KR100370345B1 - A Reprocessing Device of Inorganic Abrasive Waste Water - Google Patents

Abstract

An object of the present invention is to provide a regeneration treatment apparatus for an inorganic abrasive waste liquid having a high purity inorganic abrasive having an abrasive property almost identical to an unused inorganic abrasive waste in an used inorganic abrasive waste liquid, and efficiently recovering a high purity solution. do.

The regeneration treatment apparatus of the inorganic abrasive waste liquid of the present invention is a regeneration treatment apparatus of the inorganic abrasive waste liquid which recovers the powdered inorganic abrasive powder from the inorganic abrasive waste liquid which has been used and has become a slurry phase, and the stock solution tank part (A) and the waste liquid. The removal classification part (B) which removes the foreign matter powder from water and wet classifies it, and the cleaning liquid is added to the slurry waste liquid supplied from the removal classification part, and the deterioration substance which affects the regeneration-polishing agent characteristic of an abrasive | polishing agent A washing section (C) for washing in a dry state, a sorting section (D) for wet separating the waste liquid into water-containing slurry solids and a solution, and a powder for drying or roasting the water-containing slurry solids to powder And a regeneration unit (E).

Description

A Reprocessing Device of Inorganic Abrasive Waste Water

The present invention relates to a regeneration treatment apparatus for an inorganic abrasive waste liquid which can recover powdered regenerated inorganic abrasives and a solution from an inorganic abrasive waste liquid in the form of slurry after use.

In general, the waste liquid containing the used inorganic polishing agent is in the form of a slurry, and among these dense solids, the inorganic polishing agent used during processing, iron (Fe), tin (Sn), and tin (Sn), which are inherent in the grinding machine, Contains other inorganic substances. In addition, for the commonly used inorganic abrasive as used herein, Al ₂ O ₃ - may be an abrasive such as ZrSiO ₄ based, Al ₂ O ₃ type, SiC-based oxide, Solarium cell components. By the way, as a treatment apparatus of this inorganic abrasive waste liquid, the sedimentation separator which used several large sedimentation tanks is common, solid-liquid separation in this sedimentation tank, supernatant liquid is filtered and reused, and contains an inorganic abrasive agent. Despite this, the solids were disposed of.

However, such processing not only wastes effective resources but also leaves a problem on environmental conservation.

Therefore, in order to recover the inorganic abrasive | polishing agent discarded in this way, several conventional techniques are proposed. For example, what is proposed in Unexamined-Japanese-Patent No. 64-10247 is the apparatus which isolate | separates solid components, such as this cutting abrasive grain, and mixed components, such as a solution, from the solution containing a cutting abrasive grain. Specifically, the solid-liquid separation by filter medium is carried out, and a continuous pore soft resin is used for the cylindrical filter medium, and the internal pressure is lowered to adsorb the solid particles in the stock solution to the outer peripheral surface of the filter medium by suction. To separate them into solids and solutions.

Next, what is proposed in Unexamined-Japanese-Patent No. 4-315576 is related with the regeneration / circulating apparatus which recycles the used abrasive liquid discharged | emitted from the lap processing apparatus, and circulates this recycled abrasive liquid repeatedly. Since the recycled abrasive liquid gradually decreases in quantity, it is characterized by circulating by adding an appropriate amount by measuring new abrasive grains and pure water.

Furthermore, the conventional technique proposed in Japanese Patent Laid-Open No. 7-186041 relates to a polishing apparatus for plates such as wafers, and classifies and classifies abrasives using a plurality of cyclones, and thus for initial finishing and intermediate finishing. And separating into abrasives for finishing and using a circulation material. The technique proposed here is similar to the technique proposed in Japanese Patent Laid-Open No. Hei 4-315576. The abrasive is circulated in the slurry liquid, and insufficient abrasive grains are added.

However, in recent years, the problem of environmental preservation for industrial waste has become a big problem all over the world, becoming a big problem in various places. In addition to environmental concerns, disposing as industrial waste means wasting resources and energy at the global level. Disposing of reusable ones in individual companies also raises manufacturing costs and also has an impact on competitiveness. Therefore, how to recycle industrial waste well and reuse it is a serious problem for companies, and socially, it is considered as an industrial responsibility.

Amidst the movement to recycle such industrial wastes, the reclaiming technology of used inorganic abrasives has been proposed as described above. However, although the separation device proposed in JP-A No. 64-10247 uses a soft resin of continuous pores in a cylindrical filter medium and aspirates to separate it into a solid material and a solution, a substance having a different particle diameter in the solid material or a solution that tends to aggregate. In Esau, the mesh of the filter medium immediately blocked the mesh, and at that time, it was necessary to stop the operation, scrape off the blocked solids, or replace the filter medium.

The regeneration / circulation apparatus disclosed in Japanese Patent Laid-Open No. 4-315576 discloses circulating by adding new abrasive grains and pure water to the regenerated abrasive liquor. Iii), debris cut from the object to be polished is constantly mixed. In addition, the abraded particle shape, which is a characteristic of the abrasive grains, is rounded, and if it is reproduced as it is, the original performance is significantly lowered. In this regard, the same applies to the polishing apparatus disclosed in Japanese Patent Laid-Open No. 7-186041. If the regeneration solution is continued, the regenerated abrasive property of the abrasive is deteriorated. For this reason, the regeneration processing apparatus which is practical of the inorganic abrasive waste liquid has been anticipated.

By the way, the technique disclosed in Unexamined-Japanese-Patent No. 4-315576 and Unexamined-Japanese-Patent No. 7-186041 is basically reusing recycled abrasive grains by adding new abrasive grains and the like. In any case, there was a limit to the purity of the recycled abrasive or solution. Although the necessity of raising the purity of regenerated inorganic abrasives is high, it is basically difficult to increase the purity of regenerated inorganic abrasives with such a recycling type regeneration treatment device.

Therefore, the present invention solves the above problems, and in the used inorganic abrasive waste liquid, it is possible to efficiently recover the high-purity inorganic abrasive having an abrasive property similar to the unused inorganic abrasive, and the separated solution can be reused. It is an object of the present invention to provide a regeneration treatment apparatus for an inorganic abrasive waste liquid.

The apparatus for regenerating the inorganic abrasive waste liquid of the present invention is to add a cleaning liquid to the raw liquid storage tank part, the removal classification part, and the slurry waste liquid supplied from the removal classification part, thereby degrading the deterioration material which affects the regeneration abrasive property of the abrasive. Powder for washing or roasting the washing unit to be washed with the waste liquid, the separating unit to wet-classify the waste liquid sent from the washing unit to separate into a hydrous slurry phase and a solution, and to dry or roast the hydrous slurry solid separated from the classification unit. Characterized in that it comprises a regeneration unit.

As a result, from the used inorganic abrasive waste liquid, it is possible to efficiently recover a high-purity inorganic abrasive having an abrasive property similar to that of an unused inorganic abrasive, and the separated solution can be reused.

