KR100256818B1 - Method of forming device isolation film of semiconductor device - Google Patents
Method of forming device isolation film of semiconductor device Download PDFInfo
- Publication number
- KR100256818B1 KR100256818B1 KR1019970014437A KR19970014437A KR100256818B1 KR 100256818 B1 KR100256818 B1 KR 100256818B1 KR 1019970014437 A KR1019970014437 A KR 1019970014437A KR 19970014437 A KR19970014437 A KR 19970014437A KR 100256818 B1 KR100256818 B1 KR 100256818B1
- Authority
- KR
- South Korea
- Prior art keywords
- film
- insulating film
- trench
- forming
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 63
- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 238000002955 isolation Methods 0.000 title claims abstract description 20
- 238000009832 plasma treatment Methods 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 150000004767 nitrides Chemical class 0.000 claims abstract description 13
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims abstract description 5
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 3
- 238000005530 etching Methods 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 9
- 238000007254 oxidation reaction Methods 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 7
- 239000011248 coating agent Substances 0.000 abstract description 6
- 238000011109 contamination Methods 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 238000004140 cleaning Methods 0.000 abstract description 4
- 238000011065 in-situ storage Methods 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract description 2
- 238000001039 wet etching Methods 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
Abstract
본 발명은 반도체소자의 소자분리막 형성방법에 관한 것으로, 반도체기판 상부에 제1절연막을 열산화공정으로 형성하고, 전체표면 상부에 질화막을 화학기상증착 방법으로 형성한 다음, 트렌치를 형성하고, 제1차 산화공정으로 열산화막을 성장한 후 습식식각방법으로 상기 열산화막을 제거한 다음, 제2차 산화공정으로 상기 트렌치 표면에 열산화막을 성장시킨 후, PECVD 장비에서 챔버(chamber)의 내벽을 산화막이나 질화막으로 프리-코팅(pre-coating)하여 인-시튜 클리닝(in-situ cleaning)없이 바로 플라즈마처리함으로써 금속오염을 방지하고, 상기 트렌치를 매립하는 오존 테오스 유.에스.지.(O3-TEOS USG : O3- TetraEthylOrthoSilicate UndopedSilicateGlass, 이하에서 O3-TEOS USG라 함)막을 증착한 후, 화학기계연마(chemical mechanical polishing, 이하 CMP라 함)공정으로 평탄화된 트렌치형 소자분리막을 형성하여 후속 공정을 용이하게 함으로써 반도체소자의 수율을 향상시키고 그에 따른 고집적화를 가능하게 하는 기술이다.The present invention relates to a method of forming a device isolation film of a semiconductor device, wherein a first insulating film is formed on a semiconductor substrate by a thermal oxidation process, a nitride film is formed on the entire surface by a chemical vapor deposition method, and then a trench is formed. After the thermal oxide film is grown by the primary oxidation process, the thermal oxide film is removed by a wet etching method, and then the thermal oxide film is grown on the trench surface by the secondary oxidation process, and then the inner wall of the chamber is formed by the oxide film or the PECVD equipment. a nitride film pre-coating (pre-coating) with the - situ cleaning (in-situ cleaning) directly by the plasma treatment to prevent metal contamination, ozone Teos oil to fill the trench without S if (O 3. - TEOS USG: O 3 - a TetraEthylOrthoSilicate UndopedSilicateGlass, also O 3 -TEOS USG la below) were vapor-deposited film is planarized by chemical mechanical polishing (referred to as chemical mechanical polishing, hereinafter CMP) process agent To form a tooth isolation film by facilitating the subsequent process is to increase the yield of the semiconductor device and technique that enables high integration thereof.
