KR101105858B1 - Vacuum valve - Google Patents

Abstract

The simple anti-rotation structure of the piston provides a vacuum valve that is easy to disassemble.

A body 40 including the valve seat 44, a valve body 19 in contact with or falling off the valve seat 44, and a driving unit 2 for applying a driving force to the valve body 19, and the driving unit 2. Includes a drive shaft 17 connected to the valve body 19, a piston 14 connected from the valve body 19 of the drive shaft 17, and a piston chamber 13 accommodating the piston 14. In the vacuum valve 1 which includes the bellows 15 which hold | maintained by the cylinder 10 and the piston 14 and which divides the piston chamber 13, the piston 14 protrudes in the moving direction The cylinder 10 has a rotation preventing portion 12a that prevents the rotation of the piston 14 inserted into the protrusion 21a on the surface opposite the protrusion 21a.

Description

Vacuum Valve {VACUUM VALVE}

The present invention relates to a vacuum valve disposed between a processing chamber and a vacuum pump to adjust a vacuum pressure of the processing chamber.

For example, in a CVD apparatus of a semiconductor manufacturing apparatus, a material gas made of an element constituting a thin film material is supplied to a wafer in a reaction chamber which is a vacuum container at the inlet of the reaction chamber, and a vacuum pump is provided at the outlet of the reaction chamber. By evacuating, the inside of the reaction chamber is kept in a vacuum state. The exhaust velocity of the material gas is, for example, an ON-OFF vacuum valve is arranged in series with the butterfly proportional valve to completely block the fluid in the pipe.

10 is a cross-sectional view of the vacuum valve 100 described in Patent Document 1. As shown in FIG.

For example, in the vacuum valve 100 of patent document 1, the piston 111 is accommodated in the cylinder 11, and comprises the drive part. The piston 111 is connected to the valve body 113 via the drive shaft 112. The valve body 113 is built in the valve chamber 123 of the body 120 so that it may contact or fall off the valve seat 124 formed in the inner wall of the valve chamber 123. The valve body 113 is fixed to the lower end portion 115b of the bellows 115 by a fixing screw 130, and between the lower end 115b of the bellows 115 and the retaining member 114. The annular seal member 117 is attached to the formed ant groove 116 so that an elastic deformation is possible. The upper end 115a of the bellows 115 is sandwiched between the cylinder adapter 141 of the cylinder 110 and the body 120, and the lower end 115b is connected to the drive shaft 112, and the valve body 113. It expands and contracts in the valve chamber 123 according to the driving of the.

The piston 111 holds a bellofram 118. The bellows 118 hermetically partitions the internal space of the cylinder 110 into the primary chamber 119A and the secondary chamber 119B. The vacuum valve 100 presses the valve body 113 to the valve seat 124 by the compression spring 126 built in the primary chamber 119A to mount the annular seal member 117 to the valve seat 124. Obtain valve closing force. The vacuum valve 100 supplies the operation air from the operation port (not shown) to the secondary chamber 119B, and moves the valve body 113 upward by moving the piston 111 upward against the compression spring 126. Separated from the valve seat 124, the first port 121 and the second port 122 of the body 120 is connected as a flow path.

The vacuum valve 100 stacks the annular seal member 125, the upper end 115a of the bellows 115, and the cylinder adapter 141 on the connection portion 128 welded to the body 120, and the body with a bolt (not shown). (120) and the cylinder adapter 121 are connected. The annular seal member 125 is pressed between the upper end portion 115a and the connecting portion 128 to prevent outside air from invading the body 120.

However, when the vacuum valve 100 is used in the CVD apparatus, the working gas is solidified to adhere the product in the flow path. When the product forms a film on the wafer in the reaction chamber, the product is mixed with the film as a foreign matter, which may deteriorate the yield of the product. Therefore, the vacuum valve 100 attaches the heater 127 to the body 120, warms a gas contact part, and suppresses generation | occurrence | production of a product.

However, the vacuum valve 100 has a place where the working gas tends to stay, such as the gap between the ant groove 116 and the annular seal member 117 and the concave portion of the bellows 115. In such a place, even if it heats with the heater 127, a product adheres easily. Therefore, the vacuum valve 100 needs to frequently perform maintenance such as cleaning the bellows 1150, replacing the annular seal member 117, replacing the heater 127, and the like.

