KR101350145B1 - Apparatus for discriminating existence of substrate using lift pin and method for carrying in and testing substrate using the same - Google Patents

Abstract

The present invention (1) detects whether a displacement occurs in the lift height of the lift pin by the load of the substrate, and determines the presence or absence of the substrate according to the detection result, it is possible to conveniently determine the presence or absence of the substrate (2) Accordingly, it is possible to prevent the substrate from being loaded in the state in which the substrate is present. (3) If the displacement does not occur in all of the lift pins even when the substrate is loaded, part of the substrate may be broken or the loading of the substrate may be incorrect. Since it is not applied to some lift pins, the present invention relates to a substrate presence discrimination apparatus using a lift pin capable of inspecting whether or not the state of the board loaded therein is good, and a board loading method and inspection method using the same.

Process Chamber, Glass, Substrate, Lift Pin, Displacement, Stage, Flat Panel Display

Description

Apparatus for discriminating existence of substrate using lift pin and method for carrying in and testing substrate using the same}

1A and 1B are diagrams illustrating a general process chamber, in which FIG. 1A illustrates a state in which a lift pin is raised and FIG. 1B illustrates a state in which a lift pin is lowered.

2A and 2B are plan views illustrating a problem of the prior art, and FIG. 2A shows a state in which a substrate is broken, and FIG. 2B shows a state in which loading of a substrate is wrong.

3 is a block diagram illustrating a process chamber to which a substrate presence determining apparatus using a lift pin according to a first embodiment of the present invention is applied.

4 is an enlarged view of a portion A in FIG. 3, (A) shows a state in which no displacement is generated in the lift pin, and (B) shows a state in which displacement is generated in the lift pin.

FIG. 5 is a cross-sectional view of an essential part of a substrate presence determining apparatus using a lift pin according to a second exemplary embodiment of the present invention.

6A to 6D are cross-sectional views illustrating examples of displacement sensing means applicable to the first embodiment of the present invention.

7A to 7D are cross-sectional views illustrating examples of displacement sensing means applicable to the second embodiment of the present invention.

8 is a flowchart illustrating a method of loading a substrate and inspecting a state of the loaded substrate by using a substrate presence determining apparatus according to the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS

53: lower electrode assembly (stage) 54A, 54B: lift pin

54d: lower pin 54u: upper pin

56: pin plate of the pin lifting means

61A, 61B, 62A, 62B, 63A, 63B: Displacement sensing means

64: determination means (control means) 65: notification means

E1, E2: elastic member F1, F2: light emitting sensor

P1, P2: Reflector R1, R2: Receiver

T1, T2: signal transmission hole

According to the present invention, it is possible to determine whether a substrate exists in a stage of a semiconductor or flat panel display device manufacturing apparatus using a lift pin used for loading / unloading of a substrate, and the substrate is loaded in the state where the substrate is present. The present invention relates to a substrate presence determining apparatus using a lift pin, and a substrate loading method and an inspection method using the same, which can prevent the damage of the loaded substrate or the loading failure.

In general, a semiconductor or flat panel display device manufacturing apparatus includes a stage (mounting table) on which a semiconductor wafer, a glass substrate, or the like (hereinafter referred to as a substrate) is provided, and the stage is used for loading / unloading a substrate thereon. Lift pins are installed.

The stage and lift pins are applied in a similar manner to both semiconductor and flat panel display device manufacturing apparatuses. Hereinafter, the stages and lift pins and related components are applied to the flat panel display device manufacturing apparatus. Let's explain.

Background Art [0002] Flat panel displays, which are widely used in recent years, include liquid crystal displays, plasma display panels, and organic light emitting diodes. In addition, a vacuum processing apparatus is mainly used as a manufacturing apparatus for manufacturing such a flat panel display device, which is generally a process chamber, a load lock chamber, or a transfer chamber. It is composed.

Here, the process chamber serves to treat the surface of the substrate by etching (etching) the substrate by using plasma or thermal energy in a vacuum atmosphere. The load lock chamber alternates between atmospheric pressure and vacuum to receive and store unprocessed substrates from the outside, or to carry out the processed substrates to the outside. In addition, the transfer chamber is equipped with a transfer robot for transferring the substrates between the chambers, which transfers the substrate to be processed from the above load lock chamber to the process chamber or transfers the processed substrate from the process chamber to the load lock chamber. .

