KR101330157B1 - Inside polisher of pipe line and polishing apparatus with the same - Google Patents

Abstract

The present invention discloses an internal diameter grinder capable of polishing a fitting having a curved surface in addition to a general pipe and a polishing device that automates the polishing using the internal grinder, wherein the inner grinder has a flexible material and forms a rod shape. ; A plurality of polishing rings which are uniformly spaced on the rod, each of which includes a ring-shaped body having a cushion and a polishing surface attached to an outer diameter of the ring-shaped body, and coupled with the rod passing through the ring-shaped body to receive rotational force; ; And a head portion bearing coupled to an end of the rod to guide movement of the rod and the polishing rings along an inner diameter of a part to be polished without receiving rotational force of the rod.

Description

Inside polisher of pipe line and polishing apparatus with the same

The present invention relates to an internal diameter grinder of a pipe and an internal diameter polishing device using the same, and more particularly, to an internal diameter grinder capable of grinding fittings having a curved surface in addition to a general pipe, and to an automatic grinding device using the internal grinder. It is about.

In general, the pipe refers to a pipe or tube-type pipe member, and includes fittings for connecting the straight pipe and the straight pipe.

In particular, a straight pipe and fittings connecting these straight pipes are frequently used in semiconductor processing equipment. Among them, fittings are made of pipes or tubes and have a configuration including an elbow.

In general, piping used for semiconductor processing equipment or the like has a high possibility of damage such as corrosion caused by a gas having a reactive property such as corrosiveness when the surface treatment of the inner diameter is poor.

Therefore, pipes used in semiconductor process equipment and the like generally require a material that is resistant to corrosion while a process of surface treatment of the inner diameter is essentially performed in the manufacturing process in order to prevent corrosion.

However, the internal diameter grinding method of the conventional pipe is generally performed by hand. Therefore, the conventional inner diameter polishing method of a pipe, which is dependent on manual labor, has a problem that it takes a long time to polish the pipe and is not suitable for an environment requiring mass production.

In addition, the conventional method for polishing the inner diameter of a pipe proceeds as a method of performing two polishings in the A1 direction and the A2 direction for fittings having a curved surface as shown in FIG. 1.

However, the conventional polishing method as shown in FIG. 1 has a problem in that erosion occurs in the curved surface such as the D1 and D2 regions of the fittings by using the polishing head reciprocating back and forth.

In order to solve the above problems, an object of the present invention is to provide an inner diameter grinder of a pipe which can polish the inner diameter of the pipe while the rod is bent to correspond to the curved surface of the fittings by employing a flexible rod.

In addition, the present invention adopts the internal diameter grinder which can be polished while moving along the inner surface where the bends of the fittings are formed by the flexible characteristics of the rod, and can automatically automate the grinding process of the internal diameter of the parts by automatically driving the internal diameter grinder. It is another object to provide an internal diameter polishing apparatus for pipes.

The inner diameter grinder of the pipe according to the present invention includes: a rod having a flexible material and forming a rod shape; A plurality of polishing rings which are uniformly spaced on the rod, each of which includes a ring-shaped body having a cushion and a polishing surface attached to an outer diameter of the ring-shaped body, and coupled with the rod passing through the ring-shaped body to receive rotational force; ; And a head portion bearing coupled to an end of the rod to guide movement of the rod and the polishing rings along an inner diameter of a part to be polished without receiving rotational force of the rod.

On the other hand, the inner diameter polishing apparatus of a pipe according to the present invention, the spindle device having a chuck in the lower portion to rotate the chuck; An elevating device for elevating the spindle device; A jig spaced apart from the lower portion of the spindle device to fix a part to be polished; And an inner diameter grinder which polishes the inner diameter while entering and exiting the inner diameter of the part when the spindle device is lowered by the elevating device while being attached to the chuck that is detachable to the chuck and rotates. The inner diameter grinder includes: a rod having a flexible material and forming a rod shape; A plurality of polishing rings which are uniformly spaced on the rod, each of which includes a ring-shaped body having a cushion and a polishing surface attached to an outer diameter of the ring-shaped body, and coupled with the rod passing through the ring-shaped body to receive rotational force; ; And a head portion bearing coupled to one end of the rod to guide movement of the rod and the polishing rings along the inner diameter of the part to be polished without receiving rotational force of the rod.

