KR100699888B1 - Vacuum inlet socket - Google Patents

Abstract

The present invention relates to a vacuum inlet socket for cleaning operations of a semiconductor manufacturing apparatus in a fab. The vacuum inlet socket of the present invention includes a body having a flow path formed therein and having an extended edge at one end and a first connection at an extended edge; And a cap coupled to the first connection portion of the body, the cap including a second connection portion on the sidewall of the handle formed at the central portion thereof. And a gripping portion coupled to the second connecting portion.

Description

Vacuum inlet socket {Vacuum inlet socket}

1A is a perspective view showing a closed state of a conventional vacuum inlet socket.

1B is a cross-sectional view showing an open state of a conventional vacuum inlet socket.

2A and 2B are perspective views each showing a sealed and open state of the vacuum inlet socket according to the present invention.

Figure 3a is a perspective view showing in detail the cap and the gripping portion of the present invention.

FIG. 3B is a cross-sectional view illustrating the cap taken along the line B-B in FIG. 3A.

Figure 4 is a perspective view showing in detail the body of the present invention.

5A to 5C are perspective views showing the filter of the present invention in detail.

Explanation of symbols on the main parts of the drawings

200: body 201: euro

202: edge 203: first connection

204: fastening portion 205: filter

206: O-ring 300: cap

301: Snip 302: Second connection

304: first hole 305: second hole

400: grip part 401: pressing part

402: knob portion

The present invention relates to a manufacturing facility for a semiconductor device, and more particularly, to a vacuum inlet socket for cleaning a manufacturing facility for a semiconductor device in a fab.

A manufacturing apparatus of a semiconductor device including a chamber for performing various unit processes such as a film forming process, a patterning process, an ion implantation process, and a package process for the production of a semiconductor device may be contaminated by various sources. The source of contamination may originate from flaking of the process chamber surface, nuclear growth of reactive gases, condensation during chamber depressurization, friction during operation of the manufacturing equipment, degradation of vacuum equipment sealing or the body of the manufacturing equipment operator, and the like.

Since the manufacturing facility of the contaminated semiconductor device causes defects in the semiconductor device to reduce the yield, the operating staff regularly cleans the manufacturing facility. Typically, in order to facilitate the cleaning of the manufacturing equipment, there are vacuum inlet sockets disposed throughout the semiconductor fab, which can be cleaned only by inserting a vacuum tube.

1A is a perspective view showing a closed state of a conventional vacuum inlet socket.

Referring to Figure 1, the vacuum inlet socket has a body 10 fixed to the bottom or wall 100 of the fab; And a cap 20 inserted into the body 10 to prevent depressurization of the vacuum pump device 60. The body 10 is at the bottom or wall 100 of the fab by a fastening means such as a washer 40.

1B is a cross-sectional view showing an open state of a conventional vacuum inlet socket.

Referring to FIG. 1B, one end of the body 10 of the vacuum inlet socket is connected to the vacuum pump device 60 through a pipe 50. In general, the cap 20 is inserted into the groove 11 formed in the upper portion of the body, thereby sealing the body 10. Cap 20 has a gripping portion 30 to be easily separated from the body (10). For cleaning of the manufacturing facility, the operator removes the cap 20 from the body 10 using the grip 30 and then inserts a cleaning tube into the body 10. The cleaning tube inserted in the body 10 is decompressed by the vacuum pump device 60 to enable vacuum cleaning of the manufacturing equipment.

Since the conventional vacuum inlet socket is a structure in which the body and the cap are separated during vacuum cleaning, the cap is frequently lost, causing a rise in production cost. In addition, when considering that the operating personnel in the fab wearing a dust-proof suit and dust-proof gloves, such as to prevent contamination, there is a problem that the operating staff is difficult to separate the cap from the body holding the grip of the cap, the work efficiency is reduced.

Accordingly, the technical problem to be achieved by the present invention is to provide a vacuum inlet socket which can reduce the production cost for the semiconductor manufacturing and improve the work efficiency without the risk of losing the cap, easy opening and closing of the cap.

According to an aspect of the present invention, there is provided a vacuum inlet socket comprising: a body having a flow path formed therein and having an extended edge portion at one end thereof and a first connection portion at the extended edge portion; A cap coupled to the first connection portion of the body and including a second connection portion on a sidewall of the handle formed at an upper center portion; And a gripping portion coupled to the second connecting portion. The outer periphery of the other end of the body may be formed with a fastening portion that can be combined with the fixing washer. Preferably, the fastening portion may be spirally coupled with the fixing washer.

