JPH0940091A - Drain recovery apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drain recovery apparatus preventing that drain is scattered to the circumference at a time of the recovery of the drain into a drain recovery container or a solvent is evaporated from the drain recovery container to be diffused to the circumference, capable of improving work environment and also easy in the replacing work of the drain recovery container. SOLUTION: A pressure means bringing a cylindrical connector 20 into engagement with the drain cylindrical part 14 integrally provided to the lower part of a drain gathering part 12 and having a drain outflow port 16 at the lower end thereof so as to freely move the same along the axial direction thereof and pressing the lower part thereof to the peripheral edge part of the drain recovery port 8 of a drain recovery container 7 is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drain recovering device for recovering a drain such as a coating liquid and a developing liquid into a recovery container in a semiconductor manufacturing device such as a spin coater and a spin developer.

[0002]

2. Description of the Related Art In a semiconductor manufacturing apparatus, for example, a spin coater (rotary coating apparatus), a coating liquid supplied to the surface of a substrate and scattered around the substrate surface in a recovery cup is collected to collect a drain such as a plastic tank. A drain recovery device is provided for recovery into the container. As shown in FIG. 4, the drain recovery device 1 is arranged inside the container storage box 2 below the spin coater body, and the lower end of the drain pipe 3 connected to the bottom of the recovery cup (not shown) is inserted. The drain collecting part 4 is formed in a container shape, and the draining cylinder part 5 is integrally formed in the lower part of the drain collecting part 4 and has a cylindrical shape. Then, the drain collected from the recovery cup through the drain pipe 3 into the drain collecting section 4 is made to flow down from the drain outlet 6 at the lower end of the drainage tube section 5. A drain collection container 7 is arranged below the drain collection device 1, and the drain collection container 7 is provided.
The drain recovery port 8 is the drain outlet 6 of the drainage cylinder 5.
Are positioned to face each other. Conventionally,
In order to allow the drain flowing down from the drain outlet 7 of the drainage tube portion 5 to the drain recovery port 8 of the drain recovery container 7 to be recovered in the drain recovery container 7 without spilling around,
The funnel 9 was attached.

[0003]

Conventionally, in order to prevent the drain from spilling when collecting the drain flowing down from the drain outlet 6 of the drain cylinder 5 of the drain collecting device 1 into the drain collecting container 7. , Drain collection port 8 of drain collection container 7
Although the funnel 9 was attached to, the liquid splashed when the drain hit the inner surface of the funnel 9, and the drain sometimes scattered around. Further, since the upper opening of the funnel 9 is open to the atmosphere, the solvent recovered in the drain recovery container 7 evaporates and diffuses from the upper opening of the funnel 9 to the surroundings. There is a problem that the working environment is deteriorated due to the scattering of the drain and the evaporation of the solvent.

Further, there is a problem that the coating liquid, for example, the resist adhered to the funnel 9 is hardened and the funnel 9 is conspicuously contaminated and needs to be cleaned. Furthermore, since the lower end of the drainage tube 5 of the drain recovery device 1 is inserted below the upper opening of the funnel 9, the operator can push the drain recovery device 1 upward with one hand when replacing the drain recovery container 7. , Drain collection container 7 in container storage box 2
There was a problem that the drain recovery container 7 had to be taken out from the inside and set at a predetermined position in the container storage box 2 and the workability thereof was poor.

The present invention has been made in view of the above circumstances, and when the drain is collected in the drain collecting container, the drain is scattered around or the solvent collected in the drain collecting container is (EN) Provided is a drain recovery device which does not evaporate and diffuses into the surroundings, can improve the working environment, does not require cleaning of tools, and can easily replace a drain recovery container. The purpose is to

[0006]

In the invention according to claim 1, a drainage tubular portion having a tubular shape and having a drain outlet at the lower end is integrally formed in the lower part of a drain collecting portion having a container shape. In a provided drain recovery device, a cylindrical connecting tool is engaged with the drainage tubular section so as to be movable along the axial direction thereof, and the lower portion of the tubular connecting tool is connected to the drain recovery port of the drain recovery container. It is characterized in that a pressing means for pressing the peripheral portion is provided.