1A and 1B are cross-sectional views schematically illustrating a configuration of a process chamber among the chambers as described.

As shown, the process chamber is provided with a chamber 11 provided with a gate slit 11g for carrying in or out of a substrate on one side wall, and an upper region in the chamber 11 to treat the surface of the substrate. An upper electrode assembly 12 having a shower head for spraying a process gas, a lower electrode assembly 13 installed in the chamber 11 so as to be positioned below the upper electrode assembly 12, and the lower electrode assembly And a plurality of lift pins 14 provided so as to be able to move up and down at 13, and a pin lift device 15 for elevating the plurality of lift pins 14 simultaneously.

Here, the gate slit 11g of the chamber 11 is opened and closed by the gate valve 11v. In addition, the lower electrode assembly 13 has a substrate on its upper surface, which is why the lower electrode assembly 13 is also called a stage. On the other hand, the pin elevating device 15 is a pin plate 16, the lower end of each lift pin 14 is fixed, the ball screw 17 and the motor (elevating the pin plate 16 by a ball screw drive method) 18).

The process chamber configured as described above operates the transfer robot to bring the substrate waiting in the load lock chamber into the chamber 11 and to position the lower electrode assembly 13 (hereinafter referred to as a "stage"). The lift pin 14 is lifted by the pin elevating device 15 as in 1a. When the lift pin 14 is lifted up, the transport robot moves out of the chamber 11 while laying the substrate on the lift pin 14, and the lift pin 14 is lowered. In this case, as shown in FIG. 1B, when the lift pin 14 is completely inserted into the stage and does not protrude, the substrate is placed on the stage.

On the other hand, when the surface treatment of the substrate is completed, the lift pin 14 is raised. Accordingly, the substrate is lifted from the stage, and the transport robot enters the chamber 11 so that its arm is positioned below the substrate. After the lift pin 14 is lowered, the substrate is placed on the arm of the transport robot, the transport robot moves out of the chamber (11). At this time, the substrate is carried out.

However, the process chamber as described above, when the substrate to be processed into the chamber (11), even if the substrate has already been carried out, even if it can not confirm or check the cumbersome process proceeds as it is, the substrate to the raised lift pin (14) In the process of laying down, the arm of the robot and the existing substrate interfere with each other, there is a problem that the existing substrate is damaged. That is, the process chamber was a structure that can not look into the interior of the chamber (11), and in some cases the window is provided to look inside, but because the interior is relatively dark, the existence of the substrate accurately confirmed It was difficult to do. Of course, it was also cumbersome to look inside each time to check the existence of the substrate, and therefore the import process was carried out without confirmation.

On the other hand, when bringing in the substrate, as shown in Figure 2a may be carried out of the damaged substrate, such as part of the falling off, or as shown in Figure 2b depending on the state of the transport robot may not be loaded correctly. In addition, as described above, once the import is completed, it is impossible to confirm or cannot accurately check, and there is a problem in that it cannot extract because there is no means or measures for detecting the same.

Therefore, when the damaged substrate is brought in, unnecessary work is performed, and when the loading of the substrate is poor, the surface treatment of the substrate is not uniformly performed.

The present invention has been made to solve the problems of the prior art described above, the object is to cause the displacement in the lift height of the lift pin according to the presence of the substrate, and to detect whether the displacement occurs in the lift pin, The present invention provides a substrate presence determining apparatus using a lift pin that allows a user to quickly and conveniently check the existence of a substrate by determining whether a substrate exists according to the detection result.

Another object of the present invention is to use the above-mentioned substrate presence discrimination apparatus, and to carry in the substrate to be processed only when the substrate does not exist, so that the substrate is brought back even if the substrate already exists, and the existing substrate and the transfer robot The present invention provides a substrate loading method that can prevent problems such as damage caused by interference.

Still another object of the present invention is to use the above-mentioned substrate presence discrimination apparatus, and if a displacement is generated in all of the lift pins and no displacement occurs in any of the lift pins, a part of the substrate is broken, The present invention provides a substrate inspection method that can easily inspect a state of a loaded substrate by judging that the loading of the substrate is incorrect and the load of the substrate is not applied to some lift pins.