Preferably, the gripping portion is composed of an integrated pressing portion and a knob portion, the first groove and the upper portion of the cap to provide a seating space for the knob portion of the gripping portion around the second connection portion and the A second groove may be formed to provide a movement space with respect to the pressing portion of the grip portion.

The body may further include an O-ring on the contact surface with the cap such that the cap seals the flow path. Preferably, the O-ring may be made of any one of NBR (Acrylonitrile Butadiene Rubber), EPDM (Ethylene Propylene dine Methylene), silicone (Silicone Robber) and polyurethane (Polyurethane Elastomer).

The vacuum inlet socket may further include a connector having one end inserted into the flow path and the other end inserted into the cleaning tube. In addition, the vacuum inlet socket may further include a filter disposed in the flow path of the body, the filter may be made of a metal wire entangled in a concentric, radial, or mesh shape.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art, and the following examples can be modified in various other forms, and the scope of the present invention is It is not limited to an Example. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity, the same reference numerals in the drawings refer to the same elements.

2A and 2B are perspective views each showing a sealed and open state of the vacuum inlet socket according to the present invention.

Referring to FIG. 2A, the vacuum inlet socket 1000 has a flow path (201 of FIG. 2B) formed therein and has an edge portion 202 extended at one end thereof, and a first edge portion of the vacuum inlet socket 1000. A body 200 including a connection part 203; A cap 300 coupled to the first connection portion 203 of the body 200 and including a second connection portion 302 (FIG. 3A) on a sidewall of the handle 301 formed at an upper center portion thereof; And a gripper 400 coupled to the second connector 302.

The body 200 has a wider edge 202 at one end of the body 200 so that it can be inserted and supported in a hole in the bottom or wall of the fab. In addition, in order to fix the body 200 after the body 200 is inserted into a hole in the bottom or wall of the fab, a fastening that can be combined with a fixing washer (not shown) on the outer circumference of the other end of the body 200. The portion 204 can be formed. The fastening portion 204 may be threaded, for example, screwed with a fixing washer.

The body 200 includes a first connection portion 203 for engaging the cap 300 with the extended edge portion 202. For example, the first connector 203 may have a pin shape, and may form a groove in a predetermined portion of the cap 300 to couple the cap 300 and the body 200 by coupling the pin and the groove. .

Preferably, the body 200, the cap 300 and the grip 400 of the vacuum inlet socket of the present invention may all be made of stainless steel.

Referring to FIG. 2B, since the cap 300 is coupled to the first connection portion 203 of the body 200, the cap 300 is not separated from the body 200 even when the cap 300 is opened. As a result, the vacuum inlet socket 1000 of the present invention has no risk of losing the cap 300 even while the operator is opening the cap 300 for cleaning.

3A is a perspective view illustrating the cap and the grip portion of the present invention in detail, and FIG. 3B is a cross-sectional view of the cap taken along the line B-B of FIG. 3A.

3A and 3B, the cap 300 includes a second connection portion 302 coupled to the grip portion 400 at an upper center portion. For example, similar to the first connection portion 203, the second connection portion 302 has a shape of a pin, and forms a groove in a predetermined portion of the grip portion 400 to form a cap 300 by coupling the pin and the groove. ) And the gripper 400 may be combined. Preferably, the second connection 302 is provided on the side wall of the handle 301. The shape of the burr 301 depends on the shape of the gripper 400, and by removing the space between the cap 300 and the gripper 400, there is no irregularities in the upper surface of the vacuum inlet socket 1000. That is, in the state in which the vacuum inlet socket 1000 is closed, the top surface of the edge portion 202 of the body 200, the cap 300, and the grip portion 400 is all the same height by the chamfer 301. It does not form a step. As a result, even when the body 200 is disposed on the floor, the vacuum inlet socket 1000 of the present invention may not interfere with the movement of the manufacturing equipment of the semiconductor device or the movement of the operating personnel.

The gripper 400 may be made of a pressing part 401 and a knob part 402 integrally. The pressing portion 401 is formed to have a sufficient area so that the operating personnel is easy to press with a finger. When the operator presses the pressing portion 401, the knob portion 402 is raised in the direction of the arrow. The operating agent may open the flow path 201 of the body 200 by lifting the cap 300 while holding the raised knob 402 by hand.

