KR100777561B1 - Alkali-soluble resin and the photosensitive resin composition containing this - Google Patents
Alkali-soluble resin and the photosensitive resin composition containing this Download PDFInfo
- Publication number
- KR100777561B1 KR100777561B1 KR20050112994A KR20050112994A KR100777561B1 KR 100777561 B1 KR100777561 B1 KR 100777561B1 KR 20050112994 A KR20050112994 A KR 20050112994A KR 20050112994 A KR20050112994 A KR 20050112994A KR 100777561 B1 KR100777561 B1 KR 100777561B1
- Authority
- KR
- South Korea
- Prior art keywords
- bis
- alkali
- dianhydride
- soluble resin
- anhydride
- Prior art date
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- 229920005989 resin Polymers 0.000 title claims abstract description 76
- 239000011347 resin Substances 0.000 title claims abstract description 76
- 239000011342 resin composition Substances 0.000 title claims abstract description 62
- -1 diol compound Chemical class 0.000 claims abstract description 80
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims abstract description 49
- 239000002253 acid Substances 0.000 claims abstract description 38
- 239000000203 mixture Substances 0.000 claims abstract description 31
- 150000008065 acid anhydrides Chemical class 0.000 claims abstract description 10
- 238000012648 alternating copolymerization Methods 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 24
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000003999 initiator Substances 0.000 claims description 13
- 239000002904 solvent Substances 0.000 claims description 12
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 claims description 11
- 238000012719 thermal polymerization Methods 0.000 claims description 11
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 10
- 229920006243 acrylic copolymer Polymers 0.000 claims description 9
- 239000000654 additive Substances 0.000 claims description 9
- 239000003112 inhibitor Substances 0.000 claims description 9
- 150000008064 anhydrides Chemical class 0.000 claims description 8
- 229920005603 alternating copolymer Polymers 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000003086 colorant Substances 0.000 claims description 6
- WUPRYUDHUFLKFL-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(OC=2C=CC(N)=CC=2)=C1 WUPRYUDHUFLKFL-UHFFFAOYSA-N 0.000 claims description 5
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 claims description 4
- 230000000996 additive effect Effects 0.000 claims description 4
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 claims description 4
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 claims description 3
- JCRRFJIVUPSNTA-UHFFFAOYSA-N 4-[4-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1 JCRRFJIVUPSNTA-UHFFFAOYSA-N 0.000 claims description 3
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000002318 adhesion promoter Substances 0.000 claims description 3
- 239000000945 filler Substances 0.000 claims description 3
- 239000004014 plasticizer Substances 0.000 claims description 3
- 239000004094 surface-active agent Substances 0.000 claims description 3
- 125000003161 (C1-C6) alkylene group Chemical group 0.000 claims description 2
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 claims description 2
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 claims description 2
- JONTXEXBTWSUKE-UHFFFAOYSA-N 2-(2-aminoethylsulfanyl)ethanamine Chemical compound NCCSCCN JONTXEXBTWSUKE-UHFFFAOYSA-N 0.000 claims description 2
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical group ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 claims description 2
- KHDSXXRHWXXXBY-UHFFFAOYSA-N 3-[4-(2,3-dicarboxyphenoxy)phenoxy]phthalic acid Chemical compound OC(=O)C1=CC=CC(OC=2C=CC(OC=3C(=C(C(O)=O)C=CC=3)C(O)=O)=CC=2)=C1C(O)=O KHDSXXRHWXXXBY-UHFFFAOYSA-N 0.000 claims description 2
- DFATXMYLKPCSCX-UHFFFAOYSA-N 3-methylsuccinic anhydride Chemical compound CC1CC(=O)OC1=O DFATXMYLKPCSCX-UHFFFAOYSA-N 0.000 claims description 2
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 claims description 2
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 claims description 2
- HMMBJOWWRLZEMI-UHFFFAOYSA-N 4,5,6,7-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CCCC2=C1C(=O)OC2=O HMMBJOWWRLZEMI-UHFFFAOYSA-N 0.000 claims description 2
- VILWHDNLOJCHNJ-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)sulfanylphthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1SC1=CC=C(C(O)=O)C(C(O)=O)=C1 VILWHDNLOJCHNJ-UHFFFAOYSA-N 0.000 claims description 2
- AVCOFPOLGHKJQB-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)sulfonylphthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1S(=O)(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 AVCOFPOLGHKJQB-UHFFFAOYSA-N 0.000 claims description 2
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 claims description 2
- HSBOCPVKJMBWTF-UHFFFAOYSA-N 4-[1-(4-aminophenyl)ethyl]aniline Chemical compound C=1C=C(N)C=CC=1C(C)C1=CC=C(N)C=C1 HSBOCPVKJMBWTF-UHFFFAOYSA-N 0.000 claims description 2
- APXJLYIVOFARRM-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(C(O)=O)C(C(O)=O)=C1 APXJLYIVOFARRM-UHFFFAOYSA-N 0.000 claims description 2
- DDVYLSFEKWFRFS-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1CCC1=CC=C(C(O)=O)C(C(O)=O)=C1 DDVYLSFEKWFRFS-UHFFFAOYSA-N 0.000 claims description 2
- GEYAGBVEAJGCFB-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 GEYAGBVEAJGCFB-UHFFFAOYSA-N 0.000 claims description 2
- BEKFRNOZJSYWKZ-UHFFFAOYSA-N 4-[2-(4-aminophenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]aniline Chemical compound C1=CC(N)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(N)C=C1 BEKFRNOZJSYWKZ-UHFFFAOYSA-N 0.000 claims description 2
- UHNUHZHQLCGZDA-UHFFFAOYSA-N 4-[2-(4-aminophenyl)ethyl]aniline Chemical compound C1=CC(N)=CC=C1CCC1=CC=C(N)C=C1 UHNUHZHQLCGZDA-UHFFFAOYSA-N 0.000 claims description 2
- ZYEDGEXYGKWJPB-UHFFFAOYSA-N 4-[2-(4-aminophenyl)propan-2-yl]aniline Chemical compound C=1C=C(N)C=CC=1C(C)(C)C1=CC=C(N)C=C1 ZYEDGEXYGKWJPB-UHFFFAOYSA-N 0.000 claims description 2
- GQUSLIBGUTZKJZ-UHFFFAOYSA-N 4-[3-(3,4-dicarboxyphenoxy)phenoxy]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1OC1=CC=CC(OC=2C=C(C(C(O)=O)=CC=2)C(O)=O)=C1 GQUSLIBGUTZKJZ-UHFFFAOYSA-N 0.000 claims description 2
- YQRHQSXYASUCQL-UHFFFAOYSA-N 4-[3-(3,4-dicarboxyphenyl)-1,1,2,2,3,3-hexafluoropropyl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(F)(F)C(F)(F)C(F)(F)C1=CC=C(C(O)=O)C(C(O)=O)=C1 YQRHQSXYASUCQL-UHFFFAOYSA-N 0.000 claims description 2
- BMIUMBLWVWZIHD-UHFFFAOYSA-N 4-[3-(4-aminophenyl)propyl]aniline Chemical compound C1=CC(N)=CC=C1CCCC1=CC=C(N)C=C1 BMIUMBLWVWZIHD-UHFFFAOYSA-N 0.000 claims description 2
- IOUVQFAYPGDXFG-UHFFFAOYSA-N 4-[4-[2-[4-(3,4-dicarboxyphenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=C(C(C(O)=O)=CC=3)C(O)=O)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 IOUVQFAYPGDXFG-UHFFFAOYSA-N 0.000 claims description 2
- HHLMWQDRYZAENA-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 HHLMWQDRYZAENA-UHFFFAOYSA-N 0.000 claims description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 claims description 2
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 claims description 2
- MQAHXEQUBNDFGI-UHFFFAOYSA-N 5-[4-[2-[4-[(1,3-dioxo-2-benzofuran-5-yl)oxy]phenyl]propan-2-yl]phenoxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC2=CC=C(C=C2)C(C)(C=2C=CC(OC=3C=C4C(=O)OC(=O)C4=CC=3)=CC=2)C)=C1 MQAHXEQUBNDFGI-UHFFFAOYSA-N 0.000 claims description 2
- 101150065749 Churc1 gene Proteins 0.000 claims description 2
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 claims description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 claims description 2
- 102100038239 Protein Churchill Human genes 0.000 claims description 2
- 125000004018 acid anhydride group Chemical group 0.000 claims description 2
- 235000010290 biphenyl Nutrition 0.000 claims description 2
- 239000004305 biphenyl Substances 0.000 claims description 2
- ZLSMCQSGRWNEGX-UHFFFAOYSA-N bis(4-aminophenyl)methanone Chemical compound C1=CC(N)=CC=C1C(=O)C1=CC=C(N)C=C1 ZLSMCQSGRWNEGX-UHFFFAOYSA-N 0.000 claims description 2
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 claims description 2
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 claims description 2
- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 150000002576 ketones Chemical class 0.000 claims description 2
- 229940018564 m-phenylenediamine Drugs 0.000 claims description 2
- DOBFTMLCEYUAQC-UHFFFAOYSA-N naphthalene-2,3,6,7-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=C2C=C(C(O)=O)C(C(=O)O)=CC2=C1 DOBFTMLCEYUAQC-UHFFFAOYSA-N 0.000 claims description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 2
- 239000001294 propane Substances 0.000 claims description 2
- 229940014800 succinic anhydride Drugs 0.000 claims description 2
- 125000006159 dianhydride group Chemical group 0.000 claims 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 2
- 230000000379 polymerizing effect Effects 0.000 claims 2
- IJJNNSUCZDJDLP-UHFFFAOYSA-N 4-[1-(3,4-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 IJJNNSUCZDJDLP-UHFFFAOYSA-N 0.000 claims 1
- QGMGHALXLXKCBD-UHFFFAOYSA-N 4-amino-n-(2-aminophenyl)benzamide Chemical compound C1=CC(N)=CC=C1C(=O)NC1=CC=CC=C1N QGMGHALXLXKCBD-UHFFFAOYSA-N 0.000 claims 1
- 125000006267 biphenyl group Chemical group 0.000 claims 1
- 238000007334 copolymerization reaction Methods 0.000 claims 1
- OSFBJERFMQCEQY-UHFFFAOYSA-N propylidene Chemical group [CH]CC OSFBJERFMQCEQY-UHFFFAOYSA-N 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 31
- 230000035945 sensitivity Effects 0.000 abstract description 22
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 56
- 239000000243 solution Substances 0.000 description 32
- 229920000642 polymer Polymers 0.000 description 27
- 230000000052 comparative effect Effects 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 18
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 17
- 239000007787 solid Substances 0.000 description 17
- 238000003786 synthesis reaction Methods 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 13
- 239000000049 pigment Substances 0.000 description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 10
- 239000003054 catalyst Substances 0.000 description 10
- 239000001301 oxygen Substances 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 10
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 9
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 9
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 8
- 238000011161 development Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 7
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000006482 condensation reaction Methods 0.000 description 6
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 6
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 239000006229 carbon black Substances 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- WBMHNOGBPBPWTN-UHFFFAOYSA-N 3-[4-[4,6-bis(trichloromethyl)-1,3,5-triazin-2-yl]phenyl]sulfanylpropanoic acid Chemical compound C1=CC(SCCC(=O)O)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 WBMHNOGBPBPWTN-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NPRHQNLQPGZXCY-UHFFFAOYSA-N C(C=C)(=O)O.C(C=C)(=O)O.C(C(O)CO)(=O)O Chemical compound C(C=C)(=O)O.C(C=C)(=O)O.C(C(O)CO)(=O)O NPRHQNLQPGZXCY-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 3
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 125000005462 imide group Chemical group 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000012643 polycondensation polymerization Methods 0.000 description 3
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
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- 125000005210 alkyl ammonium group Chemical group 0.000 description 1
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- LSURRKWOANERMF-UHFFFAOYSA-N butyl 2-(hydroxymethyl)prop-2-enoate Chemical compound CCCCOC(=O)C(=C)CO LSURRKWOANERMF-UHFFFAOYSA-N 0.000 description 1
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- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
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- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
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- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
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- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
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Abstract
본 발명은 a) 2개의 중합성 불포화기를 가지는 디올 화합물, b) 산 이무수물, c) 디아민 화합물, 및 d) 필요에 따라 산 일무수물을 포함하는 알칼리 가용성 수지 제조용 조성물, 상기 조성물이 교대 공중합을 통해 형성된 알칼리 가용성 수지 및 이를 포함하는 감광성 수지 조성물을 제공한다. 본 발명에 따른 감광성 수지 조성물은 본 발명의 알칼리 가용성 수지로 인해 감도와 내약품성이 뛰어나다. The present invention provides a composition for producing an alkali-soluble resin comprising a) a diol compound having two polymerizable unsaturated groups, b) an acid dianhydride, c) a diamine compound, and d) an acid anhydride, if necessary, wherein the composition comprises alternating copolymerization. It provides an alkali-soluble resin formed through and a photosensitive resin composition comprising the same. The photosensitive resin composition according to the present invention has excellent sensitivity and chemical resistance due to the alkali-soluble resin of the present invention.
Description
도 1은 실시예 4의 감광성 수지 조성물을 적용한 컬러필터 감광재를 60 ℃ NMP에 5분간 침지한 후 광학 현미경으로 관찰한 도이며, 1 is a view observed with an optical microscope after immersing the color filter photosensitive material to which the photosensitive resin composition of Example 4 was applied for 5 minutes at 60 ℃ NMP,
도 2는 실시예 5의 감광성 수지 조성물을 적용한 컬러필터 감광재를 60 ℃ NMP에 5분간 침지한 후 광학 현미경으로 관찰한 도이며,2 is a view observed with an optical microscope after immersing the color filter photosensitive material to which the photosensitive resin composition of Example 5 is applied for 5 minutes at 60 ℃ NMP,
도 3은 비교예 2의 감광성 수지 조성물을 적용한 컬러필터 감광재를 60 ℃ NMP에 5분간 침지한 후 광학 현미경으로 관찰한 도이며,3 is a view observed with an optical microscope after immersing the color filter photosensitive material to which the photosensitive resin composition of Comparative Example 2 is applied for 5 minutes at 60 ℃ NMP,
도 4는 비교예 3의 감광성 수지 조성물을 적용한 컬러필터 감광재를 60 ℃ NMP에 5분간 침지한 후 광학 현미경으로 관찰한 도이다. 4 is a diagram observed with an optical microscope after immersing the color filter photosensitive material to which the photosensitive resin composition of Comparative Example 3 is applied for 5 minutes at 60 ℃ NMP.
