KR100190478B1 - Hollow Body and Hollow Mount Valve - Google Patents

Abstract

Particularly accurate configuration of the outlet for supplying the first medium, for example fuel, and the passage for supplying the second medium, for example gas, thereby assuring the correct volume of both media and eliminating the need for post-adjustment. can do. A hollow body consisting of an upper plate having at least one jet port and a lower plate having a vent hole, and having at least one passage formed between the upper plate and the lower plate, wherein at least one of the upper plate 24 At least one passage 28 in which one outlet port 60 and the outlet port 66 of the lower platen 25 are polymerized and the at least one passage 28 communicates with the outer periphery of the upper and lower platelets 24 and 25 and the outlet port. It is.

Description

Hollow Body and Hollow Mount Valve

1 is a partial longitudinal cross-sectional view of an embodiment of a fuel injection valve constructed in accordance with the present invention.

2 is a cross-sectional view of the hollow body according to the first embodiment.

FIG. 3 is a plan view of the lower compact plate corresponding to the cross sectional view along the line III-III of FIG. 2;

4 is a plan view of the hollow body according to the first embodiment as seen in the direction of the arrow X in FIG.

FIG. 5 is a plan view of the bottom plate for the second embodiment corresponding to the hollow cross-sectional view shown in FIG.

6 is a sectional view of a hollow body according to a third embodiment;

FIG. 7 is a bottom view of the upper compact plate corresponding to the cross sectional view of FIG.

8 is a sectional view of a hollow body according to a fourth embodiment.

9 is a sectional view of a hollow body according to a fifth embodiment.

10 is a sectional view of a hollow body according to a sixth embodiment.

11 is a plan view of a bottom plate corresponding to a cross sectional view along line XI-XI of FIG. 10;

12 is a cross-sectional view of the hollow body according to the seventh embodiment along the line XII-XII in FIG.

FIG. 13 is a sectional view along line XIII-XIII of FIG. 12;

FIG. 14 is a bottom view of the upper plate, corresponding to a cross sectional view along line XIV-XIV in FIG. 13; FIG.

* Explanation of symbols for main parts of the drawings

1 valve vertical axis 2 nozzle body

5 flow passage 8 valve unit

9: valve opening and closing part 10: valve cutting section

11: guide part 13: upper guide ring

14: lower guide ring 16: rotating magnetic field

17: mover 18: electronic coil

19: cylindrical passage portion 20: flow port

22: hollow body 24: upper small plate

25: lower plate 26: bottom surface

27: top surface 28, 28 ': passage

29: ejection end 30: recess

33: supply groove 34: cross section

36: supply bush 40: bottom

42: abutting end 43: abutting surface

44: mixture sphere 45: mixer outlet

47: first annular groove 48: sealing ring

50: second annular groove 51: third annular groove

60: cutting pyramidal spout 61: outer surface

62, 63: axis of symmetry 64: recess

65, 65; : Inflow chamber 66: Aeration port

67: square bottom 69, 69 ': lower through groove

73: square bottom 80: top side

81: side 82, 82 ': upper pass groove

84,84 ': recess 85: square bottom

88: first symmetry line 89: second symmetry line

90: square bottom 90 ': tapered bottom

91: corner

The present invention comprises an upper compact plate having at least one ejection port as described in claim 1 and a lower compact plate having a vent hole, and forming at least one passage between the sugar compact plate and the lower compact plate. A fuel-gas mixer is supplied to a valve, particularly an internal combustion engine, equipped with a hollow body and a valve closing portion cooperating with the valve seat surface according to claim 15, and a hollow body disposed downstream of the valve seat surface. It relates to a fuel injection valve for.

It is known on the basis of the specification of German Patent Application Publication No. 3240554 that a fuel injection valve for injecting a fuel-gas mixer has a metal sheet gas guide sleeve at its downstream end. The outlet of the fuel injection valve is surrounded by a gas annular cap in communication with the gas annular passage in the immediately adjacent portion of the gas guide sleeve. In order to fit the gas annular cap to control the gas quantity to the requirements of the internal combustion engine, in addition to the unavoidable manufacturing error of the gas annular cap, the gas quantity is measured at each fuel injection valve and then the gas guide sleeve is bent or shifted accordingly. That is, it needs to be adjusted. In order to achieve this adjustment operation, a high labor discharge amount and a necessary cost are required, so that the known fuel injection amount is expensive despite mass production.

A fuel injection valve using a hollow body consisting of two silicon platelets is known based on the specification of European Patent Application Publication No. 0354659. In this case, the outlet of the small plate and the vent of the lower plate are staggered with each other, but the upper and lower small plates are merely for preparing or forcing the fuel, and are used for adjusting the gas surrounding the fuel. It doesn't happen.

The object of the present invention is to configure the first medium, for example, a jet for supplying fuel, and a passage for supplying a second medium, for example, a gas, so as to precisely ensure the correct volume of both media, In addition, there is no need for post-adjustment.

The constituent means of the hollow body according to the present invention for solving the above problems is that the at least one jet port of the small plate and the through hole of the lower plate is polymerized, the at least one passage is the outer periphery of the small plate up and down and It is in point to communicate with outlet.

This configuration of the hollow body results in a simple manner of precise and homogeneous mixing of both media or extremely small droplets of liquid in an extremely narrow space.

In addition, the constituent means of the hollow body mounting valve according to the present invention consists of an upper compact plate having a hollow body facing the valve seat surface and having at least one outlet port, and a lower compact plate which is in contact with the upper compact plate and has a flow port. In addition, the upper small plate and the lower small plate form at least one passage, and the gas is supplied through the passage and is oriented toward the fuel discharged through the at least one jet port.