Description
본 발명은 반도체소자의 소자분리막 형성방법에 관한 것으로, 특히 플라즈마 유도화학기상증착(Plasma Enhanced Chemical Vapor Deposition, 이하 PECVD라함) 장비를 이용하는 소자분리공정에 있어서, PECVD 챔버에 의한 웨이퍼의 오염을 방지하여 반도체소자의 수율 및 신뢰성을 향상시키는 기술에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a device isolation film of a semiconductor device, and in particular, in a device separation process using plasma enhanced chemical vapor deposition (PECVD) equipment, to prevent contamination of a wafer by a PECVD chamber. The present invention relates to a technique for improving yield and reliability of semiconductor devices.
일반적인 반도체소자의 소자분리막 형성방법을 설명하면 다음과 같다.A method of forming a device isolation film of a general semiconductor device is as follows.
먼저, 반도체기판 상부에 열산화공정으로 제1절연막인 패드산화막을 100∼200Å의 두께로 형성하고, 전체표면 상부에 화학기상증착방법(Chemical Vapor Deposition, 이하 CVD라 함)으로 제2절연막인 질화막을 1500∼2500Å의 두께로 증착한다.First, a pad oxide film, which is a first insulating film, is formed on the semiconductor substrate by a thermal oxidation process to a thickness of 100 to 200Å, and a nitride film, which is a second insulating film, is deposited on the entire surface by chemical vapor deposition (CVD). Is deposited to a thickness of 1500-2500 mm 3.
그 다음에, 소자분리마스크를 이용한 식각공정으로 상기 제2절연막과 제1절연막 그리고 일정두께의 반도체기판을 식각하여 트렌치를 형성한다.Next, a trench is formed by etching the second insulating film, the first insulating film, and a semiconductor substrate having a predetermined thickness by an etching process using an element isolation mask.
그리고, 상기 트렌치의 표면에 제3절연막을 형성하고, 전체표면 상부를 질소와 암모니아 가스 분위기에서 플라즈마처리하는 공정을 실시한 다음, 전체표면 상부에 O3-TEOS USG막을 형성하여 평탄화를 시킨다.A third insulating film is formed on the surface of the trench, and a plasma treatment is performed on the entire surface of the trench in nitrogen and ammonia gas. Then, an O 3 -TEOS USG film is formed on the entire surface to be planarized.
이때, 상기 트렌치 표면은 상기 플라즈마처리공정시 반응챔버의 내벽에 포함된 금속물질로 인하여 오염될 수 있다.In this case, the trench surface may be contaminated due to the metal material included in the inner wall of the reaction chamber during the plasma treatment process.
상기한 바와 같이, 종래기술에 따른 반도체소자의 소자분리막 형성방법은, 플라즈마처리공정시 챔버에 의한 반도체기판 표면에 금속오염이유발되어 소자의 특성을 열화시키고 그로인한 반도체소자의 특성 및 신뢰성을 저하시키는 문제점이 있다.As described above, in the method of forming a device isolation film of a semiconductor device according to the prior art, metal contamination is induced on the surface of a semiconductor substrate by a chamber during a plasma processing process, thereby deteriorating device characteristics and deteriorating characteristics and reliability of the device. There is a problem.
본 발명은 상기한 종래기술의 문제점을 해결하기 위하여, PECVD 챔버에서 플라즈마처리를 실시하기 전에 챔버 내벽을 산화막이나 질화막으로 코팅을 실시하고, 인-시튜 클리닝없이 플라즈마처리하여 챔버 내벽으로 인한 금속오염의 발생을 최소화하며, 상기 플라즈마처리공정을 실시함으로써 O3-TEOS USG의 증착속도를 조절하여 자체 평탄화 특성을 향상시키고 후속공정을 용이하게 실시할 수 있는 반도체소자의 소자분리막 형성방법을 제공하는데 그 목적이 있다.In order to solve the above problems of the prior art, before the plasma treatment in the PECVD chamber, the chamber inner wall is coated with an oxide film or a nitride film, and plasma treatment is performed without in-situ cleaning to remove metal contamination caused by the inner wall of the chamber. The present invention provides a method of forming a device isolation film of a semiconductor device which can minimize the occurrence and improve the self-planarization characteristics by controlling the deposition rate of O 3 -TEOS USG by performing the plasma treatment process and easily perform the subsequent process. There is this.
