KR100584310B1 - Method and apparatus for processing material with laser beam injected into injection liquid - Google Patents

Abstract

The present invention relates to a method and apparatus for processing a material (45) with a laser beam injected into the injection liquid column (25). The liquid is formed by being injected by the nozzle tube 29 and the nozzle tube 28, so that the flow of the liquid is free of vortices, in particular, components that flow in a direction tangential to the nozzle tube axis. The laser light causes its focus to converge on the inflow flat surface portion 30 of the nozzle tube, and the liquid does not create a liquid storage space around the conical portion 38 which focuses the beam.

Description

METHOD AND APPARATUS FOR MAKING MATERIAL WITH A LASER BEAM INJECTED WITH INJECTION LIQUID {MATERIAL SHAPING DEVICE WITH A LASER BEAM WHICH IS INJECTED INTO A STREAM OF LIQUID}

The present invention relates to a material processing method according to the description of Claim 1 and a material processing apparatus according to the description of Claim 4.

Material processing using laser emission has been used to cut, pierce, weld, mark, and generally cut materials in a variety of ways. In the course of processing, removal of the material can be initiated by emitting a laser at a desired emission intensity on the surface of the material to be processed. This high power radiation is obtained by focused laser emission. However, a disadvantage of this technique is that the axial width (beam width) of the focal point that high intensity emission will reach is small.

If you dig or dig deep, the location of the focal point must contain a very high level of accuracy or path. The beam becomes thinner and conical to the focal point, especially when digging deep, a significant amount of material needs to be removed from the surface area to allow the cone's beam to reach the machining site, starting from the surface. However, if you dig deep or make a hole, the inclined outer wall is always formed.

As a method of preventing the traces of focus from being left and making the holes by digging narrowly while forming an approximately vertical outer wall, as a light derivative, US-A 5 773 791 which emits a laser to a spray liquid which guides the light beam to the material to be processed. , EP-A 0 515 983, DE-A 36 43 284 and WO 95/32834 are presented.

In DE-A 36 43 284 the laser beam was supplied by glass fibers. At the end of the fiberglass there is an injection liquid which flows around in the direction of the material to be processed. A disadvantage of this known device is that the diameter of the jetting liquid cannot be smaller than the diameter of the glass fibers carrying the laser beam. And another drawback is that it is caused by the water beneath the end of the fiberglass, which hinders the flow of the jetting liquid and eventually the jetted water rapidly turns into water droplets.

EP-A 0 515 983 sought to avoid this drawback with the design of optics with nozzle walls that determine the shape of the jetting liquid. A liquid holding chamber is placed upstream of the nozzle which determines the shape of the injection liquid, and the chamber is provided with a focusing lens that focuses the laser emission and closes the space from the nozzle inlet. The focal length and position of the focus lens are determined taking into account that the focal point of the laser emission is located in the central axis inside the nozzle tube. However, the invention found that the nozzles were quickly damaged by laser emission in the processing during processing, and as a result the form of the emission could no longer be complete.

WO 95/32834 has provided a method for injecting a laser into a spray liquid, in which the focus of the laser beam to be emitted is positioned in the plane of the nozzle inlet and the liquid holding space in front of the nozzle inlet is also removed. A nozzle for forming the injection liquid is provided in the liquid supply part, and the liquid supply part extends in a radial direction with respect to the nozzle axis, and a plurality of nozzles are distributed in the same axis and communicate with the outside. Even with these improvements, the nozzles were damaged during the processing of the material.

SUMMARY OF THE INVENTION An object of the present invention is to provide a material processing method that enables a long time processing of materials by making the method and apparatus safe, and a material processing method and apparatus for irradiating a laser beam with a spraying liquid column. Interruptions in the process occur only in predetermined working gaps. In particular, there is no possibility of unforeseen interference caused by damage to the nozzle wall, which determines the shape of the injection liquid.

Details of the method of the present invention are described in claim 1, and details of the material processing apparatus of the present invention are described in claim 4.

In the present invention, the laser beam is irradiated to the nozzle port forming the injection liquid, the liquid is supplied to the nozzle at high speed (without the liquid storage space), and the generation of vortex is suppressed. An optical unit configuration that satisfies these three elements will be described below.

