KR101186519B1 - Liquid crystal display device and method of fabricating thereof - Google Patents

Abstract

The liquid crystal display of the present invention and a method of manufacturing the same have a thin film transistor having an inverted staggered structure in which an ohmic contact layer is formed on a side of an active layer to directly contact an ohmic contact layer and an inversion channel layer. It is to improve the reliability and electrical properties of the thin film transistor by removing the high resistance component by providing a first substrate and a second substrate bonded to the first substrate; Forming a gate electrode and a gate line on the first substrate; Forming a first insulating film on the first substrate; Forming an amorphous silicon thin film on a first substrate on which the first insulating film is formed; Forming a first photoresist pattern on the amorphous silicon thin film; Forming an amorphous silicon thin film pattern on the gate electrode by selectively removing the amorphous silicon thin film using the first photoresist pattern as a mask; Selectively removing the first photoresist pattern to form a second photoresist pattern exposing side surfaces of the amorphous silicon thin film pattern; Implanting a high concentration of impurity ions using the second photoresist pattern as a mask to form an ohmic contact layer on a side of the exposed amorphous silicon thin film pattern; Forming a source electrode and a drain electrode on the first substrate, the source electrode and the drain electrode electrically connected to the active layer through the ohmic contact layer; Forming a second insulating film on the first substrate and selectively removing the second insulating film to form a contact hole exposing the drain electrode; Forming a pixel electrode electrically connected to the drain electrode through the contact hole; And forming a liquid crystal layer between the first substrate and the second substrate.

Ohmic contact layer, active layer, channel layer, thin film transistor

Description

Liquid crystal display and its manufacturing method {LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FABRICATING THEREOF}

1 is an exploded perspective view schematically illustrating a structure of a general liquid crystal display device.

2 is a cross-sectional view schematically showing an amorphous silicon thin film transistor having a general structure.

3 is an enlarged cross-sectional view of an active layer of the thin film transistor illustrated in FIG. 2.

4 is a plan view schematically illustrating a portion of an array substrate of a liquid crystal display according to an exemplary embodiment of the present invention.

FIG. 5 is a schematic cross-sectional view taken along line IV-IV 'of the array substrate shown in FIG. 4; FIG.

6A to 6H are cross-sectional views sequentially illustrating a manufacturing process of the array substrate illustrated in FIG. 5.

FIG. 7 is an enlarged cross-sectional view of an active layer of the thin film transistor illustrated in FIG. 5.

DESCRIPTION OF REFERENCE NUMERALS

110: array substrate 116n-1,116n: gate line

117m, 117m + 1: Data line 118: Pixel electrode

121: gate electrode 122: source electrode

123: drain electrode 124 ': active layer

125: ohmic contact layer

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and a method for manufacturing the same, and more particularly, to a liquid crystal display device and a method for manufacturing the same, which prevent deterioration due to a high resistance pass in an inverted staggered structure thin film transistor. It is about.

Recently, interest in information display has increased, and a demand for using portable information media has increased, and a light-weight flat panel display (FPD) that replaces a cathode ray tube (CRT) And research and commercialization are being carried out. Particularly, among such flat panel display devices, a liquid crystal display (LCD) is an apparatus for displaying an image using the optical anisotropy of a liquid crystal, and is excellent in resolution, color display and picture quality and is actively applied to a notebook or a desktop monitor have.

The liquid crystal display is largely composed of a color filter substrate as a first substrate, an array substrate as a second substrate, and a liquid crystal layer formed between the color filter substrate and the array substrate.

In this case, a thin film transistor (TFT) is generally used as a switching element of the liquid crystal display, and an amorphous silicon thin film is used as a channel layer of the thin film transistor.

Since the manufacturing process of the liquid crystal display device basically requires a plurality of mask processes (ie, photolithography process) for fabricating an array substrate including a thin film transistor, a method of reducing the number of mask processes in terms of productivity is required. It is required.

Hereinafter, a structure of a general liquid crystal display device will be described in detail with reference to FIG. 1.

1 is an exploded perspective view schematically illustrating a general liquid crystal display.

As shown in the figure, the liquid crystal display comprises a color filter substrate 5, an array substrate 10, and a liquid crystal layer (not shown) formed between the color filter substrate 5 and the array substrate 10 30).