본 발명은 알칼리 가용성 수지 및 이를 포함하는 감광성 수지 조성물에 관한 것이며, 더욱 상세하게는 감광성 수지 조성물의 내약품성을 높이고 고감도화를 이 룰 수 있는 알칼리 가용성 수지 및 이를 포함하는 FPD(Flat Panel Display) 제조에 사용될 수 있는 광중합형 네가티브형 감광성 수지 조성물에 관한 것이다. The present invention relates to an alkali-soluble resin and a photosensitive resin composition comprising the same, and more particularly, to an alkali-soluble resin and a flat panel display (FPD) including the same, which can increase the chemical resistance of the photosensitive resin composition and achieve high sensitivity. It relates to a photopolymerizable negative photosensitive resin composition which can be used for.
광중합형 네가티브 타입 감광성 수지 조성물은 컬러필터 제조용 감광재, 오버코트 감광재, 컬럼 스페이서, 광차폐성을 갖는 절연재 등 다양한 용도로 사용되고 있으며, 이는 통상적으로 알칼리 가용성 수지, 에틸렌성 불포화 결합을 갖는 중합성 화합물, 광중합 개시제 및 용매를 포함한다. 이와 같은 감광성 수지 조성물은 기판상에 감광성 수지 조성물을 도포하여 도막을 형성하고, 이 도막의 특정 부분에 포토마스크 등을 이용하여 방사선 조사에 의한 노광을 실시한 후, 비노광부를 현상 처리에 의해 제거하여 패턴을 형성하는 방식으로 사용될 수 있다. The photopolymerization type negative photosensitive resin composition is used in various applications such as photoresist for color filter production, overcoat photoresist, column spacer, and insulating material having light shielding properties, which are generally alkali-soluble resins, polymerizable compounds having ethylenically unsaturated bonds, Photopolymerization initiator and solvent. Such a photosensitive resin composition forms a coating film by apply | coating the photosensitive resin composition on a board | substrate, after exposing by a radiation irradiation to a specific part of this coating film using a photomask etc., a non-exposure part is removed by the development process, It can be used in a manner to form a pattern.
최근 LCD(액정 디스플레이)의 용도가 기존의 노트북 모니터에서 벗어나 데스크탑 모니터, LCD TV 등으로 확대됨에 따라 고품질의 색을 구현하기 위해 컬러필터 감광재 내의 안료 농도가 높아지고, 안료의 미세 분산화가 이루어지고 있어 안료 분산에 사용된 분산제의 농도가 높아지고 있다. 상대적으로 높은 안료와 안료 분산제의 농도는 특히 컬러필터 감광재의 내약품성과 감도의 저하를 일으키는 것으로 알려져 있다. 내약품성이 낮은 감광재는 배향막 도포 공정시 고온의 배향막액에 의해 손상이 되어 후 공정인 액정 주입시 액정을 오염시키는 물질을 배출할 수 있고 그 결과 액정 구동에 악영향을 주어 품질 불량을 야기할 수 있다. 한편 고안료농도의 컬러필터 감광재나 고차광성이 요구되는 블랙매트릭스 감광재, 3 마이크론 이상의 후막형성이 요구되는 컬럼스페이스 감광재의 경우 막하부까지 전달되는 자외선 에너지의 양이 적어 많은 에너지 조사가 필요하나 컬러필터 기판 제조용 감광성 수 지 조성물의 사용 공정에서 공정의 단위 시간당 수율 향상을 위하여 노광 시간을 줄이고 있으므로 감광성 수지 조성물 자체의 고감도화가 요구되고 있다. Recently, the use of LCD (liquid crystal display) has been expanded from the existing notebook monitors to desktop monitors, LCD TVs, etc., in order to realize high quality color, the pigment concentration in the color filter photosensitive material is increased, and the pigment is finely dispersed. The concentration of the dispersant used for pigment dispersion is increasing. Relatively high concentrations of pigments and pigment dispersants are known to cause particularly poor chemical resistance and sensitivity of color filter photosensitive materials. The photoresist with low chemical resistance may be damaged by the high temperature alignment film liquid during the alignment film coating process, and may emit a substance that contaminates the liquid crystal during the subsequent liquid crystal injection, which may adversely affect the driving of the liquid crystal, resulting in poor quality. . On the other hand, color filter photoresist with high concentration of high density, black matrix photoresist requiring high light shielding, and column space photoresist requiring thick film formation of 3 microns or more require a lot of energy irradiation due to the small amount of UV energy transmitted to the lower part of the film. In order to improve the yield per unit time of the process in the process of using the photosensitive resin composition for manufacturing a filter substrate, the high sensitivity of the photosensitive resin composition itself is required.
감광성 수지 조성물의 내약품성을 향상시키는 가장 대표적인 방법은 가교 밀도를 높일 수 있는 에틸렌성 불포화화합물의 사용량을 늘리는 것이다. 그러나 에틸렌성 불포화화합물의 양을 늘리면 투입 가능한 바인더 폴리머의 양이 상대적으로 줄어들어 현상성이나 도막의 물리적 특성이 나빠지게 되어 그 한계가 있다. The most representative method for improving the chemical resistance of the photosensitive resin composition is to increase the amount of ethylenically unsaturated compounds which can increase the crosslinking density. However, when the amount of ethylenically unsaturated compound is increased, the amount of the binder polymer that can be injected is relatively reduced, resulting in deterioration of developability or physical properties of the coating film.
감광성 수지 조성물의 고감도화를 이루기 위해서는 감도가 좋은 광개시제를 사용하는 방법이 가장 대표적이나 광개시제를 과량 사용할 경우 폴리이미드 용액에 용출되어 나올 수 있는 저분자량체가 많아져 내약품성 문제를 일으킬 수 있고, 상용화된 많은 광개시제들은 승화성이 있어 포스트베이크 공정시 오븐 오염을 심화할 우려가 있다.In order to achieve high sensitivity of the photosensitive resin composition, a method using a high sensitivity photoinitiator is most typical, but when an excessive amount of photoinitiator is used, many low molecular weights may be eluted in the polyimide solution, causing chemical resistance problems. Many photoinitiators are sublimable and may increase the oven contamination in the postbake process.
그러나 감광성 수지의 고내약품화와 고감도화는 별개의 성질이 아니며 고감도화가 이루어진 감광성 수지는 일반적으로 내약품성을 높을 가능성이 많다. 그러므로 JP 2003-241374호나 JP 2004-219979호 등과 같이 알칼리 가용성 바인더 수지의 측쇄에 불포화 이중결합기를 도입하여, 생성된 수지의 도막이 치밀하도록 하는 기술이 전반적으로 알려져 있다. 그러나 이 문헌에서 제공하는 알칼리 가용성 수지는 제조 공정 상 측쇄에 도입할 수 있는 불포화 이중결합기의 분율을 높일 수 있는 한계가 있고, 고감도화, 고내약품화를 만족한 수준으로 이룰 수 없다.However, high chemical resistance and high sensitivity of the photosensitive resin are not separate properties, and photosensitive resins having high sensitivity are generally likely to have high chemical resistance. Therefore, a technique generally known such as JP 2003-241374 or JP 2004-219979, which introduces an unsaturated double bond group into the side chain of an alkali-soluble binder resin and makes the resulting resin film dense. However, the alkali-soluble resin provided in this document has a limit to increase the fraction of unsaturated double bond groups that can be introduced into the side chain in the manufacturing process, and cannot achieve high sensitivity and high chemical resistance to a satisfactory level.
한편 바인더 수지 내에 광가교에 참여할 수 있는 불포화 이중결합을 충분히 도입하기 위해 JP 1997-325494호, JP 2005-77451호, KR 2005-0021902호 등에서는 분자중에 1개 이상의 중합성 불포화기를 가지는 디올 화합물과 산 이무수물을 반응시키고 얻어진 카르복실기 함유 교대 공중합체를 제공한다. 그러나 이렇게 제조된 공중합체는 고감도화는 이룰 수 있으나 미반응한 디올화합물과 저분자량체가 수지 용액 내에 잔존하므로 충분한 내약품성을 지니지 못한다.Meanwhile, in order to sufficiently introduce unsaturated double bonds capable of participating in photocrosslinking in the binder resin, JP 1997-325494, JP 2005-77451, KR 2005-0021902, and the like have diol compounds having one or more polymerizable unsaturated groups in a molecule; The carboxyl group-containing alternating copolymer obtained by making an acid dianhydride react is provided. However, the copolymer prepared in this way can achieve high sensitivity, but does not have sufficient chemical resistance because unreacted diol compound and low molecular weight remain in the resin solution.
본 발명자들은 분자 중에 2개의 중합성 불포화기를 가지는 디올 화합물과 산 이무수물을 반응시키고 얻어진 카르복실기 함유 교대 공중합체 제조시 부가적으로 디아민 화합물을 부가함으로써 고감도화와 고내약품화를 이룰 수 있음을 밝혀내었다.The present inventors have found that high sensitivity and high chemical resistance can be achieved by reacting a diol compound having two polymerizable unsaturated groups and an acid dianhydride in a molecule and additionally adding a diamine compound in preparing a carboxyl group-containing alternating copolymer obtained. .
이에 본 발명은 교대 공중합체 제조 시 디올 화합물과 산 이무수물, 디아민 화합물, 필요에 따라 산 일무수물을 모노머로 사용하는 알칼리 가용성 수지 제조용 조성물 및 상기 조성물이 중합된 알칼리 가용성 수지를 제공하는 것을 목적으로 한다.Accordingly, an object of the present invention is to provide a composition for preparing an alkali-soluble resin using a diol compound, an acid dianhydride, a diamine compound, an acid anhydride as a monomer, and an alkali-soluble resin polymerized with the composition. do.
또한, 본 발명은 상기 조성물이 필수 성분으로 사용되어 고감도화 및 고내약품화를 이룬 감광성 수지 조성물, 특히 LCD 컬러필터 기판 제조용 감광성 수지 조성물을 제공하는 것을 또 다른 목적으로 한다.In addition, another object of the present invention is to provide a photosensitive resin composition, particularly a photosensitive resin composition for manufacturing an LCD color filter substrate, in which the composition is used as an essential component to achieve high sensitivity and high chemical resistance.
본 발명은 a) 2개의 중합성 불포화기를 가지는 디올 화합물, b) 산 이무수 물, c) 디아민 화합물, 및 d) 필요에 따라 산 일무수물을 포함하는 알칼리 가용성 수지 제조용 조성물, 상기 조성물이 교대 공중합을 통해 형성된 알칼리 가용성 수지 및 이를 포함하는 감광성 수지 조성물을 제공한다.The present invention relates to a composition for producing an alkali-soluble resin comprising a) a diol compound having two polymerizable unsaturated groups, b) an acid dianhydride, c) a diamine compound, and d) an acid anhydride, if necessary, wherein the composition comprises alternating copolymerization. It provides an alkali-soluble resin formed through and a photosensitive resin composition comprising the same.
이하, 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail.
본 발명의 a) 성분인 2개의 중합성 불포화기를 가지는 디올 화합물은, 광가교성 에틸렌성 불포화기를 제공하고, b) 성분인 산 이무수물과 교대 공중합을 할 수 있는 디올기를 제공하는 화합물로서, 바람직하게는 디글리시딜 에테르 화합물과 (메타)아크릴산의 축합 반응을 통해 제시되는 화학식 1의 화합물이다. 여기서 (메타)아크릴산이란 아크릴산 혹은 메타아크릴산을 의미한다.The diol compound which has two polymerizable unsaturated groups which are a) component of this invention provides a photocrosslinkable ethylenically unsaturated group, and is a compound which provides the diol group which can be copolymerized alternately with the acid dianhydride which is b) component, Preferably Is a compound of formula 1 which is presented through a condensation reaction of a diglycidyl ether compound with (meth) acrylic acid. Here, (meth) acrylic acid means acrylic acid or methacrylic acid.
상기 식에서, Where
R은 수소 또는 메틸이며,R is hydrogen or methyl,
X는 CnH2n, -(CH2CH2O)nCH2CH2 -, -(CHCH3CH2)nOCHCH3CH2-, (단, n은 1~10의 정수), (단, Y는 직접 결합, C1~C6의 알킬렌, 케톤, -O-, -S-, -SO2-, 헥사플루오로프로필, -OC6H4O-, -OC6H4C(CH3)2C6H4O-로 이루어지는 군으로부터 1종 선택된다), 9,9-비스페놀 플로레닐 및 9,9-비스(4-에톡시페닐) 플로레닐로 이루어진 군으로부터 1종 이상 선택되어진다. X is C n H 2n ,-(CH 2 CH 2 O) n CH 2 CH 2 - ,-(CHCH 3 CH 2 ) n OCHCH 3 CH 2- , (where n is an integer from 1 to 10), Wherein Y is a direct bond, C 1 -C 6 alkylene, ketone, -O-, -S-, -SO 2- , hexafluoropropyl, -OC 6 H 4 O-, -OC 6 H 4 One selected from the group consisting of C (CH 3 ) 2 C 6 H 4 O-), 9,9-bisphenol florenyl and 9,9-bis (4-ethoxyphenyl) florenyl Is selected.
본 발명의 b) 성분인 산 이무수물은, a) 성분인 디올 화합물과 c) 성분인 디아민 화합물과 교대 공중합을 할 수 있는 2 무수물기를 제공하는 화합물로서, 한 분자내에 산 무수물기가 2개 있는 화합물이다. The acid dianhydride as the component b) of the present invention is a compound that provides two anhydride groups capable of alternating copolymerization with a diol compound as a component and a diamine compound as a component, a compound having two acid anhydride groups in one molecule. to be.
