmed by comparing the displacement amount with the preset value.

The mounting state of the collet 20 can be further confirmed by providing a vacuum to the collet 20 after the collet 20 is brought into close contact with the chuck 70 and checking the degree of vacuum in the collet 20 And additionally can acquire an image of the mounted collet 20 and finally confirm the mounting state of the collet 20 from the image.

The mounting of the collet 20 is automatically performed and the mounting state of the collet 20 is automatically confirmed through various steps as described above so that the time required for mounting the collet 20 The problem that the collet 20 is erroneously mounted can be sufficiently improved.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

10: pick-up unit 20: collet
30: pick-up head 40: pick-up body
50: die feed section 60: encoder
70: chuck 102: panel
104: opening 106: collet storage groove
110:

Claims (6)

A pick-up head having a collet with a plurality of suction holes for adsorbing the die, a pneumatic piping for providing a vacuum through the suction holes, the collet being mounted on the pick-up head, In a pick-up unit including a pick-up body mounted movably in a vertical direction to a die feed section,
Wherein the pick-up head has a flat lower surface on which the collet is mounted, and has a permanent magnet for gripping the collet,
The method of mounting the collet to the pick-
Providing a panel having a first region in which the collet is disposed and a second region having a flat top surface;
Lowering the pick-up head to a predetermined position such that the collet is mounted on a lower surface of the pick-up head and a displacement occurs in a vertical direction between the die feed portion and the pick-up body;
Comparing the displacement with a predetermined value to determine whether the collet is properly mounted on the pick-up head;
Attaching a lower surface of the collet mounted on the pickup head to the upper surface of the second area;
Providing a vacuum within the adsorption holes through the pneumatic piping; And
And measuring the degree of vacuum in the pneumatic piping and the suction holes to confirm the mounting state of the collet. The collet mounting method according to claim 1, wherein a guide member for guiding the collet to a normal mounting position is provided at a lower edge portion of the pick-up head. The collet mounting method according to claim 1, wherein the first region is provided with a collet receiving groove for receiving the collet. delete 2. The method of claim 1, wherein the second region is provided with a chuck for supporting the die, and the lower surface of the collet mounted on the pick-up head is in close contact with the upper surface of the chuck. The method of claim 1, further comprising: obtaining an image of a collet mounted on the pick-up head; And
Further comprising the step of comparing the obtained image with a reference image to confirm the mounting state of the collet.

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