JPS648282A - Brush-etching device - Google Patents

Abstract

PURPOSE:To uniformly etch an electrically conductive layer by separately providing plural brush devices, impregnating the device with a liq. etchant, pressing the device on a substrate, and rotating the device when a resist film is provided on both sides of the substrate having the conductive layer on both sides and the conductive layer is etched. CONSTITUTION:The substrate 1 having a conductive layer of copper foil, etc., on both surfaces and provided with a resist film on the surfaces is conveyed by a carrier roll 21. Brush bodies 13 and 14 implanted with a fiber body 16 are pressed on the upper and lower surfaces of the substrate 1 by gravity and a spring 15, a liq. etchant is supplied to the fiber body 16 from a hose 20 to wet the fiber body 16 with the etchant, and the respective brush bodies 13 and 14 are independently reciprocated by a driving part 11 while following a small circular locus B in the direction orthogonal to the moving direction of the substrate 1. The fiber bodies 16 of the brush bodies 13 and 14 sufficiently penetrate into recesses by gravity and the action of the spring 15 even when the surface of the substrate 1 is warped or has a rugged surface, and hence the part of the conductive film not coated with the resist film is uniformly etched. In addition, since the conveyor of the substrate 1 is not dipped in the etchant, the conveyor is not corroded by the etchant.