When the piston 111 rotates in the cylinder 110 during maintenance of the vacuum valve 100, the bellows 118 may be twisted and wrinkles may occur. The vacuum valve 100 is formed so as to protrude the anti-rotation pin 129 from the piston 111 to the outside, and opens a predetermined clearance in the window (110a) formed in the cylinder (110). The clearance is formed to prevent the anti-rotation pin 129 from contacting the cylinder 110 while the sliding valve is generated during the operation of the vacuum valve 100. However, if the vacuum valve 100 is disassembled and assembled with clearance formed, the piston 111 may rotate in the cylinder 110, and there exists a possibility that the bellows 118 may wrinkle. Therefore, at the time of disassembly and assembly of the vacuum valve 100, the clearance removal member 140 is provided between the anti-rotation pin 129 and the window 110a, and the rotation of the cylinder 111 is prevented.

[Patent Document 1] Japanese Unexamined Patent Publication No. 2000-163136

However, the vacuum valve 100 stopped the rotation of the piston 111 to prevent the torsion of the bellows 118, but the structure is complicated. That is, the anti-rotation structure of the piston 111 is a window 110a formed in the cylinder 110 for preventing the vertical movement of the anti-rotation pin 129 and the anti-rotation pin 129 installed on the piston 111, vacuum When the valve 100 is disassembled, the clearance removal member 140 disposed between the anti-rotation pin 129 and the window 110a is required, so that the number of parts is large. In addition, the vacuum valve 100 requires the removal and removal of the clearance removing member 140 at the time of disassembly, which complicates the procedure of disassembly.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum valve in which the anti-rotation structure of the piston is easy to disassemble.

The vacuum valve according to the present invention has the following structure.

(1) In one aspect of the present invention, there is provided a body including a valve seat, a valve body in contact with or dropped from the valve seat, and a driving unit for applying a driving force to the valve body, wherein the driving unit is connected to the valve body. A vacuum valve comprising a drive shaft, a piston connected to an opposite side of the valve body of the drive shaft, a cylinder including a piston chamber for accommodating the piston, and a bellows retained at the piston to partition the piston chamber. Is a projection or a recess protruding in the movement direction, the cylinder is coupled to the projection or the concave portion when disassembled on the surface facing the projection or the concave portion formed anti-rotation portion to prevent the rotation of the piston It is.

(2) In the invention described in (1), the piston is fixed to the drive shaft so as not to insert the protrusion or the recess into the anti-rotation part in a range where the valve body is movable when the vacuum valve is being used. desirable.

(3) In the invention described in (1) or (2), it is preferable to have a biasing member for biasing the piston in the direction in which the protrusion or the recess is inserted into the anti-rotation part.

(4) In the invention described in (3), when the connection between the drive unit and the body is disassembled, it is preferable that the protrusion or the recess is inserted into the anti-rotation part by the force of the biasing member.

The vacuum valve includes a body including a valve seat, a valve body in contact with or falling off the valve seat, and a driving part for applying a driving force to the valve body, the driving part being connected to the valve body of the driving shaft and the valve body of the driving shaft. A vacuum valve comprising a piston, a cylinder including a piston chamber for accommodating the piston, and a bellows retained at the piston to define the piston chamber, wherein the piston includes a protrusion or a recess projecting in the moving direction, and the cylinder includes a protrusion or On the surface opposite to the recessed portion, a rotation preventing portion is formed in engagement with the protrusion or the recessed portion to prevent rotation of the piston when disassembled. Since such a vacuum valve prevents rotation by combining with the anti-rotation portion formed in the cylinder, the protrusion or the recess of the piston, there is no component used for preventing rotation. In addition, since the rotation of the cylinder is prevented without removing other components at the time of disassembly, the disassembly procedure of the vacuum valve is simple. Therefore, according to the said vacuum valve, the structure which prevents rotation of a piston is simple, and disassembly operation can be performed easily.

