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JPS6476619A - Manufacture of composite oxide superconductive thin film - Google Patents

Manufacture of composite oxide superconductive thin film

Info

Publication number
JPS6476619A
JPS6476619A JP62231275A JP23127587A JPS6476619A JP S6476619 A JPS6476619 A JP S6476619A JP 62231275 A JP62231275 A JP 62231275A JP 23127587 A JP23127587 A JP 23127587A JP S6476619 A JPS6476619 A JP S6476619A
Authority
JP
Japan
Prior art keywords
targets
thin film
elements
sputtering
composite oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62231275A
Other languages
Japanese (ja)
Inventor
Hideo Itozaki
Nobuhiko Fujita
Saburo Tanaka
Shuji Yatsu
Tetsuji Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP62231275A priority Critical patent/JPS6476619A/en
Publication of JPS6476619A publication Critical patent/JPS6476619A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To make it possible to obtain a high critical voltage and good superconductive characteristics by using simple substances of a plurality of specified elements for targets and sputtering while adjusting sputtering area of the targets. CONSTITUTION:The composite oxide superconductive thin film includes at least one element alpha selected among group IIa elements in the periodic table, at least one element beta selected among group IIIa elements in the periodic table, and at least one element gamma selected among group Ib, IIb, IIIb, IVa, VIII elements. For manufacturing this superconductive thin film, simple substances of the elements alpha, beta and gamma, that is, for Ba, Y, and Cu, for example, Ba targets 2 and Y targets 3, are formed first. The sputtering area of these targets are adjusted taking the composition of the composite oxide superconductive thin film to be formed corresponding to sputtering efficiency and reaction rate of each element as the standard, and sputtering is performed in an atmosphere including oxygen.
JP62231275A 1987-09-16 1987-09-16 Manufacture of composite oxide superconductive thin film Pending JPS6476619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62231275A JPS6476619A (en) 1987-09-16 1987-09-16 Manufacture of composite oxide superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231275A JPS6476619A (en) 1987-09-16 1987-09-16 Manufacture of composite oxide superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6476619A true JPS6476619A (en) 1989-03-22

Family

ID=16921050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231275A Pending JPS6476619A (en) 1987-09-16 1987-09-16 Manufacture of composite oxide superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6476619A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03271359A (en) * 1990-03-20 1991-12-03 Japan Steel Works Ltd:The Method for synthesizing multiple oxide
US5145713A (en) * 1990-12-21 1992-09-08 Bell Communications Research, Inc. Stoichiometric growth of compounds with volatile components

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445180A (en) * 1987-08-13 1989-02-17 Nippon Steel Corp Manufacture of superconductive thin film using composite target

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445180A (en) * 1987-08-13 1989-02-17 Nippon Steel Corp Manufacture of superconductive thin film using composite target

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03271359A (en) * 1990-03-20 1991-12-03 Japan Steel Works Ltd:The Method for synthesizing multiple oxide
US5145713A (en) * 1990-12-21 1992-09-08 Bell Communications Research, Inc. Stoichiometric growth of compounds with volatile components

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