The gist of the invention is explained below.

Conventionally, the slurry was washed with water and circulated with the liquid of the composition for wrap. In such a circulation as it is, the dust mixed in the liquid can be removed, but the deteriorated substance adhering to the abrasive surface cannot be completely removed due to the obstacle of the liquid.

Therefore, the present inventors carefully examined how to improve the purity and characteristics of the recycled abrasive grains to the same level as the unused abrasive grains, but the deterioration material adhered to the abrasive surface causes the greatest deterioration of the obstacle characteristics of the recycled abrasive grains. We succeeded to find out for the first time. In addition, the knowledge that the bacteria in the liquid attract deterioration and the surface deterioration material grows. The deterioration of the polishing characteristics is because the deteriorated material roundly covers the edges of the abrasive grains, which are related to the degree of cutting. As conventionally, attractants include C (carbon) and the like contained in cast iron.

Conventional abrasive reclamation is carried out in a liquid state, taking dust in the liquid, and does not attempt to exfoliate deposits, but does not fall, so that the particle size distribution is classified by the classification even if unused abrasive grains are similar. Could not be played.

Thus, the present inventors tried and tried various methods to remove this deterioration material, but since the abrasive grains are mixed with the solution and mixed with the solution after regeneration, they seem to be meaningless at first glance, Could think of coming back. When a powder is formed, a deposit always appears on the surface (the abrasive is separated from the solution), thereby allowing direct access to the deteriorated material on the surface of the abrasive, which makes it possible to completely remove the deposit.

As a specific means of removing deposits, the first step means that the solubility of the deteriorated substance and the adhesion surface in the liquid, impact by the liquid, and the like can be considered to be caused by physical force. Hot water, hot water, spraying, or agitation are the reasons for this. Conventional water washing and agitation do not take adherent deposits and do not take them freely because they do not know that deteriorated substances are attached to the abrasive surface. In particular, the agitation performed in the conventional classification and the like does not give energy for separation such that the relative speeds of the abrasive grains and the liquid are low and the deposits fall off as in the present invention even though the agitation is performed. On the contrary, the sedimentation rate is important for classification, and no stirring above this speed should be performed.

However, the cleaning part of the present invention that drops the deposit gives energy enough to drop the deposit, and removes it, and furthermore, as a second step, by applying heat to achieve powdering in the powder regeneration unit, drying or roasting It heats from several hundred degrees Celsius to 1400 degrees Celsius, and it heats up a deterioration material simultaneously with a thermal shock. For example, in the case of using the most frequently used cast iron grinder, the polishing waste liquid is a slurry which is mixed with Fe ₃ C and C and oil, and is smothered, but this C is attracted to Fe. Aggregates ₃ C and forms a large mass, worsening the regenerated abrasive properties. This C cannot be removed even if it is washed in an acid, and can be regenerated only by roasting at 900 ° C to 1400 ° C in the washing part and the powder regeneration part of the present invention.

As described above, the present invention is provided with a cleaning part for peeling off the adhered deterioration material, a classifying part capable of removing impurities after removing the deposit, and a powder regenerating part having thermal shock of 1400 ° C. and impurity combustion at several hundred ° C. thereafter. The synergistic effect of regenerates the reclaimed abrasive grains, which can be completely identified with the unused abrasive grains in all other respects, such as polishing characteristics and particle size distribution. Thus, the recycled abrasive grains represent unused abrasive grains and use at all in polishing and grinding.

Embodiment of the Invention

The invention described in claim 1 is an apparatus for regenerating an inorganic abrasive waste liquid which recovers powdered inorganic abrasive powder from an inorganic abrasive waste liquid in the form of slurry after use, and adjusts the concentration to a predetermined concentration while storing the used inorganic abrasive waste liquid. A cleaning liquid is added to the raw liquid storage tank portion, the removal fractionation portion for removing the foreign matter from the slurry waste liquid supplied from the stock solution storage tank portion, and wet classification of the waste liquid after the foreign matter removal. The cleaning part for cleaning the deteriorated material affecting the regrind abrasive characteristics of the abrasive in the waste liquid, the classification part for separating the slurry waste liquid sent from the cleaning part into the hydrous slurry solid and the solution, and the classification part. Characterized in that it comprises a powder regeneration unit for drying or roasting the water-containing slurry phase solid separated in Since it is a regeneration treatment device for the inorganic abrasive waste liquid, the deterioration material is removed by the treatment in the cleaning part, and the impurities during drying or roasting treatment in the powder regeneration part are almost completely eliminated, and the inorganic polishing agent contains no impurities. After returning to the original crystalline form, high purity inorganic abrasives having stable abrasive properties almost the same as unused inorganic abrasives can be recovered. In addition, the solution separated and recovered by the classification unit has a purity enough to be reused as it is because impurities are not removed and impurities are not removed.

The invention according to claim 2 is a regeneration treatment apparatus for an inorganic abrasive waste liquid according to claim 1, wherein the cleaning liquid is hot water or hot water in the temperature range of 10 ° C to 130 ° C, or an alcohol solvent. It is effectively removed, and it is possible to almost completely remove the deterioration material which leaves impurities during drying or roasting in the powder regeneration unit.

In the invention according to claim 3, the stock solution storage tank unit comprises a raw material tank and a concentration adjustment tank, and the solid content concentration of the inorganic abrasive waste liquid is managed using an agitator, a water level detector, and an air pinch valve. Since it is a regeneration treatment device for the inorganic abrasive waste liquid, the solids in the inorganic abrasive waste liquid are dispersed in the stirrer, and the solids concentration in the waste liquid is controlled by using a level detector and an air pinch valve to adjust the inorganic abrasive slurry waste liquid to the most suitable concentration. There is a number.

The invention according to claim 4 is provided with a sieve for removing iron and other foreign substances from which the removal classification unit removes iron powder, and a wet classifier to remove foreign substances from the inorganic abrasive waste liquid, and the first wet type. The apparatus for regenerating the inorganic abrasive waste liquid according to claim 1 or 2, characterized in that the classification is carried out, so that iron or other foreign matter in the inorganic abrasive waste liquid can be removed, and the waste liquid sufficiently sized by the first wet classification can be obtained. . The same applies to the regeneration treatment apparatus for inorganic abrasive waste liquid according to claim 3.

The invention according to claim 5 is characterized in that the cleaning section includes a cleaning tank and a cleaning mechanism for cleaning the deterioration material that affects the regrind abrasive characteristics of the abrasive, wherein the inorganic abrasive waste liquid according to claim 1 or 2 is recycled. Since it is an apparatus, it can wash away deteriorated substances, such as an unnecessary oil component, sewage component, dust, adherent aggregate, and bacteria, in a waste liquid with a washing | cleaning apparatus. In addition, unnecessary waste liquid can be overflowed, after which concentration adjustment can be carried out, and the slurry waste liquid of an inorganic abrasive | polishing agent can be stabilized and sent to a fixed quantity continuously in a classification part. The same applies to the regeneration treatment apparatus for the inorganic abrasive waste liquid according to claim 3.