In the vacuum valve, the piston is fixed to the drive shaft so that the projection or the recess is not coupled to the anti-rotation portion in the range in which the valve body is movable when the vacuum valve is not used. In such a vacuum valve, the protrusions or the recesses come out of the anti-rotation part during use, and the protrusions or the recesses interfere with the anti-rotation part when the valve body moves, so that no work defect occurs.

In the vacuum valve, since the protrusion or the recess has a biasing member for biasing the piston in a direction that engages the rotation preventing portion, the protrusion or recess can be easily coupled to the rotation preventing portion by the force of the biasing member.

When the vacuum valve is disconnected from the driving unit and the body, the protrusion or recess is coupled to the anti-rotation part by the force of the biasing member, so that the protrusion or the recess is automatically coupled to the anti-rotation unit during disassembly. Can be.

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of the vacuum valve which concerns on this invention is described in detail, referring drawings.

(First embodiment)

<Overall Structure of Vacuum Valve>

1 is a bottom view of the vacuum valve 1, and FIG. 2 is a cross-sectional view taken along line AA of FIG.

The vacuum valve 1 includes a drive unit 2 and a valve unit 3. The drive part 2 and the valve part 3 are connected by four bolts 5, and constitute the external appearance of the vacuum valve 1.

As shown in FIG. 2, the valve portion 3 is embedded in the body 40. In the body 40, the first port 41 and the second port 42 communicate with each other through the valve chamber 43. The valve seat 44 is formed in the inner surface of the valve chamber 43. The valve chamber 43 is formed so that the valve body 19 may contact or fall off the valve seat 44. In the valve chamber 43 of the body 40, the bellows 25 which is an example of a partition is arrange | positioned so that expansion and contraction are possible with the operation | movement of the valve body 19. As shown in FIG. The connecting portion 4 is fixed to the outer circumference of the upper end of the body 40 by welding or the like, and fits the upper end 25a of the bellows 25 to connect the body 40 to the cylinder 10 of the driving unit 2. .

On the other hand, the drive part 2 is connected to the valve body 19 via the drive shaft 17, and gives a driving force to the valve body 19. FIG. The drive shaft 17 is slidably held in the bearing 19 formed in the cylinder 10, and reciprocates in the vertical direction in the figure. In the cylinder 10, a piston chamber 13 is formed between the cap 11 and the cylinder adapter 12, and the piston 14 is housed in the piston chamber 13. The cap 11 and the cylinder adapter 12 sandwich the outer periphery of the bellows 15 via the bellows presser 16. The bellows presser 16 causes the cap 11 and the cylinder adapter 12 to be coaxial. The bellows 15 is held by the piston 14, and partitions the piston chamber 13 into a primary chamber 13A and a secondary chamber 13B. The primary chamber 13A is open to the atmosphere through the top opening 11a of the cap 11. The secondary chamber 13B communicates with the operation port 12b formed in the cylinder adapter 12, and supplies and exhausts the operation air.

The upper end of the drive shaft 17 is disposed in the piston chamber 13 and connected to the piston 14, and the lower end is disposed in the valve chamber 43 and connected to the valve body 19. Between the cylinder adapter 12 and the valve body 19, the compression spring 20 which is an example of a biasing member is built up, and the valve body 19 is always given the force to the valve left direction. Accordingly, the vacuum valve 1 moves the piston 14 in response to the balance between the internal pressure of the secondary chamber 13B and the elastic force of the compression spring 20 so that the valve body 19 comes into contact with the valve seat 44. Or fall off. In addition, the vacuum valve 1 is provided with a heater (not shown) in the middle of the drive shaft 17, and heats the gas contact parts such as the bellows 25, the valve body 19, and the body 40 by the heat of the heater. The generation of the product is suppressed.

<Specific composition of the piston>

The piston 14 comprises a piston disk 21 and a piston body 22. The piston disc 21 includes a cylindrical portion 21b into which the drive shaft 17 is inserted. On the inner circumferential surface of the cylindrical portion 21b, a female screw for screwing into a male screw formed on the outer circumference of the upper end of the drive shaft 17 is formed. The cylindrical portion 21b is inserted into the bellows 15 and the piston body 22 for positioning. The piston main body 22 is fixed to the piston disk 21 using the fixing screw 23, and clamps the bellows 15 between the piston disk 21. As shown in FIG.

