KR100929577B1 - Roller unit and substrate processing apparatus including the same - Google Patents

Abstract

The roller unit includes a shaft, rollers and spray nozzles. The shaft has a hollow structure in order to introduce chemicals from the outside. The rollers are rotatably installed in the shaft along the longitudinal direction and support the substrate. A plurality of spray nozzles are installed along the longitudinal direction in the shaft, and spray the substrate to support the chemical. Therefore, by providing injection nozzles for injecting chemicals into the roller unit supporting the substrate to be conveyed, manufacturing costs can be reduced while efficiently utilizing space.

Description

ROLLER UNIT AND APPARATUS FOR PROCESSING A GLASS INCLUDING THE SAME

The present invention relates to a roller unit and a substrate processing apparatus including the same, and more particularly, to a roller unit used for conveying a substrate and an apparatus for processing a substrate therethrough.

In general, a display device, which is one of semiconductor integrated circuit devices, is manufactured by performing a deposition process, an etching process, a photolithography process, a cleaning process, or the like based on a glass substrate.

Among these processes, an etching process or a cleaning process is performed while conveying the substrate through a plurality of roller units installed parallel to each other in a process chamber. At this time, the conveyance of the substrate is substantially made by providing a driving force to the outside of some of the roller units, the other roller units are simply rotatably installed to support the substrate to be conveyed.

In addition, the etching process or the cleaning process is performed while injecting the chemical to the back surface of the substrate using the chemical injection unit while the substrate is conveyed by the roller units.

To this end, the chemical spray unit is installed between the roller units. That is, the chemical spraying unit is installed in parallel with the roller units and is formed at regular intervals along the longitudinal direction of the shaft and the shaft through which the chemical is introduced from an external chemical supply unit to spray the chemical onto the back surface of the substrate. Injection nozzles.

However, there is a problem in that a predetermined space is required between the roller units in order to install the chemical spray unit between the roller units, and the manufacturing cost increases because the chemical spray unit is separately installed.

Accordingly, the present invention has been made in view of such problems, and an object of the present invention is to provide a roller unit capable of injecting chemicals onto the substrate while supporting the substrate to be conveyed.

Further, another object of the present invention is to provide a substrate processing apparatus including the roller unit described above.

In order to achieve the object of the present invention described above, a roller unit according to one aspect comprises a shaft, rollers and injection nozzles. The shaft has a hollow structure in order to introduce chemicals from the outside. The rollers are rotatably installed in the shaft along the longitudinal direction and support the substrate. A plurality of spray nozzles are installed in the shaft along the length direction, and spray the chemical onto the supporting substrate.

The spray nozzle may protrude from the shaft in a direction parallel to the substrate. In addition, the injection nozzle may include a guide portion for guiding the chemical supplied from the shaft to the substrate at the end. The roller may be in point contact with the substrate to be conveyed.

In order to achieve the above object of the present invention, a roller unit according to another feature includes a shaft and rollers. The shaft has a hollow structure in which chemical is introduced from the outside. The rollers are rotatably installed in the shaft along the longitudinal direction and support the substrate. Thus, the shaft is provided with a plurality along the longitudinal direction, the injection hole for injecting the chemical to the supporting substrate is formed.

Thus, the injection holes may be formed such that the chemical is inclined to the substrate.

In order to achieve the above object of the present invention, a substrate processing apparatus according to one feature includes a process chamber, a first roller unit and a second roller unit. The process chamber provides space for processing a substrate. The first roller unit is rotatably installed in the process chamber, the substrate for processing is located at an upper portion, and consists of at least one conveying the substrate located at the upper portion through an external driving force. The second roller unit is a hollow shaft installed in parallel with the first roller unit in the process chamber and a chemical flows from the outside, and a plurality of the second roller units are rotatably installed along the longitudinal direction of the shaft, and the conveyance is carried from the upper side. At least one having a plurality of rollers for supporting the substrate and a plurality of spray nozzles are installed in the shaft along the longitudinal direction and spray the chemical onto the conveying substrate to process the substrate.

In this case, a plurality of the first roller units may be disposed in parallel to the inside of the process chamber, and the second roller unit may be installed adjacent to the inlet or the outlet of the process chamber.

Meanwhile, the substrate processing apparatus may further include an air ejection unit installed adjacent to the second roller unit and injecting air to the substrate to prevent leakage of chemicals injected from the second roller unit to the surroundings. have.

