JPS6484453A - Information recording medium - Google Patents
Information recording mediumInfo
- Publication number
- JPS6484453A JPS6484453A JP62242965A JP24296587A JPS6484453A JP S6484453 A JPS6484453 A JP S6484453A JP 62242965 A JP62242965 A JP 62242965A JP 24296587 A JP24296587 A JP 24296587A JP S6484453 A JPS6484453 A JP S6484453A
- Authority
- JP
- Japan
- Prior art keywords
- film
- aluminium
- degree
- vacuum
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004411 aluminium Substances 0.000 abstract 5
- 229910052782 aluminium Inorganic materials 0.000 abstract 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910017083 AlN Inorganic materials 0.000 abstract 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Landscapes
- Optical Record Carriers And Manufacture Thereof (AREA)
Abstract
PURPOSE:To form both a reflection film and a protection film in the same chamber, and to improve weather resistance by forming a mixed film, in which the ratio of a metal and the nitride or the oxide of the metal varies continuously, on a metallic reflection film. CONSTITUTION:A substrate 2 whose recording surface 3 is faced front to an aluminium target 4, is placed in the chamber 1 of a sputtering device, and a degree of vacuum is made below 5X10<-5> Torr by an exhausting system 11, and argon gas 6 is introduced so that the degree of vacuum comes to 500-400m Torr, and a voltage is impressed to the aluminium target 4 so as to make it discharge, and an aluminium film 5 is formed on the recording surface 3 of the substrate 2. Next, nitrogen gas 8 is introduced into the chamber 1, and the degree of vacuum is made to 55-500mTorr, and a ceramic film 7 varying from pure aluminium to aluminium nitride, in which the ratio of the ceramic varies continuously from 0% up to 100%, is formed on the aluminium film 5, and a label 9 is printed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242965A JPS6484453A (en) | 1987-09-28 | 1987-09-28 | Information recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242965A JPS6484453A (en) | 1987-09-28 | 1987-09-28 | Information recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6484453A true JPS6484453A (en) | 1989-03-29 |
Family
ID=17096864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62242965A Pending JPS6484453A (en) | 1987-09-28 | 1987-09-28 | Information recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6484453A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635310A (en) * | 1989-10-20 | 1997-06-03 | Casio Computer Co., Ltd. | ZnS dielectric thin film and magnetic recording medium |
-
1987
- 1987-09-28 JP JP62242965A patent/JPS6484453A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635310A (en) * | 1989-10-20 | 1997-06-03 | Casio Computer Co., Ltd. | ZnS dielectric thin film and magnetic recording medium |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1485928A (en) | Etching aluminium | |
EP0915178A3 (en) | Sputtering target of highly purified titanium | |
GB1514527A (en) | High resistance cermet film and method of making the same | |
CH673071GA3 (en) | ||
GB1464802A (en) | Magnetic oxide film its preparation and uses | |
GB1466655A (en) | Making a magnetic oxide film | |
JPS6484453A (en) | Information recording medium | |
GB2013724A (en) | Method for sputtering cadmium stannate films | |
JPS52105804A (en) | Magnetic disc substrate | |
IE822988L (en) | Multilayer electrode of a semiconductor device | |
EP0263676A3 (en) | Thin print etchable gold conductor composition | |
GB1249951A (en) | Method and apparatus for producing a tantalum nitride film | |
JPS644938A (en) | Magneto-optical recording medium | |
JPS51126384A (en) | A method of forming a thin film by sputtering | |
JPS5711813A (en) | Preparation of carbide film resistor | |
JPS54141107A (en) | Magnetic recording medium | |
JPS5634143A (en) | Magnetic recording medium | |
JPS52104063A (en) | Production of surface protection film in electronic parts | |
JPS578921A (en) | Magnetic recording body | |
JPS57167132A (en) | Production for magnetic recording medium | |
JPS56129645A (en) | Forming method for metallic thin film | |
JPS5720371A (en) | Thermal head | |
EP0509555A3 (en) | A method of making a magneto-optic memory device | |
GB1373416A (en) | Method of forming an iron oxide film | |
JPS5538947A (en) | Forming method of metallic compound coating |