Embodiments and apparatus of the present invention are shown in the drawings below. Further features of the invention are described in the text that follows.

1 is a cross-sectional view of an optical unit portion of a workpiece processing apparatus.

FIG. 2 is an enlarged longitudinal sectional view of the state in which the injection liquid is supplied to the nozzle block in the optical unit portion shown in FIG.

3 is a longitudinal sectional view of the nozzle block shown in FIG. 2 inserted into the nozzle unit.

4 is a cross-sectional view taken along the line IV-IV in FIG.

5 is a cross-sectional view showing the generation and induction process of the injection liquid by enlarging FIG.

The optical unit 1 of the material processing apparatus shown in FIG. 1 is connected to the laser light source 6 by a waveguide 3 and a waveguide connector 5. Although the laser light source 6 is schematically shown in the accompanying drawings, it means a high power laser such as Nd: YAG laser. The laser light 7 from the waveguide 3 in the connector 5 is collimated by the collimator 9 to form a light beam 10. The light beam 10 is guided to the light expanding unit 11. In the light expanding unit 11, the light beam 10 turns into the beam 13 as the diameter of the cross section increases. From the accompanying drawings, it can be observed that the diameter of the beam increases from 2 to 8. This expansion ratio in turn makes it possible to vary the beamwidth 15 of the laser beam 13 by reducing the diameter. This expansion ratio is not shown, but there is a motorized beam expander in the beam expansion unit 11, which can be changed. The light ray 13 is bent by 90 degrees by the reflector 17, and is reflected by the reflector 21, which is adjusted by the adjusting device 19, to be guided to the optical focusing device 23. The operation and use of the adjusting device 19 is described below.

The theoretical focus of the optical focusing device 23 may not coincide with the cross-sectional area of the light beam width 15 from the light beam 13. The deviation of the two is due to the divergence of the light beam 13 which may have been affected by the light expanding unit 11.

The nozzle block 27 having the nozzle tube 29 serves to form the injection liquid 25 column. The optical focusing device 23 and the light expanding unit 11 are focused from the light beam 13 and arranged or adjusted so that the light beam 15 can be placed on the nozzle pipe joint surface 30 of the nozzle port 28. . The nozzle pipe joint surface 30 extends together on both surfaces of the nozzle block 27. 2 to 5 are diagrams illustrating the periphery of the nozzle tube 29 forming the pillars of the injection liquid 25. 3 is an enlarged view of the nozzle block 27 on a scale larger than that of FIG. 2. The nozzle tube 29 takes the form of a cylinder. The nozzle block 27 should be made of a material capable of passing a laser beam (in this case, a wavelength of 1.06 mu m), and preferably made of a mechanically rigid material. For example, quartz or small, but also diamond. When the nozzle block 27 is made of diamond than when the crystal is manufactured by crystal, the service life of the nozzle block 27 can be extended. When the service life is over, a phenomenon that the injection liquid 25 is crushed even with a short distance injection occurs.

The nozzle block does not necessarily have to be transparent to take advantage of the total reflection of the nozzle tube wall. When the nozzle block is made of a material that absorbs laser light without being transparent, the nozzle tube wall should be coated with a material capable of reflecting the laser light to reduce wear caused by the injection liquid 25. If the nozzle block is not transparent, the nozzle surface must also be coated with a reflective material (to prevent correction errors) and the bottom surface of the nozzle block must also be coated with a reflective material (from the cloud of plasma around the material). To prevent light rays from radiating back into the material).

The nozzle block 27 shown in FIG. 3 has a joining surface 30 orthogonal to the axis 32 of the nozzle tube 29. The nozzle tube end 31 of the nozzle tube 28 is located between the joint surface 30 and the nozzle tube wall and is sharply manufactured, and preferably has a radius of curvature of 5 μm or less. This circular nozzle pipe end 31 is a prerequisite for long distance liquid injection. This is because the circular nozzle tube end 31 suppresses the vortex of the liquid. The nozzle block 27 is inserted into the nozzle unit 33. The contact surface 34 between the nozzle block 27 and the nozzle portion 30 should be made so that there is no gap. The gap causes vortices in the flow of the liquid, which spreads to the injection liquid 25 in the nozzle tube 29. The nozzle block 27 shown in FIG. 3 has a diameter of 2 mm and a height of 0.9 mm. If it's about this size, making a diamond will cost you money.