Preferably, the upper portion of the cap 300 of the first groove 304 and the grip portion 400 that provides a seating space for the knob portion 402 of the grip portion 400 around the second connecting portion 302 A second groove 305 may be formed to provide an exercise space with respect to the pressing portion 401. That is, the first groove 304 formed in the upper portion of the cap 300 may be formed to have the same depth as the thickness of the knob portion 402 to provide a seating space with respect to the knob portion 402. As a result, the knob portion 402 can be raised in the direction of the arrow, and is seated on the cap 300 so as not to be lowered downward. In addition, the second groove 305 formed on the upper portion of the cap 300 may be formed deeper than the thickness of the pressing portion 401 of the grip portion 400 to provide a movement space with respect to the pressing portion 401. As a result, when the pressing portion 401 is pressed with a finger, the pressing portion 401 can be moved downward. Preferably, when no pressure is applied to the pressing portion 401, the holding portion 400 is considered in consideration of the weight of the pressing portion 401 and the knob portion 402 so that the holding portion 400 can be leveled. ) Shape or the position of the second connection portion 302.

Figure 4 is a perspective view showing in detail the body of the present invention.

Referring to FIG. 4, the body 200 may further include an O-ring 206 on a contact surface with the cap 300 such that the cap 300 seals the flow path. For example, the O-ring 206 may be made of any one of rubber-based materials NBR (Acrylonitrile Butadiene Rubber), EPDM (Ethylene Propylene dine Methylene), silicon (Silicone Robber) and polyurethane (Polyurethane Elastomer).

Also, preferably, the vacuum inlet socket 1000 further includes a connector 500 in which one end 501 is inserted into the flow path 201 and the other end 502 is inserted into a cleaning tube (not shown). can do. Typically, the cleaning operation may use cleaning tubes having different outer diameters as necessary. The outer diameter of one end 501 of the connector 500 is the same size as the inner diameter of the flow path 201 of the body 200, the other end 502 of the connector 500 is the inner diameter that can be combined with the cleaning tube or It can be manufactured to have an outer diameter. As a result, there is an advantage that a cleaning tube having various sizes can be used by replacing the connector 500 without replacing the fixed vacuum inlet socket 1000.

5A to 5C are perspective views showing the filter of the present invention in detail.

5A through 5C, the vacuum inlet socket 1000 may further include a filter 205 disposed in the flow path 201 of the body 200. The filter 205 blocks impurities from entering the vacuum pump device and the piping. In particular, it is necessary to block mass and bulky materials, such as broken wafer chips, which may not only cause the vacuum pump device to fail but also block the piping. Thus, the filter 205 may be made of, for example, a metal wire entangled into concentric 205a, radial 205b, or mesh 205c to block mass and bulky materials.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions, modifications, and alterations are possible within the scope without departing from the technical spirit of the present invention, which are common in the art. It will be apparent to those who have knowledge.

As described above, the vacuum inlet socket of the present invention includes a first connection part for coupling the body and the cap, thereby providing a vacuum inlet socket capable of reducing the risk of losing the cap and preventing waste of production costs.

In addition, the vacuum inlet socket of the present invention includes a gripping portion having a pressing portion having a sufficient area so that an operator can easily press with a finger, so that the opening and closing of the cap can be easily facilitated, thereby improving the working efficiency. To provide.

Claims (10)

A body having a flow path formed therein and having an extended edge portion at one end thereof and a first connection portion at the extended edge portion; A cap coupled to the first connection of the body and including a protruding hinge that provides a second connection to the side wall; And And a gripping portion coupled to the second connection portion. The method of claim 1, The outer circumference of the other end of the body is a vacuum inlet socket, characterized in that the fastening portion which can be combined with the fixing washer is formed. The method of claim 2, The fastening part is a vacuum inlet socket, characterized in that the coupling with the fixing washer. The method of claim 1, The gripping portion is composed of an integrated pressing portion and a knob (knob), The upper portion of the cap is formed with a first groove for providing a seating space for the knob portion of the gripping portion around the second connecting portion and a second groove for providing a movement space for the pressing portion of the gripping portion is formed There is a vacuum inlet socket. The method of claim 1, The body further comprises an O-ring on the contact surface with the cap such that the cap seals the flow path. The method of claim 5, The O-ring is a vacuum inlet socket, characterized in that made of any one of NBR (Acrylonitrile Butadiene Rubber), EPDM (Ethylene Propylene dine Methylene), silicon (Silicone Robber) and polyurethane (Polyurethane Elastomer). The method of claim 1, One end is inserted into the flow path, the other end is a vacuum inlet socket further comprises a connector inserted into the cleaning tube. The method of claim 1, And a filter disposed in the flow path of the body. About claim 8 The filter is a vacuum inlet socket, characterized in that made of a metal wire entangled in concentric, radial, or mesh. The method of claim 1, The vacuum inlet socket is made of stainless steel.

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