구체적인 예로는 1,2,4,5-벤젠 테트라카르복시산 이무수물, 3,3',4,4'-벤조페논 테트라카르복시산 이무수물, 비페닐 테트라카르복시산 이무수물, 비스(3,4-디카르복시페닐) 에테르 이무수물, 비스(3,4-디카르복시페닐) 설파이드 이무수물, 비스(3,4-디카르복시페닐) 설폰 이무수물, 에틸렌 글리콜 비스(4-트리멜리테이트) 이무수물, 글리세롤 비스(1,3-트리멜릭 무수물)-2-아세테이트, 1,4-비스(2,3-디카르복시페녹시) 벤젠 이무수물, 1,3-비스(3,4-디카르복시페녹시) 벤젠 이무수물, 2,3,6,7-나프탈렌 테트라카르복시산 이무수물, 4,4'-비스(3,4-디카르복시페녹시)디페닐 이무수물, 4,4'-비스(3,4-디카르복시페녹시)디페닐 에테르 이무수물, 4,4'-비스(3,4-디카르복시페녹시)디페닐 설폰 이무수물, 비스(3,4-디카르복시페닐) 메탄 이무수물, 1,1-비스(3,4-디카르복시페닐) 에탄 이무수물, 1,2-비스(3,4-디카르복시페닐) 에탄 이무수물, 2,2-비스(3,4-디카르복시페닐) 프로판 이무수물, 2,2-비스[4-(3,4-디카르복시페녹시) 페닐] 프로판 이무수물, 4-(2,3-디카르복시페녹시)-4'- (3,4-디카르복시페녹시)디페닐-2,2-프로판 이무수물, 2,2-비스(3,4-디카르복시페닐)헥사플루오로프로판 이무수물, 1,3-비스(3,4-디카르복시페닐) 헥사플루오로프로판 이무수물, 2,2-비스[4-(3,4-디카르복시페녹시) 페닐]헥사플루오로프로판 이무수물, 4,4'-비스[2-(3,4-디카르복시페닐)헥사플루오로이소프로필]디페닐 에테르 이무수물 등이 있다.Specific examples include 1,2,4,5-benzene tetracarboxylic dianhydride, 3,3 ', 4,4'-benzophenone tetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, bis (3,4-dicarboxyphenyl ) Ether dianhydride, bis (3,4-dicarboxyphenyl) sulfide dianhydride, bis (3,4-dicarboxyphenyl) sulfone dianhydride, ethylene glycol bis (4- trimellitate) dianhydride, glycerol bis (1 , 3-trimeric anhydride) -2-acetate, 1,4-bis (2,3-dicarboxyphenoxy) benzene dianhydride, 1,3-bis (3,4-dicarboxyphenoxy) benzene dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 4,4'-bis (3,4-dicarboxyphenoxy) diphenyl dianhydride, 4,4'-bis (3,4-dicarboxyphenoxy ) Diphenyl ether dianhydride, 4,4'-bis (3,4-dicarboxyphenoxy) diphenyl sulfone dianhydride, bis (3,4-dicarboxyphenyl) methane dianhydride, 1,1-bis (3) , 4-dicarboxyphenyl) ethane dianhydride Water, 1,2-bis (3,4-dicarboxyphenyl) ethane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) propane dianhydride, 2,2-bis [4- (3,4 -Dicarboxyphenoxy) phenyl] propane dianhydride, 4- (2,3-dicarboxyphenoxy) -4'- (3,4-dicarboxyphenoxy) diphenyl-2,2-propane dianhydride, 2 , 2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride, 1,3-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride, 2,2-bis [4- ( 3,4-dicarboxyphenoxy) phenyl] hexafluoropropane dianhydride, 4,4'-bis [2- (3,4-dicarboxyphenyl) hexafluoroisopropyl] diphenyl ether dianhydride, and the like. .
본 발명의 c)성분인 디아민 화합물은, b) 성분인 산 이무수물 화합물과 교대 공중합을 할 수 있는 디아민 기를 제공하는 화합물이다. The diamine compound which is c) component of this invention is a compound which provides the diamine group which can be copolymerized alternately with the acid dianhydride compound which is b) component.
구체적인 예로서는 m-페닐렌 디아민, p-페닐렌 디아민, 1,3-비스(4-아미노페닐) 프로판, 2,2-비스(4-아미노페닐) 프로판, 4,4'-디아미노-디페닐 메탄, 1,2-비스(4-아미노페닐)에탄, 1,1-비스(4-아미노페닐)에탄, 2,2'-디아미노-디에틸 설파이드, 비스(4-아미노페닐) 설파이드, 비스(4-아미노페닐) 설폰, 비스(4-아미노페닐) 에테르, 4,4'-디아미노-벤조페논, 2,2-비스(4-아미노페닐) 헥사 플루오로프로판, 2,2-비스[4-(4-아미노페녹시)페닐]헥사플루오로프로판, 4,4'-비스[2-(4-아미노페녹시페닐)헥사플루오로이소프로필]디페닐 에테르, 4,4'-(1,4-페닐렌디옥시)디아닐린, 4,4'-(1,3-페닐렌디옥시)디아닐린, 4,4'-(4,4'-이소프로필리덴 디페닐-1,1'-디일-디옥시)디아닐린 등이 있다. Specific examples include m-phenylene diamine, p-phenylene diamine, 1,3-bis (4-aminophenyl) propane, 2,2-bis (4-aminophenyl) propane, 4,4'-diamino-diphenyl Methane, 1,2-bis (4-aminophenyl) ethane, 1,1-bis (4-aminophenyl) ethane, 2,2'-diamino-diethyl sulfide, bis (4-aminophenyl) sulfide, bis (4-aminophenyl) sulfone, bis (4-aminophenyl) ether, 4,4'-diamino-benzophenone, 2,2-bis (4-aminophenyl) hexa fluoropropane, 2,2-bis [ 4- (4-aminophenoxy) phenyl] hexafluoropropane, 4,4'-bis [2- (4-aminophenoxyphenyl) hexafluoroisopropyl] diphenyl ether, 4,4 '-(1 , 4-phenylenedioxy) dianiline, 4,4 '-(1,3-phenylenedioxy) dianiline, 4,4'-(4,4'-isopropylidene diphenyl-1,1'-diyl -Dioxy) dianiline and the like.
발명의 d)성분인 산 일무수물은 교대 공중합시 분자량을 조절하거나, 교대 공중합 종료 후 아민 말단을 카르복시 말단으로 전환하기 위해 사용하는 화합물로 서, 상기 알칼리 가용성 수지 조성물에 추가적으로 포함될 수 있다. Acid anhydride, which is a d) component of the present invention, is a compound used to control the molecular weight at the time of alternating copolymerization or to convert the amine end to the carboxy terminus after completion of the alternating copolymerization, and may be additionally included in the alkali-soluble resin composition.
구체적인 예로서는 숙신산 무수물, 글루타르산 무수물, 메틸 숙신산 무수물, 말레산 무수물, 메틸 말레산 무수물, 프탈산 무수물, 1,2,3,6-테트라히드로프탈산 무수물, 3,4,5,6-테트라히드로프탈산 무수물, 헥사히드로프탈산 무수물, 시스-5-노보넨-(엔도, 엑소)-2,3-디카르복실산 무수물 등이 있다. Specific examples include succinic anhydride, glutaric anhydride, methyl succinic anhydride, maleic anhydride, methyl maleic anhydride, phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, 3,4,5,6-tetrahydrophthalic acid Anhydride, hexahydrophthalic anhydride, cis-5-norbornene- (endo, exo) -2,3-dicarboxylic acid anhydride and the like.
본 발명의 알칼리 가용성 수지는 하기 방법으로 제조한다. Alkali-soluble resin of this invention is manufactured by the following method.
먼저, a)디올 화합물 100 몰에 대해, b)산 이무수물을 50 ~ 150 몰, 바람직하게는 60 ~ 120 몰, 필요에 따라 d) 산 일무수물을 0.1 ~ 20 몰, 바람직하게는 0.5 ~ 10 몰을 가하고 알콜기가 없는 용매를 첨가하여 80 ℃ ~ 150 ℃에서 4시간 ~ 48 시간 가열하여 a)와 b) 혹은 a)와 b), d)의 교대 공중합체를 먼저 제조한다. First, a) 50 to 150 moles of acid dianhydride, preferably 60 to 120 moles, and d) 0.1 to 20 moles of acid monoanhydride, preferably 0.5 to 10 moles per 100 moles of diol compound. Mole was added and an alcohol-free solvent was added, followed by heating at 80 ° C. to 150 ° C. for 4 to 48 hours to prepare alternate copolymers of a) and b) or a) and b) and d).
그 후 반응 온도를 10 ℃ ~ 70 ℃로 낮추고, 상기 교대 공중합체에 c) 디아민 화합물 0.1 ~ 20 몰을 첨가하여 4시간 ~ 48시간 교반하고, 필요에 따라 d) 산 일무수물을 0.1 ~ 20 몰 더 추가하여 4시간 ~ 24 시간 교반하여 제조한다. Thereafter, the reaction temperature was lowered to 10 ° C. to 70 ° C., c) 0.1 to 20 mol of the diamine compound was added to the alternating copolymer, the mixture was stirred for 4 hours to 48 hours, and d) 0.1 to 20 mol of the acid anhydride, if necessary. It is further prepared by stirring for 4 hours to 24 hours.
이렇게 제조된 본 발명의 알칼리 가용성 수지는 한 분자 내에 충분한 양의 에틸렌성 불포화기를 도입할 수 있어 감도와 내약품성을 높일 수 있고 수지 내의 아믹산기는 후공정인 포스트베이크 공정을 통해 이미드기로 변하므로 내약품성을 더욱 높일 수 있다. Alkali-soluble resin of the present invention prepared in this way can introduce a sufficient amount of ethylenically unsaturated groups in one molecule to increase the sensitivity and chemical resistance, and the amic acid group in the resin is changed to the imide group through the post-baking process Chemical resistance can be further improved.
본 발명에 따른 제조된 알칼리 가용성 수지의 대표적인 예는 하기 화학식 2 로 표시될 수 있다. Representative examples of the alkali-soluble resin prepared according to the present invention may be represented by the following formula (2).
상기식에서, m 및 n은 1 이상의 정수이다.Wherein m and n are integers of 1 or greater.
또한, 본 발명은 In addition, the present invention
1) 본 발명의 알칼리 가용성 수지 조성물이 중합된 알칼리 가용성 수지; 1) alkali-soluble resin in which the alkali-soluble resin composition of the present invention is polymerized;
2) 에틸렌성 불포화 결합을 갖는 중합성 화합물; 2) a polymerizable compound having an ethylenically unsaturated bond;
3) 광중합 개시제; 및 3) photopolymerization initiator; And
4) 용매를 필수 성분으로 포함하는 감광성 수지 조성물을 제공한다.4) It provides the photosensitive resin composition containing a solvent as an essential component.
본 발명에 따른 감광성 수지 조성물의 구성 성분 중, 상기 2) 에틸렌성 불포화 결합을 갖는 중합성 화합물의 비제한적인 예로는 에틸렌글리콜 디(메타)아크릴레이트, 에틸렌기의 수가 2 내지 14인 폴리에틸렌 글리콜 디(메타)아크릴레이트, 트리메틸올프로판 디(메타)아크릴레이트, 트리메틸올프로판 트리(메타)아크릴레이트, 펜타에리스리톨 트리(메타)아크릴레이트, 펜타에리스리톨 테트라(메타)아크릴 레이트, 2-트리스아크릴로일옥시메틸에틸프탈산, 프로필렌기의 수가 2 내지 14인 프로필렌 글리콜 디(메타)아크릴레이트, 디펜타에리스리톨 펜타(메타)아크릴레이트, 디펜타에리스리톨 헥사(메타)아크릴레이트 등의 다가 알콜을 α, β-불포화 카르복실산으로 에스테르화하여 얻어지는 화합물; 트리메틸올프로판 트리글리시딜에테르아크릴산 부가물, 비스페놀 A 디글리시딜에테르아크릴산 부가물 등의 글리시딜기를 함유하는 화합물에 (메타)아크릴산을 부가하여 얻어지는 화합물; β-히드록시에틸(메타)아크릴레이트의 프탈산디에스테르, β-히드록시에틸 (메타)아크릴레이트의 톨루엔 디이소시아네이트 부가물 등의 수산기 또는 에틸렌성 불포화 결합을 갖는 화합물과 다가 카르복실산과의 에스테르 화합물, 또는 폴리이소시아네이트와의 부가물; 및 메틸(메타)아크릴레이트, 에틸(메타)아크릴레이트, 부틸(메타)아크릴레이트, 2-에틸헥실(메타)아크릴레이트 등의 (메타)아크릴산 알킬에스테르 및 9,9'-비스 [4-(2-아크릴로일옥시에톡시)페닐]플루오렌이 있으며, 이들에만 한정되지 않고 당 기술 분야에 알려져 있는 것들을 사용할 수 있다. 또한 경우에 따라서는 이들 화합물에 실리카 분산체를 사용할 수 있는데, 예를 들면 Hanse Chemie 사제 Nanocryl XP series(0596, 1045, 21/1364)와 Nanopox XP series(0516, 0525) 등이 있다.Among the constituents of the photosensitive resin composition according to the present invention, non-limiting examples of the polymerizable compound having 2) ethylenically unsaturated bonds include ethylene glycol di (meth) acrylate and polyethylene glycol di with 2 to 14 ethylene groups. (Meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, 2-trisacryloyl Polyhydric alcohols such as oxymethylethylphthalic acid, propylene glycol di (meth) acrylate having 2 to 14 propylene groups, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like; Compounds obtained by esterification with an unsaturated carboxylic acid; Compounds obtained by adding (meth) acrylic acid to a compound containing glycidyl groups such as trimethylolpropane triglycidyl ether acrylic acid adduct and bisphenol A diglycidyl ether acrylic acid adduct; Ester compound of the compound which has hydroxyl group or ethylenically unsaturated bond, such as phthalic acid diester of (beta) -hydroxyethyl (meth) acrylate and toluene diisocyanate adduct of (beta) -hydroxyethyl (meth) acrylate, and polyhydric carboxylic acid Or adducts with polyisocyanates; And (meth) acrylic acid alkyl esters such as methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, and 9,9'-bis [4- ( 2-acryloyloxyethoxy) phenyl] fluorene, but not limited to these, those known in the art may be used. In some cases, silica dispersions may be used for these compounds, for example, Nanocryl XP series (0596, 1045, 21/1364) and Nanopox XP series (0516, 0525) manufactured by Hanse Chemie.