The invention according to claim 6 is a regeneration treatment apparatus for an inorganic abrasive waste liquid according to claim 5, characterized in that the cleaning mechanism is provided with a sprayer provided in the cleaning tank, and the cleaning liquid is sprayed by applying at least a back pressure equal to or higher than the vapor pressure. Therefore, even deteriorated materials, such as aggregates adhering to the inorganic abrasive, can be reliably washed.

The invention according to claim 7 is a regeneration treatment apparatus for the inorganic abrasive waste liquid according to claim 5, characterized in that the cleaning mechanism comprises a heating device provided in the cleaning tank, and heats and cleans. Not only the deteriorated substances in the waste liquid, but also deteriorated substances such as aggregates adhered to the inorganic abrasive can be reliably washed. In addition to heating, the cleaning effect can be further enhanced by spraying the heated waste liquid. The same applies to the regeneration treatment of the inorganic abrasive waste liquid according to claim 6.

The invention according to claim 8 is characterized in that the electric classifier comprises a wet classifier for performing secondary wet classification, and separates the particles in the solution into a plurality of grades having different diameters or specific gravity. Since it is the inorganic abrasive waste liquid as described in the above, by the second wet classification, it is possible to obtain a hydrous slurry solid of the target inorganic abrasive and other uniform particles having granules for every several grades. Excellent separation, it can be a high yield solids separation. Regeneration treatment apparatus The same applies to the regeneration treatment apparatus for the inorganic abrasive waste liquid according to any one of claims 3 to 7.

The invention according to claim 9, wherein the powder regeneration unit dried or roasted the hydrous slurry phase solidification in the range of 80 ° C to 1400 ° C. Moisture of the phase solids is almost completely removed at 80 ° C to 1400 ° C to blow off trace impurities and completely return the crystalline form of the abrasive grains. Since the deterioration material is cleaned by the cleaning unit, impurities that do not burn remain, and thus impurities can be almost completely removed. The same applies to the regeneration treatment apparatus for the inorganic abrasive jet liquid according to any one of claims 3 to 8.

The invention according to claim 10, wherein, when a cast iron polishing plate is used, the powder recycling unit dried or roasted the hydrous slurry solid in the range of 900 ° C to 1400 ° C. Therefore, in the case of using the most commonly used cast iron polishing plate (table), the polishing liquid is a mixture of Fe ₃ C and C and oil, which becomes a sluggish slurry, and this C becomes a attractant and Fe ₃ C is agglomerated and becomes a large lump, deteriorating the regeneration abrasive property. Even though it is washed with acid, this C cannot be removed. However, the C is unique to washing in the washing part and roasting at 900 to 1400 ° C. in the powder regenerating part. Playback is possible.

The invention as set forth in claim 11 is characterized in that a control unit for controlling the stock solution storage tank unit, the electric removal classification unit, the electric cleaning unit, the electric classification unit, and the electric powder regeneration unit in accordance with a predetermined control operation is provided. Since it is an inorganic polishing liquid, it is possible to control each unit of concentration control, particle size management, and temperature management from the stock solution storage tank section to the powder regeneration section with a predetermined sequence. Regeneration treatment apparatus The same applies to the regeneration treatment apparatus for the inorganic abrasive waste liquid according to any one of claims 3 to 9.

Embodiment 1

Hereinafter, the regeneration treatment apparatus for the inorganic abrasive waste liquid of Embodiment 1 of the present invention will be described with reference to FIG. 1 is a block diagram of a regeneration treatment apparatus for an inorganic abrasive waste liquid in Embodiment 1 of the present invention.

In Fig. 1, A is a stock solution storage tank portion for recovering powdered inorganic abrasives from the slurry-inorganic polishing liquid after use, and B is iron or other foreign matter in the slurry waste liquid sent from the stock storage tank portion (A). A removal classification unit for removing the powder by wet classification, C is a cleaning unit for cleaning and removing deteriorated substances such as unnecessary oil components affecting the regeneration polishing agent properties or impurities remaining during heating (regeneration), and D is a cleaning unit. (C) wet classification of the slurry waste liquid washed in (C) and separating the hydrous slurry solids and the solution, E classifies the powdered abrasive by drying or roasting the aqueous slurry solids sent from the classification unit (D) The powder regeneration unit, F, controls the units from the stock solution storage tank unit A to the powder regeneration unit E in accordance with a predetermined control operation, and performs high purity regenerated inorganic polishing agent and It is a control unit for automatically recovering the solution.

1, 1 is a raw material tank, 2 a, 2 b, 2 c, 2 d, 2 e is a stirrer, 3 a, 3 b, 3 c, 3 d is a water level detector, 4 is an air pinch valve, 5, 11 and 17 are concentration adjustment tanks, 6, 12 and 18 are air pumps, 9 and 15 are powder pumps, 7 are vibratory yarns, 8 are steel classifier tanks, 10 and 16 are wet classifiers, and 13 are cleaning Tank, 19 a is a spray dryer, 19 b is a replaceable roaster as needed in the spray dryer (19 a), 20 is a control panel for controlling the regeneration treatment device, microcomputer, etc. It is remembered in order. The control panel 20 selects each unit of the stock solution tank (A), the removal classifier (B), the cleaning unit (C), the classification unit (D), and the powder regeneration unit (E) according to the sequence of this control operation. Holiday control. In each unit, the feedback control, the calculation, the optimization, and the like are performed in accordance with the signal detected by the detector such as the water level detectors 3a, 3b, 3c, and 3d. In addition, between the units of the stock solution tank (A), the removal and classification unit (B), the cleaning unit (C), the classification unit (D), and the powder regeneration unit (E), the concentration-adjusted waste liquid is added to the next unit. It is connected by the piping pipe shown by the arrow in FIG. 1 for supplying to.

Hereinafter, each unit of A thru | or F is demonstrated in detail. The stock solution storage tank portion (A) has a raw material tank (1) provided with an agitator (2 a), a water level detector (3 a, 3 b), an air pinch valve (4), and a concentration connected to the raw material tank (1). It consists of an adjustment tank 5 and an air pump 6 for sending waste liquid from the concentration adjustment tank 5 to the removal classification part B which is the next unit. The concentration adjustment tank 5 is provided with the stirrer 2b. The agitators 2 a and 2 b stir the inside of the raw material tank 1 and the concentration adjustment tank 5, respectively, to prevent precipitation of solids and to perform concentration management. Here, the concentration is adjusted to 10% to 15%. At this time, the stirrers 2a and 2b rotate by simply raising and lowering the liquid level in the raw material tank 1 and the concentration adjustment tank 5 by agitation and detecting the liquid level by the water level detectors 3a and 3b. Although the number is controlled, it is more appropriate to control by the inverter which is easy to control the rotation speed even if the holding amount of the waste liquid in the slurry phase changes. In this case, since the liquid level is detected by the level detectors 3a and 3b, and the inverter is controlled by the signal to control the rotation speed of the stirrers 2a and 2b, the raw material tank 1 and the concentration adjustment are performed. Overflow in the tank 5 and scattering of the waste liquid by the agitators 2a and 2b at the time of low water level can be prevented reliably. The concentration adjustment is performed by measuring the weight corresponding to the unit volume and converting the liquid amount from the value.