3 is a cross-sectional view showing the drive unit 2 and the bellows 25 separated from the valve unit 3.

The piston 14 is formed by projecting the protrusion 21a in the direction in which the compression spring 20 adds the valve body 19. In this embodiment, since the vacuum valve 1 is a normal closed type, the projection part 21a is formed in the valve left end part of the piston disc 21 so that the protrusion part 21a may protrude in the valve left direction. In addition, in this embodiment, the two projection parts 21a are formed in the position which opposes the drive shaft 17. As shown in FIG.

The cylinder 10 has an anti-rotation portion 12a coupled to the protrusion 21a to an inner wall (valve seat inner wall) of the piston chamber 13 facing the protrusion 21a to prevent rotation of the piston 14. Formed. The anti-rotation part 12a is larger than the number of the projection parts 21a, and is formed in the circumferential direction of the cylinder adapter 12 at equal intervals. The reason why the number of the anti-rotation parts 12a is larger than the number of the protrusions 21a is to facilitate the assembly of the drive unit 2. The piston disk 21 is provided with a mounting hole for mounting the O-ring 24 on the surface opposite to the surface on which the protrusion 21a is formed. The O-ring 24 is pressed in the mounting hole to seal between the piston disk 21 and the piston body 22.

As shown in FIG. 2, the vacuum valve 1 has a piston 14 so that the projection portion 21a is not inserted into the rotation preventing portion 12a when the valve body 19 is in contact with the valve seat 44. It is fixed to the drive shaft 17.

<Specific Configuration of Valve Body>

1 and 2, the valve body 19 is fixed to the bellows disk 25b (an example of the valve body main body) in which the valve disk 26, which is an example of the holding member, is formed at the lower end of the bellows 25. As shown in Figs. The annular seal member 28 is attached to the ant groove 45 formed between the valve disk 26 and the bellows disk 25b. The bellows 25 is made of metal, and is formed by connecting the upper end portion 25a and the bellows disk 25b with a corrugation box portion 25c.

4 is an enlarged view of a portion X of FIG. 2.

The upper end portion 25a of the bellows 25 is inserted into the insertion portion 4a of the connecting portion 4 without any gap and positioned relative to the body 40. In the upper end portion 25a, a seal groove 30 for mounting the annular seal member 29 is formed on a surface facing the insertion portion 4a. The annular seal member 29 is tightly sealed to the inner wall of the seal groove 30 and the inner wall of the insertion portion 4a to prevent the body 40 from entering the outside air. At the outer periphery of the upper end portion 25a, a thick portion 25d thickened in the axial direction of the bellows 25 is formed. The thickness portion 25d has a thickness that protrudes from the connecting portion 4 toward the cylinder 10 when the upper portion 25a is coupled to the connecting portion 4. The thickness part 25d is inserted into the positioning step part 12c formed in the lower end part of the cylinder adapter 12, and positions the bellows 25 with respect to the cylinder adapter 12. As shown in FIG. Thus, the body 40 and the cylinder 10 are positioned via the connection 4 and the bellows 25.

In the part which protrudes from the connection part 4 of the thickness part 25d, the ingot 31 which is an example of a recessed part is formed. In order to pull the upper end portion 25a from the connecting portion 4 with a small force by using a tool coupled to the latching tool 31, the hanging handle 31 inserts the upper end portion 25a into the insertion portion 4a. Is formed at a position corresponding to the upper end of the connecting portion 4. The hanging ruler 31 is formed annularly along the outer peripheral surface of the thickness part 25d.

As shown in FIG. 2, the bellows disk 25b is threaded at the lower end of the drive shaft 17. The bellows 25 is arrange | positioned in the valve chamber 43 so that the compression spring 20 may be covered by the corrugation box part 25c, and the particle | grains which generate | occur | produce in the compression spring 20 or a sliding part are not supplied into a flow path.

