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JPS6487760A - Stainless steel member for semiconductor producing device - Google Patents

Stainless steel member for semiconductor producing device

Info

Publication number
JPS6487760A
JPS6487760A JP24505287A JP24505287A JPS6487760A JP S6487760 A JPS6487760 A JP S6487760A JP 24505287 A JP24505287 A JP 24505287A JP 24505287 A JP24505287 A JP 24505287A JP S6487760 A JPS6487760 A JP S6487760A
Authority
JP
Japan
Prior art keywords
stainless steel
steel member
producing device
semiconductor producing
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24505287A
Other languages
Japanese (ja)
Other versions
JPH0465144B2 (en
Inventor
Kazuo Fujiwara
Haruo Tomari
Fumihiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP24505287A priority Critical patent/JPS6487760A/en
Publication of JPS6487760A publication Critical patent/JPS6487760A/en
Publication of JPH0465144B2 publication Critical patent/JPH0465144B2/ja
Granted legal-status Critical Current

Links

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  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the gas release resistance of a stainless steel member by electropolishing the surface of the member and heating the member in the air to form an amorphous oxide coating film of a specified thickness. CONSTITUTION:Each of structural members of gas and pure water feeding and discharging systems, a reaction chamber, etc., as structural members of a semiconductor producing device is made of stainless steel. The surface of the stainless steel member is electropolished with an aq. H2SO4-H3PO4 soln. and the member is heated, e.g., to 250-550 deg.C in the air to form an amorphous oxide coating film of >=75Angstrom thickness. A surface treated stainless steel member having superior surface smoothness and gas release resistance is obtd.
JP24505287A 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device Granted JPS6487760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24505287A JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24505287A JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Publications (2)

Publication Number Publication Date
JPS6487760A true JPS6487760A (en) 1989-03-31
JPH0465144B2 JPH0465144B2 (en) 1992-10-19

Family

ID=17127864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24505287A Granted JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Country Status (1)

Country Link
JP (1) JPS6487760A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141566A (en) * 1988-11-21 1990-05-30 Shinko Pantec Co Ltd Equipment piping materials for ultrapure water production and supply equipment
US5407492A (en) * 1991-02-18 1995-04-18 Osaka Sanso Kogyo Ltd. Process for forming passivated film
WO1995018247A1 (en) * 1993-12-30 1995-07-06 Tadahiro Ohmi Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR100494739B1 (en) * 2002-06-27 2005-06-13 주식회사 아스플로 Method for Polishing a Surface of Chrome Oxygen Passivation
KR100494576B1 (en) * 2002-06-27 2005-06-13 주식회사 아스플로 Apparatus for Treating a Surface of Chrome Oxidize Passivation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217184A (en) * 1985-07-12 1987-01-26 Shinko Fuaudoraa Kk Surface treatment of stainless steel
JPS6431956A (en) * 1987-07-25 1989-02-02 Tadahiro Omi Manufacture of stainless steel member for semiconductor-manufacturing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217184A (en) * 1985-07-12 1987-01-26 Shinko Fuaudoraa Kk Surface treatment of stainless steel
JPS6431956A (en) * 1987-07-25 1989-02-02 Tadahiro Omi Manufacture of stainless steel member for semiconductor-manufacturing equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141566A (en) * 1988-11-21 1990-05-30 Shinko Pantec Co Ltd Equipment piping materials for ultrapure water production and supply equipment
US5407492A (en) * 1991-02-18 1995-04-18 Osaka Sanso Kogyo Ltd. Process for forming passivated film
WO1995018247A1 (en) * 1993-12-30 1995-07-06 Tadahiro Ohmi Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR100494739B1 (en) * 2002-06-27 2005-06-13 주식회사 아스플로 Method for Polishing a Surface of Chrome Oxygen Passivation
KR100494576B1 (en) * 2002-06-27 2005-06-13 주식회사 아스플로 Apparatus for Treating a Surface of Chrome Oxidize Passivation

Also Published As

Publication number Publication date
JPH0465144B2 (en) 1992-10-19

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