In this way, since the rotation speed is controlled by providing the water level detectors 3a and 3b, the overflow and scattering of the waste liquid due to the shaking of the liquid surface caused by stirring the inside of each of the tanks 1 and 5 is carried out. Since the solid concentration in the waste liquid is managed, the regeneration polishing agent can prevent the supply error that affects the final purity. In addition, it is preferable that the level detectors 3a and 3b have a pressure type liquid level switch having a small error due to the shaking of the water surface. In addition, in the first embodiment, since the air pinch valve 4 is provided in the stock solution storage tank portion A, the bad state such that the valve is worn by the abrasive and settling in the pipe 7 ) There is no malfunction due to aggregation. After the inorganic polishing liquid is adjusted to a concentration of 10% to 15% in the concentration adjusting tank 5, the diaphragm-type air is also stabilized by the pump 6 and sent to the removal classifier B. The diaphragm type air pump 6 is suitable for conveying a liquid having a high viscosity because there is no rotating part and there is little wear and the like due to the abrasive.

Next, the removal classification part 3 is demonstrated. The removal classification part B is equipped with the oscillation yarn 7, the steel-making classification tank 8 equipped with a steelmaking machine, the wet classifier 10 comprised from the liquid cyclone, and the density | concentration adjustment tank 11. As shown in FIG. A classification pump 9 is provided between the steelmaking classification tank 8 and the wet classifier 10. The concentration adjusting tank 11 also provides air for sending the concentration-constrained inorganic abrasive waste liquid to the cleaning unit C. The pump 12 is provided. Moreover, in order to improve abrasion resistance, it is preferable to use the turbo type pump with the rubber lined impeller for the classification pump 9. The waste liquid once high concentration by the action of the wet classifier 10 is again adjusted to 10% -40% here.

The vibrating yarn 7 separates impurities and coarse foreign matter contained in the slurry waste liquid, and iron is efficiently removed by the steelmaking classification tank 8 by magnetic force. Thereafter, the first wet classification is performed by the wet classifier 10 to adjust the concentration, so that the next stage of cleaning, the second stage of wet classification, and the subsequent powdering are recovered and the highly purified regenerated inorganic abrasives are recovered. You can do it.

Next, the washing | cleaning part C is demonstrated. The cleaning section (C) has a function of cleaning and removing deteriorated substances that affect the regeneration abrasive properties such as unnecessary oil components remaining in the waste liquid and impurities such as residues left in the subsequent powdering treatment step. . In addition to the above-mentioned oil components, the deteriorated substances herein include sewage components, insoluble dust, adherent aggregates adhered to the surface of the abrasive by coagulation or coagulation, and attractants which attract the coagulation and coagulation. . Particularly attracting agents that induce coagulation and aggregation are bacteria and the like that are widely reproduced in the waste fluid, and because of the ζ-potential and the sugar chains on the surface, they attract the aggregation of the fine particles even when the dead sea is caused. Is produced to attach impurities which become a deteriorated substance to the abrasive. In addition, when the bacteria themselves or dry roasted, ash remains, the regenerated abrasive properties are deteriorated, and they adhere to the abrasive.

In addition, when the most frequently used cast iron polishing plate (table plate) is used, the abrasive waste liquid is mixed with Fe ₃ C and C and an oil component to give a black, sluggish slurry. This C becomes attractant and aggregates Fe ₃ C.

The washing unit C is composed of a washing tank 13, a stirrer 2d, a water level detector 3c, 3d, an electric valve 14, a classification pump 15, and a washing mechanism cO described later. It is composed. By stirring the inside of the washing tank 13, the stirrer 2d prevents precipitation of a solid, and concentration control, solid content concentration is again adjusted to the range of 10%-15%. At this time, the stirrer 2d controls the rotation speed simply by raising and lowering the liquid level in the washing tank 13 by stirring, and detecting the liquid level with the water level detectors 3c and 3d. However, the slurry waste liquid rotates because the concentration in the liquid tends to change due to natural sedimentation, and because the impeller of the water level decreases (the number of revolutions rises) and the impeller of the stirrer 2 d is markedly worn by cavitation. It is desirable to control the number of inverters to the minimum necessary and to control the rotation speed easily. In addition, if the solid content concentration is adjusted to a too high concentration, it is difficult to control the detection by the water level detectors 3 c and 3 d. Therefore, the control at a relatively low concentration is a simplification of the control.

In the washing | cleaning part (C), the washing | cleaning liquid (cO) and the stirrer (2d) add a washing | cleaning liquid, and it washes and stirs, the waste liquid overflows, and a series of process of density adjustment after that is repeated as many times as possible. First, overflowing the waste liquid ensures a predetermined amount of waste liquid in the washing tank 13, and at the time of concentration adjustment, the liquid amount is precisely prevented from overflowing by stirring in the washing tank 13 to prevent the waste liquid from being discharged. Since it can hold | maintain and can manage the solid content concentration in waste liquid correctly, supply error can be prevented. In addition, since the overflow is controlled by the electric valve 4, control can be performed electrically, and automation by the control part F is easy. In addition, as mentioned above, although washing | cleaning, stirring, and concentration adjustment are performed repeatedly, a final one time process wash | cleans by adding a predetermined amount of washing | cleaning liquid to waste liquid, making it precipitate naturally, and then, supernatant liquid overflows a predetermined amount. In addition, it is preferable to discharge to the outside of the system.

In addition, in order to simplify the control or the apparatus by using the last one-time mindset described above, it may be as follows. That is, the cleaning liquid is added to the waste liquid, and the abrasive is washed with the cleaning mechanism (cO) and the stirrer (2d), and then spontaneously settled, the supernatant liquid overflows, the concentration is adjusted, and this is repeated. Since the solid content concentration in the waste liquid sent from the removal classification unit (B) is maintained almost constant, the supernatant liquid is discharged in an overflow, water is supplied as necessary, and the water level is measured by the level detectors (3 c, 3 d). It is a method using the thing which can adjust density when it detects. This method can make the apparatus inexpensive and effectively clean, but it requires a relatively long time for cleaning because natural precipitation is repeated.

By the way, in Embodiment 1 of this invention, as shown in FIG. 2A, the spray tank and the buffer tank are provided in the washing tank 13 as a washing | cleaning mechanism (cO). FIG. 2A is a first enlarged view of the cleaning portion in Embodiment 1 of the present invention, and FIG. 2B is a second enlarged view of the cleaning portion in Embodiment 1 of the present invention.