본 발명의 알칼리 가용성 수지는 에틸렌성 불포화 결합이 존재하므로, 감광성 수지 조성물 내 2) 에틸렌성 불포화 결합을 갖는 중합성 화합물을 생략할 수 있으며, 이 또한 본 발명의 범주에 속한다. Since alkali-soluble resin of this invention has an ethylenically unsaturated bond, 2) the polymeric compound which has an ethylenically unsaturated bond in the photosensitive resin composition can be omitted, and this also belongs to the scope of the present invention.
본 발명에 따른 감광성 수지 조성물의 구성 성분 중, 상기 3) 광중합 개시제의 비제한적인 예로는 2,4-트리클로로메틸-(4'-메톡시페닐)-6-트리아진, 2,4-트리클로로메틸-(4'-메톡시스티릴)-6-트리아진, 2,4-트리클로로메틸-(피플로닐)-6-트리아진, 2,4-트리클로로메틸-(3',4'-디메톡시페닐)-6-트리아진, 3-{4-[2,4-비스(트리클로로메틸)-s-트리아진-6-일]페닐티오} 프로판산 등의 트리아진 화합물; 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐 비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸 등의 비이미다졸 화합물; 2-히드록시-2-메틸-1-페닐프로판-1-온, 1-(4-이소프로필페닐)-2-하이드록시-2-메틸프로판-1-온, 4-(2-히드록시에톡시)-페닐 (2-히드록시)프로필 케톤, 1-히드록시시클로헥실 페닐 케톤, 2,2-디메톡시-2-페닐 아세토페논, 2-메틸-(4-메틸티오페닐)-2-몰폴리노-1-프로판-1-온(Irgacure-907), 2-벤질-2-디메틸아미노-1-(4-몰폴리노페닐)-부탄-1-온 등의 아세토페논계 화합물(Irgacure-369); Ciba Geigy 사의 Irgacure OXE 01, Irgacure OXE 02와 같은 O-아실옥심계 화합물, 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논 등의 벤조페논계 화합물; 2,4-디에틸 티옥산톤, 2-클로로 티옥산톤, 이소프로필 티옥산톤, 디이소프로필 티옥산톤 등의 티옥산톤계 화합물; 2,4,6-트리메틸벤조일 디페닐포스핀 옥사이드, 비스(2,6-디메톡시벤조일)-2,4,4-트리메틸펜틸 포스핀 옥사이드, 비스(2,6-디클로로벤조일) 프로필 포스핀 옥사이드 등의 포스핀 옥사이드계 화합물; 3,3'-카르보닐비닐-7-(디에틸아미노)쿠마린, 3-(2-벤조티아졸일)-7-(디에틸아미노)쿠마린, 3-벤조일-7-(디에틸아미노)쿠마린, 3-벤조일-7-메톡시-쿠마린, 10,10'-카르보닐비스[1,1,7,7-테트라메틸-2,3,6,7-테트라 하이드로-1H,5H,11H-Cl]-벤조피라노[6,7,8-ij]-퀴놀리진-11-온 등의 쿠마린계 화합물등이 있다.Among the constituents of the photosensitive resin composition according to the present invention, non-limiting examples of the 3) photopolymerization initiator include 2,4-trichloromethyl- (4'-methoxyphenyl) -6-triazine, 2,4-trichloro Rhomethyl- (4'-methoxystyryl) -6-triazine, 2,4-trichloromethyl- (piflonil) -6-triazine, 2,4-trichloromethyl- (3 ', 4 Triazine compounds such as' -dimethoxyphenyl) -6-triazine and 3- {4- [2,4-bis (trichloromethyl) -s-triazin-6-yl] phenylthio} propanoic acid; 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2,2'-bis (2,3-dichlorophenyl) -4,4', 5 Biimidazole compounds such as 5′-tetraphenylbiimidazole; 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 4- (2-hydroxy Methoxy) -phenyl (2-hydroxy) propyl ketone, 1-hydroxycyclohexyl phenyl ketone, 2,2-dimethoxy-2-phenyl acetophenone, 2-methyl- (4-methylthiophenyl) -2-mol Acetophenone-based compounds (Irgacure- such as polyno-1-propane-1-one (Irgacure-907) and 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one) 369); O-acyl oxime compounds such as Irgacure OXE 01 and Irgacure OXE 02 by Ciba Geigy, benzophenones such as 4,4'-bis (dimethylamino) benzophenone and 4,4'-bis (diethylamino) benzophenone compound; Thioxanthone-based compounds such as 2,4-diethyl thioxanthone, 2-chloro thioxanthone, isopropyl thioxanthone and diisopropyl thioxanthone; 2,4,6-trimethylbenzoyl diphenylphosphine oxide, bis (2,6-dimethoxybenzoyl) -2,4,4-trimethylpentyl phosphine oxide, bis (2,6-dichlorobenzoyl) propyl phosphine oxide Phosphine oxide compounds such as these; 3,3'-carbonylvinyl-7- (diethylamino) coumarin, 3- (2-benzothiazolyl) -7- (diethylamino) coumarin, 3-benzoyl-7- (diethylamino) coumarin, 3-benzoyl-7-methoxy-coumarin, 10,10'-carbonylbis [1,1,7,7-tetramethyl-2,3,6,7-tetra hydro-1H, 5H, 11H-Cl] Coumarin-based compounds such as -benzopyrano [6,7,8-ij] -quinolizin-11-one.
본 발명에 따른 감광성 수지 조성물의 구성 성분 중, 상기 4) 용매의 비제한적인 예로는 메틸 에틸 케톤, 메틸셀로솔브, 에틸셀로솔브, 에틸렌글리콜 디메틸 에테르, 에틸렌글리콜 디에틸 에테르, 프로필렌글리콜 디메틸 에테르, 프로필렌글리콜 디에틸 에테르, 디에틸렌글리콜 디메틸에테르, 디에틸렌글리콜 디에틸에테르, 디에틸렌글리콜 메틸 에틸 에테르, 2-에톡시 프로판올, 2-메톡시 프로판올, 3-메톡시 부탄올, 시클로헥사논, 시클로펜타논, 프로필렌글리콜 메틸 에테르 아세테이트, 프로펠렌글리콜 에틸 에테르 아세테이트, 3-메톡시부틸 아세테이트, 에틸 3-에톡시프로피오네이트, 에틸 셀로솔브아세테이트, 메틸 셀로솔브아세테이트, 부틸 아세테이트, 디프로필렌글리콜 모노메틸 에테르 또는 이들의 1종 이상 혼합물 등이 있다. Among the constituents of the photosensitive resin composition according to the present invention, non-limiting examples of the solvent 4) methyl ethyl ketone, methyl cellosolve, ethyl cellosolve, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, propylene glycol dimethyl Ether, propylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 2-ethoxy propanol, 2-methoxy propanol, 3-methoxy butanol, cyclohexanone, Cyclopentanone, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, 3-methoxybutyl acetate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, methyl cellosolve acetate, butyl acetate, dipropylene glycol mono Methyl ether or mixtures of one or more thereof.
본 발명의 감광성 수지 조성물은 필요에 따라 알칼리 가용성 아크릴계 공중합수지, 광증감제, 착색제, 경화촉진제, 열 중합 억제제, 가소제, 접착 촉진제, 충전제 또는 계면활성제 등의 첨가제를 추가적으로 1종 이상 포함할 수 있다. The photosensitive resin composition of the present invention may additionally include one or more additives such as alkali-soluble acrylic copolymer resins, photosensitizers, colorants, curing accelerators, thermal polymerization inhibitors, plasticizers, adhesion promoters, fillers, or surfactants. .
상기 알칼리 가용성 아크릴계 공중합 수지는 산기(acid functional group)를 포함하는 모노머 및 상기 모노머와 공중합 가능한 모노머가 열중합 개시제에 의해 공중합된 폴리머를 의미한다. The alkali-soluble acrylic copolymer resin refers to a polymer in which a monomer containing an acid functional group and a monomer copolymerizable with the monomer are copolymerized with a thermal polymerization initiator.
상기 산기를 포함하는 모노머의 비제한적인 예로는 (메타)아크릴 산, 크로톤 산, 이타콘 산, 말레인 산, 푸마르 산, 모노메틸 말레인 산, 이소프렌 술폰산, 스티렌 술폰산, 5-노보넨-2-카복실산, 모노-2-((메타)아크릴로일옥시)에틸 프탈레이트, 모노-2-((메타)아크릴로일옥시)에틸 숙시네이트, ω-카르복시 폴리카프로락톤 모노(메타)아크릴레이트 또는 이들의 혼합물 등이 있다. Non-limiting examples of the monomer containing an acid group include (meth) acrylic acid, crotonic acid, itaconic acid, maleic acid, fumaric acid, monomethyl maleic acid, isoprene sulfonic acid, styrene sulfonic acid, 5-norbornene-2 -Carboxylic acid, mono-2-((meth) acryloyloxy) ethyl phthalate, mono-2-((meth) acryloyloxy) ethyl succinate, ω-carboxy polycaprolactone mono (meth) acrylate or these And mixtures thereof.
산기를 포함하는 모노머와 공중합가능한 모노머의 비제한적인 예로는 벤질(메타)아크릴레이트, 메틸(메타)아크릴레이트, 에틸(메타)아크릴레이트, 부틸(메타)아크릴레이트, 디메틸아미노에틸(메타)아크릴레이트, 이소부틸(메타)아크릴레이트, t-부틸(메타)아크릴레이트, 시클로헥실(메타)아크릴레이트, 이소보닐(메타)아크릴레이트, 에틸헥실(메타)아크릴레이트, 2-페녹시에틸(메타)아크릴레이트, 테트라히드로퍼프릴(메타)아크릴레이트, 히드록시에틸(메타)아크릴레이트, 2-히드록시프로필(메타)아크릴레이트, 2-히드록시-3-클로로프로필(메타)아크릴레이트, 4-히드록시부틸(메타)아크릴레이트, 아실옥틸옥시-2-히드록시프로필(메타)아크릴레이트, 글리세롤(메타)아크릴레이트, 2-메톡시에틸(메타)아크릴레이트, 3-메톡시부틸(메타)아크릴레이트, 에톡시디에틸렌글리콜 (메타)아크릴레이트, 메톡시트리에틸렌글리콜(메타)아크릴레이트, 메톡시트리프로필렌글리콜(메타)아크릴레이트, 폴리(에틸렌 글리콜) 메틸에테르(메타)아크릴레이트, 페녹시디에틸렌글리콜(메타)아크릴레이트, p-노닐페녹시폴리에틸렌글리콜(메타)아크릴레이트, p-노닐페녹시폴리프로필렌글리콜(메타)아크릴레이트, 글리시딜(메타)아크릴레이트, 테트라플루오로프로필(메타)아크릴레이트, 1,1,1,3,3,3-헥사플루오로이소프로필(메타)아크릴레이트, 옥타플루 오로펜틸(메타)아크릴레이트, 헵타데카플루오로데실(메타)아크릴레이트, 트리브로모페닐(메타)아크릴레이트, 메틸 α-히드록시메틸 아크릴레이트, 에틸 α-히드록시메틸 아크릴레이트, 프로필 α-히드록시메틸 아크릴레이트, 부틸 α-히드록시메틸 아크릴레이트, 디시클로펜타닐 (메타)아크릴레이트, 디시클로펜테닐 (메타)아크릴레이트, 디시클로펜타닐 옥시에틸 (메타)아크릴레이트, 디시클로펜테닐 옥시에틸 (메타)아크릴레이트와 같은 불포화 카르복시산 에스테르류; 스티렌, α-메틸스티렌, (o,m,p)-비닐 톨루엔, (o,m,p)-메톡시 스티렌, (o,m,p)-클로로 스티렌과 같은 방향족 비닐류; 비닐 메틸 에테르, 비닐 에틸 에테르, 알릴 글리시딜 에테르와 같은 불포화 에테르류; N-비닐 피롤리돈, N-비닐 카바졸, N-비닐 모폴린과 같은 N-비닐 삼차아민류; N-페닐 말레이미드, N-(4-클로로페닐) 말레이미드, N-(4-히드록시페닐) 말레이미드, N-시클로헥실 말레이미드와 같은 불포화 이미드류; 무수 말레인산, 무수 메틸 말레인산과 같은 무수 말레산류; 알릴 글리시딜 에테르, 글리시딜 (메타)아크릴레이트, 3,4-에폭시시클로헥실메틸 (메타)아크릴레이트와 같은 불포화 글리시딜 화합물류 또는 이들의 혼합물 등이 있다.Non-limiting examples of monomers copolymerizable with monomers containing an acid group include benzyl (meth) acrylate, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, dimethylaminoethyl (meth) acrylic Rate, isobutyl (meth) acrylate, t-butyl (meth) acrylate, cyclohexyl (meth) acrylate, isobornyl (meth) acrylate, ethylhexyl (meth) acrylate, 2-phenoxyethyl (meth ) Acrylate, tetrahydroperpril (meth) acrylate, hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxy-3-chloropropyl (meth) acrylate, 4 -Hydroxybutyl (meth) acrylate, acyloctyloxy-2-hydroxypropyl (meth) acrylate, glycerol (meth) acrylate, 2-methoxyethyl (meth) acrylate, 3-methoxybutyl (meth) ) Acrylate, ethoxy Ethylene glycol (meth) acrylate, methoxy triethylene glycol (meth) acrylate, methoxy tripropylene glycol (meth) acrylate, poly (ethylene glycol) methyl ether (meth) acrylate, phenoxydiethylene glycol (meth) Acrylate, p-nonylphenoxypolyethylene glycol (meth) acrylate, p-nonylphenoxypolypropylene glycol (meth) acrylate, glycidyl (meth) acrylate, tetrafluoropropyl (meth) acrylate, 1 , 1,1,3,3,3-hexafluoroisopropyl (meth) acrylate, octafluoropentyl (meth) acrylate, heptadecafluorodecyl (meth) acrylate, tribromophenyl (meth) Acrylate, methyl α-hydroxymethyl acrylate, ethyl α-hydroxymethyl acrylate, propyl α-hydroxymethyl acrylate, butyl α-hydroxymethyl acrylate, dicyclopentanyl (methol ) Acrylate, dicyclopentenyl (meth) acrylate, dicyclopentanyl oxyethyl (meth) acrylate, dicyclopentenyl oxyethyl (meth) unsaturated carboxylic acid esters such as acrylate; Aromatic vinyls such as styrene, α-methylstyrene, (o, m, p) -vinyl toluene, (o, m, p) -methoxy styrene, (o, m, p) -chloro styrene; Unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether; N-vinyl tertiary amines, such as N-vinyl pyrrolidone, N-vinyl carbazole, and N-vinyl morpholine; Unsaturated imides such as N-phenyl maleimide, N- (4-chlorophenyl) maleimide, N- (4-hydroxyphenyl) maleimide, and N-cyclohexyl maleimide; Maleic anhydrides such as maleic anhydride and methyl maleic anhydride; Unsaturated glycidyl compounds such as allyl glycidyl ether, glycidyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, or mixtures thereof.