On the basis of the precise configuration of the hollow body mounting valve passage, the amount of fuel and the amount of gas to be surrounded by the fuel can be controlled in an extremely narrow space, and the amount of gas to be adjusted again in the assembled fuel injection valve. This is not necessary.

In this way, by combining the fuel tank operation and the gas tank operation in an extremely narrow space, extremely excellent fuel preparation is obtained. By the proper position of the passage in the hollow body, it is possible to orient the gas as a single target against one or more fuel classes.

The hollow body of this invention can be improved further by the means of Claim 2 or less, and the hollow body mounting valve of this invention can be improved further by the means of Claim 16 or less.

Since the fuel and the gas oriented to the fuel are particularly precisely tuned, the upper and lower compact plates are composed of monocrystalline silicon, and the ejection openings, through holes, through grooves and recesses of the upper and lower compact plates are It is advantageous to be molded by addition anisotropic etching. The upper and lower small plates can thus be manufactured in a simple manner, and also have a remarkably high manufacturing precision.

It is advantageous to join the upper compact plate and the lower compact plate to each other by the bottom, thereby making a secure coupling between both small plates.

In order to construct the at least one passage simply and inexpensively, at least one lower through groove is formed in the upper surface of the lower plate facing the upper plate, and the lower pass groove faces the lower plate. It is particularly advantageous to form at least one passage in mating with the bottom face of the small plate. On the basis of the same reason, at least one upper through groove is formed in the lower surface of the upper compact plate facing the lower compact plate, and the upper through groove is paired with the upper surface of the lower compact plate facing the upper compact plate. It is particularly advantageous to form at least one passageway.

In order to supply gas to the passage, it is particularly preferable that the concave portion communicating the outer periphery of the upper and lower small plates and the passage extending from the side of the lower compact plate and / or the upper compact plate extends in the direction of at least one outlet port or flow port. It is advantageous.

However, especially when a large amount of gas is supplied, and thus a large cross-sectional area of at least one passage is required, the lower face of the upper compact plate facing the lower compact plate faces the at least one upper passage groove and the lower compact face the upper compact plate. Advantageously, the top surface of the plate has at least one lower passage groove, and the at least one passage is formed by the at least one upper passage groove and the at least one lower passage groove.

In order to atomize the fuel well, it is advantageous for the centerline of the passageway to be located in a plane with the centerline of the at least one outlet.

In order to avoid the fuel flow into the passage, it is advantageous that at least one upper passage groove in the upper small plate is configured so as not to reach the spout, and the passage is inclined with respect to the valve longitudinal axis and opened in the passage. Do.

In order to supply gas to the hollow body, it is advantageous that the ejection end of the valve receives the hollow body and is surrounded by a supply bush, and at least one gas opening transverse opening is formed in the peripheral wall of the supply bush. Do.

Next, embodiments of the present invention will be described in detail with reference to the drawings.

1 shows in part a fuel injection valve according to an embodiment usable, for example, for the injector of a mixer compression spark plug type internal combustion engine. The nozzle body 2 made of a ferromagnetic material, for example of a fuel injection valve, has a flow passage 5 which is stepped concentrically with the valve longitudinal axis 1. At the downstream end of the valve needle, for example configured as a valve closure 9 tapering conically on the downstream side, the valve needle 8 is conical in the flow passage 5, for example in the flow direction. It cooperates with the valve surface 10 which makes a taper. The guide portion 11 of the flow passage 5, which is configured upstream of the valve seat surface 10, is for guiding the valve needle during directional movement of the valve seat 8, and the valve needle ( 8, the guide flange 13 and the lower guide flange 14 penetrate the guide portion 11 of the flow passage 5 at a slight radial distance.

The axial movement of the valve needle 8, and thus the valve development and closing action of the fuel injection valve, are carried out electronically, for example, as is known. As shown in FIG. 1, the valve needle 8 is engaged with the mover 17 at an end spaced from the valve seat surface 10, which moves the electromagnetic coil 18 of the fuel injection valve. And cooperate with the magnetic field 16.

The flow passage 5 is connected to the cylindrical through-flow section 19 following the conical valve seat surface 10 in a direction away from the electromagnetic coil 18 and ends at the flow port 20 of the nozzle body 2, for example. have. The hollow body 22 is arranged in direct connection with the flow port 20 in the downstream direction, and the hollow body is, for example, near the valve seat surface 10 and has a square upper plate 24 and a lower square. It is a small plate 25. The upper compact plate 24 has a lower surface 26 on the side away from the flow port 20 and contacts the upper surface 27 of the lower compact plate 25 on the side facing the upper compact plate 24. It is also combined with the lower plate. The upper compact plate 24 is also composed of, for example, single crystal silicon together with the lower compact plate 25, but it is also possible to select other suitable materials such as other single crystal semiconductors such as germanium or compound semiconductors such as gallium arsenide. The axial thicknesses of the upper compact plate 24 and the lower compact plate 25 are each 0.2 to 0.5 mm, particularly advantageously 0.3 mm.

At least one passage 28 is formed between the upper compact plate 24 and the lower compact plate 25, and a gas for generating a fuel-gas mixer passes through the passage 28. It can be induced radially from the outer periphery of 25) and flow towards the fuel.