The color filter substrate 5 includes a color filter C composed of a plurality of sub-color filters 7 for implementing colors of red (R), green (G), and blue (B); A black matrix 6 that separates the sub-color filters 7 and blocks light passing through the liquid crystal layer 30, and a transparent common electrode that applies a voltage to the liquid crystal layer 30. 8)

In addition, the array substrate 10 may be arranged in a vertical direction to form a plurality of gate lines 16 and data lines 17 defining a plurality of pixel regions P, and the gate lines 16 and data lines 17. And a pixel electrode 18 formed on the pixel region P.

The color filter substrate 5 and the array substrate 10 configured as described above are joined to face each other by a sealant (not shown) formed at the outer side of the image display area to form a liquid crystal display panel. The bonding of 10 is performed through a bonding key (not shown) formed on the color filter substrate 5 or the array substrate 10.

Hereinafter, the thin film transistor will be described in detail with reference to the accompanying drawings.

FIG. 2 is a cross-sectional view schematically illustrating an amorphous silicon thin film transistor having a general structure, and illustrates an amorphous silicon thin film transistor having an inverse staggered structure.

3 is an enlarged cross-sectional view of an active layer of the thin film transistor illustrated in FIG. 2.

Referring to the drawings, the staggered structure is a structure in which the gate electrode 21 and the source / drain electrodes 22 and 23 are disposed on the upper and lower portions of the gate insulating film 15A, respectively. It is a structure applied to a transistor.

In this case, in the reverse staggered thin film transistor, the gate electrode 21 is disposed below the staggered amorphous silicon thin film transistor of the staggered structure, through the continuous deposition of the gate insulating film 15A and the active layer 24. And since the ohmic contact layer (ohmic contact layer) (25) is formed, there is an advantage that can minimize the contact resistance and the state (state).

For reference, reference numeral 10 denotes an array substrate on which a thin film transistor is formed.

In the reverse staggered thin film transistor, when the thin film transistor is driven by applying a gate voltage, an inversion channel layer in which a carrier moves in the active layer 24 as shown in FIG. 3. At this time, the carrier 24 moving through the ohmic-contact layer 25 to the lower inversion channel layer 24C is continuously resisted in the amorphous silicon layer. The degradation of the active layer 24 due to accumulation is expected. In addition, the amorphous silicon layer between the ohmic contact layer 25 and the lower inversion channel layer 24C acts as a high resistance component, thereby degrading the electrical characteristics of the thin film transistor.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and in the reverse staggered thin film transistor, an ohmic contact layer is formed on the side of the active layer to improve the reliability and electrical characteristics of the thin film transistor and its manufacture. The purpose is to provide a method.

Further objects and features of the present invention will be described in the configuration and claims of the invention which will be described later.

In order to achieve the above object, the manufacturing method of the liquid crystal display device of the present invention comprises the steps of providing a first substrate and a second substrate bonded to the first substrate; Forming a gate electrode and a gate line on the first substrate; Forming a first insulating film on the first substrate; Forming an amorphous silicon thin film on a first substrate on which the first insulating film is formed; Forming a first photoresist pattern on the amorphous silicon thin film; Forming an amorphous silicon thin film pattern on the gate electrode by selectively removing the amorphous silicon thin film using the first photoresist pattern as a mask; Selectively removing the first photoresist pattern to form a second photoresist pattern exposing side surfaces of the amorphous silicon thin film pattern; Implanting a high concentration of impurity ions using the second photoresist pattern as a mask to form an ohmic contact layer on a side of the exposed amorphous silicon thin film pattern; Forming a source electrode and a drain electrode on the first substrate, the source electrode and the drain electrode electrically connected to the active layer through the ohmic contact layer; Forming a second insulating film on the first substrate and selectively removing the second insulating film to form a contact hole exposing the drain electrode; Forming a pixel electrode electrically connected to the drain electrode through the contact hole; And forming a liquid crystal layer between the first substrate and the second substrate.