Substrate presence determination apparatus using a lift pin according to the present invention for realizing the technical problem as described above is installed so as to be able to lift and lift in the pin hole of the stage on which the substrate is placed to raise or lower the substrate placed on the stage, Accordingly, a plurality of lift pins having a structure in which displacement is generated at an elevation height, displacement detection means for detecting whether a displacement occurs when the lift pin is raised, and whether a substrate exists by receiving a detection result from the displacement detection means. Characterized in that it comprises a determination means for determining whether or not.

Here, the lift pin may be provided with an elastic member between the support structure for supporting it.

In this case, the displacement sensing means may be a sensor installed on the line of action so that the elastic member is pressed to operate under this force when the distance between the lift pin and the support structure is narrowed. Or a light emitting sensor and a light receiving sensor that receives a signal from the light emitting sensor, and any one of the light emitting sensor and the light receiving sensor is installed on the lift pin and the other when the displacement occurs on the lift pin. Can be positioned to face. Or a light emitting sensor and a light receiving sensor receiving a signal from the light emitting sensor, wherein the light emitting sensor and the light receiving sensor are positioned to face each other with the lift pins interposed therebetween, and the lift pins receiving the light when a displacement occurs. A signal transmission hole may be provided so that a sensor receives a signal from the light emitting sensor. Or a reflector plate, a light emitting sensor for outputting a signal to the reflecting plate, and a light receiving sensor for receiving a signal reflected from the light emitting sensor. The reflecting plate is installed on the lift pin, and the light emitting sensor and the light receiving sensor are the lifter. When a displacement occurs in the pin, the signal may be positioned to output the signal to the reflector and receive the reflected signal accordingly.

Such displacement detection means may detect the displacement of all the lift pins, respectively.

Meanwhile, the lift pin may be divided into an upper pin and a lower pin instead of the above structure, and an elastic member may be installed therebetween.

In this case, the displacement detecting means may be a sensor installed on the working line to be operated by this force when the elastic member is compressed to narrow the gap between the upper and lower pins. Or a light emitting sensor and a light receiving sensor receiving a signal from the light emitting sensor, wherein either one of the light emitting sensor and the light receiving sensor is installed on the upper pin of the lift pin and the other is the displacement of the lift pin. It may be positioned to face either. Or a light emitting sensor and a light receiving sensor receiving a signal from the light emitting sensor, wherein the light emitting sensor and the light receiving sensor are positioned to face each other with the upper pin of the lift pin interposed therebetween, and the lift pin has a displacement. When the light receiving sensor receives a signal from the light emitting sensor may be provided with a signal transmission hole in the upper pin. Or a reflector, a light emitting sensor for outputting a signal to the reflecting plate, and a light receiving sensor for receiving a signal reflected from the light emitting sensor and receiving the light. The reflecting plate is installed on an upper pin of the lift pin, and the light emitting sensor and the light receiving sensor. May be positioned so that a signal is output to the reflector when the displacement occurs in the lift pin and thus receives the reflected signal.

Such displacement detection means may detect the displacement of all the lift pins, respectively.

On the other hand, the determining means is a control means, the apparatus for determining whether the substrate using the lift pin according to the present invention may further include a notification means for informing the presence of the substrate in accordance with the control of the control means.

A substrate loading method using a substrate presence determining device having the above-described configuration includes the steps of determining whether a substrate exists on the stage using the substrate presence determining device, and a substrate to be processed when it is determined that there is no substrate on the stage. It characterized in that it comprises a step of carrying to the stage.

Such a substrate loading method may further include informing when it is determined that there is a substrate on the stage.

The substrate loading method using the substrate presence determining device having the above-described configuration is applicable to the case where the displacement sensing means senses the displacement of all the lift pins by using the substrate presence determining device. Detecting whether the displacement of all the lift pins caused by the imported substrate at the time, and whether or not the damage of the substrate and the loading of the substrate is bad according to the detection result of whether displacement has occurred in all of the lift pins by the imported substrate Characterized in that it comprises the step of determining.

