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JPS6473716A - Plasma device - Google Patents

Plasma device

Info

Publication number
JPS6473716A
JPS6473716A JP62231343A JP23134387A JPS6473716A JP S6473716 A JPS6473716 A JP S6473716A JP 62231343 A JP62231343 A JP 62231343A JP 23134387 A JP23134387 A JP 23134387A JP S6473716 A JPS6473716 A JP S6473716A
Authority
JP
Japan
Prior art keywords
specimen
producer
plasma
chamber
magnetism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62231343A
Other languages
English (en)
Other versions
JPH06101443B2 (ja
Inventor
Seiichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP62231343A priority Critical patent/JPH06101443B2/ja
Priority to DE8787311451T priority patent/DE3774098D1/de
Priority to EP87311451A priority patent/EP0273741B1/en
Priority to KR1019870015216A priority patent/KR920004912B1/ko
Publication of JPS6473716A publication Critical patent/JPS6473716A/ja
Priority to US07/364,585 priority patent/US5019117A/en
Priority to US07/414,511 priority patent/US5016564A/en
Publication of JPH06101443B2 publication Critical patent/JPH06101443B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP62231343A 1986-12-29 1987-09-16 プラズマ装置 Expired - Fee Related JPH06101443B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62231343A JPH06101443B2 (ja) 1987-09-16 1987-09-16 プラズマ装置
DE8787311451T DE3774098D1 (de) 1986-12-29 1987-12-24 Plasmageraet.
EP87311451A EP0273741B1 (en) 1986-12-29 1987-12-24 Plasma apparatus
KR1019870015216A KR920004912B1 (ko) 1986-12-29 1987-12-29 플라즈마 장치
US07/364,585 US5019117A (en) 1986-12-29 1989-06-12 Plasma apparatus
US07/414,511 US5016564A (en) 1986-12-29 1989-09-29 Plasma apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231343A JPH06101443B2 (ja) 1987-09-16 1987-09-16 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS6473716A true JPS6473716A (en) 1989-03-20
JPH06101443B2 JPH06101443B2 (ja) 1994-12-12

Family

ID=16922145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231343A Expired - Fee Related JPH06101443B2 (ja) 1986-12-29 1987-09-16 プラズマ装置

Country Status (1)

Country Link
JP (1) JPH06101443B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013541817A (ja) * 2010-10-07 2013-11-14 ザ・サイエンス・アンド・テクノロジー・ファシリティーズ・カウンシル 改良された多極マグネット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947733A (ja) * 1982-09-13 1984-03-17 Hitachi Ltd プラズマプロセス方法および装置
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947733A (ja) * 1982-09-13 1984-03-17 Hitachi Ltd プラズマプロセス方法および装置
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013541817A (ja) * 2010-10-07 2013-11-14 ザ・サイエンス・アンド・テクノロジー・ファシリティーズ・カウンシル 改良された多極マグネット

Also Published As

Publication number Publication date
JPH06101443B2 (ja) 1994-12-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees