KR0169063B1 - UV irradiation device for photo-alignment - Google Patents
UV irradiation device for photo-alignment Download PDFInfo
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- KR0169063B1 KR0169063B1 KR1019960002463A KR19960002463A KR0169063B1 KR 0169063 B1 KR0169063 B1 KR 0169063B1 KR 1019960002463 A KR1019960002463 A KR 1019960002463A KR 19960002463 A KR19960002463 A KR 19960002463A KR 0169063 B1 KR0169063 B1 KR 0169063B1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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Abstract
본 발명은 자외선을 광배향물질이 성막된 기판(14),(24) 전체에 걸쳐서 균일하게 조사하기 위한 것으로, 자외선램프(11)와, 렌즈(12)와, 편광판(13)을 기판(14)과 경사지게 설치하여 자외선을 기판(14)에 비스듬히 조사하거나, 자외선램프(21)와, 렌즈(22)와, 편광판(23)이 내장된 케이싱(25)을 기판 위에 설치한 다음 케이싱(25)이나 기판(24)을 움직여서 자외선을 기판(24)에 걸쳐서 조사한다.The present invention is to uniformly irradiate ultraviolet rays over the entire substrate 14, 24 on which the photo-alignment material is formed. The ultraviolet lamp 11, the lens 12, and the polarizing plate 13 are formed on the substrate 14 ) And obliquely irradiate ultraviolet rays to the substrate 14, or install a casing 25 in which the ultraviolet lamp 21, the lens 22, and the polarizing plate 23 are mounted on the substrate, and then the casing 25. Alternatively, the substrate 24 is moved to irradiate ultraviolet rays across the substrate 24.
Description
제1도는 종래의 광배향용 자외선 조사장치를 나타내는 도면.1 is a view showing a conventional photo-alignment ultraviolet irradiation device.
제2도는 본 발명에 따른 광배향용 자외선 조사장치의 일실시예를 나타내는 도면.2 is a view showing an embodiment of an ultraviolet irradiation device for photoalignment according to the present invention.
제3도는 본 발명에 따른 광배향용 자외선 조사장치의 다른 실시예를 나타내는 도면.3 is a view showing another embodiment of an ultraviolet irradiation device for photoalignment according to the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1, 11, 21 : 자외선램프 2, 12, 22 : 렌즈1, 11, 21: UV lamp 2, 12, 22: Lens
3, 13, 23편광판 4, 14, 24 : 기판3, 13, 23 polarizing plates 4, 14, 24: substrate
25 : 케이싱25: casing
본 발명은 자외선 조사장치에 관한 것으로, 특히 배향막에 자외선을 대면 적으로, 또한 균일하게 조사하여 광배향막을 형성할 수 있도록 한 광배향용 자외선 조사장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet irradiation device, and more particularly, to an ultraviolet irradiation device for photoalignment, in which an alignment film is irradiated with a large area and uniformly to form an optical alignment film.
현재 주로 사용되고 있는 액정디스플레이는 트위스트네마틱 액정디스플레이(Twisted Nematic LCD)로서, 이 TN LCD는 좌우 및 상하의 시야각에 따라 각 계조표시(gray level)에서의 광투과도가 달라지는 단점이 있다. 특히, 좌우방향의 시야각에 대해서는 광투과도가 대칭적으로 분포하지만, 상하방향에서의 광투과도는 비대칭적으로 분포하기 때문에 상하방향으로의 시야각에서는 이미지가 반전되어 결국 시야각이 좁아지게 된다.Currently, the liquid crystal display mainly used is a twisted nematic liquid crystal display (Twisted Nematic LCD), the TN LCD has a disadvantage that the light transmittance at each gray level (gray level) is changed according to the left and right and up and down viewing angle. In particular, the light transmittance is distributed symmetrically with respect to the viewing angle in the left and right directions, but since the light transmittance is distributed asymmetrically in the vertical direction, the image is inverted at the viewing angle in the vertical direction, thereby narrowing the viewing angle.