Here, the rod may be formed of the flexible material including any one of silicon, urethane-based polymer, glass fiber and metal bellows.

The ring-shaped body of the polishing rings may be formed of silicone or urethane-based polymer material.

The polishing surface of the polishing rings may be made of any one of sandpaper or a nonwoven fabric coated with an abrasive.

Here, the polishing surface of the polishing rings may be coupled to the outer surface of the ring-shaped body by any one of Velcro bonding or silicon bonding.

The thickness of the polishing rings may be equal to or greater than a distance at which the polishing rings are spaced apart from each other.

The head unit may have a hemispherical shape and a coupling groove formed at a center of the plane; A bearing having a hollow and inserted into the coupling groove; A fixing bracket fixing one end of the bearing to a plane of the head; And a snap ring coupling the other end of the bearing to an end of the rod.

Here, the bearing may be composed of any one of a ball bearing, a journal bearing and a fluid bearing.

And, the head may be made of any one of steel or hard silicon heat-treated the surface.

In addition, the inner diameter polishing apparatus of the pipe, the frame for providing a fixed position of the jig; A fixing device coupled to the frame to support the elevating device; An operating panel for setting process conditions for polishing the inner diameter of the part using the inner diameter grinder; And controlling the operation of the elevating device and the spindle device such that a series of processes for polishing the inner diameter of the part are continuously and automatically performed while the inner diameter grinder is raised and lowered under the process conditions set in the operating panel. The apparatus may further include.

Therefore, according to the internal diameter grinder according to the present invention, polishing of a component having a curvature is possible, and excessive polishing of the curved region does not occur, so that erosion does not occur and polishing efficiency and yield are improved.

In addition, the inner diameter grinder may be applied to an automated device, and thus an increase in product yield and a reduction in manufacturing cost may be expected.

In addition, the inner diameter polishing apparatus according to the present invention has the advantage that the inner diameter polishing for fittings, which are curved pipes, can be automated, so that the polishing time and yield can be improved and the mass production can be improved compared to the conventional manual work.

As described above, as the inner diameter polishing apparatus according to the present invention provides the effect of reducing the polishing time and improving the yield, an additional effect of reducing the manufacturing cost can be expected.

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing explaining the method of grinding the internal diameter which has the bending of the conventional piping.
Figure 2 is a front view showing a preferred embodiment of the inner diameter grinder of the pipe according to the present invention.
3 is a front sectional view of FIG. 2.
4 is a partial cross-sectional view taken from 4-4 of FIG.
5 is an enlarged cross-sectional view of the head portion 16.
6 is a state diagram used in the embodiment of FIG.
Fig. 7 is a detailed view showing the main parts of a preferred embodiment of the inner diameter polishing apparatus according to the present invention.
8 is a side view of the inner diameter polishing apparatus to which FIG. 7 is applied.
9 is a front view of the inner diameter polishing apparatus of FIG. 8.
10 is a plan view of the inner diameter polishing apparatus of FIG. 8.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it should be understood that the following embodiments are provided so that those skilled in the art will be able to fully understand the present invention, and that various modifications may be made without departing from the scope of the present invention. It is not.

Embodiment of the inner diameter grinder of the pipe according to the present invention may be configured as shown in Figures 2 to 5, Figure 2 is a front view of a preferred embodiment of the inner diameter grinder of the pipe according to the invention, Figure 3 is a front cross-sectional view of FIG. 4 is a partial cross-sectional view taken along line 4-4 of FIG. 2, and FIG. 5 is an enlarged cross-sectional view of the head portion 16. For reference, FIG. 6 is a state diagram of use of the embodiment of FIG. 2.

First, the inner grinder 10 according to the present invention comprises a rod 12, polishing rings 14, and a head portion 16.

Here, the rod 12 has a flexible material and has a rod shape of a predetermined length.

As described above, the rod 12 is made of a flexible material. Therefore, when the inner diameter grinder 10 enters in order to polish the inner diameter of the fittings having the bend, the curved grinder 10 may be bent in the curved area to continue the polishing and the erosion may be prevented from occurring in the curved part.