The substrate inspection method may further include a step of notifying when the substrate is damaged or when it is determined that the loading of the substrate is poor.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. For reference, the embodiment of the present invention will be described by taking an example applied to the process chamber of the flat panel display device manufacturing apparatus.

3 is a block diagram illustrating a process chamber to which a substrate presence determining apparatus using a lift pin according to a first embodiment of the present invention is applied, and FIG. 4 is an enlarged view of portion A of FIG. 3.

As shown in FIGS. 3 and 4, a process chamber to which a substrate presence determining apparatus using a lift pin according to a first embodiment of the present invention is applied may include: a chamber 51 providing a vacuum space for surface treatment of a substrate; The upper electrode assembly 52 and the lower electrode assembly 53 respectively installed in the upper region and the lower region of the chamber 51 so as to face each other, and the lower electrode assembly of the upper electrode assembly 52 and the lower electrode assembly 53 ( A plurality of lift pins 54A provided to be capable of lifting vertically to 53; a pin lifter 55 for simultaneously lifting the plurality of lift pins 54A; and a lift pin lifted by the driving force of the pin lifter 55. A substrate presence discrimination apparatus 60 or the like for determining whether or not the substrate has already been loaded into the chamber 51 by using 54A.

The chamber 51 is provided with a gate slit 51g for carrying in or carrying out a substrate on one sidewall thereof. The gate slit 51g is opened and closed by the gate valve 51v.

The upper electrode assembly 52 of the upper electrode assembly 52 and the lower electrode assembly 53 is provided with a shower head for spraying a process gas required for surface treatment of the substrate.

The lower electrode assembly 53 is a mounting table on which a substrate loaded on its upper surface is placed. For this reason, the lower electrode assembly 53 is also called a stage. In the lower electrode assembly 53, pin holes 53h for lifting and lowering of each lift pin 54A are formed up and down.

Here, the pin holes 53h are disposed at regular intervals along the edges of the lower electrode assembly 53 (hereinafter, referred to as 'stage'). Of course, the formation position and the number of the pin holes 53h are determined by the arrangement structure, the number, and the like of the lift pins 54A, and can be freely changed.

The pin elevating device 55 is composed of a pin plate 56 on which the lower end of each lift pin 54A is firmly fixed, and driving means for elevating the pin plate 56 by a ball screw driving method.

The pin plate 56 here is a support structure for supporting the lift pin 54A. The drive means is composed of a linear ball screw 57 coupled to the pin plate 56 and a motor 58 for forward / reverse rotation of the ball screw 57.

On the other hand, the plurality of lift pins (54A) is configured to have a structure in which the displacement is different when the height is raised when the substrate is placed on the stage and when not, specifically, the main body and the lift pin itself, It consists of an elastic member E1 which elastically supports this main body.

Here, the elastic member E1 is a coil spring installed at the lower end of the lift pin 54A main body so as to be positioned between the lift pin 54A main body and the pin plate 56, and the coil spring also supports the lift pin 54A. It can be said that the supporting structure.

As described above, when the lift pin 54A operates and raises the pin elevating device 55 while the substrate is placed on the stage, the elastic member E1 is compressed by the load of the substrate and the substrate is not placed on the stage. Ascending height is lower than when rising from.

Of course, for this purpose, the elastic member E1 may be compressed by the load of the substrate, but may have a strength that is not compressed only by the load of the main body of the lift pin 54A in the absence of the substrate. As the elastic member E1, rubber or sponge may be used instead of the coil spring.

The displacement structure of the lift pin 54A is shown in FIG. 4 (A) shows a state in which the lift pin 54A is raised while the substrate is not placed on the stage, where H1 represents the lift pin 54A rising height at this time. 4B, on the contrary, shows a state in which the lift pin 54A is raised in a state where the substrate is placed on the stage, where H2 represents the lift height of the lift pin 54A at this time.

In particular, the substrate presence determining device 60 for determining whether the substrate is brought into the chamber 51 and is present on the stage is composed of displacement detection means 61A, determination means 64, notification means 65 and the like. .