In addition, another manufacturing method of the liquid crystal display device of the present invention comprises the steps of providing a first substrate and a second substrate bonded to the first substrate; Forming a gate electrode and a gate line on the first substrate; Forming a first insulating film on the first substrate; forming an amorphous silicon thin film on the first substrate on which the first insulating film is formed; Selectively patterning the amorphous silicon thin film to form an active layer on the gate electrode; Growing an ohmic contact layer on a side of the active layer; Forming a source electrode and a drain electrode on the first substrate to electrically connect with the active layer through the ohmic contact layer; Forming a second insulating film on the first substrate and selectively removing the second insulating film to form a contact hole exposing the drain electrode; Forming a pixel electrode electrically connected to the drain electrode through the contact hole; And forming a liquid crystal layer between the first substrate and the second substrate.

Hereinafter, exemplary embodiments of a liquid crystal display and a method of manufacturing the same according to the present invention will be described in detail with reference to the accompanying drawings.

4 is a plan view schematically illustrating a portion of an array substrate of a liquid crystal display according to an exemplary embodiment of the present invention, and FIG. 5 is a diagram schematically illustrating a cross section taken along line IV-IV ′ of the array substrate illustrated in FIG. 4.

At this time, although N gate lines and M data lines intersect on the actual array substrate, there are M × N pixels, but for simplicity, only the m-by-n pixel is shown in the drawing.

As shown in the figure, an n-th gate line 116n and an m-th data line 117m which are arranged vertically and horizontally on the array substrate 110 to define an mxn-th pixel region in the array substrate 110 of the present embodiment. Formed. A thin film transistor, which is a switching element, is formed in an intersection area of the nth gate line 116n and the mth data line 117m, and is connected to the thin film transistor in the pixel area so as to have a common color filter substrate (not shown). A pixel electrode 118 for driving a liquid crystal (not shown) is formed together with the electrode.

The thin film transistor includes a gate electrode 121 connected to an nth gate line 116n, a source electrode 122 connected to an mth data line 117m, and a drain electrode 123 connected to the pixel electrode 118. have. In addition, the thin film transistor is connected to the source electrode 122 by the first insulating film 115A for insulating the gate electrode 121 and the source / drain electrodes 122 and 123 and the gate voltage supplied to the gate electrode 121. ) And an active layer 124 forming a conductive channel between the drain electrode 123 and the drain electrode 123.

In this case, a part of the source electrode 122 extends in one direction to form a part of the m-th data line 117m, and a part of the drain electrode 123 extends toward the pixel area to extend the second insulating film 115B. The contact hole 140 is electrically connected to the pixel electrode 118.

In this case, a part of the n-th gate line 116n-1, which is a front gate line, overlaps a part of the pixel electrode 118 therebetween with the first insulating film 115A and the second insulating film 115B interposed therebetween. As a result, the storage capacitor Cst is formed. The storage capacitor Cst keeps the voltage applied to the liquid crystal capacitor constant until the next signal comes in. That is, the pixel electrode 118 of the array substrate 110 forms a liquid crystal capacitor together with the common electrode of the color filter substrate. In general, the voltage applied to the liquid crystal capacitor is not maintained until the next signal is input and is leaked. Disappear. Therefore, in order to maintain the applied voltage, the storage capacitor Cst needs to be connected to the liquid crystal capacitor.

The storage capacitor Cst has effects such as stabilization of gray scale display and reduction of flicker and afterimage in addition to signal retention.

The array substrate 110 according to the present embodiment configured as described above has an ohmic contact layer 125 that ohmic-contacts the active layer 124 and the source / drain electrodes 122 and 123 to the side of the active layer 124. By forming the high resistance component in the channel layer can be removed, which will be described in detail through the manufacturing process of the following liquid crystal display device.

6A through 6H are cross-sectional views sequentially illustrating a manufacturing process of the array substrate illustrated in FIG. 5.

As shown in FIG. 6A, a gate electrode 121 and a gate line 116n-1 are formed on a substrate 110 made of a transparent insulating material such as glass. In this case, the gate line 116n-1 refers to the gate line of the front end of the corresponding pixel, that is, the n-1 th gate line 116n-1. It is formed in the same manner as the n-th gate line 116n-1.

In this case, the gate electrode 121 and the n-th gate line 116n-1 are formed by depositing a first conductive layer on the entire surface of the substrate 110 and patterning the same through a photolithography process (first mask process). .

The first conductive layer may include aluminum (Al), aluminum alloy (Al alloy), tungsten (W), copper (Cu), chromium (Cr), molybdenum (Mo), or the like. The same low resistance opaque conductive material can be used. In addition, the gate electrode 121 and the n−1 th gate line 116n− 1 may have a multilayer structure in which two or more low resistance conductive materials are stacked.