상기 알칼리 가용성 아크릴계 공중합 수지는 필요에 따라 측쇄에 광중합에 참여할 수 있는 에틸렌성 불포화기를 더욱 포함할 수 있다. 이 에틸렌성 불포화기는 상기 아크릴계 공중합 수지 내의 산기와 반응할 수 있는 에폭시기를 함유한 에틸렌성 불포화 화합물과의 축합으로 제조되며 산기와 반응할 수 있는 에폭시기를 함유한 에틸렌성 불포화 화합물의 비제한적인 예로는 알릴 글리시딜 에테르, 글리 시딜 (메타)아크릴레이트, 3,4-에폭시시클로헥실메틸 (메타)아크릴레이트, 글리시딜 5-노보넨-2-메틸-2-카복실레이트(엔도, 엑소 혼합물), 1,2-에폭시-5-헥센, 1,2-에폭시-9-데센 또는 이들의 혼합물 등이 있다. The alkali-soluble acrylic copolymer resin may further include an ethylenically unsaturated group capable of participating in photopolymerization in the side chain, if necessary. This ethylenically unsaturated group is prepared by condensation with an ethylenically unsaturated compound containing an epoxy group capable of reacting with an acid group in the acrylic copolymer resin, and non-limiting examples of the ethylenically unsaturated compound containing an epoxy group capable of reacting with an acid group include Allyl glycidyl ether, glycidyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, glycidyl 5-norbornene-2-methyl-2-carboxylate (endo, exo mixture) , 1,2-epoxy-5-hexene, 1,2-epoxy-9-decene or mixtures thereof.
상기 착색제로는 1종 이상의 안료, 염료 또는 이들의 혼합물을 사용할 수 있다. 구체적으로 예시하면, 흑색 안료는 카본 블랙, 흑연, 또는 티탄 블랙 등과 같은 금속산화물 등을 사용할 수 있다. 카본 블랙의 예로는 시스토 5HIISAF-HS, 시스토 KH, 시스토 3HHAF-HS, 시스토 NH, 시스토 3M, 시스토 300HAF-LS, 시스토 116HMMAF-HS, 시스토 116MAF, 시스토 FMFEF-HS, 시스토 SOFEF, 시스토 VGPF, 시스토 SVHSRF-HS 및 시스토 SSRF(동해카본 ㈜) ; 다이어그램 블랙 II, 다이어그램 블랙 N339, 다이어그램 블랙 SH, 다이어그램 블랙 H, 다이어그램 LH, 다이어그램 HA, 다이어그램 SF, 다이어그램 N550M, 다이어그램 M, 다이어그램 E, 다이어그램 G, 다이어그램 R, 다이어그램 N760M, 다이어그램 LR, #2700, #2600, #2400, #2350, #2300, #2200, #1000, #980, #900, MCF88, #52, #50, #47, #45, #45L, #25, #CF9, #95, #3030, #3050, MA7, MA77, MA8, MA11, MA100, MA40, OIL7B, OIL9B, OIL11B, OIL30B 및 OIL31B(미쯔비시화학㈜) ; PRINTEX-U, PRINTEX-V, PRINTEX-140U, PRINTEX-140V, PRINTEX-95, PRINTEX-85, PRINTEX-75, PRINTEX-55, PRINTEX-45, PRINTEX-300, PRINTEX-35, PRINTEX-25, PRINTEX-200, PRINTEX-40, PRINTEX-30, PRINTEX-3, PRINTEX-A, SPECIAL BLACK-550, SPECIAL BLACK-350, SPECIAL BLACK-250, SPECIAL BLACK-100, 및 LAMP BLACK-101(대구사㈜); RAVEN-1100ULTRA, RAVEN- 1080ULTRA, RAVEN-1060ULTRA, RAVEN-1040, RAVEN-1035, RAVEN-1020, RAVEN-1000, RAVEN-890H, RAVEN-890, RAVEN-880ULTRA, RAVEN-860ULTRA, RAVEN-850, RAVEN-820, RAVEN-790ULTRA, RAVEN-780ULTRA, RAVEN-760ULTRA, RAVEN-520, RAVEN-500, RAVEN-460, RAVEN-450, RAVEN-430ULTRA, RAVEN-420, RAVEN-410, RAVEN-2500ULTRA, RAVEN-2000, RAVEN-1500, RAVEN-1255, RAVEN-1250, RAVEN-1200, RAVEN-1190ULTRA, RAVEN-1170(콜롬비아 카본㈜) 또는 이들의 혼합물 등이 있다. As the colorant, one or more pigments, dyes or mixtures thereof may be used. Specifically, as the black pigment, a metal oxide such as carbon black, graphite, or titanium black may be used. Examples of carbon black include cysto 5HIISAF-HS, cysto KH, cysto 3HHAF-HS, cysto NH, cysto 3M, cysto 300HAF-LS, cysto 116HMMAF-HS, cysto 116MAF, cysto FMFEF-HS , Sisto SOFEF, Sisto VGPF, Sisto SVHSRF-HS and Sisto SSRF (Donghae Carbon Co., Ltd.); Diagram Black II, Diagram Black N339, Diagram Black SH, Diagram Black H, Diagram LH, Diagram HA, Diagram SF, Diagram N550M, Diagram M, Diagram E, Diagram G, Diagram R, Diagram N760M, Diagram LR, # 2700, # 2600, # 2400, # 2350, # 2300, # 2200, # 1000, # 980, # 900, MCF88, # 52, # 50, # 47, # 45, # 45L, # 25, # CF9, # 95, # 3030, # 3050, MA7, MA77, MA8, MA11, MA100, MA40, OIL7B, OIL9B, OIL11B, OIL30B and OIL31B (Mitsubishi Chemical Corporation); PRINTEX-U, PRINTEX-V, PRINTEX-140U, PRINTEX-140V, PRINTEX-95, PRINTEX-85, PRINTEX-75, PRINTEX-55, PRINTEX-45, PRINTEX-300, PRINTEX-35, PRINTEX-25, PRINTEX- 200, PRINTEX-40, PRINTEX-30, PRINTEX-3, PRINTEX-A, SPECIAL BLACK-550, SPECIAL BLACK-350, SPECIAL BLACK-250, SPECIAL BLACK-100, and LAMP BLACK-101 (Daegu Corporation); RAVEN-1100ULTRA, RAVEN- 1080ULTRA, RAVEN-1060ULTRA, RAVEN-1040, RAVEN-1035, RAVEN-1020, RAVEN-1000, RAVEN-890H, RAVEN-890, RAVEN-880ULTRA, RAVEN-860ULTRA, RAVEN-850, RAVEN- 820, RAVEN-790ULTRA, RAVEN-780ULTRA, RAVEN-760ULTRA, RAVEN-520, RAVEN-500, RAVEN-460, RAVEN-450, RAVEN-430ULTRA, RAVEN-420, RAVEN-410, RAVEN-2500ULTRA, RAVEN-2000, RAVEN-1500, RAVEN-1255, RAVEN-1250, RAVEN-1200, RAVEN-1190ULTRA, RAVEN-1170 (Colombia Carbon, Inc.) or mixtures thereof.
또한, 색깔을 띄는 착색제의 예로는 카민 6B(C.I.12490), 프탈로시아닌 그린(C.I. 74260), 프탈로시아닌 블루(C.I. 74160), 페릴렌 블랙(BASF K0084. K0086), 시아닌 블랙, 리놀옐로우(C.I.21090), 리놀 옐로우GRO(C.I. 21090), 벤지딘 옐로우4T-564D, 빅토리아 퓨어 블루(C.I.42595), C.I. PIGMENT RED 3, 23, 97, 108, 122, 139, 140, 141, 142, 143, 144, 149, 166, 168, 175, 177, 180, 185, 189, 190, 192, 202, 214, 215, 220, 221, 224, 230, 235, 242, 254, 255, 260, 262, 264, 272; C.I. PIGMENT GREEN 7, 36; C.I. PIGMENT blue 15:1, 15:3, 15:4, 15:6, 16, 22, 28, 36, 60, 64; C.I. PIGMENT yellow 13, 14, 35, 53, 83, 93, 95, 110, 120, 138, 139, 150, 151, 154, 175, 180, 181, 185, 194, 213; C.I. PIGMENT VIOLET 15, 19, 23, 29, 32, 37 등이 있고, 이 밖에 백색 안료, 형광 안료 등도 이용할 수 있다.In addition, examples of the colorant to be colored are carmine 6B (CI12490), phthalocyanine green (CI 74260), phthalocyanine blue (CI 74160), perylene black (BASF K0084. K0086), cyanine black, linole yellow (CI21090), Linol yellow GRO (CI 21090), benzidine yellow 4T-564D, Victoria pure blue (CI42595), CI PIGMENT RED 3, 23, 97, 108, 122, 139, 140, 141, 142, 143, 144, 149, 166, 168, 175, 177, 180, 185, 189, 190, 192, 202, 214, 215, 220, 221, 224, 230, 235, 242, 254, 255, 260, 262, 264, 272; C.I. PIGMENT GREEN 7, 36; C.I. PIGMENT blue 15: 1, 15: 3, 15: 4, 15: 6, 16, 22, 28, 36, 60, 64; C.I. PIGMENT yellow 13, 14, 35, 53, 83, 93, 95, 110, 120, 138, 139, 150, 151, 154, 175, 180, 181, 185, 194, 213; C.I. PIGMENT VIOLET 15, 19, 23, 29, 32, 37, etc. In addition, a white pigment, a fluorescent pigment, etc. can also be used.
상기 경화촉진제의 예로는 2-머캡토벤조이미다졸, 2-머캡토벤조티아졸, 2-머캡토벤조옥사졸, 2,5-디머캡토-1,3,4-티아디아졸, 2-머캡토-4,6-디메틸아미노피리 딘, 펜타에리스리톨 테트라키스(3-머캡토프로피오네이트), 펜타에리스리톨 트리스(3-머캡토프로피오네이트), 펜타에리스리톨 테트라키스(2-머캡토아세테이트), 펜타에리스리톨 트리스(2-머캡토아세테이트), 트리메틸올프로판 트리스(2-머캡토아세테이트), 트리메틸올프로판 트리스(3-머캡토프로피오네이트), 트리메틸올에탄 트리스(2-머캡토아세테이트), 트리메틸옥에탄 트리스(3-머캡토프로피오네이트)로 이루어지는 군으로부터 선택되는 1 종 이상을 사용할 수 있으나, 이들에 한정되는 것은 아니며 당 기술 분야에 알려져 있는 것들을 사용할 수 있다.Examples of the curing accelerator include 2-mercaptobenzoimidazole, 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2,5-dimercapto-1,3,4-thiadiazole, 2-mer Capto-4,6-dimethylaminopyridine, pentaerythritol tetrakis (3-mercaptopropionate), pentaerythritol tris (3-mercaptopropionate), pentaerythritol tetrakis (2-mercaptoacetate), Pentaerythritol tris (2-mercaptoacetate), trimethylolpropane tris (2-mercaptoacetate), trimethylolpropane tris (3-mercaptopropionate), trimethylolethane tris (2-mercaptoacetate), trimethyl One or more kinds selected from the group consisting of octane tris (3-mercaptopropionate) may be used, but are not limited thereto, and those known in the art may be used.
상기 열 중합 억제제로는 p-아니솔, 히드로퀴논, 피로카테콜(pyrocatechol), t-부틸카테콜(t-butyl catechol), N-니트로소페닐히드록시아민 암모늄염, N-니트로소페닐히드록시아민 알루미늄염 및 페노티아진(phenothiazine)으로 이루어지는 군으로부터 선택되는 1 종 이상을 사용할 수 있으나, 이들에 한정되는 것은 아니며 당 기술 분야에 알려져 있는 것들을 사용할 수 있다. The thermal polymerization inhibitors include p-anisole, hydroquinone, pyrocatechol, t-butyl catechol, N-nitrosophenylhydroxyamine ammonium salt, N-nitrosophenylhydroxyamine One or more selected from the group consisting of aluminum salts and phenothiazines can be used, but are not limited thereto, and those known in the art can be used.
기타 가소제, 접착 촉진제, 충전제 및 계면활성제 등도 종래 감광성 수지 조성물에 포함될 수 있는 모든 화합물이 사용될 수 있다.Other plasticizers, adhesion promoters, fillers, surfactants and the like can also be used for all compounds that can be included in conventional photosensitive resin compositions.
본 발명에 따른 감광성 수지 조성물은The photosensitive resin composition according to the present invention
1) 알칼리 가용성 수지 1 내지 20 중량부, 1) 1 to 20 parts by weight of alkali-soluble resin,
2) 에틸렌성 불포화 결합을 갖는 중합성 화합물 0.5 내지 30 중량부; 2) 0.5 to 30 parts by weight of a polymerizable compound having an ethylenically unsaturated bond;
3) 광중합 개시제 0.1 내지 5 중량부; 및 3) 0.1 to 5 parts by weight of the photopolymerization initiator; And
4) 용매 10 내지 95 중량부 4) 10 to 95 parts by weight of solvent
를 포함하는 것이 바람직하다. It is preferable to include.