21 is a sprayer for ejecting and spraying the cleaning liquid into the cleaning tank 13 by compressed air, 22 is a temperature adjusting device for adjusting the temperature of the cleaning liquid for ejecting from the sprayer 21, 23 is sent from the removal classifier (B) A buffer tank capable of joining the warm waste liquid and the waste liquid overflowed from the washing tank 13, 24 is a filtration device for filtering impurities or deteriorated substances contained in the overflowed waste liquid, and 25 and 26 are flow paths. Is an electric valve (e) for changing. In the case where the capacity or life of the filtration device 24 becomes a problem, it is preferable to employ a method in which the filtration device 24 discharges the waste liquid out of the system without returning it to the buffer tank 23. In this case, since the flow path of the overflow becomes an open loop, the solid content concentration of the liquid to be discharged is preferably as low as possible, and is adopted in combination with the method of overflowing and washing the supernatant liquid after the natural sedimentation. It is suitable to do.

The atomizer 21 is connected with a supply device of compressed air (not shown) and sprayed into the cleaning tank 13 in a state in which a back pressure equal to or higher than the vapor pressure is added to the cleaning liquid. As the cleaning liquid, hot water or hot water, or an alcohol-based solvent in a temperature range of 10 ° C to 130 ° C, possibly 30 ° C to 130 ° C, preferably 100 ° C to 130 ° C, is used. If the temperature is 30 ° C or lower, the effect of heat on cleaning power and bacteria is weakened, and the effect is further lowered at 10 ° C or lower. In the case of using hot water or hot water as the cleaning liquid, more effective cleaning can be achieved by using acidic or alkaline water pH adjusted by electrolysis. In particular, it is effective to perform this pH adjustment when water near 10 degreeC is used also in hot water. However, in the case of an alcoholic solvent, although the effect doubles by heating appropriately, overheating must be avoided. Then, the temperature adjusting device 22 controls the temperature so that the cleaning liquid is ejected into the tank and is at the above temperature. The temperature-controlled cleaning liquid is sprayed onto the slurry-like waste liquid stirred in the sprayer 21 to clean and remove the deterioration material which affects the regeneration abrasive property.

In the case of hot water or hot water, any deteriorated substance can be washed without any problem, but the alcohol-based solvent has a feature that it is particularly effective to clean organic deteriorated substances such as oil. And the washing | cleaning effect can also be improved by repeating washing | cleaning using not only one type of cleaning liquid but a plurality of types of cleaning liquid.

In addition, the buffer tank 23 temporarily stores the overflowed waste liquid, joins it with the waste liquid sent from the removal classification unit B, and sends it to the washing tank 13. The overflowed waste liquid is reused for concentration adjustment by the action of this buffer tank 23. Of course, unnecessary waste liquid can also be discharged here. When sending waste liquid to the washing tank 13, the electric valve 25 is opened and the electric valve 26 is closed. After the cleaning is completed in the washing unit C, the concentrated waste liquid is opened to the next classifying unit D by the classifying pump 15 by opening the electric valve 26 and closing the electric valve 25. Lose. All are performed by control of the control part F. FIG.

By the way, as the washing | cleaning mechanism cO of this Embodiment 1, as shown in FIG. 2B, the heating apparatus may be provided in the washing tank 13. As shown in FIG. 27 is a heating apparatus for heating the slurry waste liquid in the washing tank 13, 28 is a waste liquid sent from the removal and classification unit (B) and overflowed waste liquid or washing liquid, and the waste liquid can be temperature-controlled and pressurized. Temperature regulating pressure device. Unnecessary waste liquid may be discharged from here, and in some cases, the method of not returning the waste liquid overflowed to the temperature regulating pressurizing device 28 is very advantageous. Since this is the same as the description of the open circuit of the overflow already explained in Fig. 2A, the detailed description is omitted.

The washing | cleaning mechanism (cO) of this Embodiment 1 heats the inside of the washing | cleaning tank 13 by the heating apparatus 27, and wash | cleans the waste liquid which temperature-controlled at the predetermined temperature with the temperature adjusting pressurization apparatus 28. It blows out in the tank 13, and agitates with the stirrer 2d at the same time, and it wash | cleans effectively. The liquid temperature inside may employ | adopt the same temperature as the said temperature range. By this heating and stirring, the deteriorated substance adhering to the inorganic abrasive agent is reliably removed. In some cases, the nebulizer 21 of FIG. 2A may be provided, and the washing liquid may be ejected to increase the sedimentation force. As illustrated in FIG. 2B, the heated wastewater itself may be provided with a self-liquid washing line to provide the nebulizer 21. ), And may be configured as a simple spray cleaning. Furthermore, by providing an ultrasonic generator (not shown) in the cleaning tank 13 and using ultrasonic cleaning together, the cleaning effect can be enhanced.

By providing such a cleaning mechanism (cO), it is possible to reliably clean oil components, sewage components, dust, adherent agglomerates adhering to the abrasive surface, and bacteria which cause coagulation or aggregation. The waste liquid washed and concentrated in the range of 10% to 15% is stabilized by the classification pump 15 after the control unit F changes the electric valves 25 and 26, and the classification unit D is fixed by a predetermined amount. Are automatically sent to. In addition, it is preferable to use the rubber lined impeller for the material used for the classification pump 15 in consideration of abrasion, such as a metal.

Subsequently, the classification unit (D) will be described. The classification part D is comprised from the wet classifier 16, the density adjustment tank 17, the air degree pump 18, and the stirrer 2e which stirs the inside of the concentration adjustment tank 17. As shown in FIG. When the waste liquid of the slurry level adjusted by the washing | cleaning part C is supplied to the density | concentration adjustment tank 17, the wet classifier 16 will start operation by the instruction | command from the control part F. FIG. That is, in this wet classifier 16, the work which performs secondary wet classification with respect to the particle | grains from which the particle diameter or specific gravity differs is started following the primary wet classification of the removal classification part (B). In this classification operation, a hydrous slurry solid which has undergone substantial dehydration with the desired inorganic abrasive particles and a particle solid with granules in several other grades can be obtained.

In order to achieve such a classification, the wet classifier 16 preferably employs a multi-cyclone capable of separating a plurality of other particles in the waste liquid into a diameter of a plurality of particles, usually of a grade of 2-3. As a result, for example, fine particles, medieval particles, and coarse particles can be separated, and substances having different specific gravity can be separated. In addition, since the multi-cyclone has high efficiency when the solid content concentration in the waste liquid is in the range of 10% to 15%, the concentration is adjusted to this range in the washing tank 13 of the washing section C, It is sent a bit. In addition, the classification operation can be classified into a plurality of particles having different diameters at one time, but may be repeated three times, four times and several times as necessary, and further increase the precision. Wet classification has the advantage of having high yield of filtration, separation, and dehydration, without causing clogging of water-containing solids due to the accumulation of water-containing solids inside the media.