As described above, the nozzle tube 29 into which the injection liquid 25 is injected is in the form of a cylinder. In the present invention, the nozzle tube 29 has a diameter of 150 μm and a length of 300 μm. It is preferable that the length of the nozzle tube 27 does not exceed twice the diameter. The outlet of the nozzle tube 29 is configured to be adjacent to the outlet 26 extending in a conical shape. In the present invention, the angle of the cone is 80 degrees. The surface 35 of the inner side of the cone gradually expands and forms one body with the nozzle part 33.                 

The conical inner surface facilitates the coating of reflective material on that surface. The jetting liquid is not disturbed in any direction, and the reflection effect is improved even for radiation in an unspecified direction caused by mechanical inhomogeneity (due to shock waves, impurities, etc.) due to the inclination. The angle of the cone selected in the present invention is sufficiently large so that the radiation from the sprayed liquid can be effectively reflected by colliding at a small angle even if it does not collide or collide with the side wall at all.

The liquid supplied to the nozzle tube 29 passes through the narrow disc-shaped inner space 36, and the height of the inner space 36 is about half of the diameter of the nozzle tube 29, and the diameter of the nozzle portion 33 is increased. Same as diameter. The twenty supply pipes 37 are arranged radially about the axis 32 of the nozzle pipe 29 and are connected to the inner space 36. This configuration is for supplying a uniform liquid without vortex to the nozzle tube 29. A pressure reducing filter 39 is provided at the inlet side of the supply pipe 37. The pressure reduction filter 39 is in contact with the annular space 40 and the annular space 40 is connected with the supply line 41. The pressure reducing filter 39 maintains the pressures of the twenty supply pipes 37 in a constant manner so that the liquid can be uniformly symmetrically supplied to the nozzle inlet. Since the supply line 41 is installed only in one direction, the pressure will be higher as it is closer to the supply line 41 of the 20 supply pipes 37 without the pressure reducing filter 39. As a result, the liquid supplied to the nozzle port 28 cannot enter the shifting direction. In order for the laser beam to reach the nozzle port 28, the inner space 36 is covered with a cover 43 made of a transparent material which is filled with liquid and through which the laser can pass.                 

Due to the low height of the inner space 36, the flow velocity of the liquid is increased. Due to the high flow rate, there is no possibility (or notably low) that the liquid is heated by the laser at the cone 38 of the laser being focused. By the above-mentioned configuration, it is possible to prevent the formation of a thermal lens in the inner space 36, particularly in the part of the cone 38 where the laser is focused. The mullen lens prevents the laser from being projected onto the axis 32 of the nozzle aperture 28 perfectly and stably. When a mullen lens is formed, it acts as a diverging lens, which serves to deteriorate the focus of the light beam. The laser beam may damage the nozzle by colliding with the nozzle tube or the nozzle surface. In addition, a phenomenon in which the liquid is heated and unstablely flows due to the formation of the dermal lens is caused. Therefore, the light beam cannot be projected accurately to the injection liquid 25.

Arrangement of star-shaped (radial) supply pipe 37, decompression filter 39 between annular space 40 and supply pipe 37, between nozzle block 27 and nozzle portion 30 at the portion where liquid flows. Seamless contact surface 34 of the nozzle, circular small (more than 5㎛ radius) nozzle end portion 31 located at the nozzle inlet can supply the vortex-free liquid to maximize the distance to eject the liquid have. In addition, the operation of removing the gas in the liquid and filtering the impurities can increase the injection distance. In addition, there should be no pulses in the pressure during the liquid supply. This is because the injection is unstable when the pressure is uneven because it takes the form of a cylinder. Because of the surface tension, liquids are spherical and tend to change their shape. Therefore, the liquid injected over a certain distance is broken while forming droplets, respectively. In order to realize long distance liquid spraying, it is necessary to supply a liquid with various obstacles removed as mentioned above.

