KR100833477B1 - 소형 석영칩 공진파라미터 자동 선택 분리장치 - Google Patents
소형 석영칩 공진파라미터 자동 선택 분리장치 Download PDFInfo
- Publication number
- KR100833477B1 KR100833477B1 KR1020070010938A KR20070010938A KR100833477B1 KR 100833477 B1 KR100833477 B1 KR 100833477B1 KR 1020070010938 A KR1020070010938 A KR 1020070010938A KR 20070010938 A KR20070010938 A KR 20070010938A KR 100833477 B1 KR100833477 B1 KR 100833477B1
- Authority
- KR
- South Korea
- Prior art keywords
- chip
- suction head
- track
- quartz chip
- webcam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000010453 quartz Substances 0.000 title claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 238000000926 separation method Methods 0.000 title abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 239000002994 raw material Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 244000223014 Syzygium aromaticum Species 0.000 description 1
- 235000016639 Syzygium aromaticum Nutrition 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/14—Picture signal circuitry for video frequency region
- H04N5/21—Circuitry for suppressing or minimising disturbance, e.g. moiré or halo
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Acoustics & Sound (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Sorting Of Articles (AREA)
Abstract
Description
Claims (2)
- 작업대(13)의 한쪽에 고정설치되어 있는 투입대(4)와, 상기 작업대(13)의 맞은 켠에 고정설치되어 있는 분리대(9)와, 상기 투입대(4)와 상기 분리대(9) 사이에 고정설치되어 있는 측량대(6)와, 상기 작업대(13)와 수직되어 있는 기판(14)과, 상기 기판(14)에 고정설치되어 있는 궤도(1)와, 상기 투입대(4)의 상부 쪽에 위치되어 있으며 고정대(7)를 통하여 상기 기판(14)과 연결되어 있는 웹캠(webcam)(5)과, 상기 궤도(1)에 설치되어 있으며 컴퓨터로 수평방향에서 이동할 수 있게 컨트롤을 할 수 있는 슬라이딩모듈(3)에 고정 설치되어 있는 흡입두(2)와, 상기 흡입두(2)와 상기 측량대(6)를 통 털어 포함하여 구성된 측량장치를 특징으로 하는 소형 석영칩 공진파라미터 자동 선택 분리장치.
- 제 1항에 있어서,상기 측량장치에서 상기 흡입두(2)를 상전극으로, 상기 측량대(6)가 하전극으로 되어 있는 것을 특징으로 하는 소형 석영칩 공진파라미터 자동선택 분리장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200620122879.8 | 2006-07-28 | ||
CNU2006201228798U CN200939436Y (zh) | 2006-07-28 | 2006-07-28 | 小型石英晶片谐振参数自动选分装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080011030A KR20080011030A (ko) | 2008-01-31 |
KR100833477B1 true KR100833477B1 (ko) | 2008-05-29 |
Family
ID=38745626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070010938A Expired - Fee Related KR100833477B1 (ko) | 2006-07-28 | 2007-02-02 | 소형 석영칩 공진파라미터 자동 선택 분리장치 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100833477B1 (ko) |
CN (1) | CN200939436Y (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102500554A (zh) * | 2011-10-12 | 2012-06-20 | 浙江大学台州研究院 | 一种晶片全自动目检机 |
CN110002176B (zh) * | 2018-12-17 | 2023-12-22 | 浙江大学台州研究院 | 一种石英晶片的散播式送料装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05341491A (ja) * | 1992-06-04 | 1993-12-24 | Asahi Optical Co Ltd | マスクフィルムの欠陥検査及び修正装置 |
KR20020085266A (ko) * | 2001-05-07 | 2002-11-16 | 삼성전자 주식회사 | 전지 검사장치 |
KR20030010442A (ko) * | 2001-07-25 | 2003-02-05 | 가부시키가이샤 휴모 라보라토리 | 극박 수정편 측정 분류장치 |
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2006
- 2006-07-28 CN CNU2006201228798U patent/CN200939436Y/zh not_active Expired - Fee Related
-
2007
- 2007-02-02 KR KR1020070010938A patent/KR100833477B1/ko not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05341491A (ja) * | 1992-06-04 | 1993-12-24 | Asahi Optical Co Ltd | マスクフィルムの欠陥検査及び修正装置 |
KR20020085266A (ko) * | 2001-05-07 | 2002-11-16 | 삼성전자 주식회사 | 전지 검사장치 |
KR20030010442A (ko) * | 2001-07-25 | 2003-02-05 | 가부시키가이샤 휴모 라보라토리 | 극박 수정편 측정 분류장치 |
Also Published As
Publication number | Publication date |
---|---|
JP3133507U (ja) | 2007-07-12 |
CN200939436Y (zh) | 2007-08-29 |
KR20080011030A (ko) | 2008-01-31 |
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