Next, as illustrated in FIG. 6B, the first insulating layer 115A and the amorphous silicon thin film may be sequentially formed on the entire surface of the substrate 110 on which the gate electrode 121 and the n−1 th gate line 116n-1 are formed. 120).

Then, after forming a photosensitive film made of a photosensitive material such as a photoresist on the entire surface of the substrate 110, the photosensitive film is selectively irradiated with light using a photolithography process (second mask process). Subsequently, after the exposed photoresist is developed, a first photoresist pattern 170 having a first thickness and a first width remains in a predetermined region above the gate electrode 121.

Next, as shown in FIG. 6C, when the amorphous silicon thin film formed on the lower portion of the first photoresist film pattern 170A formed as described above is selectively used as a mask, a predetermined region above the gate line 121 is removed. An amorphous silicon thin film pattern 120 ′ formed of the amorphous silicon thin film is formed on the substrate.

Subsequently, as shown in FIG. 6D, an ashing process of removing a portion of the first photoresist pattern may be performed to expose a portion of the side surface of the amorphous silicon thin film pattern. At this time, a part of the first photoresist pattern is removed to remain as a second photoresist pattern 170 ′ having a second thickness and a second width.

In addition, the ohmic contact layer 125 of the present embodiment is formed by implanting high concentrations of impurity ions into the first region of the exposed amorphous silicon thin film pattern using the remaining second photoresist pattern 170 ′ as a mask. In the second region of the amorphous silicon thin film pattern except for the ohmic contact layer 125, the implantation of impurity ions is blocked by the second photoresist layer pattern 170 ′ to form an active layer 124 made of a pure amorphous silicon thin film. Done.

In this case, the impurity ions include a Group 5 element such as phosphorus (P), and after the implantation of the impurity ions, a process of activating the implanted impurity ions may be further performed.

As described above, according to the present exemplary embodiment, the ohmic contact is formed on the side surface of the active layer 124 by implanting impurity ions into only the first region of the amorphous silicon thin film pattern using the ashed second photoresist pattern 170 ′ as a mask. The layer 125 may be formed. Alternatively, the amorphous silicon thin film may be patterned to form an active layer, followed by supplying silicon seeds and impurity ions to the side of the active layer to directly form an ohmic contact layer. The way to make this grow is mentioned. In this case, the impurity ion includes a Group 5 element such as phosphorus (P).

Next, as shown in FIGS. 6E and 6F, after forming the second conductive layer 130 on the entire surface of the substrate 110 on which the active layer 124 and the ohmic contact layer 125 are formed, photolithography A source electrode 122 electrically connected to the active layer 124 through the ohmic contact layer 125 by selectively removing the second conductive layer 130 using a process (a third mask process); The drain electrode 123 is formed.

In this case, a portion of the source electrode 122 substantially crosses the n-th gate line to form an m-th data line 117m defining a corresponding pixel region.

Thereafter, as illustrated in FIG. 6G, a second insulating film 115B is deposited on the entire surface of the substrate 110 on which the source electrode 122 and the drain electrode 123 are formed, and then a photolithography process (fourth mask process). The contact hole 140 exposing a part of the drain electrode 123 is formed by removing a part of the second insulating layer 115B through the gap.

6H, a third conductive film is deposited on the entire surface of the substrate 110 and then selectively patterned on the third conductive film using a photolithography process (a fifth mask process) to drain through the contact hole. The pixel electrode 118 electrically connected to the electrode 123 is formed.

In this case, the third conductive layer is a transparent conductive material having excellent transmittance such as indium tin oxide (ITO) or indium zinc oxide (IZO) to form the pixel electrode 118. It includes.

A portion of the pixel electrode 118 is formed to overlap a portion of the m−1 th gate line 116n−1 with the first insulating film 115A and the second insulating film 115B therebetween. The storage capacitor Cst (see FIG. 4) is formed together with the m−1 th gate line 116n-1.

Referring to FIG. 7, the thin film transistor configured as described above does not have a high resistance path component in the active layer 124 even though the thin film transistor has a staggered structure.