In addition, when the injection liquid 25 impinges on the surface of the material to be processed, a shock wave is generated, and the shock wave affects the injection liquid 25. The shock wave means that the flow of liquid is no longer layered, and some of the laser emission entering the nozzle inlet comes out of the spray liquid 25 due to the instability that occurs on the surface of the spray liquid due to the shock wave. In this way, when light rays are emitted from the injection liquid 25, the light beams may contact or penetrate the nozzle wall 27 and strike the metal wall of the nozzle unit 33. This release then generates partial heating and can be absorbed by the wall. This may melt or vaporize the material of the nozzle part 33 and may cause destruction of the nozzle part 33 and the nozzle wall 27. In order to prevent this phenomenon, the inner wall 35 is designed in a conical shape and has a reflective coating. Therefore, the laser emission generated by the instability at the front surface of the sprayed liquid is reflected by this coating and cannot penetrate the nozzle wall 27 with the absorbent material. If the material 45 is punctured or chopped, it is generated in the form of minimal energy even if there is no shock wave.

The nozzle wall 27 is described here as having a long life but is arranged for easy replacement. For the replacement of the nozzle wall only the insert 46 which is screwed out is required.

In order to confirm the seal provided, a transparent lid 43 having a groove 54 encircled by the outer side and having an observation hole 50 is provided in the insert 48. This is because the sealing ring 58a has lost its function when there is liquid in the observation hole 50. When the sealing ring 58b has lost its function, the liquid reaches the surface 60 of the transparent sheath 43, which can damage the focal point and path of the laser. In order to avoid this, the sealing rings 58a and 58b should be replaced each time liquid is observed through the observation hole 50.

The force sensor 47 is located under the material 45 to be processed. The position of the sensor 47 is selected so that when the sprayed liquid 25 impinges on the sensor 47 (not deflected), the sensor 47 can give the regulating device 49 the maximum electrical signal. The sensor 47 is provided on the geometry axis 35 of the injection liquid 25. When the injection liquid 25 into which the laser beam is injected collides with the raw material 45 which has not yet been processed, the injection liquid 25 drills a hole in the raw material 45 and thus there is no signal. If the material 45 has already a hole through which the injection liquid 25 can pass, or if an initial cut has been made, the injection liquid 25 is formed in the wall or the hole of the slot when the material 45 moves. Hit the wall of the hole. In this case, only a part of the injection liquid 25 hits the sensor 47. Therefore, the amount of material to be removed is determined by the sensor 47.

The control device 49 is connected to the displacement device of the raw material 45. The replacement device is briefly shown by arrows in FIG. 1 and the arrows are shown to indicate that they are moved in two directions (x (51a), y (51b)) on a two-dimensional plane. According to the value determined by the sensor 47, the control device 49 adjusts the moving speed of the material 45, which is determined according to the cutting pattern defined in two directions 51a and 51b. The energy of the sensor 45 is controlled by the sensor 47 so as to always cut a sufficient amount from the material 45 to control the progress of the material 45 to be processed.

The control device 49 is also connected to the laser light source 6. Therefore, the laser power is adjusted according to the value measured from the sensor and the material movement speed. In the case of a pulsed laser, if stepwise movement is adopted for the movement of the workpiece, the laser emits a plurality of pulses and thus the workpiece 45 advances one step at a time. For example, the step movement may be set to a step frequency of 100 Hz.

In addition to the optical unit illustrated in FIG. 1, an apparatus is also provided for optimizing and monitoring the laser beam for induction of the nozzle inlet or the direction of the nozzle tube 29 in the direction of the axis 32. For this purpose, white light 52 emerges from the white light source 53 and overlaps with the light beam 13. This process is performed by the reflector 17. The reflector 17 completely reflects the laser beam, while completely transmitting the white beam 52 from the white light source 53. The laser beam, in which the white rays 52 from the white light source 53 are mixed together, is guided to the optical focusing apparatus 23 by the reflecting mirror 21, and is readjusted at the nozzle tube joint surface 30, and the shaft 32 ) Will be focused. The reflector 21 is manufactured to partially transmit the white light 52.