The rod 12 may be formed of a flexible material including any one of silicon, urethane-based polymer, glass fiber, and metal bellows to have flexible characteristics.

In addition, the rod 12 penetrates through a plurality of polishing rings 14 which are regularly spaced apart, and the head portion 16 is bearing-bonded at the end.

Here, it is preferable that the distance B2 and the thickness B1 at which the plurality of polishing rings 14 are spaced apart are constant, and the plurality of polishing rings have a thickness B1 equal to or greater than the distance B2 spaced apart from each other. Configured is preferred. The adjustment of the thickness (B1) and the separation distance (B2) of the polishing ring can be determined in consideration of the fact that the fittings may have a curved shape substantially at most obtuse angles and bent up to 90 degrees.

In addition, the plurality of polishing rings 14 are fixedly bonded to each other by a method of bonding the rod 12 penetrating with the silicon bond and the like, so that the rod 12 is rotated directly from the rod 12 when the rod 12 is rotated for polishing. It is preferable to be configured to receive a rotational force to be rotated for polishing itself.

Each of the polishing rings 14 may include a ring-shaped body 20 having a cushion and a polishing surface 22 attached to an outer diameter of the ring-shaped body 20.

Here, the ring-shaped body 20 may be formed of a silicone or urethane-based polymer material so that the polishing rings 14 have a cushion.

As such, the polishing rings 14 may have a cushion due to the characteristics of the material of the ring-shaped body 20. Accordingly, the polishing rings 14 may be in close contact with inner diameters of fittings to perform polishing. As a result, efficient polishing can be achieved.

In addition, an outer surface of the polishing rings 14 may include a polishing surface 22, and the polishing surface 22 may be formed of any one of sandpaper or a nonwoven fabric coated with an abrasive. In addition, since the polishing surface 22 is consumed as polishing is performed and the polishing property is lowered, the polishing surface 22 is preferably combined with the ring-shaped body 20 in a replaceable structure. To this end, the polishing surface 22 may be configured to have a removable structure by being coupled to any one of the outer surface of the ring-shaped body 20 and Velcro bonding or silicon bonding.

On the other hand, as the head portion 16 is bearing-bonded with the end of the rod 12, the inner diameter of the parts to be polished, i.e. the fittings, to be polished without receiving the rotational force of the rod 12 while entering the inner diameter of the fittings for polishing. Accordingly, it is configured to guide the movement of the rod 12 and the polishing rings 14.

To this end, the head portion 16 has a hemispherical shape and a head 30 having a coupling groove 32 formed in the center of the plane, a bearing 34 inserted into the coupling groove 32 while having a hollow, and a head 30. A fixing bracket 36 fixed to the plane of the bolt 37 to fix one end of the bearing 34, and a snap ring 38 to couple the other end of the bearing 34 to the end of the rod 12. It may have a configuration.

In the configuration of the head portion 16, the head 30 is preferably made of any one of steel or hard silicon heat-treated the surface in order not to damage the inner diameter during the movement and have a strong property against heat generated during scratching or polishing.

In addition, the coupling groove 32 may be formed to accommodate the bearing 34 and the end of the rod 12 coupled thereto, and have a play that forms an empty space such that the end of the rod 12 and the bottom thereof do not come into contact with each other. .

In addition, the bearing 34 fixed by the fixing bracket 36 and the snap ring 38 may be configured as any one of a ball bearing, a journal bearing, and a fluid bearing. The bearing 34 configured as described above has a stress at the end of the rod 12 due to the torsion generated between the rod 12 and the head 30 generated as the inner diameter grinder 10 moves the curved portion of the fittings. It serves to solve the role and does not transmit the rotational force of the rod 12 to the head (30).

That is, even though the rod 12 rotates, the rotational force is blocked from being transmitted to the head 30 by the rotation of the bearing 34. By the role of the bearing 34, the head 30 can be moved while being supported by the inner diameter of the fittings regardless of the rotation of the rod 12, and the rod 12 and the polishing rings that move along with it. Guide (14) moves along the center of the inner diameter without biasing either side of the inner diameter so that even polishing of the entire surface of the inner diameter can be achieved.