The valve left end surface is flat in the bellows disk 25b, and the accommodating recess 32 for accommodating the valve disk 26 is formed circularly. A circumferential portion 25e protrudes from the bellows disk 25b on the opposite side of the valve left end face, and is thickened to form a screw hole for screwing the fixing screw 27 or an extrusion screw 37 which is an example of the extruded member. have. The positioning recess 33 is annularly formed in the inner wall of the storage recess 32. The screw hole to which the fixed screw 27 is screwed is formed at equal intervals in the circumferential direction, and the annular seal member 28 is pressed equally. And the screw hole screwed by the extrusion screw 37 is formed eccentrically with respect to the bellows disk 25b. The compression screw 37 inclines the valve disk 26 with respect to the bellows disk 25b, and makes it easy to peel off the annular seal member 28. As shown in FIG. In this embodiment, the screw hole to which the fixing screw 27 and the extrusion screw 37 screw-engages is formed on the positioning recessed part 33.

The valve disc 26 has a disc shape having a thickness that can be accommodated in the receiving recess 32. In the valve disc 26, the convex part 34 for inserting into the positioning recessed part 33 and positioning the valve disc 26 with respect to the bellows disk 25b protrudes annularly at the bellows side end surface.

5 is an enlarged view of a portion Y of FIG. 2.

The valve disk 26 is formed with a recess 26a for accommodating the head of the extrusion screw 37 on a surface in contact with the bellows disk 25b, and the valve disk 26 has a bottom surface of the storage recess 32. In contact with each other, an opening groove 45 is formed between the outer circumferential surface of the valve disc 26 and the inner circumferential surface of the storage recess 32. In the valve disc 26, a through hole 26b for inserting a tool for applying rotational force to the extrusion screw 37 is formed coaxially with the recess 26a. The through hole 26b is formed to have a diameter smaller than the inner diameter of the recess 256a and the outer dimension of the head of the extrusion screw 37, so that the extrusion screw 37 can contact the inner wall of the recess 26a. It is.

<Maintenance method>

Next, the maintenance method of the said vacuum valve 1 is demonstrated.

First, in order to prevent the elastic force of the compression spring 20 from acting on the valve seat 44, operation air is put into the operation port 12b, and the valve body 19 is dropped from the valve seat 44. Remove 5) from the vacuum valve (1). Thereafter, the operation air is discharged from the operation port 12b. As the operation air is discharged, the compression spring 20 extends to bring the valve body 19 into contact with the valve seat 44. Since the bolt 5 is released, the compression spring 20 continues to expand, raising the cylinder 10 from the body 40, and automatically inserting the rotation preventing portion 12a into the protrusion 21a. As a result, the piston 14 cannot rotate with respect to the cylinder 10. Rotation of the piston disk 21 is prevented, and rotation of the drive shaft 17 screwed to the piston disk 21 is prevented. After disassembling the body 40 and the valve disk 26, the bellows 25 is rotated about the drive shaft 17, and disassembled and cleaned by the drive shaft 17. In addition, the annular seal members 28 and 29 are replaced.

After the maintenance is completed, the vacuum valve 1 is assembled in the reverse order to the above. The projection part 21a is inserted into the rotation prevention part 12a until the drive part 2 is attached to the connection part 4 in the body 40. As shown in FIG. Therefore, the bellows 15 is not subjected to twisting force during disassembly or assembly, and wrinkles are less likely to occur.

When the installation and assembly of the body 40 and the drive unit 2 of the vacuum valve 1 are completed using the connection unit 4, the valve body 19 is brought into contact with the valve seat 44 by the compression spring 20. The valve is closed. At this time, the piston 14 is lifted from the inner wall of the piston chamber 13 so that the protrusion 21a of the piston disk 21 is not inserted into the anti-rotation part 12a of the cylinder 10. As a result, the rotation prevention of the piston 14 is automatically released.

By the way, when the vacuum valve 1 is disassembled, the annular seal member 29 is fixed to the upper end portion 25a and the connecting portion 4 in the up and down direction so that the connecting portion 4 can be removed even when the bolt 5 is disassembled. Is attached to the upper end 25a. In this state, the bellows 25 cannot be cleaned and the annular seal member 29 cannot be replaced.