Checking whether the light is guided correctly is independent of the laser light and uses only the white light 52 from the white light source 53. If the collimation is not correct, the white light 52 focused by the optical focusing device 23 may illuminate or surround the circular nozzle tube end 31. The surface of the nozzle aperture and its periphery can be observed by using the camera 55 via the telescope 56 and the reflector 21, and the reflector 21 has partial transparency to white light. When passing through the reflector 21, the beam is twisted due to the mirror thickness. However, this distortion can be corrected by the parallel glass sheet (57).

The reflector 21 can adjust the angle by the adjusting device 19. By adjusting the angle of the reflector 21 with the adjusting device 19, the light beam can be guided correctly in the direction of the axis 32 of the nozzle tube 29.

Operation to achieve this object is as follows. The reflecting mirror 21 is adjusted so that the reflected light beams are collected at the nozzle pipe end 31, and is adjusted in a direction opposite to the direction in which the reflecting rays are collected. After this process, the focal point is on the axis 32 of the nozzle port 29. The adjustment of the axis of the beam perpendicular to the previous inclination must be preceded in order to align it with the axis 32.

When the reflecting mirror 21 is manufactured to be partially transparent (about 2%) to the laser of the laser light source 6, the white light source 53 may be unnecessary. In this case too, the telescope and glass sheet 57 should be designed for the laser beam, and a coating that suppresses reflection is needed. The video camera 55 should have a sensitive sensitivity to laser light. In this configuration, when collimation is incorrect, the laser beam is reflected at the nozzle tube 31 or at its periphery. The reflected light beam is detected by the video camera 55 through the telescope to check the mis-collimated situation, which is corrected through the adjusting device 19 and the light expanding device 11 described above. In order to prevent damage to a nozzle tube and its surroundings, it is preferable to carry out in the state which lowered the output of a laser at the time of said adjustment. If the output of the laser is increased by using the light expanding device 11 continuously, this high output laser beam can change the adjustment of the reflector as compared with the low output laser beam.

The confirmation of collimation at the center is adjusted by adjusting the output lens of the light expanding device 11 until the width of the light beam is precisely illuminated until the nozzle end portion 31 (i.e., the nozzle hole 28) is accurately illuminated. If the light beam is already collimated correctly, the output lens of the light expanding device 11 is moved in the opposite direction until adjustment is necessary again. This configuration allows the collimation of the rays to best match the axis 32 of the nozzle port 29.

When Nd: YAG laser is used, water may be used as the injection liquid 25. The water shows a low absorbance for light having a wavelength of 1.06 µm. Nevertheless, the above absorbance is sufficient to produce a mullen lens in the nozzle port. Therefore, it is preferable to use a silicone oil selected from polymethylsiloxanes as the liquid.

When using water as the injection liquid, the absorbance of the laser beam must be less than or equal 0.2㎝ ^-1 and preferably less than or equal to ^-1 0.15㎝. When the absorbance is high, the laser is absorbed by the injection liquid 25 more than necessary. If the sprayed liquid absorbs a lot of laser, the evaporation effect may occur. In order to prevent the formation of a thermal lens in the nozzle port 29, when water having a low absorbance is used as the injection liquid, a wavelength having a wavelength of 150 nm to 1100 nm should be used. Most suitable is 920 nm, 1040 nm-1080 nm). Therefore, it is preferable to use a diode laser, a YAG laser, a frequency-doubled YAG laser, an excimer laser, a copper vapor laser, or the like as the laser light source. For example, YAG lasers are commercially available and have a high output.

The radiation of the rays may be continuous or pulsed. In the pulsed form, the liquid can be cooled for a while, reducing the amount of heat generated. Since water has a large heat capacity, it is possible to pulse a laser of high power. If water is used as the injection liquid in the Nd-YAG laser, a pulsed laser of 20 kW or more can be used. At this time, the pulse length is appropriately 20 to 500 Hz, the average output is 600 W and the pulse rate is 5 Hz.

You can also use a Q-switched Nd: YAG laser with a pulse length of 50 to 250 mW, an average power of 20 to 120 W, a pulse rate of up to 60 mW, or a mode-coupled laser with a pulse length of femtosecond. have.