According to a second aspect of the present invention, in the drain recovery device according to the first aspect, a drain guide tubular portion to be inserted into the drain recovery port of the drain recovery container is formed below the tubular connector. Is characterized by.

According to a third aspect of the present invention, in the drain recovery device according to the first or second aspect, a male screw is threaded on the outer peripheral surface of the drainage cylinder portion, and a female screw that is screwed with the male screw is attached to the barrel. The pressing means is formed by screwing on the inner peripheral surface of the cylindrical connecting tool, and the cylindrical connecting tool is rotated around its axis to be displaced in the direction in which the cylindrical connecting tool is extracted from the drainage tubular portion. It is characterized in that the lower part is pressed against the periphery of the drain recovery port of the recovery container.

According to a fourth aspect of the present invention, in the drain recovery device according to the first or second aspect, the tubular connecting member is slidably fitted on the outer peripheral surface side of the drainage tubular portion, and is pressed. The means is a spring for urging the tubular connecting member downward with respect to the drainage tubular portion.

According to a fifth aspect of the present invention, in the drain recovery device according to the first or second aspect, the tubular connecting tool is slidably fitted into the inner peripheral surface of the drainage tubular portion, and The pressing means is a spring that biases the tubular connecting member downward with respect to the drainage tubular portion.

[0011]

In the drain recovery device of the invention according to claim 1, when the drain recovery container is arranged at a predetermined drain recovery position so that the drain can be recovered into the drain recovery container, Positioned so that the drain recovery port of the drain recovery container faces the drain outlet at the lower end of the tubular part, and in this state, the tubular connecting tool engaged with the drainage tubular part is moved downward along the axial direction, The lower part of the tubular connecting tool is pressed against the drain recovery port of the drain recovery container by the pressing means. As a result, the drainage cylinder portion and the drain recovery port of the drain recovery container are communicated with each other with the tubular connector interposed, and the drain recovery port of the drain recovery container is isolated from the atmosphere by the tubular connector. It will be. Therefore, when the drain is collected in the drain collection container, the drain does not scatter around, and the solvent collected in the drain collection container does not evaporate and diffuse to the surroundings.

In the drain recovery device according to the second aspect of the present invention, since the drain guide tubular portion below the tubular connector is inserted into the drain recovery port of the drain recovery container, the tubular connector is inserted into the drain recovery container. The lower end opening position where the drain flows down is below the position of the drain recovery port of the drain recovery container. Therefore, there is no possibility that the drain will leak out from the contact surface between the lower portion of the tubular connecting member and the peripheral portion of the drain recovery port.

In the drain collecting apparatus according to the third aspect of the present invention, when the drain collecting container is arranged at a predetermined drain collecting position, the tubular connecting tool is rotated around its axis to move upward. Keeping the tubular connecting tool out of the way, position it so that the drain recovery port of the drain recovery container faces the drain outlet at the lower end of the drainage tube. After that, the tubular connecting tool is rotated around its axis and moved downward, and by this operation, the lower portion of the tubular connecting tool is pressed against the drain recovery port peripheral portion of the drain recovery container.

In the drain recovery device of the invention according to claim 4, when the drain recovery container is arranged at a predetermined drain recovery position, an operator holds the tubular connecting tool with one hand and uses the tubular connecting tool as a spring. Against the resilience of the drainage pipe, move it upward while sliding it against the outer peripheral surface of the drainage cylinder, and raise the tubular connecting tool, and place the drain collection container at the drain outlet at the lower end of the drainage cylinder. Position so that the drain collection ports face each other. After that, by gradually weakening the force applied to the tubular connecting tool and releasing the hand from the tubular connecting tool, the tubular connecting tool slides on the outer peripheral surface of the drainage tube by the restoring force of the spring. It moves downward while making contact, and its lower part abuts the peripheral edge of the drain recovery port of the drain recovery container and is elastically pressed by the restoring force of the spring.