In such a case, a tool such as a negative driver is inserted into the hooking portion 31, and the upper end portion 25a is lifted from the connecting portion 4 using the principle of the lever. As a result, the annular seal member 29 emerges from the connecting portion 4 or the upper end portion 25a, and the connecting portion 4 and the bellows 25 are separated.

If the annular seal member 28 is fixed to the valve disk 26 and the bellows disk 25, the valve disk 2 is separated from the bellows disk 25b even if the fixing screw 27 is released. The annular seal member 28 cannot be replaced.

In this case, the valve disk 26 is inserted into the through hole 26b by inserting a general-purpose tool such as a hexagon wrench or a screwdriver into the extrusion screw 37 so that the extrusion screw 37 protrudes from the bellows disk 25b. Rotate Then, the valve disk 26 is extruded so that the bellows disk 25b may rise in accordance with the traveling force of the extrusion screw 37, and the fixation of the annular seal member 28 is eliminated.

<Effect>

The vacuum valve 1 includes a body 40 including the valve seat 44 and a driving unit 2 for applying a driving force to the valve body 19 and the valve body 19 in contact with or falling off the valve seat 44. And a piston 14 for connecting the drive shaft 17 connected to the valve body 19 and the valve body 19 of the drive shaft 17 opposite to the valve body 19, and a piston accommodating the piston 14. In the vacuum valve (1) comprising a cylinder (10) comprising a seal (13) and a bellows (15) held in the piston (14) and partitioning the piston chamber (13), the piston (14) moves in the direction of movement. The projection part 21a protrudes into the shape, and the cylinder 10 has the rotation prevention part 12a which prevents rotation of the piston 14 inserted in the projection part 21a in the surface which opposes the projection part 21a, have. Since the vacuum valve 1 prevents rotation by inserting the protrusion 21a of the piston 14 into the anti-rotation part 12a formed in the cylinder 10, there is no component used to prevent rotation. In addition, since the rotation of the piston 14 is prevented without detaching other components during disassembly, the disassembly operation procedure of the vacuum valve 1 is simple. Therefore, according to the said vacuum valve 1, the rotation prevention structure of the piston 14 is simple, and disassembly can be made easy.

In the vacuum valve (1), the piston (14) has a drive shaft (not shown) so that the projection (21a) is not inserted into the rotation preventing portion (12a) in the range where the valve body (19) is movable when the vacuum valve (1) is used. It is fixed to 17). In such a vacuum valve 1, the projection 21a exits from the anti-rotation portion 12a during use, and when the valve body moves, the projection 21a interferes with the anti-rotation portion 12a so that no malfunction occurs.

In the vacuum valve 1, since the protrusion 21a has a compression spring 20 for biasing the piston 14 in the direction in which the protrusion 21a is inserted into the anti-rotation part 12a, the protrusion (a) is applied by the force of the compression spring 20. 21a) can be easily inserted into the anti-rotation part 12a.

When the vacuum valve 1 releases the connection between the driving unit 2 and the body 40, the protrusion 21a is inserted into the anti-rotation part 12a according to the force of the compression spring 20. At the time of disassembly, the projection part 21a can be automatically inserted into the rotation prevention part 12a.

(2nd embodiment)

Next, 2nd Embodiment of this invention is described, referring drawings. 6 is a cross-sectional view of the vacuum valve 1A according to the second embodiment of the present invention.

In the vacuum valve 1A of the second embodiment, the connection structure of the drive unit 2 and the valve unit 3 is different from the first embodiment. Therefore, it demonstrates centering around a different point from 1st Embodiment here. In addition, the same code | symbol as 1st Embodiment is attached | subjected to drawing in the same structure as 1st Embodiment, and description is abbreviate | omitted suitably.

The closing member 62 and the cap 63 are provided in the cylinder-shaped cylinder main body 61 of the cylinder 10, The piston 68 is attached, and the piston chamber 13B is formed. The cylinder main body 61 is provided with an operating port 61a so as to communicate with the cylinder chamber 13B. The drive shaft 17 is fixed to the piston 68 by the screw 66. The drive shaft 17 protrudes into the body 64 and is connected to the valve body 19 with a screw 67 to transmit the driving force of the drive unit 2 to the valve body 19. The sliding portion of the drive shaft 17 is covered with the bellows 65 so that particles are not supplied to the flow path.