Continuous lasers can also be used, such as YAG lasers. In this case, however, the average power is limited to this because the light beam is uninterrupted. The only possible method is to irradiate 80 µm thick jetted water with an Nd: YAG laser with an output of about 700W. When irradiated with a higher output, water evaporation, as described above, is crushed into water droplets during spraying, which is not suitable because the perfect induction of light cannot be performed correctly.

As mentioned above, the nozzle block 27 is made of quartz or diamond which is a transparent material to enable laser irradiation. The outlet of the nozzle and the conical wall of the nozzle portion 33 are coated with a material that can reflect the laser. In addition, the nozzle block 27 may be made of a material having high reflectance. If the wavelength of the laser is 1.06㎛, it is possible to produce a nozzle block with gold. When gold is used as a material, pure gold is too soft, and a small amount of copper and silver must be added to increase the strength to about 150 to 225 HV.

Claims (20)

The manufacturing method of the present invention should satisfy the following three elements at the same time, the present invention firstly focuses the laser beam on the nozzle tube entry surface 30 of the nozzle tube 29 for forming the injection liquid, and secondly The furnace liquid is supplied to the nozzle tube 28 without being driven by the injection tube 29 to form the injection liquid 25. Third, the injection liquid does not flow in the tangential direction with respect to the nozzle tube axis 32. It is supplied at high speed to 28 and does not form a liquid storage space near the conical portion 38 which is focused, but the liquid is divided into a plurality of equal-segment pipes 37 so that the liquid flows radially and the same A method of processing a material with a laser beam injected into the spraying liquid, characterized in that it flows away at an angle. The laser beam irradiated or irradiated when only the detection is detected, when it is detected that the injection liquid 25 is located on the extension line of the nozzle tube shaft 32 under the material 45. A method of processing a material with a laser beam injected into the spray liquid, characterized in that the output is adjusted. 3. The nozzle orifice 28 and its inlet periphery are optically imaged so that the axis of the laser beam is focused onto the nozzle orifice, and the energy prevents the removal of material. Or to cause the illumination light to radiate in coordination with the laser beam on the axis of the beam, to move the axis of the beam parallel to the nozzle axis 32 until the reflection action of the light at the nozzle end can be measured, and spraying In order to guide the laser beam to the center of the nozzle tube 28 forming the liquid, the distance traveled is measured to move the beam axis in the opposite direction until the reflection of the same magnitude of reflectivity is measured at the opposite nozzle end, and Later, it moves back by half of the travel distance, and once again, a similar adjustment of the beam axis is made in the direction perpendicular to the horizontal moving direction. It is a method of processing a material with a laser beam which is injected into the injection liquid. An apparatus for processing a raw material according to the method of claim 1 or 2 has a laser light source 6 and an injection liquid 25, and the shape of the injection liquid 25 is a nozzle tube of the nozzle block 27 ( 28. A method of injecting a laser beam out of a laser light source 6 into a light source formed therein and causing the laser light to be guided by the optical focusing device 23, wherein the optical focusing device 23 is a nozzle tube. Regarding the nozzle port 28 of (29), the focus of the laser beam is positioned on the nozzle face (28) of the nozzle port (28), and the plurality of equal-supply supply pipes (37) are placed at an equidistant angle. The liquid flows in the radial direction with respect to the nozzle shaft 32, and the conical portion 38 which focuses the laser light is positioned on the flat surface of the nozzle port 28, and the liquid storage space is not formed. This prevents eddy oil from occurring even in the nozzle port 28 and the nozzle pipe 29. Apparatus for processing a material by a laser beam introduced into the jet liquid, characterized in that. 5. A disk-shaped inner space (36) is formed around the nozzle tube (28), wherein the inner space (36) is in communication with a plurality of radial supply pipes (37) that are opened out, and the diameter of the nozzle tube. In relation to the height of the inner space 36 is formed so that the liquid storage space does not occur at the inlet of the nozzle port 28 so that the flow rate of the liquid is only slightly lower than the speed in the nozzle tube 29, The supply pipes 37 are joined to each other at a position communicating with the space 36, and the supply pipes 37 are provided radially outward so that the axes of the adjacent supply pipes 37 have the same angle toward the center, so that the nozzle tube ( 28. Apparatus for processing a material with a laser beam injected into a spraying liquid, characterized in that the flow of liquid towards 28 does not have any vortex component about the nozzle tube axis (32). 