In the drain collecting apparatus according to the fifth aspect of the present invention, when the drain collecting container is arranged at a predetermined drain collecting position, an operator holds the tubular connecting tool with one hand and uses the tubular connecting tool as a spring. Against the resilience of the drainage tube, move it upward while sliding it against the inner surface of the drainage tube, and raise the tubular connecting tool to the drain outlet at the bottom of the drainage tube. Position them so that the drain recovery ports of are facing each other. After that, by gradually weakening the force applied to the tubular connecting device and releasing the hand from the tubular connecting device, the tubular connecting device is attached to the inner peripheral surface of the drainage tubular portion by the restoring force of the spring. It moves downward while sliding, and its lower portion abuts the peripheral edge of the drain recovery port of the drain recovery container and is elastically pressed by the restoring force of the spring.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to FIG.
This will be described with reference to FIG.

FIG. 1 is an embodiment of the present invention, and is an enlarged vertical sectional view showing the vicinity of a drainage cylinder of a drain recovery device and the vicinity of a drain recovery port of a drain recovery container. Figure (A)
Shows a state before connecting the drainage cylinder and the drain collection container, and FIG. 6B shows a state where the drainage cylinder and the drain collection container are connected.

The drain collecting unit 1 of the drain recovery device 10
The configuration of No. 2 is the same as that of the conventional device (the same applies to each embodiment shown in FIGS. 2 and 3 described later), and
As the drain recovery container 7, a conventional one is used. This drain recovery device 10 is different from the conventional device in the configuration of the drainage cylinder portion 14. That is, the drainage cylinder portion 14 integrally formed in the lower portion of the drain collecting portion 12 and having a cylindrical shape along the vertical direction and having the drain outlet 16 at the lower end has a male screw 18 threaded on its outer peripheral surface. The drainage tube portion 14 is engaged with a tubular connecting member 20 in which an internal thread 22 screwed into the external thread 18 is threaded on the inner peripheral surface. Then, by rotating the tubular connecting tool 20 around its axis, the tubular connecting tool 20 is rotated.
Is configured to be movable in the vertical direction with respect to the drainage cylinder portion 14.

The lower portion of the tubular connecting member 20 has a stepped outer peripheral surface, and the drain guide tubular portion 24 has an outer diameter dimension slightly smaller than the inner diameter dimension of the drain recovery port 8 of the drain recovery container 7. Is provided, and the plane orthogonal to the axial direction is the contact surface 26 that contacts the peripheral edge of the drain recovery port 8 of the drain recovery container 7. A sealing O-ring 28 is provided on the contact surface 26 of the tubular connecting member 20.

In the drain recovery device 10 shown in FIG. 1, the drain recovery container 7 is inserted into the drain storage container 7 by inserting the drain recovery container 7 into a container storage box at the bottom of the spin coater main body and arranging it at a predetermined drain recovery position. When attempting to recover, the tubular connecting tool 20 is rotated around its axis and moved upward as shown in FIG. Make sure that it does not interfere with the movement of the drain collection container 7. Then, the drain recovery port 8 of the drain recovery container 7 is connected to the drain outlet 16 at the lower end of the drainage cylinder 14.
The drain collection container 7 is positioned and fixed so that the two face each other. In this state, the tubular connector 20 is gripped with one hand and rotated about its axis, whereby the tubular connector 2
0 downwardly, and as shown in FIG. 1B, the drain guide cylinder portion 24 is moved to the drain recovery port 8 of the drain recovery container 7.
Then, the contact surface 26 at the bottom of the tubular connecting tool 20 is brought into contact with and pressed against the peripheral edge of the drain recovery port 8 of the drain recovery container 7. As a result, the drainage cylinder portion 14 and the drainage recovery port 8 of the drainage recovery container 7 are communicated with each other with the tubular connecting member 20 interposed therebetween, and are collected in the drain collecting portion 12 to collect the drainage cylinder portion 1.
The drain flowing down from the drain outlet 16 of No. 4 is collected in the drain collection container 7 without being scattered around. Further, since the contact surface 26 at the lower portion of the tubular connecting member 20 and the peripheral portion of the drain recovery port 8 of the drain recovery container 7 are airtightly isolated from the atmosphere by the sealing O-ring 28,
There is no possibility that the solvent recovered in the drain recovery container 7 evaporates and leaks to the surroundings between the contact surface 26 at the bottom of the tubular connector 20 and the peripheral edge of the drain recovery port 8 of the drain recovery container 7. .