In addition, the bearing 34 may be supported by the fixing bracket 36 coupled to the plane of the head 30 at one end of the coupling groove 32 by the bolt 37.

To this end, the fixing bracket 36 has a ring shape, and a plurality of through holes (not shown) are preferably formed at the periphery of the bolt 37. It is preferable to have a diameter smaller than the inlet of the coupling groove 32 to support one end of the (34). Accordingly, one end of the bearing 34 inserted into the coupling groove 32 by being inserted into the end of the rod 12 may be supported by the fixing bracket 36 at one end of the inlet side of the coupling groove 32.

In addition, the bearing 34 is preferably the other end of the bottom side of the coupling groove 32 is supported by a snap ring 38 coupled to the rod 12. Here, the snap ring 38 may be engaged in a groove formable at the end of the rod 12 to firmly support one end of the bearing 34.

The inner diameter grinder 10 having the rod 12, the polishing rings 14, and the head 16 configured as described above is capable of polishing a curved part, that is, fittings 40, as shown in FIG. Due to the flexible characteristics of the rod 12, the rod 12 is also bent in correspondence with the bent region, so that excessive grinding of the bent region does not occur and erosion does not occur.

In addition, the above-described inner diameter grinder 10 may rotate and move while being in close contact with the inner diameter of the part as the polishing rings 14 have a cushion, so that polishing may be efficiently performed.

In addition, the above-described inner diameter grinder 10 has the rod 12 and the polishing rings 14 along the center of the inner diameter as the head 16 guides the movement of the rod 12 and the polishing rings 14. The movement is guided so that even polishing of the front surface can be achieved.

Internal grinder according to the present invention having the characteristics as described above can be configured in the automated device can be expected to increase the product yield and reduce the manufacturing cost.

An inner diameter polishing apparatus implementing automation by employing the inner diameter polishing machine 10 according to the present invention may be configured as shown in FIG. 7, and may be manufactured as an actual facility as illustrated in FIGS. 8 to 10. The configuration of the embodiment of the breakdown polishing apparatus according to the present invention will be described with reference to FIGS. 7 to 10. FIG. 7 is a detailed view of the main portion showing a preferred embodiment of the inner diameter polishing apparatus according to the present invention. Fig. 9 is a front view of the inner diameter polishing apparatus of FIG. 8, and FIG. 10 is a plan view of the inner diameter polishing apparatus of FIG. 8.

7 and 10, the inner diameter polishing apparatus according to the present invention employs the inner diameter polishing machine 10 described above, and includes a spindle device 100, a lifting device 120, and a driving device for driving the inner diameter polishing machine 10. It has a configuration including the jig 130.

The spindle apparatus 100 has a configuration that includes a spindle motor 104 configured at the top to provide a high-speed rotational force and a chuck 102 configured at the bottom to grip an end of the rod 12 of the inner grinder 10. .

Here, the high speed rotational force of the spindle motor 104 of the spindle apparatus 100 is transmitted to the chuck 102, and the high speed rotation chuck 102 rotates the gripped inner diameter grinder 10 at high speed. Preferably the spindle device 100 may be configured to rotate the chuck 102 at a rotational speed in the range of 0 to 30,000 RPM.

The spindle device 100 described above is constrained by the elevating device 120 to be driven up and down.

The elevating device 120 is installed vertically with the elevating motor 122 that provides power for elevating or descending, and thus elevating or descending the elevating plate 124 and the elevating plate 124 and the spindle device 100. Has a configuration including a clamp 126.

According to the above configuration, the elevating plate 124 is raised or lowered by the driving force of the elevating motor 122, and the spindle device 100 coupled to the clamp 126 is linked to the raising or lowering of the elevating plate 124. It can be raised or lowered for polishing using the inner diameter grinder (10). At this time, the lifting distance of the spindle device 100 can be controlled to 0 to 999mm.

In addition, the jig 130 may be spaced apart from the lower portion of the spindle device 100 to be configured to fix a part to be polished, that is, fittings 40, and the jig 130 may be configured to have a frame suitable for the shape of the part to be fixed. Can be.

