KR100697614B1 - 회절격자 및 그 제조 방법 - Google Patents
회절격자 및 그 제조 방법 Download PDFInfo
- Publication number
- KR100697614B1 KR100697614B1 KR1020060009414A KR20060009414A KR100697614B1 KR 100697614 B1 KR100697614 B1 KR 100697614B1 KR 1020060009414 A KR1020060009414 A KR 1020060009414A KR 20060009414 A KR20060009414 A KR 20060009414A KR 100697614 B1 KR100697614 B1 KR 100697614B1
- Authority
- KR
- South Korea
- Prior art keywords
- glass substrate
- thin film
- diffraction grating
- film layer
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000011521 glass Substances 0.000 claims abstract description 74
- 239000000758 substrate Substances 0.000 claims abstract description 71
- 239000010410 layer Substances 0.000 claims abstract description 66
- 239000010409 thin film Substances 0.000 claims abstract description 42
- 229920000642 polymer Polymers 0.000 claims abstract description 41
- 239000006117 anti-reflective coating Substances 0.000 claims abstract description 40
- 239000011368 organic material Substances 0.000 claims abstract description 33
- 239000012790 adhesive layer Substances 0.000 claims abstract description 28
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 abstract description 13
- 239000002861 polymer material Substances 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- 238000001723 curing Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 229920000728 polyester Polymers 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000004049 embossing Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 polyalkylate Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000098 polyolefin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000003457 sulfones Chemical class 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 239000002419 bulk glass Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G9/00—Bed-covers; Counterpanes; Travelling rugs; Sleeping rugs; Sleeping bags; Pillows
- A47G9/10—Pillows
- A47G9/1081—Pillows comprising a neck support, e.g. a neck roll
- A47G9/109—Pillows comprising a neck support, e.g. a neck roll adapted to lie on the side and in supine position
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G9/00—Bed-covers; Counterpanes; Travelling rugs; Sleeping rugs; Sleeping bags; Pillows
- A47G9/10—Pillows
- A47G2009/1018—Foam pillows
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G9/00—Bed-covers; Counterpanes; Travelling rugs; Sleeping rugs; Sleeping bags; Pillows
- A47G9/10—Pillows
- A47G9/1009—Rigid frame constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Pulmonology (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Description
Claims (7)
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 회절광이 출사하는 제 1 유리기판의 일측면인 출사면과 입사광이 입사하는 제 2 유리기판의 일측면인 입사면에 각각 미리 무반사 코팅을 하는 단계;상기 제 1 유리기판의 타측면에 등방성 유기물 또는 폴리머로 이루어진 박막층을 코팅하는 단계;격자 패턴이 형성되어 있는 스탬퍼를 상기 박막층에 가압하여 요철부를 형성하는 단계;상기 요철부가 형성된 박막층에 자외선을 조사하는 단계;상기 제2유리기판의 타측면과 상기 요철부 사이에 상기 박막층의 굴절율과 상이한 등방성 유기물 또는 폴리머로 이루어진 접착층을 개재하여 상기 제 1 유리기판과 상기 제 2 유리기판을 접합하는 단계; 및상기 접착층에 자외선을 조사하여 경화시키는 단계의 순서로 이루어지는 회절 격자의 제조 방법.