Next, the drain recovery device 30 shown in FIG.
Has a configuration in which a tubular connecting member 38 is slidably fitted on the outer peripheral surface side of a drainage tubular portion 34 that is integrally formed in the lower portion of the drain collecting portion 32 and has a drain outlet 36 at the lower end. There is.
A compression coil spring 42 is wound around the outer peripheral surface of the drainage tube portion 34 between the fixed ring 40 fixed to the upper end portion thereof and the upper end surface of the tubular connecting member 38. The tool 38 is urged downward with respect to the drainage tube portion 34.
Further, an annular protrusion 44 is provided at the lower end of the outer peripheral surface of the drainage cylinder 34.
Are integrally formed, and the tubular connecting member 38 is used as the drainage tubular portion 3
It is designed not to be pulled out from 4. The lower portion of the tubular connecting tool 38 has a stepped outer peripheral surface, similarly to the drain recovery device 10 shown in FIG. 1, and has an outer diameter slightly smaller than the inner diameter of the drain recovery port 8 of the drain recovery container 7. A drain guide cylinder portion 46 having a dimension is provided, and a plane orthogonal to the axial direction serves as an abutment surface 48 that abuts the peripheral edge portion of the drain recovery port 8 of the drain recovery container 7. There is. Then, the upper end portion of the tubular connecting member 38 is in sliding contact with the outer peripheral surface of the drainage tubular portion 34, and the contact surface 48 at the lower end portion of the tubular connecting member 38.
Sealing O-rings 50 and 52 are provided in each.

In the drain recovery device 30 shown in FIG. 2, when the drain recovery container 7 is arranged at a predetermined drain recovery position and an attempt is made to recover the drain into the drain recovery container 7, the operator uses a cylinder with one hand. As shown in FIG. 2 (A), the cylindrical connecting member 38 is gripped, and the cylindrical connecting member 38 is slidably contacted with the outer peripheral surface of the drainage tubular portion 34 against the elastic force of the compression coil spring 42. While moving upward, the tubular connector 38 is lifted so that the lower end portion of the tubular connector 38 does not interfere with the movement of the drain collection container 7. Then, the drain recovery container 7 is positioned and fixed so that the drain recovery port 8 of the drain recovery container 7 faces the drain outlet 36 at the lower end of the drainage cylinder 34. After that, by gradually weakening the force applied to the tubular connecting tool 38 and releasing the hand from the tubular connecting tool 38, the tubular connecting tool 38 becomes the compression coil spring 4.
The restoring force of 2 causes the drain guide cylinder portion 46 to move downward while slidingly contacting the outer peripheral surface of the drainage cylinder portion 34, and the drain guide cylinder portion 46 enters the drain recovery port 8 of the drain recovery container 7 as shown in FIG. 2B. The contact surface 48 at the bottom of the tubular connector 38 is inserted into contact with the peripheral portion of the drain recovery port 8 of the drain recovery container 7, and the contact surface 48 at the bottom of the tubular connector 38 is restored by the restoring force of the compression coil spring 42. It is elastically pressed against the periphery of the drain recovery port 8 of the drain recovery container 7. As a result, the drainage cylinder portion 34 and the drain recovery port 8 of the drain recovery container 7 are communicated with each other through the tubular connecting member 38. Then, between the inner peripheral surface of the upper end portion of the tubular connecting member 38 and the outer peripheral surface of the drainage tubular portion 34, and the contact surface 48 at the lower portion of the tubular connecting member 38 and the peripheral portion of the drain recovery port 8 of the drain recovery container 7. Between them, the sealing O-rings 50 and 52 are airtightly isolated from the atmosphere, so that the solvent recovered in the drain recovery container 7 does not evaporate and leak to the surroundings.