상기한 문제를 해결하기 위해 현재 제안되고 있는 것이, 2도메인(2-domain) 트위스트네마틱(TN) 액정셀과 도메인 분할된 트위스트네마틱(Domain-divided TN)액정셀 및 4도메인(4-domain) 트위스트네마틱 액정셀 등과 같은 멀티도메인(multi-domain) 액정셀이다. 2도메인 TN 액정셀은 폴리이미드(polyimide)를 러빙하여 각 도메인의 프리틸트방향(pretilt direction)을 서로 반대방향으로 해서 시야각이 반전되는 것을 보상하며, 도메인 분할된 TN 액정셀은 각 도메인을 다른 프리틸트각을 보유하는 배향물질(예를 들면, 유기배향막이나 무기배향막)로 형성하여, 각 도메인의 평균 배향각도가 반대방향으로 되게 하여 시야각이 비대칭적으로 되는 것을 보상하게 된다. 또한, 4도메인 TN 액정셀은 역방향 러빙(reverse rubbing)과 2중 Si0x 사방증착(oblique evaporation)을 이용해서 각 도메인의 프리틸트방향을 다르게 하여 시야각을 보상한다.In order to solve the above problems, currently proposed two-domain (two domain) twisted nematic (TN) liquid crystal cell, domain-divided TN liquid crystal cell and four domain (4-domain) A multi-domain liquid crystal cell, such as a twisted nematic liquid crystal cell. The 2-domain TN liquid crystal cell rubs polyimide to compensate for the inversion of the viewing angle by shifting the pretilt direction of each domain to the opposite direction. By forming an alignment material having a tilt angle (for example, an organic alignment film or an inorganic alignment film), the average orientation angle of each domain is reversed to compensate for the asymmetry of the viewing angle. In addition, the four-domain TN liquid crystal cell compensates the viewing angle by changing the pretilt direction of each domain by using reverse rubbing and double Si0x oblique evaporation.
그러나, 상기한 멀티도메인들에 있어서는, 폴리이미드의 러빙에 의해 먼지나 전하가 발생하여 결과적으로 수율이 나빠지거나 기판이 파손되는 일이 생기며, 제조공정도 러빙을 실시할 때 한쪽 도메인을 러빙하고, 포토레지스트를 마스크로 하여 다른 도메인을 러빙한 후, 상기한 포토레지스트를 제거야하 하는 등 공정히 복잡하게 된다.However, in the above-mentioned multidomains, dust and charge are generated by rubbing of polyimide, resulting in poor yield or damage to the substrate, and the manufacturing process also rubs one domain when rubbing. After rubbing other domains with the photoresist as a mask, the photoresist needs to be removed.
그래서, 제조공정을 줄이고 기판의 파손을 방지하게 위해 제안되는 것이 배향막이 성막된 기판에 선형 편광된 자외선을 조사하여 배향막에 프리틸트방향을 부여하는 광배향이다. 이러한 광배향에서 사용되는 배향막은 주로 PVCN(polyvinylcinnamate)계의 고분자로 구성되어 선형 편광된 자외선이 조사된 에 따라 고분자간에 발생하는 크로스링킹(cross linking)에 의해 광고분자화된(photopolymerization)배향막이 된다. 이 광고분자의 방향은 선형 편광된 자외선의 방향에 수직하게 된다. 이 광고분자의 방향에 따라 배향막의 배향방향이 결정되며, 상기한 광배향막에 형성되는 프리틸트각은 조사된 자외선의 입사방향 또는 조사에너지에 따라 달라지게 된다. 다시 말해서, 배향막에 조사되는 자외선의 편광방향과 조사 에너지에 따라 배향막의 프리틸트방향과 프리틸트각이 결정된다. 또한, 상기와 같이 자외선을 이용하여 프리틸트방향을 부여하는 광배향에 있어서는, 영역에 따라 편광판을 일정한 각도로 회전하여 편광방향을 달리하면서 자외선을 조사해서 배향방향이 각각 다른 도메인을 배향막에 형성하여 멀티도메인을 만든다.Therefore, it is proposed to reduce the manufacturing process and to prevent the breakage of the substrate is a photo-alignment to give a pretilt direction to the alignment film by irradiating linearly polarized ultraviolet rays to the substrate on which the alignment film is formed. The alignment layer used in the photo-alignment is mainly composed of polyvinylcinnamate (PVCN) -based polymers, and becomes a photopolymerization alignment layer by cross linking generated between polymers as the linearly polarized ultraviolet rays are irradiated. . The direction of this ad molecule is perpendicular to the direction of the linearly polarized ultraviolet light. The alignment direction of the alignment layer is determined according to the direction of the advertising molecules, and the pretilt angle formed on the optical alignment layer is changed depending on the incident direction of the irradiated ultraviolet rays or the irradiation energy. In other words, the pretilt direction and the pretilt angle of the alignment film are determined by the polarization direction and the irradiation energy of the ultraviolet rays irradiated onto the alignment film. In addition, in the optical orientation in which the pretilt direction is given by using ultraviolet rays as described above, the polarizing plate is rotated at a predetermined angle according to the region to irradiate the ultraviolet rays while changing the polarization direction to form domains having different orientation directions in the alignment layer. Create a multidomain.