In order to ensure the fixed position of the hollow body 22 with respect to the flow port 20 of the step flow passage 5, and to prevent the horizontal displacement of the hollow body 22 with respect to the flow port 20, the nozzle body ( A recess 30 is provided in the end face 34 of the ejection end 29 on the downstream side of 2), and the recess surrounds the hollow body 22 and the flow port 20 is provided with a hollow body 22. It is configured to open at the bottom 21 of the recess 300 in contact with the upper compact plate 24. In order to enable gas to reach the at least one passage 28 of the hollow body 22, At least one supply groove 33 is formed in the radial direction, for example, between the outer circumference of the ejection end 29 of the nozzle body 2 and the recess 30, and the supply groove is the ejection end 29. Starting at the end of the end face 34 and extending to at least the passage 28 toward the valve seat surface 10 in the axial direction, for example. All.

However, for the same purpose, at least one supply hole in the ejection end 29 of the nozzle body 2, or at least one supply between the outer edge of the hollow body 22 and the peripheral wall of the recess 30. It is also possible to construct a passageway.

The nozzle body 2 is enclosed in the radial direction and the axial direction, for example, by the supply bush 36 at the end in the vicinity of the end face 34 of the jet end 29, in the axial direction the range of the jet end 29. The feed bush 36 has, for example, four transverse openings 37 which extend in the radial direction from the outer periphery of the feed bush 36 inward to the annular feed chamber 38 and to the feed chamber. The silver is formed between the outer circumference of the ejection end 29 and the longitudinal opening 39 at the end of the supply bush 36. The bottom 40 of the supply bush 36 in the direction facing the ejection end 29 of the nozzle body 2 has an abutting end 42 near the valve longitudinal axis 1 in the radial direction. The flat contact surface 43 extending perpendicularly to the valve longitudinal axis 1 of the contact end portion 42 extends beyond the fryer bottom 40 near the ejection end 29 in the axial direction. . The flat contact surface 43 of the supply bush 36 is in intimate contact with the hollow body 22 and reliably fixes the axial position of the hollow body 22 in the recess 30 of the nozzle body 2. In addition, the gas flows in the direction of the injection fuel only through the at least one passage 28. For example, a cylindrical mixing port 44 is opened which is connected directly to the hollow body 22 in the flow direction and extends concentrically from the bottom 40 of the supply bush 36 to the valve longitudinal axis 1. A mixer splitter 45 is connected to the mixing port, which extends in the hopper downstream.

The longitudinal opening 39 of the feed bush 36 is provided with a first annular groove 47 above the four transverse openings 37, for example, at the end in the direction away from the mixer spout 45. And the annular groove receives the sealing ring 48. The sealing ring 48 forms a seal between the outer circumference of the nozzle body 2 and the longitudinal opening 39 of the supply bush 36.

In the case where the fuel injection valve is combined with the supply bush 36, for example, the valve mounting part internal combustion of the intake pipe of the internal combustion engine, the supply bush 36 is disposed at the upper and lower portions of the lateral opening 37 in the peripheral wall of the valve mounting part. It is necessary to seal against. For this purpose there is a second annular groove 50 near the electromagnetic coil 18 above the transverse opening 37 on the outer circumference of the supply bush 36 and a third below the transverse opening 37. The annular groove 51 is integrally molded, and each of the annular grooves 50 and 51 may be provided with a sealing ring.

FIG. 2 shows a hollow body 22 according to the first embodiment shown in FIG. 3 shows a plan view of the lower plate 25 corresponding to the cross-sectional view along the II-II line of FIG. 2, and FIG. 4 shows a plan view of the hollow body 22 viewed in the direction of arrow X of FIG. 2. It is.

In Figures 2 to 4, for example, the square top compact 24 has a conical spout 60 symmetrically with respect to the valve abscissa 1, for example cutting four heads. These ejection openings extend in the direction of the lower surface 26 of the upper compact plate 24 and are directly bonded to each other with respect to the lower surface 26. The flow port 20 of the flow passage 5 has a cross-sectional area covering the entire jet port 60 and is linked with the jet port 60 in the downstream direction. The long side of the jet port 60 is about 0.1 to 0.25 mm in the narrowest part.

For example, the square lower plate 25 has four outer sides 61 and the outer side limits the outside of the lower plate 25 in a vertical direction extending parallel to the valve horizontal axis 1. It is also located at right angles to each other. In order to combine the hollow body 22 formed of the upper compact plate 24 and the lower compact plate 25, the upper compact plate 24 and the lower compact plate 25 agree in terms of the outer circumference from the cross section of the embodiment. It is particularly advantageous to have a village law. The hollow body 22 has the 1st symmetry axis | shaft 62 and the 2nd symmetry axis | shaft 63, and the two symmetry axis | shafts divide the outer side surface 61 into 2 parts, respectively. From the side surface 61 as a starting point, the width is narrower than the outer surface, and the upper surface 27 of the lower compact plate 25 has a rectangular bottom 67 symmetrically about the symmetry axes 62 and 63. One recessed part 64 is formed, respectively. The concave portion 64 extends from the bottom 67 toward the upper surface 27 of the lower compact plate 25 in the shape of a rim, and matches with the lower surface 26 of the upper compact plate 24, respectively. The inflow chamber 65 is formed. The lower plate 25 has a convex opening 66, concentrically, for example, with a valve horizontal axis 1, which extends in the shape of a cutting pyramid in the flow direction. The recess 64 or inlet chamber 65 extends inwardly in the direction of the tubular opening 66 but is not in direct communication with the vent opening 66.