5. The nozzle tube according to claim 4, wherein the length of the nozzle tube is less than twice the diameter of the nozzle tube, and the nozzle outlet port 26 is formed in the shape of a horn (trumpet tube), and the angle of the wall of the nozzle outlet port 26 is the injection liquid. Greater than the spectral angle of the laser spectroscopy from the laser beam scanned within, and when the laser beam is in the range of wavelengths from 150 nm to 1100 nm, especially when between 190 nm and 920 nm and between 1040 nm and 1080 nm An apparatus for processing a material with a laser beam injected into the injection liquid, characterized in that more than 80 degrees. 7. The nozzle outlet 26, designed in the shape of a cone 35, has a coating for reflecting the laser, and the nozzle block 27 ranges from 150 nm to 1100 nm, preferably from 1040 nm to 1080 nm wavelengths. Apparatus for processing a material with a laser beam injected into a spraying liquid, characterized in that for use of the laser of the crystal, in particular made of diamond. 5. The apparatus of claim 4, wherein the nozzle block (27) is made of a material having high laser reflectance. 5. The force sensor (47) according to claim 4, wherein the force sensor (47) is located on the line of the nozzle shaft (32) below the nozzle outlet, and the material (45) to be processed is installed on the sensor (47), and the sensor (47) impinges the injection liquid (25). When the material is processed into a laser beam injected into the spraying liquid, a signal is generated so that the spraying liquid carrying the laser in the axial direction of the nozzle tube can be measured. Device. 5. The material processing method according to claim 4, wherein the liquid supply adjusting device removes the liquid pressure pulse from the liquid supplied to the nozzle port and preferably removes gas and especially particles from the liquid. Device. 5. The apparatus according to claim 4, having observation devices (21, 57, 56, 55) and adjusting devices (19, 21) for observing the nozzle port (28) and its surroundings, wherein the adjusting devices (19, 21) are laser beams. An apparatus for processing a material into a laser beam injected into a spraying liquid, characterized in that located in the center in the nozzle port (28) to change the focus of the. The injection nozzle injection portion according to claim 1, wherein the nozzle pipe end portion 31 of the nozzle hole 28 is located between the joining surface 30 and the nozzle pipe wall, is sharply formed, and has a radius of curvature of 5 μm or less. How to process the material with a laser beam. The method of claim 1, wherein the 0.2㎝ ^-1 or less absorption of the laser beam for a liquid, preferably a method for the absorption material is processed with a laser beam to be injected into a liquid jet, characterized in that not more than 0.15㎝ ^-1. 5. The apparatus of claim 4, wherein the length of the nozzle tube (29) is less than twice the diameter of the nozzle tube (29). The liquid supply to the nozzle tube (29) is via a disc-shaped narrow inner space (36) formed between the transparent cover (43) and the nozzle block (27), and the inner space (36). ) Is a device for processing a material with a laser beam injected into the injection liquid, characterized in that the liquid is supplied from the supply pipe (37) arranged in a star shape (radial form) around the axis of the nozzle tube (29). 15. The apparatus as set forth in claim 14, wherein the pressure reducing filter (39) is provided outside the inlet of the supply pipe (37) and the annular space (40). . 5. Method according to claim 4, characterized in that the nozzle block (27) can be detached by turning and removing the screwed insertion mole (46). 5. The light expanding unit (11) according to claim 4, wherein the light expanding unit (11) expands the diameter of the light beam before it reaches the optical focusing device (23), wherein the theoretical focus of the optical focusing device (23) is from the light beam (13). A method of processing a material with a laser beam injected into an injection liquid, characterized in that it does not have to coincide with the light width (15). A wave guide (3) is connected to a laser light source (6), a connector (5) is provided at the end of the wave guide (3), and the light beam from the wave guide (3) is collimated (9). A method of processing a material with a laser beam injected into the injection liquid, characterized in that the collimation is guided by the) and guided to the light expansion unit (11). 16. The injection of the injection liquid according to claim 15, wherein the transparent cover 43 is formed so as to check whether liquid is introduced into the surface 60 of the cover 43 opposite to the inner space 36. Apparatus for processing materials with laser beam.

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