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JPS6476903A - Apparatus for producing oxide superconducting material - Google Patents

Apparatus for producing oxide superconducting material

Info

Publication number
JPS6476903A
JPS6476903A JP62231887A JP23188787A JPS6476903A JP S6476903 A JPS6476903 A JP S6476903A JP 62231887 A JP62231887 A JP 62231887A JP 23188787 A JP23188787 A JP 23188787A JP S6476903 A JPS6476903 A JP S6476903A
Authority
JP
Japan
Prior art keywords
substrate
plasma
chamber
superconducting material
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62231887A
Other languages
Japanese (ja)
Other versions
JPH0556283B2 (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62231887A priority Critical patent/JPS6476903A/en
Priority to KR1019880011900A priority patent/KR910007384B1/en
Priority to CN88107276A priority patent/CN1016388B/en
Priority to EP88308627A priority patent/EP0308266A3/en
Publication of JPS6476903A publication Critical patent/JPS6476903A/en
Priority to US07/535,302 priority patent/US5162296A/en
Priority to US07/882,525 priority patent/US5262396A/en
Publication of JPH0556283B2 publication Critical patent/JPH0556283B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To form an oxide ceramic superconducting material film on a substrate, by externally applying a magnetic field to a plasma generation chamber containing a substrate to be treated, supplying a group IIIa element, a group IIa element and copper together with oxygen in a state of vapor or fine particles to the generation chamber under irradiation with microwave and reacting the components in the plasma. CONSTITUTION:A plasma generation chamber 30 containing a substrate 10 is evacuated. O2 gas is introduced into the chamber 30 through a gas inlet 16 and, at the same time, microwave 30-2 is applied to the chamber with a microwave oscillator 14. A high-density plasma is generated in the space 31 by applying a magnetic field 30-1 with an electromagnet 15. Alkyl compounds, etc., of group IIIa lanthanoid element A, group IIa element B and Cu are dissolved in an organic solvent or water, introduced into the chamber together with O2 bubbling gas through an inlet 17 and made to react with each other with the plasma in the space 31 to form an oxide ceramic superconducting material film having a composition of formula (A1-XBX)YCuZOW (X is 0.1-1; Y is 2-4; Z is 1-4; W is 4-10) on the substrate 10.
JP62231887A 1987-09-16 1987-09-16 Apparatus for producing oxide superconducting material Granted JPS6476903A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62231887A JPS6476903A (en) 1987-09-16 1987-09-16 Apparatus for producing oxide superconducting material
KR1019880011900A KR910007384B1 (en) 1987-09-16 1988-09-15 Formation of superconductor oxide film
CN88107276A CN1016388B (en) 1987-09-16 1988-09-16 Method and device for forming superconducting oxide material
EP88308627A EP0308266A3 (en) 1987-09-16 1988-09-16 Method and apparatus for forming superconducting materials
US07/535,302 US5162296A (en) 1987-09-16 1990-06-08 Plasma-enhanced CVD of oxide superconducting films by utilizing a magnetic field
US07/882,525 US5262396A (en) 1987-09-16 1992-05-13 Plasma-enhanced CVD of oxide superconducting films by utilizing a magnetic field

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231887A JPS6476903A (en) 1987-09-16 1987-09-16 Apparatus for producing oxide superconducting material

Publications (2)

Publication Number Publication Date
JPS6476903A true JPS6476903A (en) 1989-03-23
JPH0556283B2 JPH0556283B2 (en) 1993-08-19

Family

ID=16930587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231887A Granted JPS6476903A (en) 1987-09-16 1987-09-16 Apparatus for producing oxide superconducting material

Country Status (1)

Country Link
JP (1) JPS6476903A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288408A (en) * 1988-05-31 1990-03-28 Mitsubishi Metal Corp Manufacturing method of superconducting ceramic membrane
JP2017126607A (en) * 2016-01-12 2017-07-20 株式会社リコー Oxide semiconductor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4417015A1 (en) * 1994-05-14 1995-11-16 Maschimpex Gmbh Sorting machine for sorting or classifying small products of the pharmaceutical and confectionery industries by shape and color

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
JPS5963732A (en) * 1982-10-04 1984-04-11 Hitachi Ltd Thin film forming equipment
JPS59219461A (en) * 1983-05-24 1984-12-10 Toshiba Corp Amorphous silicon film forming device
JPS60117711A (en) * 1983-11-30 1985-06-25 Toshiba Corp Forming apparatus of thin film
JPS61109036A (en) * 1984-11-01 1986-05-27 Canon Inc Display device of television lens
JPS61125133A (en) * 1984-11-22 1986-06-12 Hitachi Ltd Low temperature plasma electromagnetic field control structure
JPS61267324A (en) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd Dry thin film processing equipment
JPS62150726A (en) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd Manufacturing method of semiconductor device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
JPS5963732A (en) * 1982-10-04 1984-04-11 Hitachi Ltd Thin film forming equipment
JPS59219461A (en) * 1983-05-24 1984-12-10 Toshiba Corp Amorphous silicon film forming device
JPS60117711A (en) * 1983-11-30 1985-06-25 Toshiba Corp Forming apparatus of thin film
JPS61109036A (en) * 1984-11-01 1986-05-27 Canon Inc Display device of television lens
JPS61125133A (en) * 1984-11-22 1986-06-12 Hitachi Ltd Low temperature plasma electromagnetic field control structure
JPS61267324A (en) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd Dry thin film processing equipment
JPS62150726A (en) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd Manufacturing method of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288408A (en) * 1988-05-31 1990-03-28 Mitsubishi Metal Corp Manufacturing method of superconducting ceramic membrane
JP2017126607A (en) * 2016-01-12 2017-07-20 株式会社リコー Oxide semiconductor

Also Published As

Publication number Publication date
JPH0556283B2 (en) 1993-08-19

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