At the top surface 27 of the lower compact plate 25 in the direction of each axis of symmetry 62, 63, at least one, respectively, between each recess 64 and the vent port 66, two in the first embodiment. The lower passage groove 69 is formed to pass inward, and each of the lower passage grooves forms one passage 28 corresponding to the lower surface 26 of the upper plate 24.

The passage 28 communicates the inflow chamber 65 opened toward the outer circumferential side of the upper and lower small plates 24 and 25 and the flow passage 66 of the hollow body 22, and each of the symmetry axes 62 and 63. Extend parallel to. Since the two passages 28 arranged in parallel from the common inflow chamber 65 have equal intervals with respect to each of the symmetry axes 62 and 63, the hollow body 22 composed of axis symmetry and point symmetry emerges. The lower passage groove 69 has a square bottom 73 and extends in a trapezoidal shape up to the top surface 27 of the lower plate 25. The axial dimension of the lower passage groove 69 measured in the directions of the symmetry lines 62 and 63 is about 0.1 to 0.25 mm. It is particularly advantageous that the passage 28 is oriented such that the ejected gas impinges on the fuel flowing out from one of the ejection openings 60, respectively. The centerline of the passage 28 is advantageously located in a plane passing through at least one of the centerlines of the jets 60. The passage 28 is narrow in the transverse direction orthogonal to its center line and extends only over the periphery region of the vent port 66 or the jet port 60.

In the upper compact plate 24 and the lower compact plate 25 made of monocrystalline silicon, the ejection opening 60, the recess 64, the flow opening 66 and the lower passage groove 69 are known in a known manner, for example. For example isotropes. It is formed by etching. First, the plane of the thin silicon platelet is polished and coated with a thin oxide layer, on which a photo layer is provided. A photomask is placed on this photo layer and subsequently exposed. By the use of a developing solution, a pattern consisting of a portion covered with a photo layer and an exposed oxide portion is formed on the small plate. In the bath containing hydrofluoric acid, the exposed oxide sites are subjected to etching treatment, and then the photo layer is removed. In this way, an oxide pattern is obtained on the small plate, which acts as a mask for subsequent etching. The alkaline liquid or acid acts on the exposed silicon, causing recesses in the monocrystalline microplate. The use of the anisotropic etchant increases the depth of the recesses without widening them. At this time, since the side wall of the recess is formed by the crystal plane of the silicon plate, a trapezoidal cross-sectional cross section is formed.

The etching operation stops immediately upon reaching a layer doped with, for example, boron in the direction of etching.

As shown in the first embodiment, the cross section of the blower outlet 60, the recessed portion 64, the flow passage 66, and the lower passageway 69 is shaped into a trapezoidal shape or a conical shape in which the head is cut by anisotropic etching. In addition to this, other cross sections are also possible, for example rectangular.

The lower end face 26 of the upper compact plate 24 and the upper end face 27 of the lower compact plate 25 are joined to each other by an adhesive. For this reason, first, the lower end surface 26 of the upper compact plate 24 and the upper end surface 27 of the lower compact plate 25 are polished, and the surface is chemically treated.

Next, the prepared surfaces of the upper compact plate 24 and the lower compact plate 25 to be bonded to each other are coalesced at room temperature. The bonding operation is completed by, for example, temperature treating the upper and lower platelets 24 and 25 in a nitrogen atmosphere.

Gas for forming the fuel gas mixer reaches into the supply chamber 38 through the lateral opening 37. This supply chamber 38 is formed between the outer periphery of the nozzle main body 2 and the longitudinal opening 39 of the supply bush 36. From this supply chamber 38, the said gas flows into the inflow port 66 of the four inflow chambers 65 and the two channel | paths 28 respectively connected to each inflow chamber, for example. The fuel is also sent out through the jet port 60 into the flow port 66.

The passage 28 has a narrow cross section that helps to throttle the flowing gas and further aid in gas conditioning.

This narrow cross section also accelerates the gas, so the gas collides with the ejected fuel on the highway and also surrounds the fuel.

This results in the formation of a significantly homogeneous fuel gas mixer. This fuel gas mixer is sent to the intake pipe of the internal combustion engine, for example, through the mixer blower outlet 45.

The above-mentioned gas is, for example, air branched by bypass just before the throttling valve disposed in the intake pipe of the internal combustion engine. However, it is also possible to use recovered exhaust gas of an internal combustion engine or to use gas (air, exhaust gas) conveyed by an attached fan in order to reduce the emission of a toxic substance.

5 shows a bottom plate 25 of the hollow body 22 according to the second embodiment of the present invention. The same components and components of the same operation are denoted by the same reference numerals as in the case of the first embodiment shown in FIGS.

The second embodiment differs from the first embodiment only in that the number of passages 28 or the number of lower passage grooves 69 formed in the upper end face 27 of the lower compact plate 25 is different. Each of the lower through holes 69 passing inwards from the four concave portions 64 of the upper surface 27 is formed one by one, and each of the lower through holes has a symmetry axis of the lower plate 25, for example. It extends in parallel with the lines 62 and 63, and it opens to the flow opening 66. In the flow direction from each inflow chamber 65 of the lower plate 25 to the flow port 66, all the lower passage grooves 69 are comprised in the right side of each symmetry axis | shaft 62 and 63, for example.

Based on this structure, supply of the gas to the flow port 66 arises with turning. As a result, the formation of a mixture of fuel and gas is remarkably improved.