The connecting portion 64a is integrally formed in the upper portion of the body 64. The bellows 65 includes an upper end 65a (an example of a partition), a bellows disk 65b (an example of a valve body), and a corrugated limb 65c. The upper end 65a is inserted into the connecting portion 64a of the body 64 through the annular seal member 29, and the body 64 is connected to the driving unit 2 stacked on the upper end 65a by bolts (not shown). have. The annular seal member 29 is sealed between the connecting portion 64a and the upper end portion 65a so that no fluid flows in and out of the body 64. The upper end part protrudes toward the drive part 2 from the connection part 64a, and the upper end part 65a has the annular part 31 annularly formed in the outer peripheral surface of the protruding part.

Such a vacuum valve 1A cannot be disassembled if the annular seal member 29 is fixed to the connecting portion 64a and the upper end portion 65a during maintenance. At this time, after releasing the bolt (not shown) to release the drive unit 2 from the body 64, a universal tool is put into the hooking unit 31, and the upper end 65a is connected to the connecting unit 64a using the principle of the lever. When lifted up, the fixation can be released. Therefore, according to the vacuum valve 1A, even if the annular seal member 29 is stuck to the upper end part 65a and the connection part 64a, it can disassemble | disassemble the upper end part 65a and the connection part 64a easily.

In addition, this invention is not limited to the said embodiment, A various application is possible.

(1) For example, in the above embodiment, the hook portion 31 is formed in an annular shape, but the hook portion 31 is partially provided at one or a plurality of places on the upper ends 25a, 65a of the bellows 25, 65. You may form.

(2) For example, as shown in FIG. 8, the annular convex part 25g is formed in the part which the thickness part 25d of the bellows 25 protrudes from the connection part 4, and the cylinder adapter 12 of the The positioning step 12e for positioning the cylinder adapter 12 with respect to the bellows 25 may be formed by inserting into the annular convex part 25g at the lower end part. In this case, a bellows (25h) for fastening the tool is formed in a part of the annular convex portion (25g), the same as the hook portion 31 of the above embodiment, and fixed through the seal member (29) 25 and the body 40 may be separated.

(3) For example, in the said embodiment, the extrusion screw 37 was made into an example of an extrusion member. On the other hand, the extrusion member is formed to be able to swing on the bellows disk 25b, and the other end of the extrusion member causes the valve disk 26 to be extruded from the bellows disk 25b when one end of the extrusion member is pressed against the tip of the tool. Also good. Also in this case, the through-hole 26b which inserts a tool in the part corresponding to the one end of the extrusion member of the valve disk 26 may be formed.

(4) In addition, in the said embodiment, although the recessed part 26a which accommodates an extrusion member was formed in the valve disk 26, you may form a recessed part in the bellows disk 25b.

(5) Further, for example, the convex portion formed on the bellows disk 25b side and the fouling portion formed on the valve disk 26 are combined to position the valve disk 26 with respect to the bellows disk 25b. Also good. In addition, neither of the bellows disk 25b and the valve disk 26 need be provided with the positioning irregularities.

(6) For example, in the said embodiment, although the vacuum valve 1, 1A is a normal closed type, a normal open type valve may be sufficient.

(7) For example, in the said embodiment, although the drive part 2 accommodates only one piston 14 and 68, you may accommodate two or more pistons 14 and 68.

(8) For example, in the constant embodiment, the valve body 19 is driven by the balance of the elastic force of the compression spring 20 and the internal pressure of the secondary chamber 13B. In contrast, for example, the cylinder 10 is provided with a closing function to the cap 63 shown in FIG. 6, and an operation port for supplying and supplying the operation air communicates with the primary chamber 13A and the secondary chamber 13B. The compression spring 20 may be omitted, respectively, by forming the valve body 19 to drive the valve body 19 in accordance with the pressure balance between the primary chamber 13A and the secondary chamber 13B.