제1a도 내지 제1e 도는 본 발명의 실시예에 따른 반도체소자의 소자분리막 형성방법을 도시한 단면도.1A to 1E are cross-sectional views illustrating a method of forming an isolation layer in a semiconductor device according to an embodiment of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
11 : 반도체 기판 13 : 제1절연막11: semiconductor substrate 13: first insulating film
15 : 제2절연막 16 : 트렌치15: second insulating film 16: trench
17 : 제4절연막 19 : O3-TEOS USG막17: fourth insulating film 19: O 3 -TEOS USG film
이상의 목적을 달성하기 위한 본 발명에 따른 반도체소자의 소자분리막 형성방법은,Device isolation film forming method of a semiconductor device according to the present invention for achieving the above object,
반도체기판 상부에 제1절연막을 형성하는 공정과,Forming a first insulating film on the semiconductor substrate;
상기 제1절연막 상부에 제2절연막을 형성하는 공정과,Forming a second insulating film on the first insulating film;
상기 제2절연막과 제1절연막 그리고 일정두께의 반도체기판을 식각하여 트렌치를 형성하는 공정과,Forming a trench by etching the second insulating film, the first insulating film, and a semiconductor substrate having a predetermined thickness;
상기 트렌치 표면에 제3절연막을 형성하는 공정과,Forming a third insulating film on the trench surface;
상기 제3절연막을 제거하는 공정과,Removing the third insulating film;
상기 트렌치 표면에 제4절연막을 형성하는 공정과,Forming a fourth insulating film on the trench surface;
상기 반도체기판이 내재된 챔버 내벽에 제5절연막을 형성하는 공정과,Forming a fifth insulating film on an inner wall of the chamber in which the semiconductor substrate is embedded;
상기 제4절연막을 N2/NH3플라즈마처리하는 공정과,Performing a N 2 / NH 3 plasma treatment on the fourth insulating film;
상기 트렌치를 O3-TEOS USG로 매립하는 공정을 포함하는 것을 특징으로 한다.And filling the trench with O 3 -TEOS USG.
한편, 이상의 목적을 달성하기위한 본 발명의 원리는, 얕은(shallow)트렌치소자분리공정을 실시하는데 있어서, 플라즈마 처리공정을 실시하기 전에 반응챔버인 PECVD 챔버의 내벽을 산화막이나 질화막으로 프리-코팅하여 금속오염의 가능성을 최소화하고, 플라즈마 처리공정을 실시한후 트렌치에 O3-TEOS USG를 증착함으로써 산화막 상부는 O3-TEOS USG를 빠르게 증착시키고 질화막 상부는 O3-TEO USG을 증착이 느리게 하여 자체 평탄화 특성을 향상시키며, 후속 공정인 CMP 공정의 공정시간을 감소시켜 공정 균일도 및 생산성을 향상시키는 것이다.On the other hand, the principle of the present invention for achieving the above object is, in performing a shallow trench isolation process, by pre-coating the inner wall of the PECVD chamber which is a reaction chamber with an oxide film or a nitride film before performing the plasma treatment process After minimizing the possibility of metal contamination and performing the plasma treatment process, O 3 -TEOS USG is deposited on the trench to rapidly deposit O 3 -TEOS USG on the oxide layer and O3-TEO USG on the nitride layer to slow down the deposition. It improves the characteristics and improves the process uniformity and productivity by reducing the process time of the subsequent CMP process.
이하, 첨부된 도면을 참고로 하여 본 발명을 상세히 설명하기로 한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
제1a도 내지 제1e도는 본 발명의 실시예에 따른 반도체소자의 소자분리막 형성공정을 도시한 단면도이다.1A to 1E are cross-sectional views illustrating a process of forming an isolation layer in a semiconductor device according to an embodiment of the present invention.