Further, the drain recovery device 60 shown in FIG.
Has a configuration in which a tubular connecting member 66 is slidably fitted on the inner peripheral surface side of a drainage tubular portion 64 integrally formed in the lower portion of the drain collecting portion 62. An annular bulging portion 68 is integrally formed in the lower portion of the tubular connecting member 66, and is located below the annular bulging portion 68 and slightly smaller than the inner diameter of the drain recovery port 8 of the drain recovery container 7. A drain guide cylinder 70 having a small outer diameter is formed in the upper part, and the lower surface of the annular bulging part 68 is a contact surface 72 that contacts the peripheral edge of the drain recovery port 8 of the drain recovery container 7. . A compression coil spring 74 is wound around the outer peripheral surface of the tubular connecting member 66 between the annular bulging portion 68 and the lower end surface of the drainage tubular portion 64. The liquid cylinder 64 is biased downward. Further, an annular projection 76 is integrally formed at the lower end of the inner peripheral surface of the drainage tube portion 64 so that the tubular connecting member 66 does not come off from the drainage tube portion 64. Then, on the sliding contact surface of the upper end portion of the tubular connecting member 66 with the inner peripheral surface of the drainage tubular portion 64 and the contact surface 72 of the annular bulging portion 68 of the tubular connecting member 66, a sealing O- Rings 78 and 80 are provided, respectively.

The drain recovery device 60 shown in FIG. 3 is similar to the drain recovery device 30 shown in FIG. 2 when the drain recovery container 7 is to be placed at a predetermined drain recovery position.
The operator holds the tubular connecting member 66 with one hand, and
As shown in FIG.
The cylindrical connecting member 66 is kept in a lifted state while being slidably contacted with the inner peripheral surface of the drainage tubular portion 64 against the resilience of the tubular coupling tool 66. Then, the drain recovery container 7 is positioned and fixed such that the drain recovery port 8 of the drain recovery container 7 faces the lower end opening of the tubular connecting member 66. After that, by gradually weakening the force applied to the tubular connecting tool 66 and releasing the hand from the tubular connecting tool 66, the tubular connecting tool 66 can be discharged by the restoring force of the compression coil spring 74. It moves downward while slidingly contacting the inner peripheral surface of the portion 64, and the drain guide cylinder portion 70 is inserted into the drain recovery port 8 of the drain recovery container 7 as shown in FIG. The contact surface 72 of the annular bulging portion 68 of the drain 66 is the drain recovery port 8 of the drain recovery container 7.
The contact surface 72 of the annular bulging portion 68 of the tubular connecting member 66 is elastically pressed against the peripheral edge portion of the drain recovery port 8 of the drain recovery container 7 by the restoring force of the compression coil spring 74. As a result, the drainage tube portion 64 and the drain collection container 7
And the drain recovery port 8 are communicated with each other through a tubular connecting member 66. Further, between the outer peripheral surface of the upper end portion of the tubular connecting tool 66 and the inner peripheral surface of the drainage tubular portion 64, and the contact surface 72 of the annular bulging portion 68 of the tubular connecting tool 66 and the drain recovery container 7. O-rings 7 for sealing are provided between the drain recovery port 8 and the peripheral portion.
It will be airtightly isolated from the atmosphere by 8 and 80.

The structure of the pressing means for pressing the lower part of the tubular connecting member against the peripheral edge of the drain recovery port of the drain recovery container is not limited to that of the embodiment shown in FIGS. 1 to 3.

[0026]

When the drain recovery device of the invention according to claim 1 is used, when the drain is recovered in the drain recovery container, the drain scatters around and the solvent recovered in the drain recovery container evaporates. Since it does not diffuse to the surroundings, the working environment can be improved. Further, unlike the conventional device, it is not necessary to clean tools such as a funnel and the drain recovery container can be easily replaced, so that workability is improved.

In the drain recovery device according to the second aspect of the present invention, since there is no possibility that the drain will leak to the outside from the contact surface between the lower portion of the tubular connecting tool and the peripheral edge of the drain recovery port, there is no possibility of drain leakage. Contamination around the device is prevented.

In the drain recovery device according to the third aspect of the present invention, the lower part of the tubular connector can be easily pressed against the peripheral edge of the drain recovery port of the drain recovery container by simply rotating the tubular connector. You can

In the drain recovery device according to the fourth aspect of the present invention, the lower portion of the tubular connecting tool can be easily removed by simply grasping and lifting the tubular connecting tool and then releasing the hand from the tubular connecting tool. It can be pressed against the periphery of the drain recovery port of the drain recovery container.