By the above-described configuration, the inner diameter grinder 10 is moved up and down while rotating at a high speed by interlocking between the elevating device 120 and the spindle device 100, and a jig disposed spaced apart from the inner diameter grinder 10. Internal diameter grinding of the fittings 40 may be performed while the internal diameter grinder 10 moves in and out as shown in FIG.

Components configured as shown in FIG. 7 may be installed in a frame as a device as shown in FIGS. 8 to 10.

The frame may be divided into an upper frame 140 and a lower frame 142, and the base plate 144 may be configured between the upper frame 140 and the lower frame 142.

On the base plate 144, a jig 130 for loading a part to be polished in an accurate position may be installed, and a fixing device 150 in which the lifting device 120 is installed may be installed.

Fixing device 150 is configured to have a predetermined height and the lifting device 120 is fixed to the front.

In addition, the upper frame 140 may be configured with an operating panel 160 for setting a process condition for polishing the inner diameter of the part using the inner diameter grinder 10 and displaying a process state.

The operating panel 160 includes a screen panel 162 for displaying a process state, an adjusting panel 164 for setting process conditions, and a warning light 166 for visually indicating a process state.

The screen panel 162 may be implemented as a display device such as a liquid crystal display, and the adjustment panel 164 may be implemented as a panel including a volume or a switch. In addition, the warning light 166 is configured to visually express the process state in various ways, such as a blue light indicating that the process is normal, an orange light indicating that the process is pending, and a red light indicating that a process abnormality has occurred. Can be.

The operating panel 160 may set the rotational speed, the polishing time, and the vertical feed distance of the internal grinder 10 as process conditions, the rotational speed may be set in the range of 0 to 30,000 RPM, and the polishing time is 0. To 999 seconds, and the feeding distance may be set to 0 to 999 mm.

In addition, the embodiment according to the present invention further comprises a control device 170 by a series of grinding the inner diameter of the fittings as a component while the inner diameter grinder 10 is rotated and raised at a high speed under the process conditions set on the operating panel 160 The process of may be configured to control the operation of the elevating device 120 and the spindle device 100 to perform continuously automatically.

Here, the control device 170 may be configured to mount a substrate employing a conventional microprocessor, and is controlled by a circuit interface with the spindle device 100, the lifting device 120, the operating panel 160, and the like. The operation can be implemented. This may be variously performed by the manufacturer, so a specific example is omitted.

On the other hand, an embodiment according to the present invention may include a high speed spindle cooler 180, the high speed spindle cooler 180 is a coolant for cooling the spindle device 100 is a high speed rotation operation by the spindle motor (104). It is a configuration for supplying.

In addition, according to the embodiment of the present invention, the jig 130 may be installed to form a door (not shown) in front of the fittings 40 coming in and out, and the door shaft 190 may be further configured to open and close the door. have.

As described above, the inner diameter polishing apparatus is configured, and the fitting, which is a component fixed to the jig 130 by the lifting and lowering by the elevating device 120 and the fixing and the high speed rotation of the internal polishing machine 10 by the spindle device 100, is performed. Internal diameter polishing for stream 40 may be automated.

As described above, the inner diameter polishing apparatus according to the present invention has the advantage that the polishing time and yield can be improved and mass production can be improved as compared with the conventional manual operation by the internal diameter polishing is automated.

In addition, as the inner diameter polishing apparatus according to the present invention provides the effect of reducing the polishing time and improving the yield, an additional effect of reducing the manufacturing cost can be expected.

In addition, by using the flexible inner diameter grinder according to the present invention, the polishing can be performed by correcting the shape by sufficient elastic force in accordance with the mechanical radius of curvature of the parts, so that polishing can proceed without damage such as erosion on the curved surface. It can have the effect of improving the quality and improving the yield.