제1도는 배향막에 자외선을 조사하는 종래의 자외선 조사장치로서, 자외선램프(1)에서 나온 자외선이 렌즈(2)를 거쳐 편광판(3)에서 선형 편광된 후, 배향막이 성막된 기판(4)에 조사되어 기판(4) 위에 성막된 배향막에 프리틸트방향이 부여된다.FIG. 1 is a conventional ultraviolet irradiation device for irradiating ultraviolet rays to an alignment layer. The ultraviolet rays emitted from the ultraviolet lamp 1 are linearly polarized on the polarizing plate 3 through the lens 2 and then onto the substrate 4 on which the alignment layer is formed. The pretilt direction is provided to the oriented film irradiated and formed into the film on the board | substrate 4.
그러나, 상기한 자외선 조사장치는 자외선램프의 크기가 한정되어 있기 때문에, 조사되는 면적이 너무 적어서 최근의 대면적 액정디스플레이에 대해서는 적합하지 못하며, 또한 균일하게 조사되지 않는 문제도 있었다.However, the ultraviolet irradiation device described above has a problem that the size of the ultraviolet lamp is limited, so that the irradiated area is too small to be suitable for the recent large-area liquid crystal display, and there is also a problem that it is not uniformly irradiated.
본 발명은 상이한 문제를 감안하여 이루어진 것으로, 기판에 자외선을 대면적으로, 또한 균일하게 조사함으로써 광배향막을 형성할 수 있는 광배향용 자외선 조사장치를 제공하는 것을 목적으로 한다.SUMMARY OF THE INVENTION The present invention has been made in view of different problems, and an object thereof is to provide an ultraviolet irradiation device for photoalignment, which can form a photoalignment film by irradiating a substrate with a large area and uniformly ultraviolet rays.
상기한 목적을 달성하기 위해, 본 발명에 따른 자외선 조사장치는 자외선이 발생되는 자외선램프와, 렌즈와, 상기한 렌즈를 거쳐 나온 자외선을 선형 편광시키는 편광판과, 상기한 선형 편광된 자외선이 조사되는 기판으로 구성된다.In order to achieve the above object, the ultraviolet irradiating apparatus according to the present invention is irradiated with an ultraviolet lamp, a lens, a polarizing plate for linearly polarizing the ultraviolet light emitted through the lens, the linearly polarized ultraviolet light is irradiated It consists of a substrate.
이하, 첨부된 도면을 참조하여 본 발명에 따른 광배향용 자외선 조사장치를 상세히 설명한다.Hereinafter, with reference to the accompanying drawings will be described in detail the ultraviolet irradiation device for alignment according to the present invention.
제2도는 본 발명에 따른 자외선 조사장치의 일실시예를 나타내는 도면으로, 도면부호 11은 자외선램프를 나타낸다. 이 자외선램프(11)는 주로 수은(Hg)램프를 사용한다. 상기한 자외선램프(11)로부터 발생되어 나온 자외선이 렌즈(12)를 거쳐 편광판(13)에서 선형 편광되어 배향막이 성막된 기판(14) 위에 조사된다.2 is a view showing an embodiment of the ultraviolet irradiation device according to the present invention, wherein reference numeral 11 denotes an ultraviolet lamp. This ultraviolet lamp 11 mainly uses a mercury (Hg) lamp. Ultraviolet rays generated from the ultraviolet lamp 11 are linearly polarized by the polarizing plate 13 via the lens 12 and irradiated onto the substrate 14 on which the alignment layer is formed.