The substrate processing apparatus may further include a third roller unit that is rotatably installed in parallel with the first roller unit and supports the substrate to be conveyed.

According to such a roller unit and a substrate processing apparatus including the same, injecting the chemical onto the substrate by installing rollers for supporting the substrate to be transported on one shaft and spray nozzles for injecting the chemical to the substrate to be transported together. There is no need for a separate installation space for the space can be utilized more efficiently.

In addition, as in the description of the background art for the injection of the chemical, by not using a separate injection shaft, it is possible to reduce the overall manufacturing cost.

Hereinafter, a chemical spray apparatus and a substrate processing apparatus including the same according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art, and, unless expressly defined in this application, are construed in ideal or overly formal meanings. It doesn't work.

1 is a schematic view illustrating a substrate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a side view of the substrate processing apparatus illustrated in FIG. 1.

1 and 2, a substrate processing apparatus 1000 according to an embodiment of the present invention may include a process chamber 100, a first roller unit 200, a second roller unit 300, and a third roller unit. 400.

The process chamber 100 provides a space for processing the substrate G loaded from the outside. Herein, the substrate G may be a glass substrate G used for manufacturing a display element. Alternatively, the substrate G may be a semiconductor substrate G for manufacturing a semiconductor device.

The first roller unit 200 is installed in the process chamber 100. The substrate G, which is loaded and processed into the process chamber 100, is positioned above the first roller unit 200. The said 1st roller unit 200 conveys the said board | substrate G located in the upper part. Thus, the first roller unit 200 is connected to the external drive unit 10 has its own rotational force. Specifically, the first roller unit 200 is structurally connected to the drive unit 10 and fixedly installed at regular intervals along the longitudinal direction to the first shaft 210 and the first shaft 210 to which rotational force is provided. And first rollers 220 rotating together with the first shaft 210.

The first roller unit 200 may be installed in parallel with each other at intervals shorter than the length of the substrate (G) in the transfer direction of the substrate (G) for smooth conveyance of the substrate (G). have.

The second roller unit 300 is installed in the process chamber 100 in parallel with each other in a parallel structure with the first roller unit 200. The second roller unit 300 has a configuration similar to the first roller unit 200.

In detail, the second roller unit 300 may include a hollow second shaft 310 installed in parallel with the first shaft 210, and a second roller unit 300 installed at regular intervals along the length direction of the second shaft 310. Two rollers 320.

However, unlike the first roller unit 200, the second roller unit 300 serves to support the substrate G which is merely conveyed without providing rotational force to the second shaft 310. . Accordingly, the second rollers 320 of the second roller unit 300 are rotatably installed on the second shaft 310.

In addition, the second roller unit 300 is sprayed on the rear surface of the substrate (G) to receive and transport the chemical (C) from the external chemical supply unit 20 to the etching process or the cleaning process for the substrate (G) Let this be done. In this case, the chemical (C) may include sulfuric acid (H 2 SO 4), hydrochloric acid (HCl), hydrofluoric acid (HF), hydrogen peroxide solution (H 2 O 2), deionized water (H 2 O) and the like depending on the type of the process.

To this end, the second roller unit 300 is provided with a plurality of injection nozzles 330 in the longitudinal direction between the second roller 320 and the outer of the second shaft 310.

In other words, the chemical C flows into the second shaft 310 from the chemical supply unit 20, and then is supplied to the injection nozzles 330 from the second shaft 310 to convey the substrate ( It is sprayed on the back side of G).

Hereinafter, the injection nozzle 330 will be described in more detail with reference to FIG. 3.

3 is an enlarged view of a portion A of FIG. 2.

Referring to FIG. 3, the spray nozzles 330 are installed at regular intervals on the second shaft 310 to uniformly spray the chemical C on the back surface of the substrate G to be transported.

The spray nozzle 330 protrudes in a direction parallel to the substrate G conveyed from the second shaft 310. This is to allow the chemical C injected from the spray nozzle 330 to be uniformly sprayed on the rear surface of the substrate G which is conveyed even at the positions of the second rollers 320.

Accordingly, the injection nozzle 330 includes a guide portion 332 for guiding the chemical C to the upper portion where the substrate (G) is carried at the end.

The guide part 332 is formed to include a tapered surface in a substantially upward direction in the advancing direction of the chemical C introduced from the second shaft 310. Thus, the chemical (C) is guided in the upper direction while hitting the tapered surface of the guide portion 332. At this time, since the chemical (C) hits the tapered surface of the guide portion 332, it is possible to obtain the effect of being more dispersed and sprayed on the substrate (G) to convey than if not otherwise.

The second roller unit 300 may be installed adjacent to the inlet 110 where the substrate G is loaded or the outlet 120 where the substrate G is unloaded in the process chamber 100. have. This is to perform the process more efficiently with respect to the substrate G conveyed in the process chamber 100.

For example, if the second roller unit 300 adjacent to the inlet 110 sprays an acidic chemical C such as hydrochloric acid (HCl) or sulfuric acid (H2SO4) on the rear surface of the substrate G, the outlet The second roller unit 300 adjacent to 120 is a neutral chemical such as hydrogen peroxide solution (H 2 O 2) or deionized water (H 2 O) to remove acidic chemicals (C) such as hydrochloric acid (HCl) or sulfuric acid (H 2 SO 4). (C) can be sprayed on the rear surface of the substrate G.

In addition, when the second roller unit 300 is installed adjacent to the inlet 110 or the outlet 120, the spray nozzle 330 is as close as possible to the inlet 110 or the outlet 120. In order to do so, it may be installed toward the inlet 110 or the outlet 120 with respect to the second shaft 310.

Therefore, the injection nozzle which injects the chemical C to the second rollers 320 supporting the substrate G to be conveyed to one second shaft 310 and the substrate G to be conveyed. By installing the 330 together, there is no need for a separate installation space for injecting the chemical C to the substrate G, and thus the space can be utilized more efficiently.

In addition, as in the description of the background art for the injection of the chemical (C), by not using a separate injection shaft, it is possible to reduce the overall manufacturing cost.

The third roller unit 400 is installed in a position parallel to the first roller unit 200 to support the substrate (G) conveyed by the first roller unit 200 so that the conveyance is made smoothly. Play a role.

To this end, the third roller unit 400 has a configuration similar to that of the first roller unit 200. In detail, the third roller unit 400 is provided with a third shaft 410 parallel to the first shaft 210 and a third roller 420 installed at regular intervals along the length direction of the third shaft 410. )

However, unlike the first roller unit 200, the third roller unit 400 is not connected to the external driving unit 10, and only supports the substrate G to be conveyed. Like the second rollers 320, the 420 may be rotatably installed on the third shaft 410.

On the other hand, when the second roller unit 300 is installed at both the inlet 110 and the outlet 120 as described above, the substrate processing apparatus 1000 is the second roller unit 300 It is further provided with an air injection unit 500 is installed between the blocking the chemical (C) which any one of the second roller unit 300 is injected into the other.

The air injection unit 500 may be provided on the back surface of the substrate G, but in general, since not only the back surface of the substrate G but the opposite surface thereof is processed by the chemical C, The air injection unit 500 may be installed on both sides of the substrate G. At this time, since the opposite surface of the substrate (G) has no spatial constraints due to a separate configuration, it can be processed simply by installing a device for injecting the chemical (C).

Hereinafter, a shape for minimizing the interference of the chemical C injected to the rear surface of the substrate G through the spray nozzles 330 by the second rollers 320 is illustrated in FIGS. 4 and 5. It will be described in detail with reference to the additional.

4 is a front view of the substrate processing apparatus illustrated in FIG. 1, and FIG. 5 is an enlarged view of a portion B of FIG. 4.

4 and 5, the second rollers 320 of the second roller unit 300 come into contact with the substrate G to be conveyed.

In this case, in order to minimize the contact area between the second roller 320 and the substrate G, the contact surface of the second roller 320 may be rounded. As a result, the second roller 320 and the substrate G to be conveyed may be guided to point contact. In this case, the shape of the contact surface of the second roller 320 may be any other shape as long as the second roller 320 makes point contact with the substrate G.

In addition, the first roller 220 of the first roller unit 200 and the third roller 420 of the third roller unit 400 may also be transported to the substrate ( It may have a shape in point contact with G).

As a result, the chemical C injected from the spray nozzle 330 to the rear surface of the substrate G may be minimized due to the first, second, and third rollers 220, 320, and 420. Can be.

6 is a configuration view of the second roller unit of the substrate processing apparatus according to another embodiment of the present invention, viewed from the front, and FIG. 7 is a view of the second roller unit of FIG.