(9) For example, in the said embodiment, although the bellows 25 is an example of a partition, the partition 51 which does not contain the corrugation box part 25c like the vacuum valve 1B shown in FIG. ) May be sandwiched between the drive unit 2 and the body 40 (connecting unit 4). At this time, it is preferable to seal between the partition 51 and the drive shaft 17 with the seal member 52 to prevent the fluid from leaking between the body 40 and the drive unit 2. Moreover, the valve body main body 54 is provided in the lower end part of the drive shaft 17, the valve disc 26 is provided in the storage recessed part 32 of the valve body main body 54, and the valve body 19 is comprised, Also good.

(10) For example, in the said embodiment, the projection part 21a was formed in the piston 14, and the concave rotation prevention part 12a was formed in the cylinder 10. As shown in FIG. In contrast, as shown in FIG. 7, a recess 21d is formed in the piston disk 21A of the piston 14A, and corresponds to the recess 21d of the cylinder disk 12A constituting the cylinder 10A. 12 d of rotation prevention parts may be respectively protruded in the place to be made. Even in this case, when the drive unit 2 is released from the body 40, the piston 14A is moved by the force of the compression spring 53 to automatically insert the recess 21d into the anti-rotation unit 12d. The rotation can be prevented.

(11) For example, in the said embodiment, although the compression spring 20 is arrange | positioned in the body 40, as shown in FIG. 7, the compression spring 53 (an example of a biasing member) of the cylinder 10 is carried out. It may be disposed in the primary room 13A.

(12) For example, as shown in FIG. 9, the taper 34 is formed in the outer peripheral surface and the inner peripheral surface of the convex part 34, and the convex part 34 becomes thinner toward the end, and the positioning part 33 The taper 33a corresponding to the convex portion 34 may be tongued on the surface which slides on the convex portion 34 so that the convex portion 34 may be easily released from the positioning portion 33. In this case, the valve disk 26 can be separated from the bellows disk 35b without being affected by the engagement length between the convex portion 34 and the positioning portion 33.

(13) For example, even if the arrangement | positioning of the fixing screw 27 and the extrusion screw 37 differs from the said embodiment (for example, arrange | positioning the extrusion screw 37 to the center of the bellows disk 25b, etc.) In the same manner as in the above embodiment, the valve disk 26 can be lifted off the bellows disk 25b and separated by the traveling force of the extrusion screw 37.

1 is a bottom view of a vacuum valve according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along AA of FIG. 1.

3 is a cross-sectional view showing the drive section and the bellows separated from the valve section.

4 is an enlarged cross-sectional view of part X of FIG. 2.

5 is an enlarged cross-sectional view of a portion Y of FIG.

6 is a sectional view of a vacuum valve according to a second embodiment of the present invention.

7 is a modification of the vacuum valve.

8 is a view showing an example of a recess.

9 is a modification of the convex portion and the positioning concave portion.

10 is a cross-sectional view of the vacuum valve described in Patent Document 1. FIG.

[Description of the code]

1, 1B vacuum valve

2 drive section

10 cylinder

12a, 12d anti-rotation part

13 piston seal

14 piston

15 Bellows

17 drive shaft

20 compression spring (an example of a biasing member)

21a projection

21b recess

Claims (4)

A body including a valve seat, a valve body in contact with or falling from the valve seat, and a driving unit for applying a driving force to the valve body, The drive unit includes a drive shaft connected to the valve body, a piston connected to the opposite side of the valve body of the drive shaft, a cylinder including a piston chamber accommodating the piston, and a bellows retained at the piston to partition the piston chamber. In the vacuum valve containing, The piston includes a protrusion or a recess projecting in the movement direction, The cylinder has an anti-rotation part formed on a surface opposite the protrusion part or the concave part to prevent rotation of the piston by engaging with the protrusion part or the concave part when disassembled. And the piston is fixed to the drive shaft so as not to insert the protrusion or the concave portion into the anti-rotation portion in a range in which the valve body is movable when the vacuum valve is in use. delete The method of claim 1, And a biasing member for biasing the piston in a direction in which the protrusion or the recess is inserted into the rotation preventing portion. The method of claim 3, And when the connection between the drive unit and the body is released, the protrusion or the recess is inserted into the anti-rotation part by the force of the biasing member.

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