A hollow body 22 according to a third embodiment of the invention is shown in FIG. 6 and in FIG. 7 as a bottom view of the upper compact plate 24 corresponding to a cross sectional view along the line VII-VII in FIG. 6. have. However, the same components and components of the same operation are denoted by the same reference numerals as in the case of the embodiment shown in FIGS. As in the case of the first and second embodiments, also in the third embodiment, the square top plate 924 and the square bottom plate 25 are made of monocrystalline silicon and are connected to each other by the bottom. The blower outlet 60, the recessed part 84, the flow-through port 66, and the upper passage groove 82 are shape | molded by anisotropic etching, for example.

The lower compact plate 25 has a square through hole 66 extending concentrically to the valve longitudinal axis 1 from a top surface 27 of the lower compact plate 25 to a conical shape in which the head is cut in the flow direction. Is composed. In the upper compact plate 24, for example, four square jet ports 60, which are symmetrically formed on the valve longitudinal axis 1, communicate with the flow port 66. The spout 60 extends in a truncated pyramidal shape toward the lower surface 26 of the upper compact plate starting from the upper surface 80 of the upper compact plate 24 and the lower surface of the upper compact plate 24. In (26), they are directly bonded to each other.

The upper compact plate 24 is limited to four outer sides 81 by the outer periphery, which are located at right angles to each other at the ends. The lower surface 26 of the upper plate 24 extends inward toward the ejection opening 60 starting from each side 81, and each recess 84 having a rectangular bottom 73 is formed. Moreover, each recessed part 84 is formed symmetrically about the symmetry axis | shaft 62 or 63, and is bisected by this symmetry axis | shaft. The recesses 84 taper in a trapezoidal shape toward the upper end surface 80 of the upper compact plate 24.

In combination with the upper end face 27 of the lower compact plate 25, the recesses 84 constitute one inflow chamber 65, respectively. Each inflow chamber 65 communicates with the downstream end part of the jet port 60, for example by two channel | paths 28, respectively. The passage 28 extends to the lower surface 26 of the upper compact plate 24 so that the upper pass groove 82 and the lower compact plate 25 have a rectangular bottom 85 on the upper surface 80 side. It is formed by the upper surface 27 and is also narrow in the transverse direction perpendicular to the center line of the passage, so that the passage is an outer peripheral region of the flow opening 66 or an outer peripheral portion of one outlet 60. It just spans the area. The upper passage groove 82 has a trapezoidal cross section and is tapered toward the upper end surface 80 of the upper compact plate 24. The axial dimension of the upper through groove 82 is about 0.1 to 0.25 mm.

In particular, in order to obtain a homogeneous fuel gas mixer, two passages 28 extend in parallel, equidistantly symmetrically with respect to each symmetry axis 62, 63 starting from one inflow chamber 65, respectively. Each passage 28 directly opens to the jet port 60, and the supply gas collides with the fuel sent out from the center.

8 shows a hollow body 22 according to a fourth embodiment of the invention. However, the same components and components of the same operation are denoted by the same reference numerals as in the case of the embodiment shown in FIGS. Unlike the third embodiment, the passage 28 extending in the upper small plate 24 does not directly open to the blowout opening 60 of the upper small plate 24, but the valve longitudinal axis 1 is inclined downward. Since it is inclined with respect to the opening in the through hole 66 of the lower plate 25, the gas reaches directly into the through hole 66 through the inflow chamber 65 and the passage 28, Unlike the embodiment, the impingement impinges on the fuel flow direction rather than perpendicular to the discharged fuel. In addition, the inflow of fuel into the passage 28 is prevented. In other respects, the fourth embodiment is substantially equivalent to the third embodiment.

9 shows a hollow body 22 according to a fifth embodiment of the present invention. However, the same components and components of the same operation are denoted by the same reference numerals as in the case of the embodiment shown in FIGS.

In the upper compact plate 24, for example, four square jet holes 60 are formed symmetrically with respect to the valve longitudinal axis 1. The square jet opening 60 is symmetrically shaped with respect to the valve longitudinal axis 1. The square spout 60 extends into a conical shape with the head cut toward the lower surface 26 starting from the upper surface 80 of the upper plate 24, and also directly to each other at the lower surface 26 Is joining. The lower plate 25 has a convex opening 66 of a square cross section extending concentrically to the valve longitudinal axis 1 and extending into a conical shape in which the head is cut in the flow direction.

From each of the four side surfaces 61 of the lower compact plate 25, the upper face 27 of the lower compact plate 25 is formed with a recess 64 each having a rectangular bottom 67. The concave portion extends toward the through hole 66 of the lower compact plate 25. The recesses 64 are already located symmetrically with respect to the symmetry lines 62 and 63 as shown for the first embodiment, and these axes of symmetry 62 and 63 also define the centerline of the recesses 64. It is coming true. The recesses 64 taper in a trapezoidal shape in a direction away from the upper small plate 24.

For example, two lower through holes 69 are formed in the upper surface 27 of the lower compact plate 25 starting from each of the four recesses 64. It extends to 66 and opens in this flow opening 66. The configuration of the lower passage groove 69 of the present embodiment corresponds to the configuration of the lower passage groove 69 shown in the first embodiment, for example.

In the lower surface 26 of the upper compact plate 24, which faces the upper surface 27, a rectangular bottom 73 is formed starting from each of the four side surfaces 81 of the upper compact plate 24. The recessed part 84 which has is shape | molded. This recess 84 extends inwardly towards the ejection opening 60 and ends just in front of the ejection opening, and is also symmetrical about the symmetry axes 62 and 63 as shown in the third embodiment, for example. In addition, these symmetry axes 62 and 63 also exist in the central axis of the recessed part 64. The trapezoidal recesses 84 taper toward the upper end surface 80 of the upper compact plate 24.