한편, 상기 알칼리 가용성 아크릴계 공중합 수지가 상기 성분에 첨가제로써 첨가되는 경우, 알칼리 가용성 아크릴계 공중합 수지와 본 발명의 알칼리 가용성 수지의 합은 20 중량부가 넘지 않도록 하며, 바람직하게는 1 내지 19 중량부가 되도록 한다. 또한 상기 알칼리 가용성 아크릴계 공중합 수지 외의 기타 전술한 첨가제가 첨가되는 경우, 첨가제 중 착색제는 0.5 내지 20 중량부, 그 외 나머지 첨가제는 0.01 내지 10 중량부로 함유되는 것이 바람직하다.On the other hand, when the alkali-soluble acrylic copolymer resin is added as an additive to the component, the sum of the alkali-soluble acrylic copolymer resin and the alkali-soluble resin of the present invention does not exceed 20 parts by weight, preferably 1 to 19 parts by weight. . In addition, when the above-mentioned additives other than the alkali-soluble acrylic copolymer resin are added, the coloring agent in the additive is 0.5 to 20 parts by weight, the other additives are 0.01 to 10 parts by weight It is preferable to contain.
본 발명에 따른 알칼리 가용성 수지 제조용 조성물은 전술한 성분 이외에 통상적으로 사용되는 용매, 축합 촉매 및 기타 첨가제를 추가적으로 포함할 수 있다.The composition for producing an alkali-soluble resin according to the present invention may further include a solvent, a condensation catalyst, and other additives commonly used in addition to the above components.
이하 본 발명의 알칼리 가용성 수지의 제조방법을 설명한다.Hereinafter, the manufacturing method of alkali-soluble resin of this invention is demonstrated.
본 발명의 알칼리 가용성 수지는 최소 두 단계의 반응을 거친다. Alkali-soluble resins of the present invention undergo at least two stages of reaction.
첫번째 단계는 단분자 화합물이 고분자를 형성하는 반응으로, 본 발명의 알칼리 가용성 수지 조성물의 a) 성분인 디올 화합물과 b) 성분인 카르복시산 이무수물 화합물의 교대 공중합 반응이다. 디올 화합물 대 카르복시산 이 무수물 화합물 의 비율은 디올화합물 100몰에 대해 카르복시산 이 무수물 50 내지 150몰 범위에서 선택할 수 있으며, 충분한 크기의 분자량을 얻기 위해서는 60 내지 120몰 정도의 비슷한 몰분율을 사용하는 것이 바람직하다. 이 반응은 소량의 촉매를 첨가하는 경우 더욱 쉽게 일어난다. 본 발명에서 사용할 수 있는 촉매로는 당 기술 분야에서 축합 반응의 촉매로서 알려져 있는 통상의 촉매를 사용할 수 있으며, 예컨대 염기성 촉매인 알킬암모늄염, 트리페닐포스핀, 트리페닐안티몬, 디메틸아미노피리딘 등을 사용할 수 있다. The first step is a reaction in which a monomolecular compound forms a polymer, and is an alternating copolymerization reaction of a diol compound as a) and a carboxylic dianhydride compound as b) of the alkali-soluble resin composition of the present invention. The ratio of diol compound to carboxylic anhydride compound may be selected in the range of 50 to 150 moles of carboxylic acid anhydride with respect to 100 moles of diol compound, and in order to obtain a sufficient molecular weight, it is preferable to use a similar mole fraction of about 60 to 120 moles. . This reaction occurs more easily with the addition of small amounts of catalyst. As the catalyst that can be used in the present invention, a conventional catalyst known in the art as a catalyst for condensation reaction can be used, and for example, a basic catalyst such as alkylammonium salt, triphenylphosphine, triphenylantimony, dimethylaminopyridine, or the like can be used. Can be.
상기 축합 반응의 반응 온도는 80 내지 150℃, 특히 100 내지 150℃ 범위인 것이 바람직하며, 반응 시간은 1 내지 48 시간, 특히 4 내지 48시간이 바람직하다. 상기와 같은 온도 범위에서는 축합 반응을 통해 부가된 에틸렌기가 열중합을 통하여 겔화를 일으킬 수 있으므로, 상기 중합 반응에 적절한 열중합 금지제를 산소가 있는 분위기 하에 사용할 수 있으며, 열중합 금지제의 대표적인 예로는 4-메톡시페놀(MEHQ), 2,6-디-티부틸-4-메틸 페놀이 있다. The reaction temperature of the condensation reaction is preferably in the range of 80 to 150 ° C, in particular 100 to 150 ° C, and the reaction time is preferably 1 to 48 hours, particularly 4 to 48 hours. In the above temperature range, since the ethylene group added through the condensation reaction may cause gelation through thermal polymerization, a thermal polymerization inhibitor suitable for the polymerization reaction may be used under an oxygen atmosphere, and a representative example of the thermal polymerization inhibitor 4-methoxyphenol (MEHQ), 2,6-di-thibutyl-4-methyl phenol.
본 발명에 따른 두번째 단계는 상기 첫번째 단계를 통해 형성된 고분자의 카르복시산 무수물 말단과 본 발명의 알칼리 가용성 수지 조성물의 c) 성분인 디아민 화합물이 축합 반응을 통해 아믹산기를 형성하는 단계이다. 이때 형성된 아믹산은 추후의 포스트 베이크 공정을 통해 이미드기로 변환하여 형성된 감광재 패턴의 내약품성을 높이는 역할을 하게 된다. 디아민 화합물의 양은, 첫번째 단계를 통해 형성된 폴리머의 미반응 카르복시산 : 디아민 화합물의 몰이 1:0.5 ~ 1:2, 바람직하 게는 1:0.8 ~ 1:1.5의 범위에서 선택될 수 있다. The second step according to the present invention is a step in which the carboxylic acid anhydride terminal of the polymer formed through the first step and the diamine compound, which is the c) component of the alkali-soluble resin composition of the present invention, form an amic acid group through a condensation reaction. In this case, the formed amic acid serves to increase chemical resistance of the photosensitive material pattern formed by converting the imide group through a post-baking process. The amount of diamine compound may be selected in a range of 1: 0.5 to 1: 2, preferably 1: 0.8 to 1: 1.5, of the moles of unreacted carboxylic acid: diamine compound of the polymer formed through the first step.
상기 축합 반응의 반응 온도는 10℃ 내지 70℃ 범위인 것이 바람직하고, 반응 시간은 1 내지 48 시간이 바람직하다. 디아민 화합물은 산화 과정을 통해 짙은 갈색으로 발색을 할 수 있는데, 이러한 현상이 나타나는 것을 방지하기 위하여 질소 분위기 하에서 반응할 수 있으나, 여전히 겔화가 발생할 수 있으므로 산소가 있는 분위기 하에서 반응하는 것이 바람직하다.The reaction temperature of the condensation reaction is preferably in the range of 10 ° C to 70 ° C, and the reaction time is preferably 1 to 48 hours. The diamine compound may develop a dark brown color through an oxidation process. In order to prevent such a phenomenon from occurring, the diamine compound may be reacted under a nitrogen atmosphere. However, since the diamine compound may still be gelled, the diamine compound is preferably reacted under an oxygen atmosphere.
본 발명의 알칼리 가용성 수지는 필요에 따라 아민 말단을 카르복시산 일무수물 화합물과 축합하여 이미드기로 변환하는 단계를 첨가할 수 있으며 반응의 조건은 두번째 단계와 같다. 미반응 아민기 : 카르복시산 일무수물의 양은 몰로 1: 0.8 ~ 1: 1.2, 바람직하게는 1:1 ~ 1:1.2의 범위에서 선택할 수 있다. Alkali-soluble resin of the present invention may be added, if necessary, the step of condensing the amine terminal with the carboxylic acid anhydride compound to convert the imide group and the reaction conditions are the same as in the second step. The amount of unreacted amine group: carboxylic acid anhydride may be selected in the range of 1: 0.8 to 1: 1.2, preferably 1: 1 to 1: 1.2 in moles.
이와 같은 방법에 따라 제조된 알칼리 가용성 수지 바인더의 산가는 50 내지 200 KOH mg/g의 범위가 바람직하다. 산가가 50 미만인 경우 알칼리 현상액에 대한 용해도가 낮아 현상 시간이 길어지고 기판상에 잔사를 남길 우려가 있으며, 산가가 200을 초과하는 경우 패턴의 탈착이 일어나고 패턴의 직진성을 확보할 수 없으며 패턴의 테이퍼각이 90도를 넘는 역테이퍼(또는 T-top)를 보이게 된다. The acid value of the alkali-soluble resin binder prepared according to this method is preferably in the range of 50 to 200 KOH mg / g. If the acid value is less than 50, the solubility in the alkaline developer is low, which may lead to a long development time and to leave residue on the substrate. When the acid value is more than 200, the pattern may be detached and the pattern may not go straight. You will see an inverse taper (or T-top) over 90 degrees.
또한, 상기 알칼리 가용성 수지 바인더의 중량 평균 분자량으로는 3000 내지 100,000의 범위가 바람직하며, 특히 5,000 내지 30,000 범위가 더욱 바람직하다. 중량평균 분자량이 3000 미만인 경우 바인더 폴리머로서 요구되는 구성 성분간의 바인딩 기능이 약하고 현상시의 물리적 외력에 견딜 수 없어 패턴이 소실되며 LCD 용 감광재에 요구되는 기본적인 내열성 및 내약품성 등의 물성을 만족할 수 없다. 중량 평균 분자량이 100,000을 초과하는 경우 알칼리 현상액에 대한 현상성이 과도하게 적어 현상 공정 특성이 저하되고 심할 경우 현상이 불가능해지며, 흐름성도 나빠져서 코팅 두께의 제어나 두께 균일성(uniformity) 확보가 어려워진다.In addition, the weight average molecular weight of the alkali-soluble resin binder is preferably in the range of 3000 to 100,000, more preferably in the range of 5,000 to 30,000. If the weight average molecular weight is less than 3000, the binding function between the components required as the binder polymer is weak, and the pattern is lost due to the physical external force during development, and the physical properties such as basic heat resistance and chemical resistance required for the photosensitive material for LCD can be satisfied. none. If the weight average molecular weight is more than 100,000, the developability of the alkaline developer is excessively low, so that the development process characteristics are deteriorated, and if it is severe, the development is impossible, and the flowability is also poor, making it difficult to control the coating thickness or secure the uniformity of the thickness. Lose.
본 발명의 감광성 수지 조성물은 롤 코터(roll coater), 커튼 코터(curtain coater), 스핀 코터(spin coater), 슬롯 다이 코터, 각종 인쇄, 침적 등에 사용되며, 금속, 종이, 유리 플라스틱 기판 등의 지지체상에 적용될 수 있다. 또한, 필름 등의 지지체 상에 도포한 후 기타 지지체 상에 전사하는 것도 가능하며, 그 적용 방법은 특별히 한정되지 않는다. The photosensitive resin composition of the present invention is used in a roll coater, curtain coater, spin coater, spin coater, slot die coater, various printing, deposition, and the like, and supports for metal, paper, and glass plastic substrates. Can be applied to the phase. Moreover, after apply | coating on support bodies, such as a film, it is also possible to transfer on other support bodies, The application method is not specifically limited.
본 발명의 감광성 수지 조성물을 경화시키기 위한 광원으로는 예컨대 파장이 250 내지 450 nm의 광을 발산하는 수은 증기 아크(arc), 탄소 아크, Xe 아크 등이 있다.As a light source for hardening the photosensitive resin composition of this invention, mercury vapor arc (arc), carbon arc, Xe arc etc. which emit light of 250-450 nm in wavelength, for example are mentioned.
이하의 실시예를 통하여 본 발명을 더욱 상세하게 설명한다. 단, 실시예는 본 발명을 예시하기 위한 것이며 본 발명의 범위가 이들에 의하여 한정되는 것은 아니다.The present invention will be described in more detail with reference to the following examples. However, the Examples are provided to illustrate the present invention and the scope of the present invention is not limited thereto.