제1a도를 참조하면, 반도체기판(11) 상부에 제1절연막(13)인 패드산화막을 형성한다. 이때, 상기 패드산화막(13)은 열산화공정으로 형성하되, 50 내지 200Å 정도의 두께로 형성한다.Referring to FIG. 1A, a pad oxide film, which is the first
그리고, 상기 제1절연막(13) 상부에 제2절연막(15)인 질화막을 일정두께로 형성한다. 이때, 상기 질화막(15)은 화학기상증착방법으로 1500 내지 2500Å 정도의 두께로 형성한다.A nitride film, which is the second
그 다음에, 소자분리마스크(도시안됨)를 이용한 식각공정으로 상기 반도체기판(11)의 셀부와 주변회로부에 트렌치(16)를 형성한다.Next, a
제1b도를 참조하면, 상기 트렌치(16)표면에 제3절연막인 제1열산화막(도시안됨)을 형성하는 제1차 산화공정을 실시한다. 이때, 상기 제1열산화막은 100 내지 200Å정도의 두께로 형성한다.Referring to FIG. 1B, a first oxidation process is performed to form a first thermal oxide film (not shown), which is a third insulating film, on the surface of the
그리고, 상기 제1열산화막을 습식식각으로 제거한다.Then, the first thermal oxide film is removed by wet etching.
이때, 제1차 산화공정과 제1열산화막의 제거공정은 상기 트렌치(16)형성공정시 발생된 트렌치(16) 표면의 결함을 제거한다.In this case, the first oxidation process and the first thermal oxide film removal process remove defects on the surface of the
제1c도를 참조하면, 제2차 산화공정으로 트렌치(16) 표면에 제4절연막(17)인 제2열산화막을 100내지 200Å 정도의 두께로 형성한다.Referring to FIG. 1C, a second thermal oxide film, which is the fourth
제1d도를 참조하면, 제2차 열산화공정 후 챔버의 내벽에 절연막(도시되지 않음)인 산화막, 질화막 또는 산질화막 재질로 5 내지 10㎛의 두께로 프리-코팅한다.Referring to FIG. 1D, after the second thermal oxidation process, the inner wall of the chamber is pre-coated to an thickness of 5 to 10 μm of an oxide film, a nitride film, or an oxynitride film as an insulating film (not shown).
이때, 상기 프리-코팅공정은, PECVD에서 한종류의 증착재료가 진행되고 후속 공정으로 다른 증착재료가 진행될 때 인-시튜 클리닝공정없이 진행할 수 있다.In this case, the pre-coating process may be performed without an in-situ cleaning process when one kind of deposition material proceeds in PECVD and another deposition material proceeds in a subsequent process.
그 다음에, 절연막이 내벽에 프리코팅된 챔버(도시안됨)에서 웨이퍼(도시안됨)의 표면을 플라즈마 처리함으로써 O3-TEOS USG의 하지의존성을 감소시킨다.Subsequently, the underlying dependence of the O 3 -TEOS USG is reduced by plasma treating the surface of the wafer (not shown) in a chamber (not shown) with an insulating film precoated on the inner wall.
이때, 상기 플라즈마 처리공정은 O3-TEOS USG를 증착할 때의 조건 보다 약한 조건인 N2/NH3= 1∼3/2∼10 LSM의 유량, HF/LF=0.1∼1.0/0.1∼0.3kW의 전력, 300∼400℃의 온도 및 1.0∼2.0Torr의 압력을 갖는 조건으로 10∼50초의 시간동안 실시한다.At this time, the plasma treatment step is N 2 / NH 3 = 1 to 3/2 to 10 LSM, HF / LF = 0.1 to 1.0 / 0.1 to 0.3 which is weaker than the conditions when depositing O 3 -TEOS USG It is carried out for a time of 10 to 50 seconds under conditions having a power of kW, a temperature of 300 to 400 DEG C and a pressure of 1.0 to 2.0 Torr.