By the way, in the classification part (D), in addition to the hydrous slurry-like solid substance which consists of particle | grains of each grade mentioned above, a solution can also be collect | recovered. Since the solids are removed from the classification unit (D) and the foreign matter, impurities, and deteriorated substances are almost removed from the removal classification unit (B) and the cleaning unit (C), the solution recovered from this classification unit (D) It is so pure that it can be reused as it is. In order to raise this purity further, you may use a filter, such as a vacuum drum filter and a filter press, as needed. In addition, although the solution can be recovered even in the step before the classification unit (D), in this case, if a filter such as a vibrating drum filter or a filter press is not provided, it cannot be reused, and the cost is expensive. It is also suitable to install an ozone generator in the recovery line to sterilize and disinfect the recovered solution. As a result, bacteria and the like can be reduced, deterioration material is reduced when the abrasive is regenerated, and a high-purity regenerated inorganic abrasive can be recovered, which is very preferable when the regeneration is continuously performed.

The waste liquid is adjusted to a hydrous slurry solids having a water content (density) of about 40% in the concentration adjusting tank 17, and the air is stably sent to the powder regeneration unit E by the pump 18.

Next, the powder regeneration unit E will be described. The powder regeneration unit E is composed of a spray dryer 19 a or a roasting furnace 19 b. Dry and roast in the range of 80 degreeC-1400 degreeC. This temperature is determined by the material of the inorganic abrasive, the purity desired. If the temperature is within this range, it is good, but if it is 250 ° C. or higher, the powdery abrasive which is almost completely free of moisture can be recovered without affecting the conditions. In the case where relatively regenerative abrasive properties are not required, treatment at a drying level of about 80 ° C. to 400 ° C. is sufficient. However, when higher regenerative abrasive properties are required, the treatment is performed at roasting level at a high temperature of 1300 ° C. to 1400 ° C. It is suitable. In this case, the crystalline form of the powder particles can be completely restored to its original state, and the regenerated powder can increase remarkably the whiteness, making it an extremely good regenerated inorganic polishing agent. In addition, it is considered that trace impurities are removed by temperature by roasting. In Embodiment 1, the characteristics of the recycled abrasive and the unused (before use) abrasive were compared by constituent analysis, particle size distribution, and micrographs. It has the component equivalent to the abrasive | polishing agent of the former), the diameter of a particle, and particle shape. This will be described later in detail.

Finally, the control unit F controls the stock solution storage tank section, the removal classification section, the cleaning section, the classification section, and the powder regeneration section in accordance with a predetermined control operation, and the powder regeneration section E in the stock solution storage tank section A is controlled. Each unit up to) is controlled according to sequence. The control unit F is provided with a control panel 20, which controls each unit consecutively, and also signals detected by detectors such as level detectors 3 a, 3 b, 3 c, and 3 d in each unit. According to this, feedback control, calculation, optimization and the like are performed.

By the way, with respect to the regeneration treatment apparatus for the inorganic abrasive waste liquid according to the first embodiment described above, the silicon wafer was polished using an inorganic abrasive composed of a mixture of a molten Al ₂ O ₃ component and a ZrSiO ₄ component and a water-soluble lubricant. As to the case, the operation and action thereof will be described in detail.

At this time, the inorganic abrasive waste liquid is a sloppy liquid (abrasive waste liquid) containing a water-soluble lubricant, an abrasive, iron from abrasive grains from a polishing machine, silicon from a silicon wafer, and other trace components. This abrasive waste liquid is introduced into the raw material tank 1 of the stock solution storage tank portion A and stirred for 30 minutes. While measuring the weight per unit volume of the liquid, the water level detectors 3a and 3b detect the water level, and the solution amount and concentration are estimated from this. Thereafter, the air pinch valve 14 is opened by a command from the control unit F, and the waste liquid is dropped into the concentration adjusting tank 5 in the piping pipe in the direction of the arrow, and the water is supplied from the water supply device to increase the concentration. Dilution is adjusted to 10% to 15%.

When the adjustment is finished, the control unit F enters the vibrating yarn 7 of the removal and classification unit B by using the air pump 6, and enters the vibrating yarn 7 of the removal classification unit B (flow rate 9 L / min), After removing foreign matters such as dust, the steel is placed in the steelmaking tank 8 to remove iron components using a steel mill using permanent magnets having a magnetic force of about 3500 to 10,000 gauss. Here, the polishing powder of the polishing machine as an impurity is almost removed. Thereafter, the abrasive waste liquid is introduced into the wet classifier 10 in the classification pump 9, and operation starts.

The wet classified abrasive waste liquid enters the concentration adjusting tank 11 by placing a piping pipe. At this time, since the solid concentration of the abrasive waste liquid is 40% or more, the concentration is adjusted again to 10 to 40% using water. Continuous processing is continued and when the raw material tank 1 falls below the prescribed water level, the abrasive waste liquid is supplied to the raw material tank 1. At this time, the vibrating yarn 7 and the steel-making classification tank 8 stop by automatic control by the control part F, and the primary wet classification is complete | finished.

Subsequently, by the air pump 12, the wet-classified abrasive waste liquid enters the washing tank 13 of the washing unit C, and the water level detectors 3 c and 3 d detect that the liquid level has reached the operation start level. Then, operation of the stirrer 2d is started, and the washing | cleaning process by the washing | cleaning mechanism cO is started simultaneously. This removes unnecessary deterioration substances such as oil, dust, adhesion aggregates, and bacteria. Thereafter, the waste liquid is sent to the wet classifier 16 of the classifying unit D by the classifying pump 15, the operation of the wet classifier 16 is started, and the second classifying is started. The abrasive classified into the diameter of the predetermined particle | grains by the classification operation is sent to the density | concentration adjustment tank 17 through a piping pipe, and concentration adjustment and stirring are started. The solution is also recovered here.

Subsequently, the abrasive waste liquid whose concentration (water content) is adjusted to 40% in the powder regeneration unit E is sent from the air pump 18 to the spray dryer 19 a or roaster 19 b, at a temperature of 250 ° C. Recycle the abrasive, which contains almost no moisture. In the case of the first embodiment, the powdering treatment is performed at a relatively low temperature of 250 ° C. in the spray dryer 19 a. However, the powder is roasted at a high temperature of about 1300 ° C. to 1400 ° C. in the roasting furnace 19 b. The whiteness of can be remarkably increased to obtain a good powder in which the crystalline form returns to its original state. Of course, if the conditions change, there is a slight variation in temperature.

In particular, in the case of grinding using the most frequently used cast iron grinding wheel (table plate), roasting treatment in this powder regeneration unit is important. The cast iron contains about 3.8% C (carbon), but after polishing, the polishing liquid becomes a black, slurred slurry in which Fe ₃ C, C and oil are mixed. In the waste liquid, the mixture of C and oil becomes a attractant to agglomerate Fe ₃ C and form a large mass to deteriorate the regenerated abrasive property after regeneration. This C cannot be removed even if it is washed in an acid, deteriorates the function of the steel making machine in a short time, and can be regenerated by roasting at 900 ° C to 1400 ° C in the washing part and the powder regeneration part of the present invention. In the case of containing C, heating is most contributing. In the case of SiC and the like, heating in the air is prohibited, and heating in an inert gas and cleaning in the washing section are important.