In the upper surface 27 of the lower compact plate 25, the recesses 64 coincide with the recesses 84 in the lower surface 26 of the upper compact plate 24, and match with each inflow chamber 65. And concave portion 64 and concave portion 84 have, for example, a coincident geometric dimension in at least a matching region, and occupy a coincidence position with respect to the axis of symmetry 62, 63. have.

Starting from each of the four concave portions 26 formed on the lower surface 26 of the upper compact plate 24, two upper passage grooves 82 extend inwardly in the ejection opening 60 direction, respectively. The upper passage groove 82 extends in parallel to each of the symmetry lines 62 and 63, has a cross section that is tapered in a trapezoid shape on the upper end surface 80 side, and has a rectangular bottom 85. Each of the upper through grooves 82 and the lower through grooves 69 overlaps with the lower surface 26 of the upper compact plate 24 and the upper surface of the lower compact plate 24, and each of the upper through grooves ( 82 and the lower passage groove 69 are combined with each other to form a passage 28, which does not reach the spout 60, but is inclined downward with respect to the valve longitudinal axis 1 so that the lower small plate ( It is opened to the flow opening 66 of 25 and is oriented to the fuel fraction which blows off from the blowing opening 60. Each upper through groove 82 and each lower through groove 69 have a matching geometric dimension at least in the region where they overlap, and occupy a matching position with respect to the symmetry lines 62 and 63.

10 and 11 show a hollow body 22 according to a sixth embodiment of the present invention.

11 is a top view corresponding to the cross sectional view along the XI-XI line of FIG. In this case, the same components and components of the same operation are denoted by the same reference numerals as in the case of the embodiment shown in FIGS. The hollow body 22 is composed of a square upper plate 24 and a square lower plate 25, the upper and lower small plates 24, 25 are all made of single crystalline silicon, bonded to each other by the bottom It is. The square upper small plate 24 and the square lower small plate 25 have the same outer dimension. In the upper plate 24, four square jets 60 are formed, for example, as outlined by broken lines in FIG. 10, and these jets 60 are symmetric with respect to the valve longitudinal axis 1, for example. Extends into a conical shape with the head cut out toward the lower surface 26 from the upper surface 80 of the upper compact plate 24, and is directly joined to each other on the lower surface 26. . The lower compact plate 25 has one through hole 66 extending concentrically to the valve longitudinal axis 1, which has, for example, a square cross section, and also has a direction away from the upper compact plate 24. It is expanding into a trapezoidal shape.

In FIG. 11, in addition to the symmetry lines 62 and 63 extending parallel to the outer side surface 61, the first diagonal line of the lower plate 25 is indicated by reference numeral 88 and the second diagonal line is indicated by reference numeral 89. In FIG. Lower through grooves 69 are formed parallel to both symmetry lines 62 and 63 starting from the outer side surfaces 61 of the lower plate 25, and symmetrically to both diagonals 88 and 89, respectively. Two opposite through-holes 69 'facing each other starting from the corner 91 are formed in the upper surface 27 of the lower compact plate 25, and the through-holes are inwardly directed through the openings 66. Extending to. In that case, the symmetry lines 62 and 63 and the diagonal lines 88 and 89 form the center axis of the lower passage grooves 69 and 69 '. The lower through groove 69 extending parallel to the axes of symmetry 62 and 63 has a rectangular bottom 90, while the lower through groove 69 'extending symmetrically to the diagonals 88 and 89 is a tub. It has the bottom 90 'tapered in the direction of the flow opening 66. As shown in FIG. The lower passage grooves 69 and 69 'are tapered in a trapezoidal shape in a direction away from the upper surface 27. In combination with the bottom face 26 of the upper small plate 24, the lower passage grooves 69 and 69 ′ form a passage 28 that opens in the through hole 66.

This embodiment makes it possible to prepare particularly uniformly surrounded by the gas supplied through the fuel passage 28 discharged from the blower outlet 60 and to a homogeneous mixer.

12 to 14, the hollow body 22 according to the seventh embodiment of the present invention is shown. In this case, the same components and components of the same operation are denoted by the same reference numerals as in the case of the embodiment shown in FIGS. 13 is a sectional view taken along the line XIII-XIII in FIG. 12, and FIG. 14 is a bottom view of the upper plate 24 corresponding to the sectional view taken along the line XIV-XIV in FIG. The square upper plate 24 and the square lower plate 25 are made of single crystalline silicon, and are joined to each other by, for example, a bottom. The blower outlet 60, the recessed part 84, the flow-through port 66, and the upper passage grooves 82 and 82 'are shape | molded by anisotropic etching, for example.

On the lower compact plate 25 concentrically with the valve longitudinal axis 1, a rectangular through hole extending in a conical shape in which the head is cut in the flow direction starting from the upper surface 27 of the lower compact plate 25 ( 66) is formed. Four square spouts 60 communicate with the flow port 66, for example, and the spouts are formed symmetrically with the valve longitudinal axis 1 in the upper plate 24. As shown in FIG. The spout 60 extends into a conical shape in which the head is cut toward the lower surface 26 from the upper surface 80 of the upper small plate 24, for example, the lower end of the upper small plate 24. The surfaces 26 are joined to each other.