10: internal grinder 12: rod
14: polishing ring 16: head portion
20: ring-shaped body 22: polishing surface
30: head 32: coupling groove
34: bearing 36: fixed bracket
37: bolt 38: snap ring
40: fittings 100: spindle device
102: Chuck 104: Spindle Motor
120: lifting device 122: lifting motor
124: lifting plate 126: clamp
130: jig 140: upper frame
142: lower frame 144: base plate
150: fixing device 160: operating panel
162: screen panel 164: adjustment panel
166: warning light 170: control device
180: high speed spindle cooler 190: door shaft

Claims (11)

A rod having a flexible material and forming a rod shape;
A plurality of polishing rings which are uniformly spaced on the rod, each of which includes a ring-shaped body having a cushion and a polishing surface attached to an outer diameter of the ring-shaped body, and coupled with the rod passing through the ring-shaped body to receive rotational force; ; And
And a head portion coupled to an end of the rod to guide the movement of the rod and the polishing rings along an inner diameter of a part to be polished without receiving rotational force of the rod.
Wherein:
A head having a hemispherical shape and a coupling groove formed at the center of the plane;
A bearing having a hollow and inserted into the coupling groove;
A fixing bracket fixing one end of the bearing to a plane of the head; And
And a snap ring for coupling the other end of the bearing to an end of the rod.
The method of claim 1, wherein the rod comprises any one of silicon, urethane-based polymer, glass fiber and metal bellows,
The ring-shaped body of the polishing rings is an inner diameter grinder of the pipe formed of a silicone or urethane-based polymer material.
The polishing surface of claim 1, wherein the polishing surface of the polishing rings is made of any one of sandpaper or nonwoven fabric coated with an abrasive.
The polishing surface of the polishing rings is coupled to the outer surface of the ring-shaped body by either Velcro bonding or silicon bonding,
Wherein the thickness of the polishing rings is greater than or equal to the distance that the polishing rings are spaced apart from each other.
delete The method of claim 1,
The bearing consists of any one of a ball bearing, a journal bearing and a fluid bearing,
The head grinder of the inner diameter of the pipe is composed of any one of steel or hard silicon heat-treated the surface.
A spindle device having a lower chuck and rotating the chuck;
An elevating device for elevating the spindle device;
A jig spaced apart from the lower portion of the spindle device to fix a part to be polished; And
And an inner diameter grinder which polishes the inner diameter while entering and returning to the inner diameter of the part when the spindle device is lowered by the elevating device while being attached to the chuck that is detachable to the chuck and rotates.
The inner diameter grinder,
A rod having a flexible material and forming a rod shape;
A plurality of polishing rings which are uniformly spaced on the rod, each of which includes a ring-shaped body having a cushion and a polishing surface attached to an outer surface of the ring-shaped body, and coupled with the rod passing through the ring-shaped body to receive rotational force; ; And
And a head part bearing coupled to one end of the rod to guide the movement of the rod and the polishing rings along the inner diameter of the part without receiving the rotational force of the rod.
The method of claim 6, wherein the rod comprises any one of silicon, urethane-based polymer, glass fiber and metal bellows,
The ring-shaped body of the polishing rings is an internal diameter polishing apparatus of the pipe formed of a silicon or urethane-based polymer material.
The polishing surface of claim 6, wherein the polishing surface of the polishing rings is made of any one of sandpaper or nonwoven fabric coated with an abrasive material.
The polishing surface of the polishing rings is coupled to the outer surface of the ring-shaped body by either Velcro bonding or silicon bonding,
And the thickness of the polishing rings is equal to or greater than the distance that the polishing rings are spaced apart from each other.
The method of claim 6, wherein the head portion,
A head having a hemispherical shape and a coupling groove formed at the center of the plane;
A bearing having a hollow and inserted into the coupling groove;
A fixing bracket fixing one end of the bearing to a plane of the head; And
And a snap ring for coupling the other end of the bearing to an end of the rod.
10. The method of claim 9,
The bearing consists of any one of a ball bearing, a journal bearing or a fluid bearing,
The head is an internal diameter polishing apparatus for a pipe composed of any one of steel or hard silicon heat-treated the surface.
The method according to claim 6,
A frame providing a fixed position of the jig;
A fixing device coupled to the frame to support the elevating device;
An operating panel for setting process conditions for polishing the inner diameter of the part using the inner diameter grinder; And
A control device for controlling the operation of the elevating device and the spindle device such that a series of processes for polishing the inner diameter of the part can be automatically and continuously performed while the inner grinder is raised and lowered under the process conditions set in the operating panel. An internal diameter polishing apparatus for a pipe further comprising.

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