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JPS649673A - Piezoelectric flexible element - Google Patents

Piezoelectric flexible element

Info

Publication number
JPS649673A
JPS649673A JP62163921A JP16392187A JPS649673A JP S649673 A JPS649673 A JP S649673A JP 62163921 A JP62163921 A JP 62163921A JP 16392187 A JP16392187 A JP 16392187A JP S649673 A JPS649673 A JP S649673A
Authority
JP
Japan
Prior art keywords
substrate
piezoelectric
ceramic
plate
bonded together
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62163921A
Other languages
Japanese (ja)
Inventor
Takenobu Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP62163921A priority Critical patent/JPS649673A/en
Publication of JPS649673A publication Critical patent/JPS649673A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

PURPOSE:To increase the bonding strength between a substrate and piezoelectric plates and to obtain a long-lived piezoelectric flexible element having a good durability against repetitive use by a method wherein the bonded surfaces of the substrate and the piezoelectric plates are covered with electrochemically deposited fine particles. CONSTITUTION:A piezoelectric plate 4 consists of a tabular piezoelectric ceramic 22 and silver electrodes 24 and 26, which cover both surfaces of the ceramic 22 and are used for applying a voltage, and similarly, a piezoelectric plate 6 consists of a tabular piezoelectric ceramic 32 and silver electrodes 34 and 36, which cover both surfaces of ceramic 32 and are used for applying a voltage. A substrate 2 and the plate 4 are bonded together with a bonding agent layer 8 and similarly, the substrate 2 and the plate 6 are bonded together with a bonding agent layer 10. The surfaces of the substrate 2 possess a proper property and a proper roughness due to deposited fine particles 14. Thereby, the bonding strength between the substrate 2 and the plates 4 and 6, which are bonded together with the bonding agent layers 8 and 10, is increased sufficiently.
JP62163921A 1987-07-02 1987-07-02 Piezoelectric flexible element Pending JPS649673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62163921A JPS649673A (en) 1987-07-02 1987-07-02 Piezoelectric flexible element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62163921A JPS649673A (en) 1987-07-02 1987-07-02 Piezoelectric flexible element

Publications (1)

Publication Number Publication Date
JPS649673A true JPS649673A (en) 1989-01-12

Family

ID=15783353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62163921A Pending JPS649673A (en) 1987-07-02 1987-07-02 Piezoelectric flexible element

Country Status (1)

Country Link
JP (1) JPS649673A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0382563A2 (en) * 1989-02-10 1990-08-16 Nikon Corporation Ultrasonic motor having high drive effeciency
JPH04131960U (en) * 1991-05-27 1992-12-04 日本航空電子工業株式会社 Bonding structure of electrode part in piezoelectric element assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713784A (en) * 1980-06-30 1982-01-23 Toshiba Corp Bimorph piezoelectric element
JPS62113487A (en) * 1985-11-13 1987-05-25 Ube Ind Ltd Laminated piezoelectric body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713784A (en) * 1980-06-30 1982-01-23 Toshiba Corp Bimorph piezoelectric element
JPS62113487A (en) * 1985-11-13 1987-05-25 Ube Ind Ltd Laminated piezoelectric body

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0382563A2 (en) * 1989-02-10 1990-08-16 Nikon Corporation Ultrasonic motor having high drive effeciency
EP0382563B1 (en) * 1989-02-10 1997-06-18 Nikon Corporation Ultrasonic motor having high drive efficiency
EP0382563B2 (en) † 1989-02-10 2001-01-03 Nikon Corporation Ultrasonic motor having high drive efficiency
JPH04131960U (en) * 1991-05-27 1992-12-04 日本航空電子工業株式会社 Bonding structure of electrode part in piezoelectric element assembly

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