Each of the four sides 81 located at right angles to each other of the upper small plate 24 has, for example, a rectangular bottom 73, each one extending inwards toward the spout 60. Concave portions 84 and 84 'are formed in the bottom surface 26 of the upper small plate 24. The recesses 84 are symmetrically positioned, for example, on the axis of symmetry 63, and the recesses 84 'are symmetrically positioned, for example, on the axis of symmetry 62, respectively. It is divided into two and tapered toward the upper end face 27 of the upper small plate 24.

The recesses 84 and 84 'are combined with the top surface 27 of the lower compact plate 25 to form one inflow chamber 65 and 65', respectively.

For example, two inflow chambers 65 opposed to each other, which are bisected by the symmetry axis 63, communicate with the downstream end of the spout 60 by two passages 28, respectively. The passage 28 is formed by an upper passage groove 82 extending in the lower surface 26 of the upper small plate 24 and an upper surface 27 of the lower small plate 25. For example, the width is narrow in the transverse direction perpendicular to the passage centerline, and thus this passage is just over a partial range of the spout 60. The upper passage groove 82 is tapered in the direction of the upper surface 80 of the upper small plate (24).

The two inflow chambers 65 'which are arranged at an angle with respect to the inflow chamber 65, which are bisected by, for example, the symmetry axis 62, do not reach the outlet 60, Two passages 28 'inclined with respect to the valve longitudinal axis 1 in an oblique downward direction communicate with the flow port 66 of the lower plate 25. As shown in FIG. The passage 28 ′ is constituted by an upper passage groove 82 ′ extending in the upper small plate 24. The gas thus arrives directly into the vent port 66 through the inlet chamber 65 'and the passage 28' and impinges on the discharged fuel inclined with respect to the fuel flow direction.

In this way, a part of the gas first impinges on the fuel flowing through the jet port 60, and another part of the gas is inclined in the region of the vent port 66 so as to be supplied to the fuel gas mixed airflow, thereby providing a particularly homogeneous fuel gas. A mixer is obtained.

In the embodiment according to the present invention, since the passages 28 and 28 'are markedly narrow in the transverse direction perpendicular to the passage centerline, they only span the outer circumferential portion of the vent port 66 or the outlet port 60, In the assembled valve, it is possible to tune in an extremely narrow space without the need to adjust the passages 28 and 28 'in order to obtain a desired amount of gas quantity. Therefore, extremely accurate manufacture of the upper small plate 24 and the lower small plate 25 is required.

The upper compact plate 24 and the lower compact plate 25 are composed of single crystalline silicon for this precision manufacturing, and also the ejection opening 60, the recesses 64 and 84, 84 ', the flow opening 66, the lower portion It is particularly advantageous to mold the through grooves 69 and 69 'and the upper through grooves 82 and 82', for example by anisotropic etching.

Not only can the hollow body 22 of the present invention be applied as a fuel injection valve for a fuel injection device, but also in order to atomize other media, i.e. when the fine particles require droplets, Therefore, it can apply also in order to spray ink and lacquer evenly.

Claims (30)