First, the displacement detecting means 61A detects whether the elastic member E1 is compressed and the displacement is generated at the rising height when the lift pin 54A is fully raised so as to protrude upward from the stage by a constant height. It is configured to immediately output this detection result (detection signal) to the judging means 64 electrically connected thereto when it is detected to have been detected.

The displacement detecting means 61A detects displacements of all of the lift pins 54A, respectively, and the elastic member E1 is compressed so that the distance between the lift pin 54A body and the pin plate 56 is narrowed. In this way, the sensor is installed on the action line of the force so as to be operated under the force of narrowing the gap, and when the force is received, the sensor is operated due to this and outputs a detection signal to the determination means 64.

The sensor as described above is specifically installed in the pin plate 56 in a state of being inserted into the coil spring of the elastic member E1 so as to be located between the main body of the lift pin 54A and the pin plate 56. Of course, there is no reason why it must be installed like this, it will be enough to be located on the line of action described above to receive the action force. As an example of this, an operation arm is provided at a lower portion of the main body of the lift pin 54A in the vertical direction of the lifting direction, and a sensor is attached to the pin plate 56 so as to be positioned between the operation arm and the pin plate 56. There is a way to install it.

For reference, one having the same function as the above sensor is a push switch configured to be mechanically connected when pressed (by the lift pin main body). Of course, an electrical contact sensor or an electric strain gage configured to electrically detect the presence or absence of contact (with the lift pin body) may also be applied.

Next, the determination means 64 is to determine the existence of the substrate by receiving the detection signal from the displacement detection means 61A, that is, the sensor, which is a control means for controlling the operation (operation) of the flat panel display device manufacturing apparatus.

When the control means determines that the substrate is present, the control means outputs a corresponding control signal to operate the notification means 65 electrically connected thereto. On the contrary, when it is determined that the substrate does not exist, the control signal is output and the operation of the flat panel display device manufacturing apparatus is controlled so that the substrate to be processed can be loaded.

Then, the notification means 65 serves to notify the user when the substrate is present according to the control of the control means. As the notification means 65, a visual warning light 65w or a monitor may be applied, or an audible speaker 65s or a buzzer may be applied. Of course, both visual and auditory alerts can be applied together.

On the other hand, such that the presence of the substrate is provided with a warning light (65w) as many as the number of sensors (which is also the number of lift pins), if any sensor outputs a detection signal, the control means corresponding to the warning light (65w It can be implemented by lighting only). As mentioned with this notification method, the sensor, which is the displacement sensing means 61A, individually detects the displacement of each lift pin 54A, if the displacement is not generated on all of the lift pins 54A even when the substrate is loaded. Since a part of the substrate is broken or the substrate is loaded incorrectly so that the load of the substrate is not applied to some lift pins 54A, it is possible to check whether the state of the loaded substrate is good.

Reference numeral 59, which is not described above, is a bellows that seals the lift pin 54A exposed between the bottom surface of the chamber 51 and the pin plate 56 in order to maintain the inside of the chamber 10 in a vacuum.

A second embodiment of the present invention having a configuration similar to that of the first embodiment of the present invention will be described as follows. Herein, the second embodiment of the present invention will be described with respect to different parts as compared with the first embodiment, and the corresponding parts are also shown in the drawings.

FIG. 5 is a cross-sectional view of an essential part of a substrate presence determining apparatus using a lift pin according to a second exemplary embodiment of the present invention.

As shown in FIG. 5, the second embodiment of the present invention has the configuration and displacement sensing means of the lift pins 54B with respect to all other configurations and their actions as compared with the first embodiment of the present invention. Only the installation structure of 61B is slightly different.

Referring to this, in the second embodiment, each lift pin 54B is an upper pin 54u positioned on the upper side, a lower pin positioned below the upper pin 54u and having a lower end fixed to the pin plate 56. 54d, an elastic member E2 installed on the upper pin 54u or the lower pin 54d so as to be positioned between the lower pin 54d and the upper pin 54u to elastically support the upper pin 54u. It consists of. At this time, the elastic member (E2) is a coil spring (rubber, sponge, etc. can also be applied), similar to the elastic member (E1) of the first embodiment, the compression is performed by the load of the substrate, but only by the load of the upper pin (54u) Has uncompressed strength.