That is, through the present embodiment, the ohmic contact layer 125 is formed on the side of the active layer 124 to directly form the inversion channel layer 124C and the ohmic contact layer 125 by applying a gate voltage. To make contact. As a result, it is possible to remove the high resistance component in the active layer 124 when driving the thin film transistor, it is possible to prevent deterioration phenomenon or deterioration of the electrical characteristics occurring in the existing structure.

As such, since the ohmic contact layer 124 is in direct contact with the channel layer 124C, there is no resistance component between the ohmic contact layer 124 and the channel layer 124C, and thus the carrier movement is not disturbed. Will not. As a result, there is an advantage in that the electrical characteristics of the thin film transistor are improved, such as on-current is improved.

For reference, the arrow shown in the drawing schematically shows the movement path of the carrier.

The array substrate 110 configured as described above is bonded to face the color filter substrate (not shown) by a sealant (not shown) formed outside the image display area to form a liquid crystal display panel. The bonding of the color filter substrate is performed through a bonding key (not shown) formed on the array substrate 110 and the color filter substrate.

In the present embodiment, an amorphous silicon thin film transistor using an amorphous silicon thin film as the channel layer is described as an example, but the present invention is not limited thereto, and the present invention is also applied to a polycrystalline silicon thin film transistor using a polycrystalline silicon thin film as the channel layer. do.

In addition, the present invention can be applied not only to a liquid crystal display device but also to other display devices manufactured using thin film transistors, for example, organic electroluminescent display devices in which organic light emitting diodes (OLEDs) have.

Many details are set forth in the foregoing description but should be construed as illustrative of preferred embodiments rather than to limit the scope of the invention. Therefore, the invention should not be construed as limited to the embodiments described, but should be determined by equivalents to the appended claims and the claims.

As described above, the liquid crystal display device and the manufacturing method thereof according to the present invention can improve the electrical characteristics of the thin film transistor by removing the high resistance component and smoothly move the carrier, thereby improving the reliability of the thin film transistor.

Claims (12)

Providing a first substrate and a second substrate joined against the first substrate; Forming a gate electrode and a gate line on the first substrate; Forming a first insulating film on the first substrate; Forming an amorphous silicon thin film on a first substrate on which the first insulating film is formed; Forming a first photoresist pattern on the amorphous silicon thin film; Forming an amorphous silicon thin film pattern on the gate electrode by selectively removing the amorphous silicon thin film using the first photoresist pattern as a mask; Selectively removing the first photoresist pattern to form a second photoresist pattern exposing side surfaces of the amorphous silicon thin film pattern; Implanting a high concentration of impurity ions using the second photoresist pattern as a mask to form an ohmic contact layer on a side of the exposed amorphous silicon thin film pattern; Forming a source electrode and a drain electrode on the first substrate, the source electrode and the drain electrode electrically connected to the active layer through the ohmic contact layer; Forming a second insulating film on the first substrate and selectively removing the second insulating film to form a contact hole exposing the drain electrode; Forming a pixel electrode electrically connected to the drain electrode through the contact hole; And Forming a liquid crystal layer between the first substrate and the second substrate. delete The method of claim 1, wherein the amorphous silicon thin film pattern to which the impurity ions are not implanted forms an active layer. The method of claim 1, wherein the impurity ions include a Group 5 element such as phosphorus (P). The method of claim 1, wherein the second photoresist pattern has a narrower width than the first photoresist pattern. Providing a first substrate and a second substrate joined against the first substrate; Forming a gate electrode and a gate line on the first substrate; Forming a first insulating film on the first substrate; Forming an amorphous silicon thin film on a first substrate on which the first insulating film is formed; Selectively patterning the amorphous silicon thin film to form an active layer on the gate electrode; Growing an ohmic contact layer on a side of the active layer; Forming a source electrode and a drain electrode on the first substrate to electrically connect with the active layer through the ohmic contact layer; Forming a second insulating film on the first substrate and selectively removing the second insulating film to form a contact hole exposing the drain electrode; Forming a pixel electrode electrically connected to the drain electrode through the contact hole; And Forming a liquid crystal layer between the first substrate and the second substrate. The method of claim 6, wherein the ohmic contact layer is grown by supplying a silicon seed and impurity ions to a side surface of the active layer. 8. The method of claim 7, wherein the impurity ions include a Group 5 element such as phosphorus (P). delete delete delete delete

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