In the hollow body consisting of an upper compact plate having at least one injection port, and a lower compact plate having a flow passage, and forming at least one passage between the upper compact plate and the lower compact plate, At least one ejection opening 60 of the upper small plate 24 and the through hole 66 of the lower compact plate 25 are polymerized, and at least one passage 28 or 28 'is formed on the upper and lower small plate 24. And the outer periphery of (25) and the passage opening (66). The method of claim 1, A hollow body characterized in that the upper small plate (24) and the lower small plate (25) are composed of monocrystalline silicon. The method of claim 2, The ejection openings 60, the through holes 66, the through holes 69, 69 ', 82, 82', and the recesses 64, 84, 84 'of the upper compact plate 24 and the lower compact plate 25. The hollow body which is shape | molded by the anisotropic etching. The method of claim 2, A hollow body characterized in that the upper small plate (24) and the lower small plate (25) are joined to each other by the bottom. The method of claim 1, At least one lower through hole 69 and 69 'is formed in the upper surface 27 of the lower compact plate 25 facing the upper compact plate 24, and the lower through hole is formed in the lower compact plate ( A hollow body characterized by forming at least one passageway (28) in pairs with the bottom surface (26) of the upper small plate (24) facing the 25). The method of claim 1, At least one upper through hole 82, 82 'is formed in the lower face 26 of the upper small plate 24 facing the lower plate 25, and the upper through groove is formed in the upper small plate 24. A hollow body, characterized in that it forms at least one passageway (28, 28 ') in pairs with the upper end (27) of the lower plate (25) facing. The method of claim 1, The bottom face 26 of the upper microplate 24 has at least one upper passage groove 82, 82 ′, and the top face 27 of the lower plate 25 has at least one lower passage groove 69. 69 '), wherein at least one passageway 28, 28' is formed by polymerization of the upper passageway 82,82 'and the lower passageway 69,69'. Hollow body. The method of claim 1, The lower compact plate 25 is a recess 64 which communicates the outer periphery of the upper and lower small plates 24 and 25 and the passages 28 and 28 'with the side surfaces 61 and 81 of the upper small plate 24 as a starting point. , 84,84 ') is hollow. The method of claim 1, A hollow body, characterized in that the centerline of the passages (28, 28 ') is located in a plane with the centerline of at least one outlet (60). The method of claim 9, Hollow body, characterized in that two passages (28) extending in the direction orthogonal to each other are located in the direction toward one jet (60). The method of claim 9, In the small plate 24, four ejection openings 60 adjacent to each other are formed symmetrically with respect to the valve longitudinal axis 1, and one passage 28 in each of the ejection openings 60 in each direction. Hollow body, characterized in that located. The method according to any one of claims 6 to 11, In the small plate 24, at least one of the passage grooves 82 and 82 'does not reach the spout 60, and passages 28 and 28' are provided on the valve longitudinal axis 1, respectively. It is inclined with respect to the hollow body characterized by opening to the through-hole 66. The method of claim 6, The upper passage grooves 82 facing each other of the upper compact plate 24 are configured to form one passage 28 located in each direction at one ejection opening 60 of the upper compact plate 24, respectively. In addition, the other upper passage groove 82 ′ of the upper small plate 24, which faces each other at an angle to the passage, does not reach to the outlet port 60 but is inclined to the valve longitudinal axis 1 to form a flow passage ( A hollow body, characterized in that it is configured to form one passageway 28 'each of which is opened to 66. The method according to any one of claims 1 to 11, wherein The lower compact plate 25 is constituted in the forward direction, and one passage 28, 28 'is connected to the through hole 66 from each of the shaft surfaces 61 and the corners 91 as a starting point. Hollow body characterized in that. A fuel injection for supplying a fuel-gas mixer to a valve, in particular an internal combustion engine, with a valve closing portion 9 cooperating with the valve seat surface 10 and a hollow body 22 disposed downstream of the valve seat surface. In the valve, The hollow body 22 faces the valve seat surface 10 and has an upper small plate 24 having at least one injection hole 60 and a lower small plate in contact with the upper small plate and having a flow port 66. The upper plate 24 and the lower plate 25 form at least one passage 28, 28 ', and the gas is supplied through the passage 25, and at least Hollow body mounting valve, characterized in that located in the direction toward the fuel discharged through one jet (60). The method of claim 15, A hollow body mounting valve, wherein the upper compact plate 24 and the lower compact plate 25 are made of monocrystalline silicon. The method of claim 16, Anisotropic etching of the spout 60, the through hole 66, the passing grooves 69 and 69 'and the recesses 64, 84 and 84' provided in the upper and lower platelets 24 and 25 A hollow body mounting valve, which is molded by. The method of claim 16, A hollow body mounting valve, wherein the upper compact plate 24 and the lower compact plate 25 are joined to each other by a bottom part. The method of claim 15, At least one lower through hole (69, 69 ') is formed in the upper surface (27) of the lower plate (25) facing the upper plate (24), and the lower plate (25) is formed in the lower plate (25). The hollow body mounting valve, characterized in that the at least one passage (28) is formed in pairs with the bottom surface (26) of the upper compact plate (24) facing. The method of claim 15, At least one upper through hole 82, 82 ′ is formed in the lower surface 26 of the upper compact plate 24 facing the lower compact plate 25, and the upper pass groove is formed in the upper compact plate 24. A hollow body mounting valve, which is coupled to an upper surface 27 of the lower platelets 25 facing at least to form at least one passageway 28, 28 ′. The method of claim 15, The bottom surface 26 of the upper compact plate 24 has at least one upper through hole 82 and 82 ', and the top surface 27 of the lower compact plate 25 has at least one lower through groove 69, 69 '), wherein the at least one passageway 28, 28' is formed by polymerization of the upper passageway 82,82 'and the lower passageway 69,69'. Hollow body mounting valve. The method of claim 15, Recesses 64 interlocking the outer circumferences of the upper and lower small plates 24 and 25 with the passages 28 and 28 'starting from the side surfaces 61 and 81 of the lower compact plate 25 or the upper compact plate 24. Hollow seat valve, characterized in that the (84,84 ') is extended. The method of claim 15, A hollow-body-mounted valve, characterized in that at least one jet port (60) in the upper compact plate (24) and the vent port (66) in the lower compact plate (25) are polymerized with each other. The method of claim 15, A hollow body mounted valve, characterized in that the centerline of the passages (28, 28 ') is located in a plane with the centerline of the at least one outlet (60). The method of claim 24, A hollow body mounting valve, characterized in that two passages (28) extending in directions perpendicular to each other are positioned and oriented in a direction toward one jet port (60). The method of claim 24, Four ejection openings 60 adjacent to each other in the upper compact plate 24 are formed symmetrically with respect to the valve longitudinal axis 1, and one passage 28 is positioned in each of the ejection openings 60 in the direction. Hollow body mounting valve characterized in that. The method of claim 17, At least one upper through hole 82, 82 'in the upper compact plate 24 is configured not to reach the spout 60, and passages 28, 28' are provided at the valve longitudinal axis 1, respectively. A hollow body mounting valve, characterized in that it is inclined with respect to an opening through the through hole 66. The method of claim 20, It is configured to form one passage 28 which is located in the direction toward each one of the ejection openings 60 of the upper compact plate 24 of the upper passage groove 82 facing each other of the upper compact plate 24. In addition, the other upper passage groove 82 'of the upper compact plate facing each other at an angle to the passage does not reach the outlet port 60 but is inclined to the valve longitudinal axis 1 to the flow outlet 66. A hollow body mounted valve, characterized in that it is configured to form one passageway 28 'each opening. The method according to any one of claims 15 to 28, The lower plate 25 has a square shape, and each of the passages 28 and 28 'passes through the through hole 66, starting from each side 61 and each corner 91. Hollow body mounting valve, characterized in that. The method of claim 15, The ejection end 29 of the valve receives the hollow body 22 and is surrounded by the supply bush 36, and at least one gas opening transverse opening 37 is formed in the peripheral wall of the supply bush. Hollow body mounting valve, characterized in that.