In this way, the lift pin 54B divided into the upper pin 54u and the lower pin 54d, and the elastic member E2 is provided between the lift pins 54B and the lift height when the substrate is placed on the stage and vice versa. In comparison, in the case of the lower pin 54d, there is no difference, but in the case of the upper pin 54u, the displacement occurs.

On the other hand, the displacement detecting means 61B has the same function as that of the first embodiment, which is inserted into the coil spring which is the elastic member E2 so as to be positioned between the upper pin 54u and the lower pin 54d, respectively. The upper pin 54u or the lower pin 54d is provided.

If the lift pin 54B is configured such that even if the lift pin 54B is raised, the divided portions of the upper pin 54u and the lower pin 54d are always located outside the chamber 51, this displacement As described in the first embodiment, the sensing means 61B can also be provided between the pin plate 56 and the operation arm provided on the lower pin 54d.

Next, various modifications of the displacement sensing means applicable to the structure of the lift pin as in the first embodiment of the present invention and related matters will be described with reference to FIGS. 6A to 6D.

According to FIG. 6A, the displacement detecting unit 62A may be configured of the light emitting sensor F1 and the light receiving sensor R1.

Here, one of the light emitting sensor F1 and the light receiving sensor R1 is provided in the main body of the lift pin 54A, and the other is installed in the pin hole 53h. At this time, the light receiving sensor R1 receives a signal output from the light emitting sensor F1. For this purpose, the light emitting sensor F1 and the light receiving sensor R1 are positioned to face each other when the lift pin 54A is raised. do.

For reference, when the light emitting sensor F1 and the light receiving sensor R1 are installed in this manner, the light emitting sensor F1 and the light receiving sensor R1 signal each other regardless of the presence or absence of the substrate during the lifting process of the lift pin 54A. Will be exchanged. Therefore, the light emitting sensor F1 and the light receiving sensor R1 communicate with each other only when the lift pin 54A is raised. Alternatively, the above control means may be configured such that determination is made only when the signal is received from the displacement detecting means 62A for a predetermined time or more.

6B shows that either one of the light emitting sensor F1 and the light receiving sensor R1 of FIG. 6A may be positioned at a predetermined height upward from the pin plate 56 rather than the pin hole 53h.

Here, reference numeral B denotes a bracket for maintaining the position of the sensor (light emitting sensor or light receiving sensor) at a spaced distance from the pin plate 56.

FIG. 6C shows that the light emitting sensor F1 and the light receiving sensor R1 described above may be positioned to face each other in front of each other with the lift pin 54A interposed therebetween.

Here, both the light emitting sensor F1 and the light receiving sensor R1 are installed in the pin holes 53h, respectively, and the lift pins F may allow the light emitting sensor F1 and the light receiving sensor R1 to exchange signals with each other. 54A) is provided with a signal transmission hole T1. At this time, the signal transmission hole T1 is positioned so that when the lift pin 54A is raised, the signal output from the light emitting sensor F1 passes through it and is input to the light receiving sensor R1.

According to FIG. 6D, the displacement detecting means 63A may be configured by the light emitting sensor F1, the light receiving sensor R1, and the reflecting plate P1.

Here, the light emitting sensor F1 outputs the signal to the reflecting plate P1, and the light receiving sensor R1 receives the signal reflected by the reflecting plate P1, which has the same function as that described with reference to FIGS. 6A to 6C. Sensor.

On the other hand, the reflecting plate P1 is provided in the lift pin 54A. The light emitting sensor F1 and the light receiving sensor R1 are both installed in the pin holes 53h, and the light emitting sensor F1 has a signal when the displacement occurs in the lift pin 54A. The light receiving sensor R1 is positioned to receive a signal output from the light emitting sensor F1 and reflected by the reflecting plate P1 when a displacement occurs in the lift pin 54A.

Next, various modifications of the displacement sensing means applicable to the structure of the lift pin as in the second embodiment of the present invention and related matters will be described with reference to FIGS. 7A to 7D. For reference, the light emitting sensor F2, the light receiving sensor R2, and the reflecting plate P2 described later all applied the same functions as those of FIGS. 6A to 6D.

