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JPS6473204A - Thickness measuring apparatus - Google Patents

Thickness measuring apparatus

Info

Publication number
JPS6473204A
JPS6473204A JP23071987A JP23071987A JPS6473204A JP S6473204 A JPS6473204 A JP S6473204A JP 23071987 A JP23071987 A JP 23071987A JP 23071987 A JP23071987 A JP 23071987A JP S6473204 A JPS6473204 A JP S6473204A
Authority
JP
Japan
Prior art keywords
inspected
back surface
thickness
measuring point
front surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23071987A
Other languages
Japanese (ja)
Inventor
Hiroshi Nishikawa
Yasuo Kataoka
Shotaro Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23071987A priority Critical patent/JPS6473204A/en
Publication of JPS6473204A publication Critical patent/JPS6473204A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure the thickness of an object to be inspected with high accuracy, by respectively irradiating the front and back surfaces of the object to be inspected with light and measuring the displacement of a reference line and a measuring point by the reflected lights from both surfaces and operating the thickness of the object to be inspected on the basis of the measured data. CONSTITUTION:An object 1 to be inspected is vertically held and the measuring point of the front surface of the object 1 to be inspected is irradiated with light 14 by a front surface measuring means and the displacement DELTAl1 of the measuring point of the front surface and the front surface reference line UL of a reference thickness D0 is measured by the reflected light from said surface. The back surface of the object 1 to be inspected is irradiated with the light 14 in the vicinity of the back surface of the above-mentioned front surface measuring point by a back surface measuring means and the displacement DELTAl2 of the back surface measuring point and the back surface reference line DL of a reference thickness A is measured by the reflected light from said back surface. The thickness L of the object 1 to be inspected is operated on the basis of the signals from both of the above-mentioned measuring means by an operation means.
JP23071987A 1987-09-14 1987-09-14 Thickness measuring apparatus Pending JPS6473204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23071987A JPS6473204A (en) 1987-09-14 1987-09-14 Thickness measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23071987A JPS6473204A (en) 1987-09-14 1987-09-14 Thickness measuring apparatus

Publications (1)

Publication Number Publication Date
JPS6473204A true JPS6473204A (en) 1989-03-17

Family

ID=16912238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23071987A Pending JPS6473204A (en) 1987-09-14 1987-09-14 Thickness measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6473204A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759107A (en) * 1980-09-26 1982-04-09 Hitachi Ltd Method and device for measuring plate thickness

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759107A (en) * 1980-09-26 1982-04-09 Hitachi Ltd Method and device for measuring plate thickness

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