Also in the drain recovery device according to the fifth aspect of the present invention, the lower portion of the tubular connecting tool can be easily removed by simply holding the tubular connecting tool, lifting it, and then releasing the hand from the tubular connecting tool. It can be pressed against the periphery of the drain recovery port of the drain recovery container.

[Brief description of drawings]

FIG. 1 is an enlarged vertical sectional view showing the vicinity of a drainage cylinder of a drain recovery device and the vicinity of a drain recovery port of a drain recovery container, showing an embodiment of the present invention. FIG. The state before connecting the drain collecting container and the drain collecting container is shown, and (B) shows the state where the draining cylinder part and the drain collecting container are connected.

FIG. 2 is a vertical cross-sectional view showing another embodiment of the present invention, in which the vicinity of the drainage cylinder of the drain recovery device and the vicinity of the drain recovery port of the drain recovery container are enlarged, and FIG. The state before connecting the tubular portion and the drain collection container is shown, (B) is
The state which connected the drainage cylinder part and the drain collection container is shown.

FIG. 3 is a vertical cross-sectional view showing another embodiment of the present invention in which the vicinity of the drain cylinder of the drain recovery device and the vicinity of the drain recovery port of the drain recovery container are enlarged, and FIG. Shows the state before connecting the liquid cylinder part and the drain collection container,
(B) shows a state in which the drainage cylinder and the drain recovery container are connected.

FIG. 4 is a partial cross-sectional front view showing the inside of a container storage box provided with a conventional drain recovery device.

[Explanation of symbols]

10, 30, 60 Drain recovery device 12, 32, 62 Drain collecting section 14, 34, 64 Drainage tube section 16, 36 Drainage tube drain outlet 18 18 Male thread on outer peripheral surface of drainage section 20, 38, 66 Cylindrical connecting tool 22 Female screw on the inner peripheral surface of the cylindrical connecting tool 24, 46, 70 Drain guide cylindrical portion 26, 48, 72 Abutment surface 28, 50, 52 with the drain collecting port peripheral portion of the drain collecting container 78, 80 Sealing O-rings 42, 74 Compression coil spring 44 Annular protrusion on outer peripheral surface of drainage tube portion 68 Annular bulging portion 76 Annular protrusion on inner peripheral surface of drainage tube portion

Claims (5)

[Claims] 1. A drainage pipe portion having a tubular shape and having a drain outlet at a lower end is integrally formed vertically in a lower portion of a drain collecting portion having a container shape, and a drain flow at a lower end of the drainage pipe portion is formed. In a drain collection device arranged so that the drain collection port is arranged so that the drain collection port faces the outlet, the drain collected in the drain collecting section is collected through the drainage tube section, wherein the drainage tube section is provided. In addition, a pressing means is provided which engages a tubular connecting tool so as to be movable along the axial direction and presses the lower part of the tubular connecting tool against the drain recovery port peripheral portion of the drain recovery container. Drain collection device. 2. The drain recovery device according to claim 1, wherein a drain guide tubular portion to be inserted into a drain recovery port of the drain recovery container is formed in a lower portion of the tubular connecting tool. 3. A male screw is threaded on the outer peripheral surface of the drainage tube portion, and the pressing means is a female screw threaded on the inner peripheral surface of the tubular connecting tool to engage with the male thread. The device according to claim 1 or 2, wherein the lower portion of the tubular connecting member is pressed against the drain recovery port peripheral portion of the recovery container by rotating the shaft around the axis and displacing it in the direction of withdrawing from the drainage tubular part. Drain recovery device. 4. A tubular connecting tool is slidably fitted on the outer peripheral surface side of the drainage tubular portion, and a pressing means urges the tubular connecting tool downward with respect to the drainage tubular portion. The drain recovery device according to claim 1 or 2, which is a spring. 5. A tubular connecting member is slidably inserted into the inner peripheral surface side of the drainage tubular portion, and a pressing means urges the tubular connecting tool downward with respect to the drainage tubular portion. The drain recovery device according to claim 1 or 2, which is a spring.