Regarding the abrasive properties of the recycled inorganic abrasive described above, it is explained in detail by comparing the recycled inorganic abrasive with an unused (prior to use) inorganic abrasive and slurry-containing inorganic abrasive waste-containing particles.

FIG. 3A is a particle size distribution diagram of the inorganic abrasive powder before use in Embodiment 1 of the present invention, FIG. 3B is a particle size distribution diagram of slurry-like inorganic abrasive waste liquid-containing particles in Embodiment 1 of the present invention, and FIG. 3C is an embodiment of the present invention. 4A is a particle size distribution view of the regenerated inorganic abrasive polishing agent of Embodiment 1 of the present invention, and FIG. 4A is a microscopic observation photograph of the inorganic polishing agent before use of Embodiment 1 of the present invention, and FIG. 4B is a slurry of Embodiment 1 of the present invention. Fig. 4C is a microscopic observation picture of the regenerated inorganic polishing agent in Embodiment 1 of the present invention.

As the measurement sample, an inorganic abrasive composed of a mixture of the above-described molten Al ₂ O ₃ component and ZrSiO ₄ component is selected, and the unused (pre-use) abrasive sample, regenerated abrasive sample and slurry-type inorganic abrasive waste solution are contained. Component analysis was performed by comparing samples of the particles. The analyzer used a fluorescence X-ray analyzer (X-RAY SECROMETOR 3270 manufactured by Rigaku Corporation). Each sample was fitted to an exclusive die using an alumina ring having a diameter of 30 mm, press-molded at a pressure of 20 tons with a press, and the fluorescent X-ray spectrum was measured. Table 1 shows the estimated quantitative analysis results by the FP method of the main detection components based on the obtained fluorescence X-ray spectrum. Content is shown in conversion of simple oxide.

According to Table 1, the components of the unused (before use) inorganic and regenerated abrasives are no different from those of each component, but there is a slight component difference of less than 1%, which is within the range of the component error of the original unused inorganic abrasive. It is a degree to be included. The inorganic abrasive thus recovered has a purity almost equal to that of an unused inorganic abrasive. On the other hand, it is understood that other impurities such as Fe ₂ O ₃ , SiO _2, and the like are increased in the particle component of the slurry-like inorganic polishing liquid, and A1 ₂ O ₃ and ZrO ₂ are relatively decreased. In view of these results, the regeneration treatment apparatus of the present invention is invisible to the above-mentioned impurities, moreover, in the inorganic polishing liquid with the cleaning of the deteriorated material by the cleaning part (C) and the drying roasting by the powder regeneration part (E). However, it can be seen that it completely removes even the bacteria and the like, restoring the quality of the regenerated inorganic abrasive to an unused quality level.

Next, as shown in Figs. 3A, 3B and 3C, the particle size distribution was measured to compare the characteristics. The measuring instrument is a Shimadzu laser diffraction particle size distribution analyzer (SALD-2000). The particle size distributions of the unused (prior to used) inorganic abrasives and the regenerated inorganic abrasives are usually about 12 탆 wide and have a nearly identical distribution showing a peak around 10 탆. There is no distribution peak in this range. This shows that either is comprised by the substantially uniform particle of the magnitude | size about 10 micrometers. On the other hand, although the particle size distribution of the slurry-type inorganic abrasive waste liquid shows a slightly low peak centering on 10 micrometers, it has also shown that it has a very extensive distribution to 6 micrometers or less and 1 micrometer, and contains many microparticles | fine-particles. . Furthermore, it can also be seen that relatively large particles in the range of 30 µm to 50 µm are also included. This is considered to be because the inorganic polishing liquid after polishing contains various particles in addition to the abrasive grains. The regenerating treatment apparatus of the present invention completely removes these debris and other particles of the two-diameter particles mixed as a result of polishing, and regenerates the regenerated abrasive agent to a distribution state of particles equivalent to an unused inorganic abrasive agent. .

Furthermore, particle-like microscopic observation was performed as shown in Figs. 4A, B and C. The measuring instrument is EPMA1600 (magnification x 1000 times) manufactured by Shimadzu Corporation. The particle shape of the unused (prior to use) inorganic abrasive and the regenerated inorganic abrasive is both the aggregated mass, and the ridgeline has the shape of the edge. Moreover, it can be confirmed that very small pointed adherends (adhesives) adhere to the surfaces of some particles in these agglomerates. For both, almost no difference is observed between the particle shape and the amount of deposits on the surface. On the other hand, it turns out that the particle | grains of a slurry-like inorganic abrasive waste liquid contain many small particles which do not contribute to grinding | polishing. Moreover, as a whole, the shape of each particle is round and it does not have the ridgeline used as an edge. This is considered to be because a large amount of deposits cover the surface of each particle. Since the presence of the edge is closely related to the polishing characteristics, this rounded shape, in other words, the surface-covered deposit is a cause of deterioration in polishing performance. The regeneration treatment apparatus of the present invention almost completely removes the deterioration material that causes this deposit in the washing portion (C) and dry roasts it in the powder regenerating portion (E). It can be regenerated and restored to the same place as the inorganic abrasive.

Finally, Table 2 is a comparison table of the polishing properties of the unused (before use) inorganic abrasive and the regenerated inorganic abrasive. Polishing characteristics were measured for polishing rate, surface roughness (Ra), and scratches (defective water / treated water).

In the test method, the abrasive was suspended in water and rubbing oil, and the polishing object was polished using a lap board to measure the polishing properties.

The polishing rate in the polishing characteristics is 3 inches by using 20 sheets of silicon wafers as the to-be-polished material and using a machine made from a fugitive sandals as a rubbing machine. Was measured by grinding at a weight of 100 g / cm 2, a rotational speed of 70 rpm, and an injection amount of 120 ml / min for the polishing slurry. The composition of this polishing slurry is 450 ml of rubbing oil and 2250 ml of water with respect to 600 g of an abrasive. Surface roughness (Ra) measured the silicon wafer polished in this way by the roughening (made by Tokyo Precision Co., Ltd.) after grinding | polishing. Furthermore, the scratch was examined by observing this polished silicon wafer with a 40 times optical microscope.

According to Table 2, it can be seen that there is no difference in polishing characteristics between the unused (before use) inorganic abrasive and the regenerated inorganic abrasive. As described above, according to the regeneration treatment apparatus of the present invention, it can be seen that the regenerated inorganic polishing agent has a stable abrasive property which is almost the same as that of the inorganic abrasive before use (unused) with high purity.