According to FIG. 7A, the displacement detecting unit 62B may be configured of a light emitting sensor F2 and a light receiving sensor R2, and either one of the light emitting sensor F2 and the light receiving sensor R2 may be a lift pin 54B. ), And the other is installed in the pin hole 53h. In addition, the light emitting sensor F2 and the light receiving sensor R2 are positioned to face each other when the lift pin 54B is raised.

FIG. 7B shows that any one of the above light emitting sensor F2 and light receiving sensor R2 may be positioned at a predetermined height upward from the pin plate 56 rather than the pin hole 53h. Code B is a bracket.

7C shows that the above light emitting sensor F2 and the light receiving sensor R2 may be positioned to face each other in front of each other with the lift pin 54B interposed therebetween. It is provided in the pin hole 53h, respectively.

On the other hand, when the lift pin 54B is raised, a signal transmission hole T2 is provided in the upper pin 54u so that the light emitting sensor F2 and the light receiving sensor R2 can exchange signals with each other.

According to FIG. 7D, the displacement detecting means 73B is composed of a light emitting sensor F2, a light receiving sensor R2, and a reflecting plate P2.

Here, the reflecting plate P2 is provided in the upper pin 54u. The light emitting sensor F2 and the light receiving sensor R2 are respectively installed in the pin holes 53h. At this time, the light emitting sensor F2 is positioned so that the signal is output to the reflector plate P2 when the displacement occurs in the lift pin 54B, and the light receiving sensor R2 is reflected when the displacement occurs in the lift pin 54B. It is positioned to receive a signal.

8 is a flowchart illustrating a method of loading a substrate and inspecting a state of the loaded substrate by using a substrate presence determining apparatus according to the present invention.

Hereinafter, referring to FIG. 8, a substrate loading method and a substrate inspection method using the substrate presence determination device will be described by describing a substrate processing process by the process chamber to which the substrate presence determination device as described above is applied. For reference, the substrate presence determining device of the first embodiment (which includes various modifications of the deformation detection means) or the substrate presence determining device of the second embodiment (which also includes various modifications of the deformation detection means) Since both are used similarly to the substrate loading method and the inspection method will be described according to the first embodiment shown in Figures 3 and 4 applied.

The lift pin 54A is normally lowered and remains inserted into the pin hole 53h so that its upper end does not protrude from the stage. In this state, when the transfer robot is driven and the substrate (substrate to be processed) waiting in the load lock chamber is to be loaded into the chamber 51 and loaded on the stage, the plurality of lift pins are simultaneously driven by the driving force of the pin elevating device 55. After ascension, it descends to its original position (see S1).

In this process, when the lift pin 54A is lifted, the sensor, which is the displacement detecting means 61A, has a substrate placed on the lift pin 54A, and the elastic member E1 is compressed and lifted on the lift pin 54A by the load of the substrate. The controller detects whether a displacement has occurred and the control means receives a sensing result from the sensor (see S2). At this time, the control means determines that there is a substrate when a sensing signal is input from any sensor (see S3). If no sensing signal is input from both sensors, it is determined that there is no substrate (see S4).

If it is determined that the substrate is present, as in the next step S3, the control means outputs a control signal to activate the notification means 65 (see S13). The user can then recognize the presence of the substrate and further follow up Can be taken. Of course, in this case, it may be configured so that the carrying-in itself of the substrate is not made by the control means.

On the other hand, as in step S4, when it is determined that there is no substrate, the transfer robot is driven to load the substrate to be processed and positioned above the stage (see S5), and the lift pin 54A is lifted up to carry in from the transfer robot. After receiving the substrate, it is lowered to its original position (see S6). Of course, the transport robot moves out of the chamber 51 when the lift pin 54A receives the substrate.

Here, the sensor also detects whether a displacement has occurred in the lift pin 54A, and the control means receives a sensing result from the sensor (see S7). It is determined that the corresponding sensor side of the substrate is damaged (see FIG. 2A) or the substrate is loaded poorly (see FIG. 2B). (See S8.) On the contrary, if a sensing signal is input from both sensors, there is no damage to the substrate. Of course, it is determined that the loading of the substrate is in a good state (see S9).