여기서, 본 발명자의 실험 결과에 따르면 상기 프리-코팅을 실시하고 플라즈마 처리공정을 실시할 때 트렌치(16) 표면에 존재하는 금속오염물질의 양은, 프리-코팅을 하지 않은 경우의 1/10정도로 감소된다.Here, according to the experimental results of the present inventors, the amount of metal contaminants present on the surface of the
그리고, 상기 플라즈마 처리공정에 의해 상기 트렌치(16)를 메우는 O3-TEOS USG막을 증착할 때 열산화막에서는 증착이 빠르고 질화막위에서는 증착이 느리게 되어 자체 평탄화 특성을 우수하게 함으로써 후속 CMP 공정의 공정시간을 최소화하여 평탄화된 트렌치 소자분리공정을 용이하게 한다.In addition, when the O 3 -TEOS USG film filling the
제1e도를 참조하면, 상기 플라즈마 처리공정 후 O3-TEOS USG(19)를 전면에 증착하여 상기 트렌치(16)를 O3TEOS USG(19)로 매립한다.Referring to FIG. 1E, after the plasma treatment process, the O 3 -TEOS
이때, 상기 O3TEOS USG(19)의 증착 공정은, 80∼120SLM정도의 질소가스의 유량, 100∼140g/㎥ 정도의 오존농도에서 5000∼7000Å 정도의 두께로 형성한다.At this time, the deposition process of the O 3 TEOS
그후, 도시되지는 않았으나 후속 열처리 및 CMP공정을 실시하여 얕은 트렌치 소자분리(shallow trench isolation)공정을 완료한다.Subsequently, although not shown, subsequent heat treatment and a CMP process are performed to complete the shallow trench isolation process.
이상에서 설명한 바와 같이 본 발명에 따른 반도체소자의 소자분리막 형성방법은, 챔버내벽을 산화막이나 질화막으로 프리-코팅함으로써 플라즈마처리공정으로 인한 금속오염을 최소화하고, O3TEOS USG의 자체 평탄화 특성을 향상시켜 CMP공정의 공정시간을 감소시키며, 후속공정을 용이하게 하여 반도체소자의 특성, 수율 및 생산성을 향상시키고 그에 따른 반도체소자의 고집적화를 가능하게 하는 잇점이 있다.As described above, the method of forming a device isolation film of a semiconductor device according to the present invention minimizes metal contamination caused by a plasma treatment process by pre-coating a chamber inner wall with an oxide film or a nitride film, and improves the self-planarization characteristics of O 3 TEOS USG. By reducing the process time of the CMP process, and facilitates the subsequent process to improve the characteristics, yield, and productivity of the semiconductor device, and thereby the high integration of the semiconductor device is possible.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970014437A KR100256818B1 (en) | 1997-04-18 | 1997-04-18 | Method of forming device isolation film of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970014437A KR100256818B1 (en) | 1997-04-18 | 1997-04-18 | Method of forming device isolation film of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19980077341A KR19980077341A (en) | 1998-11-16 |
| KR100256818B1 true KR100256818B1 (en) | 2000-05-15 |
Family
ID=19503203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019970014437A Expired - Fee Related KR100256818B1 (en) | 1997-04-18 | 1997-04-18 | Method of forming device isolation film of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR100256818B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101422332B1 (en) * | 2011-04-04 | 2014-07-22 | 도쿄엘렉트론가부시키가이샤 | Supercritical drying method and apparatus for semiconductor substrates |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100315447B1 (en) * | 1999-03-25 | 2001-11-28 | 황인길 | Shallow trench manufacturing method for isolating semiconductor devices |
| KR100461330B1 (en) * | 2002-07-19 | 2004-12-14 | 주식회사 하이닉스반도체 | Method for forming Shallow Trench Isolation of semiconductor device |
| KR100842904B1 (en) * | 2005-09-30 | 2008-07-02 | 주식회사 하이닉스반도체 | Device Separating Method of Semiconductor Device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0750295A (en) * | 1993-08-05 | 1995-02-21 | Fujitsu Ltd | Method for manufacturing semiconductor device |
-
1997
- 1997-04-18 KR KR1019970014437A patent/KR100256818B1/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0750295A (en) * | 1993-08-05 | 1995-02-21 | Fujitsu Ltd | Method for manufacturing semiconductor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101422332B1 (en) * | 2011-04-04 | 2014-07-22 | 도쿄엘렉트론가부시키가이샤 | Supercritical drying method and apparatus for semiconductor substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| KR19980077341A (en) | 1998-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5665635A (en) | Method for forming field oxide film in semiconductor device | |