6 and 7, the substrate processing apparatus 1100 according to another exemplary embodiment of the present invention supports the substrate G to be transported from the upper side, and the chemical C from the outside on the rear surface of the substrate G. It includes a second roller unit 600 for spraying.

The second roller unit 600 is formed in a hollow structure and is rotatably installed in the second shaft 610 and the second shaft 610 in which the chemical C is introduced from the outside in a lengthwise direction. And second rollers 620 for supporting the substrate G.

Accordingly, a plurality of injection holes 630 are formed in the second shaft 610 along the longitudinal direction to substantially spray the chemical C on the rear surface of the substrate G.

In this case, the injection holes 630 may be formed such that the chemical C is inclined to the substrate G in order to prevent interference with the second rollers 620.

As such, by forming the injection holes 630 in the second shaft 610, the substrate C may be processed by spraying the chemical C on the rear surface of the substrate G without any additional configuration. .

Although the above description of the present invention has been described with reference to preferred embodiments of the present invention, those skilled in the art or those skilled in the art will have the idea of the present invention described in the claims to be described below. It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.

According to the present invention, the rollers supporting the substrate to be transported on one shaft and the spray nozzles for injecting the chemical to the substrate to be transported are provided together, thereby processing the substrate by spraying the chemical onto the substrate. It can be used to efficiently utilize the space of the.

1 is a configuration diagram schematically illustrating a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a side view of the substrate processing apparatus shown in FIG. 1.

3 is an enlarged view of a portion A of FIG. 2.

4 is a front view of the substrate processing apparatus illustrated in FIG. 1.

5 is an enlarged view of a portion B of FIG. 4.

6 is a configuration view of the second roller unit of the substrate processing apparatus according to another embodiment of the present invention, viewed from the front.

FIG. 7 is a side view of the second roller unit of FIG. 6.

<Explanation of symbols for the main parts of the drawings>

G: Substrate C: Chemical

10: drive unit 20: chemical supply unit

100: process chamber 200: first roller unit

220: first roller 300: second roller unit

320: second roller 330: injection nozzle

400: third roller unit 420: third roller

500: air injection unit 1000: substrate processing apparatus

Claims (15)

delete delete delete delete delete delete A process chamber providing space for processing a substrate; At least one first roller unit rotatably installed in the process chamber, the substrate for processing being located at an upper portion, and transferring the substrate located at the upper portion through an external driving force; And The hollow shaft is installed in parallel with the first roller unit in the process chamber and the chemical flows from the outside, a plurality of rotatably installed in the shaft along the longitudinal direction and supporting the substrate to be transported from the top And at least one second roller unit installed in the shaft and in the shaft in a longitudinal direction and having spray nozzles for spraying the chemical onto the conveying substrate to process the substrate. 8. The substrate processing apparatus of claim 7, wherein a plurality of the first roller units are disposed in parallel to the inside of the process chamber, and the second roller unit is installed adjacent to the inlet or the outlet of the process chamber. The air conditioner of claim 7, further comprising an air ejection unit disposed adjacent to the second roller unit and injecting air to the substrate to prevent the chemical ejected from the second roller unit from leaking to the surroundings. The substrate processing apparatus made into it. 8. The substrate processing apparatus of claim 7, further comprising a third roller unit rotatably installed in parallel with the first roller unit and supporting the substrate to be conveyed. 8. The substrate processing apparatus of claim 7, wherein each of the spray nozzles protrudes from the shaft in a direction parallel to the substrate. The substrate processing apparatus of claim 7, wherein each of the spray nozzles includes a guide part configured to guide the chemical supplied from the shaft to the substrate at an end portion thereof. 8. The apparatus of claim 7, wherein each of the rollers is configured to be in point contact with the substrate being conveyed. A process chamber providing space for processing a substrate; At least one first roller unit rotatably installed in the process chamber, the substrate for processing being located at an upper portion, and transferring the substrate located at the upper portion through an external driving force; And The hollow shaft is installed in parallel with the first roller unit in the process chamber and a plurality of rollers are rotatably installed along the longitudinal direction in the shaft and a plurality of rollers supporting the substrate to be conveyed from the top. At least one second roller unit having a The shaft is provided with a plurality in the longitudinal direction and the substrate processing apparatus, characterized in that the injection holes for processing the substrate by spraying the chemical to the substrate to be formed. The substrate processing apparatus of claim 14, wherein the injection holes are formed such that the chemical is inclined to the substrate.

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