KR100316805B1 - 핸들러의 얼라이너 상승장치 - Google Patents
핸들러의 얼라이너 상승장치 Download PDFInfo
- Publication number
- KR100316805B1 KR100316805B1 KR1019990017985A KR19990017985A KR100316805B1 KR 100316805 B1 KR100316805 B1 KR 100316805B1 KR 1019990017985 A KR1019990017985 A KR 1019990017985A KR 19990017985 A KR19990017985 A KR 19990017985A KR 100316805 B1 KR100316805 B1 KR 100316805B1
- Authority
- KR
- South Korea
- Prior art keywords
- aligner
- block
- plate
- fixing
- upper portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (2)
- 베이스 플레이트와;상기 베이스 플레이트의 상부면에 설치되는 하부 고정 블록과;상기 하부 고정 블록의 양측부에 세워져서 설치되는 LM 가이드를 구비한 서포트 플레이트와;상기 서포트 플레이트와 상기 하부 고정 블록 양측 사이에 각각 설치되는 측면 고정 플레이트와;상기 측면 고정 플레이트의 상하부 사이에 고정수단에 의해 고정되는 가이드 핀에 끼움 설치되는 스프링과;상기 측면 고정 플레이트의 상부에 고정되는 하부 얼라이너 블록과;상기 하부 얼라이너 블록의 상부에 얹혀지고 양측부가 조정핀에 의해 결합되는 얼라이너와;상기 얼라이너의 상부에 고정되고 다수의 위치 고정핀을 구비한 상부 얼라이너 플레이트와;상기 얼라이너의 하부에 설치되고 상기 얼라이너와 하부 얼라이너 블록에 서로 연통하여 설치된 디바이스를 잡아주기 위한 다수의 흡착수단과;상기 얼라이너를 상승시키기 위한 상승 구동 수단으로 구성되는 것을 특징으로 하는 핸들러의 얼라이너 상승장치.
- 제 1항에 있어서, 상기 상승 구동 수단은 상기 베이스 플레이트의 상부에 수직하게 설치되는 구동모터와;상기 구동모터에 구비된 샤프트의 하단부에 설치된 제 1풀리와;상기 구동모터와 대응하도록 그 일측에 설치되고 볼 스크류 너트에 의해 회전되도록 설치된 볼 스크류와;상기 볼 스크류의 하단부에 설치된 제 2풀리와;상기 구동모터에 결합되어 회전하는 1풀리에 일측이 끼움 결합되고 상기 제 2풀리에 타측이 끼움 결합되어 상기 볼 스크류를 회전시키도록 설치된 벨트로 구성되는 것을 특징으로 핸들러의 얼라이너 상승장치.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990017985A KR100316805B1 (ko) | 1999-05-19 | 1999-05-19 | 핸들러의 얼라이너 상승장치 |
JP2000100905A JP3238922B2 (ja) | 1999-04-01 | 2000-04-03 | ハンドラーのアライナ上昇装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990017985A KR100316805B1 (ko) | 1999-05-19 | 1999-05-19 | 핸들러의 얼라이너 상승장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000074215A KR20000074215A (ko) | 2000-12-15 |
KR100316805B1 true KR100316805B1 (ko) | 2001-12-12 |
Family
ID=19586434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990017985A Expired - Fee Related KR100316805B1 (ko) | 1999-04-01 | 1999-05-19 | 핸들러의 얼라이너 상승장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100316805B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100439309B1 (ko) * | 2002-01-29 | 2004-07-07 | 주식회사 넥사이언 | 와이어 본딩된 칩 테스트 장치 및 방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101703978B1 (ko) * | 2015-12-18 | 2017-02-07 | 허경삼 | 디에스에이 보드 교체용 핸들러 |
-
1999
- 1999-05-19 KR KR1019990017985A patent/KR100316805B1/ko not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100439309B1 (ko) * | 2002-01-29 | 2004-07-07 | 주식회사 넥사이언 | 와이어 본딩된 칩 테스트 장치 및 방법 |
Also Published As
Publication number | Publication date |
---|---|
KR20000074215A (ko) | 2000-12-15 |
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