| JP4669679B2 (en) | Method for manufacturing silicon nitride film and method for manufacturing semiconductor device | |
| KR100372643B1 (en) | Method for manufacturing semiconductor device using damascene process | |
| US7645678B2 (en) | Process of manufacturing a shallow trench isolation and process of treating bottom surface of the shallow trench for avoiding bubble defects | |
| KR100365890B1 (en) | Method for forming a shallow trench isolation structure | |
| US7384486B2 (en) | Chamber cleaning method | |
| EP0909461B1 (en) | Method for simplifying the manufacture of an interlayer dielectric stack | |
| KR100256818B1 (en) | Method of forming device isolation film of semiconductor device | |
| KR20000004099A (en) | Method for forming an interlayer dielectric of semiconductor devices | |
| JP2000100926A (en) | Semiconductor device and manufacture thereof | |
| KR100248344B1 (en) | Method for manufacturing semiconductor device | |
| US20130095665A1 (en) | Systems and methods for processing substrates | |
| US20040224501A1 (en) | Manufacturing method for making tungsten-plug in an intergrated circuit device without volcano phenomena | |
| JPH11150179A (en) | Manufacture of trench isolation type semiconductor device | |
| KR100422959B1 (en) | Device isolation insulating film formation method of semiconductor device | |
| KR100620158B1 (en) | Contact formation method of semiconductor device | |
| KR100492790B1 (en) | Device isolation insulating film formation method of semiconductor device | |
| KR100713896B1 (en) | Insulation Formation Method | |
| US20240105499A1 (en) | Molecular layer deposition carbon masks for direct selective deposition of silicon-containing materials | |
| KR100437541B1 (en) | Method for forming isolation layer of semiconductor device using two-step gap filling processes | |
| CN100481373C (en) | Manufacturing method of semiconductor device | |
| US6605517B1 (en) | Method for minimizing nitride residue on a silicon wafer | |
| KR100455366B1 (en) | How to remove residues in semiconductor device manufacturing | |
| KR100562316B1 (en) | Method for manufacturing a metal dielectric film of a semiconductor device | |
| KR20030048547A (en) | Method of manufacturing a semiconductor device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19970418 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19970829 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19970418 Comment text: Patent Application |
|
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19990831 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 19991130 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20000225 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20000226 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| PR1001 | Payment of annual fee |
Payment date: 20030120 Start annual number: 4 End annual number: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20040119 Start annual number: 5 End annual number: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 20050120 Start annual number: 6 End annual number: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20060118 Start annual number: 7 End annual number: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20061211 Start annual number: 8 End annual number: 8 |
|
| FPAY | Annual fee payment |
Payment date: 20080102 Year of fee payment: 9 |
|
| PR1001 | Payment of annual fee |
Payment date: 20080102 Start annual number: 9 End annual number: 9 |
|
| LAPS | Lapse due to unpaid annual fee | ||
| PC1903 | Unpaid annual fee |
Termination category: Default of registration fee Termination date: 20100109 |