In addition, the crystal form of the inorganic abrasive powder when roasted at 1300 degreeC-1400 degreeC in the roasting furnace was measured by X-ray diffraction. The measuring instrument is a X-ray diffractometer XD-1 manufactured by Shimadzu Corporation. Measurement conditions are X-ray tube, target Cu, tube current 15 mA, tube voltage 35 kW, and slit. Slit 1 (deg), air scattering prevention Slit 1 (deg), detection slits 0.30 (mm). In the X-ray peak pattern, the peaks of alumina and zircon of corundum crystals were clearly precipitated in the X-ray peak pattern, and the A1 ₂ O ₃ component phase and ZrSiO ₄ component phase were observed as before. It was confirmed that the two-phase crystalline form.

1 is a block diagram of an apparatus for regenerating an inorganic abrasive waste liquid in Embodiment 1 of the present invention.

Fig. 2A is a first enlarged view of the cleaning part in Embodiment 1 of the present invention.

Fig. 2B is a second enlarged view of the cleaning portion in the first embodiment of the present invention.

FIG. 3A is a particle size distribution diagram of the inorganic abrasive before use in Embodiment 1 of the present invention. FIG.

3B is a particle size distribution diagram of slurry-like inorganic abrasive waste liquid-containing particles in Embodiment 1 of the present invention.

FIG. 3C is a particle size distribution diagram of a regenerated inorganic abrasive polish in accordance with Embodiment 1 of the present invention. FIG.

4A is a photomicrograph of an inorganic abrasive before use in Embodiment 1 of the present invention.

4B is a photomicrograph of the slurry-like inorganic abrasive waste liquid-containing particles in Embodiment 1 of the present invention.

4C is a photomicrograph of a regenerated inorganic abrasive polish in accordance with Embodiment 1 of the present invention.

(Explanation of the sign)

A Stock solution tank

B classifier

C cleaning part

D classification

E powder regeneration unit

F control unit

1 Raw material tank

2 a, 2 b, 2 c, 2 d, 2 e Stirrer

3 a, 3 b, 3 c, 3 d level probe

4 air pinch valve

5,11,17 concentration adjustment tank

6,12,18 Air Road Pump

7 vibrating yarn

8 Steel Classification Tank

9,15 classification pump

10,16 Wet Classifier

13 Cleaning Tank

14,25,26 Electric Valve

19 a spray dryer

19 b By roasting

20 control panel

21 nebulizer

22 Temperature controller

23 Buffer tank

24 filtration equipment

27 heater

28 Temperature regulating pressure device

cO cleaning device

.

As described above, the regeneration treatment apparatus for the inorganic abrasive waste liquid of the present invention removes foreign matters from the concentrated waste liquid by providing a removal classification unit, and performs first wet classification of the abrasive waste liquid. The stable waste liquid can be sent to the washing unit.

In addition, by providing the cleaning part, it is possible to regenerate the abrasive of stable quality by removing wastewater components, oil components, adhesion coagulants, bacteria, and the like, which are deteriorated substances affecting the regeneration polishing property, from the slurry waste liquid.

In addition, since a wet classifier is used for the classification unit, the particles in the waste liquid can be classified into fine particles, medieval particles and coarse particles, and particles having different specific gravity can be separated.

In addition, the provision of the powder regeneration unit completely removes the moisture of the hydrous slurry solids of the abrasive, and furthermore, the abrasive can be completely returned to its original crystalline form to become a powdery inorganic abrasive.

In addition, by providing the control unit, the playback processing apparatus can be automatically stabilized and controlled to perform continuous work.

In addition, the regenerated inorganic abrasive has a stable abrasive property, which is almost unchanged from the abrasive before use (highly unused) with high purity, and furthermore, the separated solution does not contain impurities with high purity and has purity that can be reused as it is. In addition, it is possible to make effective use of the inorganic abrasive waste liquid which is disposed of after use, contributing to environmental conservation.

Claims (11)

An apparatus for regenerating inorganic abrasive waste liquid which recovers powdered inorganic abrasive powder from an inorganic abrasive waste liquid in a slurry phase after use thereof, A raw liquid storage tank unit for storing used inorganic abrasive waste liquid and adjusting the concentration to a predetermined concentration; A removal classification unit for removing the foreign matter from the slurry waste liquid supplied from the electric stock solution tank and wet classifying the waste liquid after the removal of the electric foreign matter; A cleaning unit for adding the cleaning liquid to the slurry waste liquid supplied from the electric removal and sorting unit to clean the deteriorated material which affects the regrind property of the abrasive from the waste liquid; A classification section for wet-classifying the slurry waste liquid sent from the electric cleaning unit and separating the slurry into a solid slurry and a solid solution; And a powder regeneration unit for drying or roasting the hydrous slurry solids separated in the electric classification unit to pulverize the inorganic abrasive waste liquid. The regeneration treatment apparatus for an inorganic abrasive waste liquid according to claim 1, wherein the electric cleaning liquid is hot water or hot water or an alcohol solvent in a temperature range of 10 ° C to 130 ° C. The inorganic abrasive waste liquid according to claim 1 or 2, wherein the electric stock solution tank comprises a raw material tank and a concentration adjusting tank, and manages the solid concentration of the inorganic abrasive waste liquid using an agitator, a level detector, and an air pinch valve. Regeneration processing unit. 3. The electric removal classification unit according to claim 1 or 2, wherein the electric removal classification unit includes a steelmaking machine for removing iron powder, a sieve for removing other foreign matters, and a wet classifier to remove foreign matters from the inorganic abrasive waste liquid. And the first wet classification is performed. The regeneration treatment apparatus for an inorganic abrasive waste liquid according to claim 1 or 2, wherein the electric cleaning unit includes a cleaning tank and a cleaning mechanism for cleaning the deterioration material that affects the regeneration abrasive property of the abrasive. 6. The regeneration treatment apparatus for inorganic abrasive waste liquid according to claim 5, wherein the electric cleaning device is equipped with an atomizer provided in the electric cleaning tank, and sprayed and cleaned by applying a back pressure of at least vapor pressure to the electric cleaning liquid. 6. The regeneration treatment apparatus for inorganic abrasive waste liquid according to claim 5, wherein the electric cleaning mechanism has a heating device provided in the electric cleaning tank, and heats and washes the waste liquid and the washing liquid. The inorganic abrasive according to claim 1 or 2, wherein the electric classifying unit is equipped with a wet classifier for the secondary wet classifying, and the particles in the solution are separated into a plurality of grades by the difference in the diameter or specific gravity of the particles. Waste liquid regeneration treatment device. The regeneration treatment apparatus for inorganic abrasive waste liquid according to claim 1 or 2, wherein the electric powder regeneration unit dried or roasted the hydrous slurry solid in the range of 80 ° C to 1400 ° C. 10. The regeneration treatment apparatus for inorganic abrasive waste liquid according to claim 9, wherein when the cast iron polishing plate is used, the electric powder regeneration unit dried or roasted the hydrous slurry solids in the range of 900 ° C to 1400 ° C. The inorganic abrasive waste liquid according to claim 1 or 2, wherein a control unit for controlling the electric stock solution tank, the electric removal classifier, the electric cleaning unit, the electric classification unit, and the electric powder regeneration unit in accordance with a predetermined control operation is provided. Regeneration processing unit.