Then, as in step S8, if it is determined that the state of the substrate is bad, go to step S13 to notify the user, and activates the notification means (65). Therefore, the user can recognize the state of the substrate and can take appropriate measures. Of course, in such a case, it is preferable to configure the control unit so that subsequent processes (steps) do not proceed.

On the other hand, as in step S9, if it is determined that the state of the substrate is normal, the surface treatment of the substrate proceeds. The process proceeds in the order of entering 51, descending lift pin 54A, and moving out of the carrier robot chamber 51. (See S11.)

If you want to process another substrate, go to step S5. Otherwise, the process is terminated (see S12).

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, Various modifications can be made.

As described above, the present invention detects whether a displacement occurs in the lift pin by the displacement detecting means and the judging means, and determines whether or not the substrate exists according to the detection result. There is an advantage that can be determined.

In addition, when the determination means determines that the substrate does not exist, the substrate is carried in, so that the substrate to be processed can be prevented from being loaded in the state where the substrate already exists. There is an advantage that can be prevented from being damaged by interference with the robot.

In addition, when detecting whether a lift pin has been displaced, all of the lift pins are individually detected, and if the detection result is not input from any one or more lift pins, a part of the board may be broken or the loading may be incorrect, and the board may not be loaded. Since no load is applied, there is an advantage in that the state (goodness or failure) of the substrate can be inspected.

Claims (18)

A plurality of lift pins which are installed to be liftable in a pin hole of a stage on which the substrate is placed, to lift or put down the substrate placed on the stage, and have a structure in which displacement is generated at a rising height depending on the presence or absence of the substrate; Displacement sensing means for sensing whether a displacement occurs when the lift pin is raised; Determination means for determining whether the substrate exists by receiving the detection result from the displacement detection means, The displacement detecting means includes a light emitting sensor; It consists of a light receiving sensor that receives a signal from the light emitting sensor, The light emitting sensor and the light receiving sensor are positioned to face each other with the lift pins in between, The lift pin is a substrate presence determination device using a lift pin, characterized in that the signal transmission hole is provided so that the light receiving sensor receives the signal of the light emitting sensor when a displacement occurs. The method according to claim 1, The lift pin is a substrate presence determination device using a lift pin, characterized in that the elastic member is installed between the support structure for supporting it. delete delete delete delete The method according to claim 1, And the displacement detecting means detects displacements of all the lift pins, respectively. delete delete delete A plurality of lift pins which are installed to be liftable in a pin hole of a stage on which the substrate is placed, to lift or put down the substrate placed on the stage, and have a structure in which displacement is generated at a rising height depending on the presence or absence of the substrate; Displacement sensing means for sensing whether a displacement occurs when the lift pin is raised; Determination means for determining whether the substrate exists by receiving the detection result from the displacement detection means, The lift pin is divided into an upper pin and a lower pin and an elastic member is installed therebetween. The displacement detecting means includes a light emitting sensor; It consists of a light receiving sensor that receives a signal from the light emitting sensor, The light emitting sensor and the light receiving sensor are positioned to face each other with the upper pin of the lift pin interposed therebetween, And the lift pin has a signal transmission hole provided in the upper pin so that the light receiving sensor receives the signal of the light emitting sensor when a displacement occurs. delete The method of claim 11, And the displacement detecting means detects displacements of all the lift pins, respectively. The method according to claim 1 or 11, The determining means is a control means, The substrate presence determining apparatus further comprises a notification means for informing the presence of the substrate according to the control of the control means. Determining whether a substrate exists on the stage by using the substrate presence determining apparatus according to claim 1 or 11; And carrying a substrate to be treated to a stage when it is determined that there is no substrate on the stage. 16. The method of claim 15, The substrate loading method further comprises a step of notifying when it is determined that there is a substrate on the stage. Using the board | substrate presence discrimination apparatus of Claim 7 or 13, Detecting whether displacement has occurred in both lift pins by the loaded substrate when receiving the loaded substrate; And determining whether the substrate is broken or the loading of the substrate is bad according to a detection result of whether displacement is caused in all of the lift pins by the loaded substrate. 18. The method of claim 17, The substrate inspection method further comprises the step of notifying when it is determined that the substrate is damaged or the loading of the substrate is poor.

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