[합성예 1~ 4. 알칼리 가용성 수지 제조][Synthesis example 1-4. Manufacture of alkali-soluble resin]
합성예Synthesis Example 1 One
1) 비스페놀 A 글리서레이트 디아크릴레이트(BGDA) 69.78 g(0.144mol), 3,3',4,4'-디페닐설폰 테트라카르복실산 이무수물(DTDA) 56.76 g(0.158 mol), 촉매로 테트라부틸암모늄 브로마이드(TBAB) 0.89 g, 열중합 금지제로 p-메톡시페놀(MEHQ) 0.39 g, 용매로 프로필렌글리콜 메틸 에테르 아세테이트(PGMEA) 287 g을 500 mL two-neck 둥근바닥 플라스크에 담았다. 115 ℃에서 2시간 동안 공기를 흘려주며 가열하였다. 그 후 플라스크를 냉각하여 BGDA와 DTDA가 축합중합한 폴리머 용액 A를 얻었다. (Mw 8,300, 산가 144, 고형분 30.6%)1) Bisphenol A Glycerate Diacrylate ( BGDA ) 69.78 g (0.144 mol), 3,3 ', 4,4'-diphenylsulfone tetracarboxylic dianhydride ( DTDA ) 56.76 g (0.158 mol), catalyst 0.89 g of tetrabutylammonium bromide ( TBAB ), 0.39 g of p-methoxyphenol ( MEHQ ) as a thermal polymerization inhibitor, and 287 g of propylene glycol methyl ether acetate ( PGMEA ) as a solvent were placed in a 500 mL two-neck round bottom flask. Heated at 115 ° C. for 2 hours with air. Thereafter, the flask was cooled to obtain a polymer solution A obtained by condensation polymerization of BGDA and DTDA. (Mw 8,300, acid value 144, solids 30.6%)
2) 4,4'-(1,4-페닐렌디옥시)디아닐린(TPEQ) 3.77g (0.013 mol)을 25.3 g의 시클로헥사논에 녹여 상기 폴리머 용액 A 66.43 g(미반응 무수물기 0.0023몰에 해당)에 떨어뜨리고 상온에서 24시간 저어주었다. 저어 주는 동안은 공기를 지속적으로 흘려 산소가 있는 분위기를 만들었다. 그 이후 테트라히드로프탈산 무수물(THPA) 2.00g (0.013 mol)을 넣고 5시간 동안 저어 반응을 종결하여 폴리머 용액 1을 얻었다. (Mw 15,000, 산가 156, 고형분 26.1%)2) 3.77 g (0.013 mol) of 4,4 '-(1,4-phenylenedioxy) dianiline ( TPEQ ) was dissolved in 25.3 g of cyclohexanone and 66.43 g of the polymer solution A (0.0023 mol of unreacted anhydride group). Drop) and stir at room temperature for 24 hours. During the stirring, air was continuously flowing to create an oxygen atmosphere. Thereafter, 2.00 g (0.013 mol) of tetrahydrophthalic anhydride ( THPA ) was added thereto, and the reaction was terminated for 5 hours to obtain Polymer Solution 1. (Mw 15,000, acid value 156, solids 26.1%)
합성예Synthesis Example 2 2
1) 비스페놀 A 글리서레이트 디아크릴레이트(BGDA) 62.78 g(0.130mol), 에틸렌 글리콜 비스(4-트리멜리테이트) 이무수물(TMEG) 58.48 g (0.143 mol), 촉매로 TBAB 0.81 g, 열중합 금지제로 MEHQ 0.19 g, 용매로 PGMEA 230 g을 500 mL two-neck 둥근바닥 플라스크에 담았다. 115 ℃에서 11시간 동안 공기를 흘려주며 가열 하였다. 그 후 플라스크를 냉각하여 BGDA와 TMEG가 축합중합한 폴리머 용액 B를 얻었다. (Mw 5800, 산가 142, 고형분 34.1%)1) Bisphenol A Glycerate Diacrylate (BGDA) 62.78 g (0.130 mol), Ethylene Glycol Bis (4-Trimellitate) Anhydride (TMEG) 58.48 g (0.143 mol), TBAB 0.81 g as Catalyst, Thermal Polymerization 0.19 g of MEHQ as inhibitor and 230 g of PGMEA as solvent were placed in a 500 mL two-neck round bottom flask. Heated for 11 hours at 115 ℃ flowing air. Thereafter, the flask was cooled to obtain a polymer solution B obtained by condensation polymerization of BGDA and TMEG. (Mw 5800, Acid Value 142, Solids 34.1%)
2) 4,4'-(4,4'-이소프로필리덴 디페닐-1,1'-디일-디옥시)디아닐린 (BAPP) 2.40g (0.0059 mol)을 22.4 g의 시클로헥사논에 녹여 상기 폴리머 용액 B 115.66 g (미반응 무수물기 0.0042몰에 해당)에 떨어뜨리고 상온에서 24시간 저어주었다. 저어 주는 동안은 공기를 지속적으로 흘려 산소가 있는 분위기를 만들었다. 그 이후 THPA 0.64g (0.004 mol)을 넣고 24시간 동안 저어 반응을 종결하여 폴리머 용액 2를 얻었다. (Mw 10,100, 산가 153, 고형분 29.8 %)2) Dissolve 2.40 g (0.0059 mol) of 4,4 '-(4,4'-isopropylidene diphenyl-1,1'-diyl-dioxy) dianiline (BAPP) in 22.4 g of cyclohexanone Dropped to 115.66 g of polymer solution B (corresponds to 0.0042 mol of unreacted anhydride groups) and stirred at room temperature for 24 hours. During the stirring, air was continuously flowing to create an oxygen atmosphere. After that, 0.64 g (0.004 mol) of THPA was added thereto, and the reaction was terminated by stirring for 24 hours to obtain Polymer Solution 2. (Mw 10,100, acid value 153, solids 29.8%)
합성예Synthesis Example 3 3
1) 비스페놀 A 글리서레이트 디아크릴레이트(BGDA) 98.68 g(0.204mol), 비페닐 테트라카르복시산 이무수물(BPDA) 65.89 g (0.224 mol), 촉매로 TBAB 1.32 g, 열중합 금지제로 MEHQ 0.65 g, PGMEA 126 g을 500 mL two-neck 둥근바닥 플라스크에 담았다. 115 ℃에서 10시간 동안 공기를 흘려주며 가열하였다. 그 후 BGDA 용액 69.00 g (고형분 31.82 g, 0.066몰)을 첨가하고 115 ℃에서 2시간, BGDA 용액 33.00 g(고형분 15.22 g, 0.031몰)을 넣고 115 ℃에서 2시간, BGDA 용액 28.50 g(고형분 13.14 g, 0.027몰)을 넣고 115 ℃에서 1시간 추가 가열 후 플라스크를 냉각하여 BGDA와 BPDA가 축합중합한 폴리머 용액 C를 얻었다. (Mw 5100, 산가 122, 고형분 38.4%)1) Bisphenol A Glycerate Diacrylate (BGDA) 98.68 g (0.204 mol), Biphenyl tetracarboxylic dianhydride (BPDA) 65.89 g (0.224 mol), TBAB 1.32 g as catalyst, MEHQ 0.65 g, as thermal polymerization inhibitor, 126 g of PGMEA was placed in a 500 mL two-neck round bottom flask. Heated at 115 ° C. for 10 hours with air. Then 69.00 g of BGDA solution (31.82 g of solid content, 0.066 mol) was added thereto, followed by 2 hours at 115 ° C., 33.00 g of BGDA solution (15.22 g of solid content of 0.031 mol), and 2 hours at 115 ° C., 28.50 g of BGDA solution (solid content 13.14). g, 0.027 mol), and further heated at 115 ° C. for 1 hour to cool the flask to obtain a polymer solution C obtained by condensation polymerization of BGDA and BPDA. (Mw 5100, acid value 122, solids 38.4%)
2) 4,4'-(1,3-페닐렌디옥시)디아닐린 (APB) 0.54g (0.0018 mol)을 3.57 g의 시클로헥사논에 녹여 상기 폴리머 용액 C 107.57 g(미반응 무수물기 0.0017몰에 해당)에 떨어뜨리고 상온에서 24시간 저어주어 반응을 종결하여 폴리머 용액 3을 얻었다. 저어 주는 동안은 공기를 지속적으로 흘려 산소가 있는 분위기를 만들었다. (Mw 6,600, 산가 117, 고형분 40.0 %)2) 0.54 g (0.0018 mol) of 4,4 '-(1,3-phenylenedioxy) dianiline (APB) was dissolved in 3.57 g of cyclohexanone to 107.57 g of the polymer solution C (0.0017 mol of unreacted anhydride group). Drop), stirred at room temperature for 24 hours to terminate the reaction, to obtain a polymer solution 3. During the stirring, air was continuously flowing to create an oxygen atmosphere. (Mw 6,600, acid value 117, solids 40.0%)
합성예Synthesis Example 4 4
1) 비스페놀 플루오렌 디글리시딜 에테르 (BPFG) 55.55 g(0.120mol), 아크릴산 19.06 g(0.265mol), 촉매로 테트라부틸암모늄 브로마이드(TBAB) 1.52 g, 열중합 금지제로 p-메톡시페놀(MEHQ) 0.81 g, PGMEA 169 g을 500 mL two-neck 둥근바닥 플라스크에 담았다. 120 ℃에서 12시간 동안 공기를 흘려주며 가열하여 TLC로 BPFG가 남아있지 않은 것을 확인한 후 BPDA 23.03 g(0.078 mol)을 넣고 8시간, BPDA 1.70 g(0.0057 mol)을 넣고 5시간, 또다시 BPDA 1.70 g(0.0057 mol)을 넣고 4시간 추가 가열 한 후 플라스크를 냉각하여 폴리머 용액을 얻었다. 이 용액 169.10g을 취한 후 120 ℃로 승온하고 BPDA 3.24 g(0.011 mol)과 PGMEA 71 g을 넣고 8시간 가열하였고 남겨둔 상기의 폴리머 용액 41.54 g을 넣고 120 ℃에서 3시간 가열하였다. 냉각 후 폴리머 용액 D를 얻었다. (Mw 4,500, 산가 123, 고형분 27.7%)1) 55.55 g (0.120 mol) of bisphenol fluorene diglycidyl ether (BPFG), 19.06 g (0.265 mol) of acrylic acid, 1.52 g of tetrabutylammonium bromide (TBAB) as a catalyst, p-methoxyphenol as a thermal polymerization inhibitor ( MEHQ) 0.81 g and 169 g PGMEA were placed in a 500 mL two-neck round bottom flask. After heating for 12 hours at 120 ° C, confirming that no BPFG remained by TLC. After adding 23.03 g (0.078 mol) of BPDA for 8 hours, adding 1.70 g (0.0057 mol) of BPDA for 5 hours, and then BPDA 1.70 g (0.0057 mol) was added thereto, followed by additional heating for 4 hours, and the flask was cooled to obtain a polymer solution. After taking 169.10 g of this solution, the temperature was raised to 120 ° C., 3.24 g (0.011 mol) of BPDA and 71 g of PGMEA were added thereto, and the result was heated for 8 hours. After cooling, polymer solution D was obtained. (Mw 4,500, acid value 123, solids 27.7%)
2) 4,4'-(1,3-페닐렌디옥시)디아닐린 (APB) 1.16g (0.0040 mol)을 8.00 g의 PGMEA에 녹여 상기 폴리머 용액 D 169,95 g(미반응 무수물기 0.0040몰에 해당)에 떨어뜨리고 상온에서 24시간 저어주어 반응을 종결하고, 폴리머 용액 4를 얻었다. 저어 주는 동안은 공기를 지속적으로 흘려 산소가 있는 분위기를 만들었다. (Mw 5,100, 산가 117, 고형분 27.0 %)2) Dissolve 1.16 g (0.0040 mol) of 4,4 '-(1,3-phenylenedioxy) dianiline (APB) in 8.00 g of PGMEA and add 169,95 g of the polymer solution D (0.0040 mol of unreacted anhydride group). Drop), stirred at room temperature for 24 hours to terminate the reaction, to obtain a polymer solution 4. During the stirring, air was continuously flowing to create an oxygen atmosphere. (Mw 5,100, acid value 117, solids 27.0%)
[비교합성예 1~3. 알칼리 가용성 수지 제조]Comparative Examples 1-3. Alkali-soluble resin production]
비교합성예Comparative Synthesis Example 1 One
벤질 메타아크릴레이트 (BzMA) 89.3g과 메틸 메타아크릴산(MAA) 10.7g, 사슬이동제로 도데실머캡탄 0.3 g, 용매로 PGMEA 375 g을 반응기에 담고 반응물의 온도로 70 ℃로 승온하였다. 이때 질소를 용액 내에 퍼징하며 1시간 동안 산소를 제거하였다. 반응물의 온도가 70 ℃에 이르고 충분히 산소가 제거된 후 열중합개시제로 2,2'-아조 비스(이소부티로니트릴) (AIBN) 2.5 g을 25 g의 PGMEA에 녹여 한번에 부었다. 6시간 중합 후 80 ℃로 승온하여 한시간 가열하고 반응물을 식혀 폴리머 용액 E를 얻었다. (Mw 22000, AV 70, SC 19.24 %)89.3 g of benzyl methacrylate (BzMA) and 10.7 g of methyl methacrylic acid (MAA), 0.3 g of dodecylmercaptan as a chain transfer agent, and 375 g of PGMEA as a solvent were put in a reactor, and the temperature of the reaction was increased to 70 ° C. At this time, nitrogen was purged in the solution and oxygen was removed for 1 hour. After the reaction temperature reached 70 ° C. and oxygen was sufficiently removed, 2.5 g of 2,2′-azobis (isobutyronitrile) ( AIBN ) was dissolved in 25 g of PGMEA as a thermal initiator. After the polymerization for 6 hours, the temperature was raised to 80 ° C and heated for one hour to cool the reaction to obtain a polymer solution E. (Mw 22000, AV 70, SC 19.24%)
비교합성예Comparative Synthesis Example 2 2
벤질 메타아크릴레이트 (BzMA) 83.1g과 메틸 메타아크릴산(MAA) 16.9g, 사슬이동제로 도데실머캡탄 1.5 g, 용매로 PGMEA 375 g을 반응기에 담고 반응물의 온도로 70 ℃로 승온하였다. 이때 질소를 용액 내에 퍼징하며 1시간 동안 산소를 제거하였다. 반응물의 온도가 70 ℃에 이르고 충분히 산소가 제거된 후 열중합개시제로 2,2'-아조 비스(이소부티로니트릴) (AIBN) 2.5 g을 25 g의 PGMEA에 녹여 한번에 부었다. 6시간 중합 후 80 ℃로 승온하여 한시간 가열하고 반응물을 식혀 폴리머 용액 F를 얻었다(Mw 18000, AV 110, SC 19.42 %)83.1 g of benzyl methacrylate (BzMA) and 16.9 g of methyl methacrylic acid (MAA), 1.5 g of dodecylmercaptan as a chain transfer agent, 375 g of PGMEA as a solvent were put in a reactor, and the temperature of the reactant was raised to 70 ° C. At this time, nitrogen was purged in the solution and oxygen was removed for 1 hour. After the reaction temperature reached 70 ° C. and oxygen was sufficiently removed, 2.5 g of 2,2′-azobis (isobutyronitrile) ( AIBN ) was dissolved in 25 g of PGMEA as a thermal initiator. After polymerization for 6 hours, the temperature was raised to 80 ° C., heated for one hour, and the reaction product was cooled down to obtain a polymer solution F (Mw 18000, AV 110, SC 19.42%).
비교합성예Comparative Synthesis Example 3 3
상기 합성예 3의 2)에서 4,4'-(1,3-페닐렌디옥시)디아닐린(APB)를 첨가하지 않은 것을 제외하고는 폴리머 용액 3의 제조와 동일하게 폴리머 용액 G를 얻었다. (Mw 5100, 산가 122, 고형분 38.4%)Polymer solution G was obtained in the same manner as in the preparation of polymer solution 3 except that 4,4 ′-(1,3-phenylenedioxy) dianiline (APB) was not added in Synthesis Example 3). (Mw 5100, acid value 122, solids 38.4%)
[실시예 1-5. 감광성 수지 조성물 제조]Example 1-5. Photosensitive resin composition]
실시예Example 1 One
카본 블랙의 25 % 분산액 35g, 알칼리 가용성 수지로서 상기 합성예 1에서 제조된 알칼리 가용성 수지 13.4 g(고형분 3.5 g) , 중합성 화합물인 디펜타에리스리톨 헥사아크릴레이트 3.5g, 광중합 개시제 Irgacure-369 2.5g, 3-{4-[2,4-비스(트리클로로메틸)-s-트리아진-6-일]페닐티오} 프로판산 1g, 4,4'-디에틸아미노벤조페논 0.5g, 유기 용매인 PGMEA 44.5g을 3 시간 동안 혼합하여 감광성 수지 조성물을 제조하였다.35 g of carbon black 25% dispersion, 13.4 g of alkali-soluble resin (solid content 3.5 g) prepared in Synthesis Example 1 as alkali-soluble resin, 3.5 g of dipentaerythritol hexaacrylate as a polymerizable compound, 2.5 g of photopolymerization initiator Irgacure-369 , 1 g of 3- {4- [2,4-bis (trichloromethyl) -s-triazin-6-yl] phenylthio} propanoic acid, 0.5 g of 4,4'-diethylaminobenzophenone, organic solvent 44.5 g of PGMEA was mixed for 3 hours to prepare a photosensitive resin composition.