- 제 6 항에 있어서,상기 접착층을 위상 지연판의 양면에 개재하여 상기 요철부와 상기 제 2 유리 기판 사이에 상기 위상 지연판을 삽입하는 단계를 더 포함하는 것을 특징으로 하는 회절 격자의 제조 방법.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060009414A KR100697614B1 (ko) | 2006-01-31 | 2006-01-31 | 회절격자 및 그 제조 방법 |
PCT/KR2006/005478 WO2007089073A1 (en) | 2006-01-31 | 2006-12-14 | Diffraction grating and method of fabrication thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060009414A KR100697614B1 (ko) | 2006-01-31 | 2006-01-31 | 회절격자 및 그 제조 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100697614B1 true KR100697614B1 (ko) | 2007-03-22 |
Family
ID=38327614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060009414A Expired - Fee Related KR100697614B1 (ko) | 2006-01-31 | 2006-01-31 | 회절격자 및 그 제조 방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100697614B1 (ko) |
WO (1) | WO2007089073A1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101527484B1 (ko) * | 2013-01-23 | 2015-06-17 | 주식회사 오이솔루션 | 체적 브래그 격자 및 이의 제조방법 |
KR20190019025A (ko) * | 2017-08-16 | 2019-02-26 | 루멘텀 오퍼레이션즈 엘엘씨 | 회절 광학 소자를 위한 다층 박막 스택 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007051887B4 (de) * | 2007-10-31 | 2023-07-20 | Carl Zeiss Ag | Diffraktives optisches Element sowie Verwendung eines optischen Klebstoffs zur Herstellung eines solchen |
WO2015116974A1 (en) | 2014-01-31 | 2015-08-06 | Canon U.S.A., Inc. | Miniature endoscope using nanoimprint lithography |
US10809426B2 (en) * | 2014-06-23 | 2020-10-20 | Robert Magnusson | Wideband resonant reflectors with zero-contrast gratings |
US11231544B2 (en) | 2015-11-06 | 2022-01-25 | Magic Leap, Inc. | Metasurfaces for redirecting light and methods for fabricating |
CN109476175B (zh) | 2016-05-06 | 2021-07-30 | 奇跃公司 | 具有用于重定向光的非对称光栅的超表面及其制造方法 |
JP7142015B2 (ja) | 2017-01-27 | 2022-09-26 | マジック リープ, インコーポレイテッド | 異なって向けられたナノビームを有するメタ表面によって形成された回折格子 |
KR102551162B1 (ko) | 2017-01-27 | 2023-07-04 | 매직 립, 인코포레이티드 | 메타표면들을 위한 반사 방지 코팅들 |
KR20200053319A (ko) * | 2018-11-08 | 2020-05-18 | 삼성전자주식회사 | 백라이트 유닛 및 이를 포함하는 홀로그래픽 디스플레이 장치 |
CN110488404A (zh) * | 2019-07-26 | 2019-11-22 | 中国科学院长春光学精密机械与物理研究所 | 一种衍射光栅的无损切割方法 |
FI130396B (fi) * | 2020-09-23 | 2023-08-10 | Dispelix Oy | Optinen aaltojohde lisätyn todellisuuden näyttölaitteeseen |
WO2025048334A1 (ko) * | 2023-08-31 | 2025-03-06 | 고려대학교 산학협력단 | 회절 광학 소자 및 그 제조 방법, 그리고 이를 이용한 홀로그램, 그리고 이를 이용한 vr/ar 기기, 그리고 이를 이용한 hud |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11110787A (ja) | 1997-10-02 | 1999-04-23 | Asahi Glass Co Ltd | 回折素子および光ヘッド装置 |
JP2003014914A (ja) | 2001-07-02 | 2003-01-15 | Sharp Corp | 回折素子およびそれを組み込んだ光ピックアップ装置 |
JP2003139930A (ja) | 1993-03-10 | 2003-05-14 | Matsushita Electric Ind Co Ltd | 回折素子及びそれを用いた光合分波装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5457573A (en) * | 1993-03-10 | 1995-10-10 | Matsushita Electric Industrial Co., Ltd. | Diffraction element and an optical multiplexing/demultiplexing device incorporating the same |
US6618116B1 (en) * | 1997-10-02 | 2003-09-09 | Asahi Glass Company, Limited | Optical head device and a diffraction element suitable for the device, and a method of manufacturing the diffraction element and the optical head device |
KR100266038B1 (ko) * | 1997-12-12 | 2000-09-15 | 김춘호 | 광통신용 신호 처리 필터 및 그 제조 방법 |
-
2006
- 2006-01-31 KR KR1020060009414A patent/KR100697614B1/ko not_active Expired - Fee Related
- 2006-12-14 WO PCT/KR2006/005478 patent/WO2007089073A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003139930A (ja) | 1993-03-10 | 2003-05-14 | Matsushita Electric Ind Co Ltd | 回折素子及びそれを用いた光合分波装置 |
JPH11110787A (ja) | 1997-10-02 | 1999-04-23 | Asahi Glass Co Ltd | 回折素子および光ヘッド装置 |
JP2003014914A (ja) | 2001-07-02 | 2003-01-15 | Sharp Corp | 回折素子およびそれを組み込んだ光ピックアップ装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101527484B1 (ko) * | 2013-01-23 | 2015-06-17 | 주식회사 오이솔루션 | 체적 브래그 격자 및 이의 제조방법 |
KR20190019025A (ko) * | 2017-08-16 | 2019-02-26 | 루멘텀 오퍼레이션즈 엘엘씨 | 회절 광학 소자를 위한 다층 박막 스택 |
KR102698578B1 (ko) * | 2017-08-16 | 2024-08-23 | 루멘텀 오퍼레이션즈 엘엘씨 | 회절 광학 소자를 위한 다층 박막 스택 |
Also Published As
Publication number | Publication date |
---|---|
WO2007089073A1 (en) | 2007-08-09 |
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