본 발명에서 사용되는 배향막은 PVCN-F(polyvinyfluorcinnamate)나 폴리실록산(polysiloxane)물질로서, 이 물질은 종래의 PVCN(polyvinyfluorcinnamate)계의 고분자보다도 안정된 배향력을 제공해 준다.The alignment layer used in the present invention is a PVCN-F (polyvinyfluorcinnamate) or polysiloxane (polysiloxane) material, which provides a more stable orientation than the conventional polyvinyfluorcinnamate (PVCN) polymer.
그리고, 일련의 직선상의 설치된 자외선램프(11)와 렌즈(12) 및 편광판(13)은 상기한 기판(14)과는 기판의 수직선상에 대하여 θ만큼의 각을 이루도록 설치된다. 다시 말해서, 자외선이 상기한 기판(14)에 일정한 각도(θ)만큼 비스듬히 조사되므로, 자외선이 기판 위에 조사되는 종래의 자외선 조사장치 보다 더욱 넓은 면적에 자외선을 조사할 수 있다.A series of linearly installed ultraviolet lamps 11, a lens 12, and a polarizing plate 13 are provided with the substrate 14 to form an angle of θ with respect to the vertical line of the substrate. In other words, since ultraviolet rays are irradiated obliquely to the substrate 14 by a predetermined angle θ, ultraviolet rays can be irradiated to a larger area than conventional ultraviolet irradiation apparatuses in which ultraviolet rays are irradiated onto the substrate.
상기한 구성의 자외선 조사장치에서, 편광판(13)을 일정한 각도만큼 계속 회전시킴으로써, 여러 가지 편광방향을 갖는 자외선을 얻을 수 있으며, 마스크(mask)를 사용하여 배향막이 성막된 기판(14)의 일부 영역에만 자외선을 조사할 수 있다. 따라서, 마스크를 사용하여 배향막이 성막된 기판(14)의 일부 영역을 블로킹한 상태에서 특정한 방향으로 선형 편광된 자외선을 조사한 후, 다시 마스크를 사용하여 기판의 다른 영역을 블로킹한 상태에서 편광판(13)을 회전시켜 처음과는 다른 방향으로 편광된 자외선을 조사함으로써, 서로 다른 프리틸트방향을 갖는 2도메인 액정셀이나 4도메인 액정셀과 같은 멀티도메인 액정셀을 제조할 수 있게 된다.In the ultraviolet irradiation device having the above-described configuration, by continuously rotating the polarizing plate 13 by a predetermined angle, ultraviolet rays having various polarization directions can be obtained, and a part of the substrate 14 on which the alignment layer is formed using a mask is formed. Ultraviolet rays can be irradiated only to the area. Therefore, after irradiating linearly polarized ultraviolet rays in a specific direction while blocking a portion of the substrate 14 on which the alignment layer is formed by using a mask, the polarizer 13 is again blocked with another region of the substrate by using a mask. By irradiating the ultraviolet rays polarized in a direction different from the first by rotating), it is possible to manufacture a multi-domain liquid crystal cell such as a two-domain liquid crystal cell or a four-domain liquid crystal cell having different pretilt directions.
제3도는 본 발명에 따른 자외선 조사장치의 다른 실시예를 나타내는 도면이다. 이 실시예에서는 자외선램프(21)와 렌즈(22) 및 편광판(23)이 케이싱(25)내에 내장되어 도면표시하지 않은 모터에 의해 구동되어서 기판(24) 위를 움직이면서 자외선을 기판에 조사한다. 따라서, 자외선이 기판(24) 전체에 걸쳐서 균일하게 조사된다. 또한, 상기한 실시예에서 케이싱(25)이 모터에 의해 움직이면서 자외선을 조사하는 것뿐만 아니라, 케이싱(25)은 고정되어 있고 기판에 모터에 의해 움직이면서 자외선이 기판에 조사되는 것도 물론 가능하다.3 is a view showing another embodiment of the ultraviolet irradiation device according to the present invention. In this embodiment, the ultraviolet lamp 21, the lens 22, and the polarizing plate 23 are embedded in the casing 25 and driven by a motor not shown, and irradiate the substrate with ultraviolet light while moving on the substrate 24. Therefore, ultraviolet rays are uniformly irradiated over the entire substrate 24. Further, in the above-described embodiment, not only the casing 25 irradiates ultraviolet rays while being moved by the motor, but the casing 25 is fixed and the ultraviolet rays are irradiated onto the substrate while being moved by the motor to the substrate.