실시예Example 2 2
카본 블랙의 25 % 분산액 35g, 알칼리 가용성 수지로서 상기 합성예 2에서 제조된 알칼리 가용성 수지 11.7 g(고형분 3.5g), 중합성 화합물인 디펜타에리스리톨 헥사아크릴레이트 3.5g, 광중합 개시제 Irgacure-369 2.5g, 3-{4-[2,4-비스(트리클로로메틸)-s-트리아진-6-일]페닐티오} 프로판산 1g, 4,4'-디에틸아미노벤조페논 0.5g, 유기 용매인 PGMEA 45.8g을 3 시간 동안 혼합하여 감광성 수지 조성물을 제조하였다. 35 g of carbon black 25% dispersion, 11.7 g (solid content 3.5 g) of alkali-soluble resin prepared in Synthesis Example 2 as alkali-soluble resin, 3.5 g of dipentaerythritol hexaacrylate as a polymerizable compound, 2.5 g of photopolymerization initiator Irgacure-369 , 1 g of 3- {4- [2,4-bis (trichloromethyl) -s-triazin-6-yl] phenylthio} propanoic acid, 0.5 g of 4,4'-diethylaminobenzophenone, organic solvent 45.8 g of PGMEA were mixed for 3 hours to prepare a photosensitive resin composition.
실시예Example 3 3
카본 블랙의 25 % 분산액 35g, 알칼리 가용성 수지로서 상기 합성예 4에서 제조된 알칼리 가용성 수지 13.0 g(고형분 3.5g), 중합성 화합물인 디펜타에리스리톨 헥사아크릴레이트 3.5g, 광중합 개시제 Irgacure-369 2.5g, 3-{4-[2,4-비스(트리클로로메틸)-s-트리아진-6-일]페닐티오} 프로판산 1g, 4,4'-디에틸아미노벤조페논 0.5g, 유기 용매인 PGMEA 48.75g을 3 시간 동안 혼합하여 감광성 수지 조성물을 제조하였다. 35 g of 25% dispersion of carbon black, 13.0 g of alkali-soluble resin (solid content 3.5 g) prepared in Synthesis Example 4 as alkali-soluble resin, 3.5 g of dipentaerythritol hexaacrylate as a polymerizable compound, 2.5 g of photopolymerization initiator Irgacure-369 , 1 g of 3- {4- [2,4-bis (trichloromethyl) -s-triazin-6-yl] phenylthio} propanoic acid, 0.5 g of 4,4'-diethylaminobenzophenone, organic solvent 48.75 g of PGMEA was mixed for 3 hours to prepare a photosensitive resin composition.
실시예Example 4 4
안료 C.I. Pigment Red 254의 15 % 분산액 50g, 합성예 3에서 제조된 알칼리 가용성 수지 용액 12.5 g(고형분 5.0 g), 중합성 화합물인 디펜타에리스리톨 헥사아크릴레이트 3g, 광중합 개시제 Irgacure-369 2g, 유기 용매인 PGMEA 32.5 g을 3시간 동안 혼합하여 감광성 수지 조성물을 제조하였다.Pigment C.I. 50 g of 15% dispersion of Pigment Red 254, 12.5 g of alkali-soluble resin solution prepared in Synthesis Example 3 (5.0 g of solid content), 3 g of dipentaerythritol hexaacrylate as a polymerizable compound, 2 g of photopolymerization initiator Irgacure-369, PGMEA as an organic solvent 32.5 g of the mixture was mixed for 3 hours to prepare a photosensitive resin composition.
실시예Example 5 5
안료 C.I. Pigment Red 254의 15 % 분산액 50g, 합성예 4에서 제조된 알칼리 가용성 수지 용액 18.5 g (고형분 5.0g), 중합성 화합물인 디펜타에리스리톨 헥사아크릴레이트 3g, 광중합 개시제 Irgacure-369 2g, 유기 용매인 PGMEA 26.5 g을 3시간 동안 혼합하여 감광성 수지 조성물을 제조하였다.Pigment C.I. 50 g of 15% dispersion of Pigment Red 254, 18.5 g of alkali-soluble resin solution prepared in Synthesis Example 4 (5.0 g of solid content), 3 g of dipentaerythritol hexaacrylate as a polymerizable compound, 2 g of photopolymerization initiator Irgacure-369, PGMEA as an organic solvent 26.5 g were mixed for 3 hours to prepare a photosensitive resin composition.
[비교예 1-3. 감광성 수지 조성물 제조]Comparative Example 1-3. Photosensitive resin composition]
비교예Comparative example 1 One
알칼리 가용성 수지로 비교 합성예 1의 폴리머 용액 E 13.4g을 사용한 것을 제외하고는, 상기 실시예 1 과 동일하게 수행하여 감광성 수지 조성물을 제조하였다.A photosensitive resin composition was prepared in the same manner as in Example 1, except that 13.4 g of Polymer Solution E of Comparative Synthesis Example 1 was used as the alkali-soluble resin.
비교예Comparative example 2 2
알칼리 가용성 수지로 비교 합성예 2의 폴리머 용액 F 12.5g을 사용한 것을 제외하고는, 상기 실시예 4와 동일하게 수행하여 감광성 수지 조성물을 제조하였다.A photosensitive resin composition was prepared in the same manner as in Example 4, except that 12.5 g of the polymer solution F of Comparative Synthesis Example 2 was used as the alkali-soluble resin.
비교예Comparative example 3 3
알칼리 가용성 수지로 비교 합성예 3의 폴리머 용액 G 18.5g을 사용한 것을 제외하고는, 상기 실시예 5와 동일하게 수행하여 감광성 수지 조성물을 제조하였다.A photosensitive resin composition was prepared in the same manner as in Example 5, except that 18.5 g of the polymer solution G of Comparative Synthesis Example 3 was used as the alkali-soluble resin.
실험예Experimental Example 1. 감광성 수지 조성물의 감도 및 내약품성 평가 1. Evaluation of sensitivity and chemical resistance of photosensitive resin composition
본 발명에 따라 제조된 감광성 수지 조성물의 감도 및 내약품성을 테스트하기 위하여 하기와 같은 방법을 사용하였다.The following method was used to test the sensitivity and chemical resistance of the photosensitive resin composition prepared according to the present invention.
상기 실시예 1 내지 5 및 비교예 1 내지 3에 의해 제조된 감광성 수지 조성물 용액들을 각각 유리에 스핀 코팅(spin coating)하고, 약 100℃에서 2분 동안 전열 처리(prebake)하여 필름을 형성하였다. 형성된 각 필름을 포토마스크(photomask)를 이용하여 고압 수은 램프(high-pressure mercury lamp) 하에서 100 또는 200mJ/㎠의 에너지로 노광시킨 후, 패턴을 pH 11.3 내지 11.7의 KOH 알칼리 수용액을 이용하여 시간별로 현상하고 탈이온수로 세척하였다. 이후 200℃에서 약 40 분간 후열 처리(postbake)하였다. The photosensitive resin composition solutions prepared by Examples 1 to 5 and Comparative Examples 1 to 3 were respectively spin coated on glass and prebakeed at about 100 ° C. for 2 minutes to form a film. Each formed film was exposed to an energy of 100 or 200 mJ / cm 2 under a high-pressure mercury lamp using a photomask, and then the pattern was subjected to time using an aqueous KOH alkali solution of pH 11.3 to 11.7. Developed and washed with deionized water. It was then postbake at 200 ° C. for about 40 minutes.
각 감광성 수지 조성물의 감도는 Line & space mask를 이용하여 노광했을 때 현상 후 남아 있는 최소 픽셀 크기를 이용하여 결정하였다. The sensitivity of each photosensitive resin composition was determined using the minimum pixel size remaining after development when exposed using a Line & space mask.
각 감광성 수지 조성물의 내약품성은 블랙 매트릭스 감광재의 경우 60 ℃ NMP(N-메틸 피롤리돈)에 3분간 침지한 후 형상의 광학 현미경 관찰 및 두께의 변화로, 컬러필터 감광재의 경우 60 ℃ NMP에 5분간 침지한 후 색변화(ΔEab*)의 측정, 두께 변화, 및 광학 현미경 관찰로 결정하였다.The chemical resistance of each photosensitive resin composition was immersed in 60 ° C. NMP (N-methyl pyrrolidone) for 3 minutes in the case of the black matrix photosensitive material, followed by optical microscope observation of the shape and the change in thickness. After soaking for 5 minutes, it was determined by measuring color change (ΔEab *), thickness change, and optical microscope observation.
상기 감도 및 내약품성에 대한 실험 결과를 하기 표1 및 표2에 나타내었다. Experimental results for the sensitivity and chemical resistance are shown in Tables 1 and 2 below.
표 1에 나타난 바와 같이, 본 발명의 실시예 1 내지 3의 감광성 수지 조성물을 블랙 매트릭스 감광재에 적용한 결과, 현상 후 남아 있는 최소 픽셀 크기가 10 ~ 14 ㎛로 비교예 1의 28㎛에 비해 현저히 낮아 우수한 감도 특성을 확인할 수 있다. 또한 NMP에 3분간 침지한 후의 두께 변화는 1.0 ~ 1.8%를 보여, 비교예 1의 5.4%에 비해 화학 물질에 대한 내약품성이 훨씬 높은 것을 확인할 수 있다. As shown in Table 1, as a result of applying the photosensitive resin compositions of Examples 1 to 3 of the present invention to the black matrix photoresist, the minimum pixel size remaining after development was 10 to 14 µm, which is significantly higher than that of 28 µm of Comparative Example 1. Low sensitivity can be confirmed. In addition, the thickness change after immersion in NMP for 3 minutes shows 1.0 ~ 1.8%, it can be seen that the chemical resistance to chemicals is much higher than 5.4% of Comparative Example 1.
표 2에 나타난 바와 같이, 본 발명의 실시예 4 및 5의 감광성 수지 조성물을 컬러 필터 감광재에 적용한 결과, 현상 후 남아 있는 최소 픽셀 크기가 10 ㎛ 미만으로, 비교예 2 및 3의 20㎛ 및 14㎛에 비해 현저히 낮아 우수한 감도 특성을 확인할 수 있다. 또한 NMP에 5분간 침지한 후의 두께 변화는 5.5 및 7.3%를 보여, 비교예 2 및 3의 16.4% 및 8.2%에 비해 화학 물질에 대한 내약품성이 훨씬 높은 것을 확인할 수 있으며, 또한 컬러필터 감광재의 색변화도 더 낮은 수치를 보여 내약품성이 우수함을 확인할 수 있다. As shown in Table 2, as a result of applying the photosensitive resin compositions of Examples 4 and 5 of the present invention to the color filter photosensitive member, the minimum pixel size remaining after development was less than 10 µm, 20 µm of Comparative Examples 2 and 3 and It is remarkably lower than 14 μm, which shows excellent sensitivity characteristics. In addition, the change in thickness after 5 minutes of immersion in NMP showed 5.5 and 7.3%, indicating that the chemical resistance to chemicals was much higher than that of 16.4% and 8.2% of Comparative Examples 2 and 3, and the color filter photoresist Color change also shows a lower value, it can be confirmed that the excellent chemical resistance.
감광성 조성물을 적용한 컬러필터 감광재를 60 ℃ NMP에 5분간 침지한 후 광학 현미경으로 관찰한 결과는 도 1 내지 도4에 나타내었다. After immersing the color filter photosensitive material to which the photosensitive composition was applied for 5 minutes at 60 ° C. NMP, the result of observing with an optical microscope is shown in FIGS.
도 1 및 도 2에 나타난 바와 같이 실시예 4 및 실시예 5의 감광성 수지 조성물을 적용한 컬러필터 감광재는 광학현미경으로 관찰한 결과, 별다른 변화를 관찰할 수 없었다. As shown in FIG. 1 and FIG. 2, the color filter photosensitive material to which the photosensitive resin compositions of Examples 4 and 5 were applied was observed with an optical microscope, and no change was observed.
반면, 도 3에 나타난 바와 같이, 비교예 2의 감광성 수지 조성물을 적용한 컬러필터 감광재는 표면이 매우 거칠어지고 색변화가 심한 것을 확인하였다. 또한 도 4에 나타난 바와 같이, 비교예 3의 감광성 수지 조성물을 적용한 컬러필터 감광재는 표면에 핀홀(pin hole)이 발생한 것을 확인하였다. On the other hand, as shown in Figure 3, the color filter photosensitive material to which the photosensitive resin composition of Comparative Example 2 is applied was confirmed that the surface is very rough and the color change is severe. In addition, as shown in Figure 4, the color filter photosensitive material to which the photosensitive resin composition of Comparative Example 3 was applied, it was confirmed that a pin hole occurred on the surface.
따라서, 본 발명에 의한 알칼리 가용성 수지를 함유하는 감광성 조성물은 기존의 감광성 조성물에 비해 감도 및 내약품성이 우수함을 확인할 수 있었다. Therefore, it was confirmed that the photosensitive composition containing the alkali-soluble resin according to the present invention is superior in sensitivity and chemical resistance as compared with the existing photosensitive composition.
본 발명에 따른 감광성 수지 조성물은 본 발명의 알칼리 가용성 수지로 인해 감도가 좋고 내약품성이 뛰어나다. 감도가 우수하므로 노광시간을 단축할 수 있어 제조 공정성 향상에 유용하며, 내약품성이 뛰어나 공정상 처리되는 약품에 의해 패턴이 손상될 위험이 적어 가용할 수 있는 공정의 범위가 넓다.The photosensitive resin composition according to the present invention has good sensitivity and excellent chemical resistance due to the alkali-soluble resin of the present invention. Since the sensitivity is excellent, the exposure time can be shortened, which is useful for improving the manufacturing processability. The chemical resistance is excellent, and thus there is little risk of damage to the pattern due to the chemicals processed in the process.
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