이 실시 예에서도 편광판(23)을 회전시켜 편광방향을 변화시키고 마스크를 사용하여 배향막이 성막된 기판(24)의 일부를 블로킹함으로써 기판(24)의 각 영역에 서로 다른 프리틸트방향을 갖는 멀티도메인 액정셀을 제조할 수 있게 된다.Also in this embodiment, the polarizing plate 23 is rotated to change the polarization direction, and a part of the substrate 24 having the alignment layer formed thereon is blocked by using a mask, thereby having different pretilt directions in each region of the substrate 24. A liquid crystal cell can be manufactured.
본 발명은 상기한 바와 같이 자외선이 기판에 비스듬히 조사되거나, 기판 위를 움직이면서 조사되도록 구성되어 있으므로, 자외선이 기판의 넓은 영역에 균일하게 조사될 수 있게 된다.According to the present invention, since the ultraviolet rays are irradiated at an angle to the substrate or irradiated while moving on the substrate, the ultraviolet rays can be uniformly irradiated on a large area of the substrate.
Claims (6)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960002463A KR0169063B1 (en) | 1996-02-01 | 1996-02-01 | UV irradiation device for photo-alignment |
| US08/792,265 US5889571A (en) | 1996-02-01 | 1997-01-31 | Ultraviolet irradiating device for photo-alignment process and an irradiating method using the same |
| GB9718617A GB2314170B (en) | 1996-02-01 | 1997-01-31 | An ultraviolet irradiating device for photo-alignment process and an irradiating method using the same |
| DE19703682A DE19703682B9 (en) | 1996-02-01 | 1997-01-31 | UV light irradiation apparatus for photo alignment method and irradiation method using the same |
| FR9701084A FR2744536B1 (en) | 1996-02-01 | 1997-01-31 | ULTRAVIOLET IRRADIATION DEVICE FOR A PHOTOALIGNMENT PROCESS, AND IRRADIATION METHOD USING THE SAME |
| GB9702048A GB2309794B (en) | 1996-02-01 | 1997-01-31 | An ultraviolet irradiating device for photo-alignment process and an irradiating method using the same |
| JP9020509A JPH09211465A (en) | 1996-02-01 | 1997-02-03 | Light irradiation device for light alignment and light irradiation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960002463A KR0169063B1 (en) | 1996-02-01 | 1996-02-01 | UV irradiation device for photo-alignment |
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| Publication Number | Publication Date |
|---|---|
| KR970062765A KR970062765A (en) | 1997-09-12 |
| KR0169063B1 true KR0169063B1 (en) | 1999-03-20 |
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| KR1019960002463A Expired - Lifetime KR0169063B1 (en) | 1996-02-01 | 1996-02-01 | UV irradiation device for photo-alignment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6292296B1 (en) | 1997-05-28 | 2001-09-18 | Lg. Philips Lcd Co., Ltd. | Large scale polarizer and polarizer system employing it |
| US7061679B1 (en) | 1998-05-27 | 2006-06-13 | Lg. Philips Lcd Co., Ltd. | Light irradiating device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100455650B1 (en) * | 1996-11-27 | 2005-05-09 | 삼성전자주식회사 | Liquid Crystal Alignment |
| KR100323731B1 (en) * | 1998-11-06 | 2002-05-09 | 구본준, 론 위라하디락사 | Light irradiating device |
| KR100538700B1 (en) * | 1998-12-19 | 2006-03-22 | 엘지.필립스 엘시디 주식회사 | Alignment device for liquid crystal display elements |
-
1996
- 1996-02-01 KR KR1019960002463A patent/KR0169063B1/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6292296B1 (en) | 1997-05-28 | 2001-09-18 | Lg. Philips Lcd Co., Ltd. | Large scale polarizer and polarizer system employing it |
| US7061679B1 (en) | 1998-05-27 | 2006-06-13 | Lg. Philips Lcd Co., Ltd. | Light irradiating device |
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| KR970062765A (en) | 1997-09-12 |
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